公开(公告)号：US20140375981A1

公开(公告)日：2014-12-25

申请号：US14043783

申请日：2013-10-01

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/88

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US20140361176A1

公开(公告)日：2014-12-11

申请号：US14362725

申请日：2012-11-29

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： James Russell

IPC: G01N21/35 ,  A61M16/10 ,  G01N33/00 ,  G01N21/85 ,  G01N33/50

CPC classification number: G01N21/3504 ,  A61B5/0836 ,  A61M16/1005 ,  A61M2016/102 ,  G01N21/031 ,  G01N21/85 ,  G01N33/0027 ,  G01N33/50 ,  G01N2021/8578 ,  G01N2201/0636

Abstract: A gas measurement module (16) for use with an airway adapter (22) is configured such that both an emitter (48) and a detector (52, 54) are disposed on the same side of a sampling chamber (46) formed within the airway adapter. Optical elements (56) that guide electromagnetic radiation from the emitter back and forth across the sampling chamber to the detector include at least one toric element. The at least one toric element compensates for a tilted folding mirror positioned on a side of the sampling chamber opposite from the emitter and the detector.

Abstract translation: 与气道适配器（22）一起使用的气体测量模块（16）被配置成使得发射器（48）和检测器（52,54）都设置在形成在所述气道适配器（22）内的取样室（46）的同一侧 气道适配器。 将来自发射器的来自发射器的电磁辐射引导穿过采样室到检测器的光学元件（56）包括至少一个复曲面元件。 至少一个复曲面元件补偿位于与发射器和检测器相对的取样室侧面上的倾斜折叠镜。

公开(公告)号：US20140306112A1

公开(公告)日：2014-10-16

申请号：US14317070

申请日：2014-06-27

Applicant: MSA TECHNOLOGY, LLC.

Inventor： CHRISTOPHER D. STARTA ,  ROBERT E. UBER ,  THOMAS TRAUTZSCH ,  FREDERICK J. SCHULER

IPC: G01N21/59

CPC classification number: G01N21/59 ,  G01N21/3151 ,  G01N21/3504 ,  G01N2201/023 ,  G01N2201/0636 ,  G01N2201/0662

Abstract: A closed path infrared sensor includes an enclosure, a first energy source within the enclosure, at least a second energy source within the enclosure, at least one detector system within the enclosure and a mirror system external to the enclosure and spaced from the enclosure. The mirror system reflects energy from the first energy source to the at least one detector system via a first analytical path and reflects energy from the second energy source to the at least one detector system via a second analytical path. Each of the first analytical path and the second analytical path are less than two feet in length.

Abstract translation: 封闭路径红外传感器包括外壳，外壳内的第一能量源，外壳内的至少第二能量源，外壳内的至少一个检测器系统和外壳外部与外壳隔开的反射镜系统。 反射镜系统经由第一分析路径将来自第一能量源的能量反射到至少一个检测器系统，并且经由第二分析路径将来自第二能量源的能量反射到至少一个检测器系统。 第一分析路径和第二分析路径中的每一条长度小于两英尺。

公开(公告)号：US08193538B2

公开(公告)日：2012-06-05

申请号：US12523960

申请日：2008-01-22

Applicant: Christopher John Howard Wort ,  Geoffrey Alan Scarsbrook ,  Ian Friel ,  Richard Stuart Balmer

Inventor： Christopher John Howard Wort ,  Geoffrey Alan Scarsbrook ,  Ian Friel ,  Richard Stuart Balmer

IPC: H01L29/15

CPC classification number: C01B32/28 ,  C23C16/27 ,  C23C16/274 ,  C23C16/278 ,  C30B25/105 ,  C30B25/20 ,  C30B29/04 ,  G01N21/87 ,  G01N21/95 ,  G01N27/308 ,  G01N2201/0636 ,  H01J37/321 ,  H01J2237/08 ,  H01J2237/3341 ,  H01L21/02104 ,  H01L21/02376 ,  H01L21/02527 ,  H01L21/02579 ,  H01L21/0262 ,  H01L21/02634 ,  H01L21/041 ,  H01L29/045 ,  H01L29/1602 ,  H01L29/167 ,  H01L29/36 ,  Y10T428/24355

Abstract: Electronic field effect devices, and methods of manufacture of these electronic field effect devices are disclosed. In particular, there is disclosed an electronic field effect device which has improved electrical properties due to the formation of a highly mobile two-dimensional charge-carrier gas in a simple structure formed from diamond in combination with polar materials.

Abstract translation: 公开了电子场效应装置及这些电子场效应装置的制造方法。 特别地，公开了一种电子场效应器件，其由于由金刚石与极性材料组合形成的简单结构中形成高度移动的二维电荷载体气体而具有改善的电性能。

公开(公告)号：US08192050B2

公开(公告)日：2012-06-05

申请号：US12729452

申请日：2010-03-23

Applicant: Katsuya Ido ,  Takayoshi Tsuiki ,  Masayuki Ohta

Inventor： Katsuya Ido ,  Takayoshi Tsuiki ,  Masayuki Ohta

IPC: F21S4/00 ,  F21V21/00

CPC classification number: G01N21/8806 ,  G01N2021/95646 ,  G01N2201/0634 ,  G01N2201/0636 ,  Y10S362/80

Abstract: An illumination device for visual inspection includes: a transmissive reflector plate that is formed of a light transmitting material, has an opening in a center, assumes a dome shape, a radius of which is gradually expanded downward with a center axis of the opening set as a center, and has a lower surface formed of a reflecting surface on which fine unevenness for diffusing and reflecting light from below is formed and an upper surface located on an opposite side of the lower surface; first, second, and third light source units that irradiate light on an inspection object, the first, second, and third light source units being provided on the upper surface of the transmissive reflector plate and arranged in a place below the opening and passing the center axis; and a fourth light source unit that irradiates light on the inspection object and being provided below the transmissive reflector plate.

Abstract translation: 一种用于目视检查的照明装置包括：透光反射板，其由透光材料形成，具有中心的开口，呈圆顶形，半径逐渐向下延伸，开口的中心轴为 中心，并且具有由反射面形成的下表面，在该反射面上形成用于从下方扩散和反射光的微细凹凸和位于下表面的相对侧上的上表面; 第一，第二和第三光源单元，其在检查对象物上照射光，第一，第二和第三光源单元设置在透射反射板的上表面上，并布置在开口下方并通过中心 轴; 以及第四光源单元，其在检查对象上照射光并设置在透射反射板下方。

公开(公告)号：US08189193B1

公开(公告)日：2012-05-29

申请号：US12589076

申请日：2009-10-19

Applicant: Martin M. Liphardt ,  Ping He ,  James D. Welch

Inventor： Martin M. Liphardt ,  Ping He ,  James D. Welch

IPC: G01J4/00

CPC classification number: G01J3/0224 ,  G01J3/021 ,  G01J3/10 ,  G01N21/21 ,  G01N21/211 ,  G01N2201/061 ,  G01N2201/0636

Abstract: Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.

Abstract translation: 由椭圆光度计，偏光计，分光光度计，反射计，米勒矩阵测量等系统中的水平取向的弧光灯提供的电磁辐射束的入射角的控制。

公开(公告)号：US20110273703A1

公开(公告)日：2011-11-10

申请号：US13102107

申请日：2011-05-06

Applicant: Marko Brammer ,  Timo Mappes

Inventor： Marko Brammer ,  Timo Mappes

IPC: G01N21/00 ,  G02B6/35

CPC classification number: G01N21/51 ,  G01N21/645 ,  G01N2021/015 ,  G01N2021/0187 ,  G01N2021/6463 ,  G01N2201/0636 ,  G01N2201/066

Abstract: An opto-mechanical switch produces different optical paths from two optical path sections out of a plurality of optical path sections that are oriented in different spatial directions. The switch has an optical component on which one end of each optical path section impinges, and which is adapted to be moved linearly in a direction of movement at right angles to the optical path sections between different switching positions, in which it selectively couples different optical path sections optically with each other. Further provided is a measuring system for the analysis of fluids, having such an opto-mechanical switch.

Abstract translation: 光机械开关从沿不同空间方向取向的多个光路部分中的两个光路部分产生不同的光路。 该开关具有光学部件，每个光路部分的一端入射到该光学部件上，该光学部件适于在与不同切换位置之间的光路部分成直角的运动方向上线性移动， 路径部分光学地彼此。 还提供了用于分析具有这种光机械开关的流体的测量系统。

公开(公告)号：US08035821B2

公开(公告)日：2011-10-11

申请号：US11663614

申请日：2005-07-18

Applicant: Jochen Strähle ,  Ulrich Kallmann ,  Rahmi Gencoglu ,  Uwe Kasten

Inventor： Jochen Strähle ,  Ulrich Kallmann ,  Rahmi Gencoglu ,  Uwe Kasten

IPC: G01B11/02

CPC classification number: G01N21/8806 ,  G01B9/02049 ,  G01B9/02057 ,  G01B9/0209 ,  G01B11/2441 ,  G01N21/45 ,  G01N21/9515 ,  G01N2021/1785 ,  G01N2021/9516 ,  G01N2201/0636

Abstract: An interferometric system having an illumination arm, including a light source and an illuminating optical system, for forming an illuminating beam; an object arm, including a reference element for measuring an object having an object surface to be measured, for forming an image-rays path, the object to be measured having an object surface inaccessible to direct illumination; a reference arm including a reference element; a detector arm including a detector; and a beam splitter, the reference element having one or more mirrored zones. Consequently, component parts which have undercut surfaces in the illumination direction can be measured in a single measuring operation.

Abstract translation: 一种具有照明臂的干涉测量系统，包括用于形成照明光束的光源和照明光学系统; 对象臂，包括用于测量具有待测量对象表面的物体的参考元件，用于形成图像光线路径，所述被测量物体具有不能直接照射的物体表面; 包括参考元件的参考臂; 检测器臂，包括检测器; 和分束器，所述参考元件具有一个或多个镜像区域。 因此，可以在单次测量操作中测量在照明方向上具有底切面的部件。

公开(公告)号：US20110089341A1

公开(公告)日：2011-04-21

申请号：US12926884

申请日：2010-12-15

Applicant: Søren Aasmul

Inventor： Søren Aasmul

IPC: G01J1/58

CPC classification number: G01N21/645 ,  G01J1/04 ,  G01J1/0422 ,  G01N2021/6463 ,  G01N2201/0636

Abstract: In apparatus for the production and detection of fluorescence at a sample surface, the height of the apparatus above the sample surface is reduced, and loss of the emitted fluorescence due to reflection loss and light scattering is minimized. The apparatus comprises a three-dimensionally curved light reflecting surface (40) that directs light from a light source (32) transversely to its original path and focuses the light on to an illumination zone (30) at or below the sample surface. The reflecting surface (40) also collects, directs and at least partially collimates emitted fluorescence transversely to its original path and towards a detector (46).

Abstract translation: 在用于在样品表面生产和检测荧光的装置中，样品表面上方的装置的高度减小，并且由于反射损失和光散射引起的发射的荧光的损失最小化。 该装置包括三维弯曲的光反射表面（40），其将来自光源（32）的光横向于其原始路径引导并将光聚焦到在样品表面处或下方的照明区域（30）。 反射表面（40）还收集，引导并至少部分地将发射的荧光横向于其原始路径并朝向检测器（46）准直。

公开(公告)号：US07869042B2

公开(公告)日：2011-01-11

申请号：US12457854

申请日：2009-06-23

Applicant: Søren Aasmul

Inventor： Søren Aasmul

IPC: G01N21/25

CPC classification number: G01N21/645 ,  G01J1/04 ,  G01J1/0422 ,  G01N2021/6463 ,  G01N2201/0636

Abstract: In apparatus for the production and detection of fluorescence at a sample surface, the height of the apparatus above the sample surface is reduced, and loss of the emitted fluorescence due to reflection loss and light scattering is minimized. The apparatus comprises a three-dimensionally curved light reflecting surface (40) that directs light from a light source (32) transversely to its original path and focuses the light on to an illumination zone (30) at or below the sample surface. The reflecting surface (40) also collects, directs and at least partially collimates emitted fluorescence transversely to its original path and towards a detector (46).