公开(公告)号：US07428048B1

公开(公告)日：2008-09-23

申请号：US11026912

申请日：2004-12-30

Applicant: Daniel L. Farkas ,  Elliot S. Wachman ,  Jill Wachman ,  Miriam Farkas ,  Erik H. Lindsley

Inventor： Daniel L. Farkas ,  Elliot S. Wachman ,  Jill Wachman ,  Miriam Farkas ,  Erik H. Lindsley

IPC: G01J4/00

CPC classification number: G01J3/447 ,  A61B5/0059 ,  A61B5/0075 ,  A61B5/0086 ,  A61B5/0095 ,  G01J3/02 ,  G01J3/0278 ,  G01N21/21 ,  G01N21/4795

Abstract: An apparatus for image elastic scattering spectroscopy is disclosed that is comprised of a light source for generating polarized light. Means are provided to convey the polarized light to a target. A collector receives light reflected from the target. A detector is responsive to the collector for generating images at both parallel and perpendicular polarizations for each of a plurality of wavelengths. A range finder detects a distance to the target. Control electronics control the image generation and the range finder. The apparatus may be configured to image areas on the surface of the body or configured so as to be inserted into various body cavities. Typically, the apparatus will be used in conjunction with an analyzer for analyzing the images for evidence of abnormal cells. Methods of gathering data and of screening for abnormal cells are also disclosed.

Abstract translation: 公开了一种用于产生偏振光的光源的图像弹性散射光谱仪。 提供了将偏振光传送到目标的装置。 收集器收到从目标反射的光。 检测器响应于收集器，用于为多个波长中的每个波长的平行和垂直极化产生图像。 测距仪检测到目标的距离。 控制电子控制图像生成和测距仪。 该装置可以被配置成对身体表面上的区域进行成像，或者被配置成插入到各个体腔中。 通常，该装置将与用于分析图像的分析仪一起使用以用于异常细胞的证据。 还披露了收集数据和筛选异常细胞的方法。

公开(公告)号：US07420675B2

公开(公告)日：2008-09-02

申请号：US11129769

申请日：2005-05-13

Applicant: George Giakos

Inventor： George Giakos

IPC: G01J4/00

CPC classification number: G01J3/447 ,  B82Y10/00 ,  B82Y20/00 ,  G01J4/04 ,  G01N21/21

Abstract: The present invention relates to a multi-energy system that generates and/or forms images of targets/structures by applying Mueller matrix imaging principles and/or Stokes polarimetric parameter imaging principles to data obtained by the multi-energy system. In one embodiment, the present invention utilizes at least one energy or light source to generate two or more Mueller matrix and/or Stokes polarization parameters images of a target/structure, and evaluates the Mueller matrix/Stokes polarization parameters multi-spectral difference(s) between the two or more images of the target/structure. As a result, high contrast, high specificity images can be obtained. Additional information can be obtained by and/or from the present invention through the application of image, Mueller matrix decomposition, and/or image reconstruction techniques that operate directly on the Mueller matrix and/or Stokes polarization parameters.

Abstract translation: 本发明涉及通过将Mueller矩阵成像原理和/或斯托克斯偏振参数成像原理应用于由多能系统获得的数据来生成和/或形成目标/结构图像的多能量系统。 在一个实施例中，本发明利用至少一个能量或光源来产生目标/结构的两个或多个Mueller矩阵和/或斯托克斯极化参数图像，并且评估Mueller矩阵/斯托克斯极化参数多光谱差（s ）在目标/结构的两个或多个图像之间。 结果，可以获得高对比度，高特异性图像。 通过应用直接在Mueller矩阵和/或斯托克斯极化参数上操作的图像，Mueller矩阵分解和/或图像重建技术，可以获得附加信息和/或从本发明获得附加信息。

公开(公告)号：US20060256426A1

公开(公告)日：2006-11-16

申请号：US11416392

申请日：2006-05-03

Applicant: Ralf Wolleschensky

Inventor： Ralf Wolleschensky

IPC: G02F1/33

CPC classification number: G02B27/283 ,  G01J3/0224 ,  G01J3/1256 ,  G01J3/4406 ,  G01J3/447 ,  G01N21/6445 ,  G01N21/6458 ,  G02B21/002 ,  G02B21/0068

Abstract: Device for controlling light radiation, which is excited in a specimen and/or which is backscattered and/or reflected and which contains one or more wavelengths, at a plurality of light outlets, wherein a separation of the light radiation into differently polarized components is carried out; and the components of the excitation radiation and/or detection radiation are affected in their polarization by means of a preferably birefringent, preferably acousto-optic or electro-optic medium, which changes the ordinary and extraordinary refractive index.

公开(公告)号：US20060238759A1

公开(公告)日：2006-10-26

申请号：US11388205

申请日：2006-03-24

Applicant: Hiroshi Okabe ,  Kenichi Matoba ,  Kazuhiko Oka

Inventor： Hiroshi Okabe ,  Kenichi Matoba ,  Kazuhiko Oka

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In the channeled spectroscopic polarimetry, a measurement error of a parameter showing a spectropolarization characteristic of a sample is effectively removed, the error being generated by various variations in retardation of a retarder depending upon the state of the sample. With attention being focused on that the retardation of the retarder may be kept constant by stabilization of an incident direction of light that transmits through the retarder, the retarder was arranged on the light source side with respect to the sample so as to effectively remove an influence relative to a measurement error, such as variations in direction of a light ray due to the sample.

Abstract translation: 在通道光谱极化法中，有效地消除了示出样品的分光偏振特性的参数的测量误差，该误差是由取决于样品状态的延迟器的延迟的各种变化产生的。 关注的是通过使通过延迟器透射的光的入射方向的稳定化可以使延迟器的延迟保持恒定，延迟器相对于样品被布置在光源侧，以便有效地消除影响 相对于测量误差，例如由于样品导致的光线的方向的变化。

公开(公告)号：US07116419B1

公开(公告)日：2006-10-03

申请号：US10705119

申请日：2003-11-11

Applicant: Andrew M. Weiner ,  Xiang Wang

Inventor： Andrew M. Weiner ,  Xiang Wang

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447 ,  H04J14/02 ,  H04J14/06

Abstract: Systems and methods for measuring the state of polarization (SOP) for each wavelength channel in a multi-wavelength-channel light beam are disclosed. The system includes a set of two or more rapidly switchable waveplates switched to form a sequence of secondary light beams having different polarizations. A polarizer filters the set of secondary light beams, and a spectral dispersing element spatially divides the secondary light beams into their respective wavelength components. A detector array measures in parallel the intensity of the different wavelength components for each of the polarization-filtered light beams. A controller stores the intensity measurements and calculates the Stokes parameters for each wavelength component, thereby characterizing the SOP for all the wavelength channels of the multi-wavelength light beam.

Abstract translation: 公开了用于测量多波长通道光束中每个波长通道的偏振状态（SOP）的系统和方法。 该系统包括一组两个或更多个可快速切换的波片，其被切换以形成具有不同偏振的次级光束序列。 偏振器对该组二次光束进行滤光，并且光谱分散元件将二次光束空间分割成它们各自的波长分量。 检测器阵列平行测量每个经偏振滤波的光束的不同波长分量的强度。 控制器存储强度测量并计算每个波长分量的斯托克斯参数，从而表征多波长光束的所有波长信道的SOP。

公开(公告)号：US07072039B2

公开(公告)日：2006-07-04

申请号：US10644038

申请日：2003-08-20

Applicant: Michael E. Dobbs ,  Jeff D. Pruitt ,  Matthew L. Gypson ,  Benjamin R. Neff

Inventor： Michael E. Dobbs ,  Jeff D. Pruitt ,  Matthew L. Gypson ,  Benjamin R. Neff

IPC: G01J4/00

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N2021/1757 ,  G01N2021/1793 ,  G01N2201/0691

Abstract: Remotely sensing a target may include generating a first beam of optical radiation that is modulated at a first frequency and polarized at a first polarization. A second beam of optical radiation that is modulated at a second frequency and polarized at a second polarization may also be generated. The first and second beams of optical radiation may be transmitted to the target. Radiation at the first polarization and radiation at the second polarization may be detected from the target using a phase sensitive technique and the first and second frequencies.

Abstract translation: 远程感测目标可以包括产生以第一频率被调制并以第一极化极化的第一光束。 也可以产生以第二频率被调制并以第二极化极化的第二光束。 第一和第二光辐射束可以传输到目标。 可以使用相敏技术和第一和第二频率从目标检测第一极化处的辐射和第二极化处的辐射。

公开(公告)号：US07064828B1

公开(公告)日：2006-06-20

申请号：US10027940

申请日：2001-12-19

Applicant: Pablo I. Rovira ,  Lars Markwort

Inventor： Pablo I. Rovira ,  Lars Markwort

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01J3/447 ,  G01J4/02 ,  G01N2021/213

Abstract: A metrology device, such as an ellipsometer, includes a light source that produces a pulsed electromagnetic beam, such as a flash bulb or pulsed laser, and a spatially dependent polarizing element that introduces a spatially dependent retardation in the light beam. The use of a pulsed light source is advantageous over a continuous light source, as a pulsed light source generates less heat, is stronger, lasts longer, and does not need the use of a mechanical shutter. The use of a spatially dependent polarizing element advantageously eliminates the use of temporally dependent moving polarization modulation elements, thereby allowing the use of a pulsed light source. Downstream of the spatially dependent polarizing element are the analyzer and a multi-element detector that may be synchronized with the pulsed electromagnetic beam to detect after one or several pulses of light have been emitted from the pulsed light source.

Abstract translation: 诸如椭圆计的计量装置包括产生诸如闪光灯泡或脉冲激光器的脉冲电磁波束的光源和在光束中引入空间上相关的延迟的空间依赖的偏振元件。 脉冲光源的使用优于连续光源，因为脉冲光源产生较少的热量，更强烈，持续更长时间，并且不需要使用机械快门。 使用空间依赖的偏振元件有利地消除了使用时间上依赖的移动偏振调制元件，从而允许使用脉冲光源。 空间依赖的偏振元件的下游是分析仪和多元素检测器，其可以与脉冲电磁波束同步，以在从脉冲光源发射一个或几个脉冲之后进行检测。

公开(公告)号：US07023549B2

公开(公告)日：2006-04-04

申请号：US10886877

申请日：2004-07-07

Applicant: Andrei V. Shchegrov ,  Anatoly Fabrikant ,  Mehrdad Nikoonahad

Inventor： Andrei V. Shchegrov ,  Anatoly Fabrikant ,  Mehrdad Nikoonahad

IPC: G01B11/28

CPC classification number: H01L22/20 ,  G01J3/447 ,  G01J4/04 ,  G01N21/211

Abstract: A gallery of seed profiles is constructed and the initial parameter values associated with the profiles are selected using manufacturing process knowledge of semiconductor devices. Manufacturing process knowledge may also be used to select the best seed profile and the best set of initial parameter values as the starting point of an optimization process whereby data associated with parameter values of the profile predicted by a model is compared to measured data in order to arrive at values of the parameters. Film layers over or under the periodic structure may also be taken into account. Different radiation parameters such as the reflectivities Rs, Rp and ellipsometric parameters may be used in measuring the diffracting structures and the associated films. Some of the radiation parameters may be more sensitive to a change in the parameter value of the profile or of the films then other radiation parameters. One or more radiation parameters that are more sensitive to such changes may be selected in the above-described optimization process to arrive at a more accurate measurement. The above-described techniques may be supplied to a track/stepper and etcher to control the lithographic and etching processes in order to compensate for any errors in the profile parameters.

Abstract translation: 构建种子轮廓的画廊，并且使用半导体器件的制造工艺知识来选择与轮廓相关联的初始参数值。 也可以使用制造过程知识来选择最佳种子轮廓和最佳初始参数值集合作为优化过程的起始点，由此将与模型预测的轮廓的参数值相关联的数据与测量数据进行比较，以便 达到参数的值。 也可以考虑在周期性结构之上或之下的膜层。 不同的辐射参数，例如反射率R S，R P和椭偏参数可用于测量衍射结构和相关膜。 一些辐射参数可能对轮廓或膜的参数值的变化对其他辐射参数更敏感。 可以在上述优化过程中选择对这种变化更敏感的一个或多个辐射参数，以获得更准确的测量。 可以将上述技术提供给轨道/步进器和蚀刻器以控制光刻和蚀刻工艺，以便补偿轮廓参数中的任何误差。

公开(公告)号：US06992809B1

公开(公告)日：2006-01-31

申请号：US11049064

申请日：2005-02-02

Applicant: Xinghua Wang ,  Chenhui Wang

Inventor： Xinghua Wang ,  Chenhui Wang

IPC: G02F1/01

CPC classification number: G02F1/13473 ,  G01J3/0224 ,  G01J3/2823 ,  G01J3/447 ,  G01J2003/1269 ,  G02F2203/055

Abstract: A hyper-spectral imaging filter has serial stages along an optical signal path in a Solc filter configuration. Angularly distributed retarder elements of equal birefringence are stacked in each stage, with a polarizer between stages. The retarders can include tunable (such as abutted liquid crystals tuned in unison), fixed and/or combined tunable and fixed birefringences. Although the retardations are equal within each stage, distinctly different retardations are used for two or more different stages. This causes some stages to pass narrow bandpass peaks and other stages to have widely spaced bandpass peaks. The transmission functions of the serial stages are superimposed with selected preferably-tunable peaks coinciding. The resulting conjugate filter has a high finesse ratio, and good out of band rejection.

Abstract translation: 超光谱成像滤波器在Solc滤波器配置中沿着光信号路径具有串行级。 在每个阶段中堆叠具有相等双折射的角度分布的延迟元件，在阶段之间具有偏振器。 缓凝剂可以包括可调谐的（例如一致调节的邻接的液晶），固定和/或组合的可调谐和固定的双折射。 虽然在每个阶段中的延迟是相等的，但明显不同的延迟用于两个或更多个不同的阶段。 这导致一些阶段通过窄带通峰和其他阶段以具有宽间隔的带通峰。 串行级的传输功能与所选择的优选可调谐峰值重合。 所得到的共轭过滤器具有高的精细比和良好的带外抑制。

公开(公告)号：US06941081B2

公开(公告)日：2005-09-06

申请号：US09782098

申请日：2001-02-13

Applicant: Lothar B. Moeller ,  Paul Stephen Westbrook

Inventor： Lothar B. Moeller ,  Paul Stephen Westbrook

IPC: G01J3/447 ,  G01J4/04 ,  H04B10/18 ,  H04B10/06 ,  H04B10/00

CPC classification number: H04B10/2569 ,  G01J3/447 ,  G01J4/04

Abstract: A method and apparatus for polarization measurements. A polarization state of an optical signal can be determined using a polarization analyzer comprising a polarization controller, a polarizer, a wavelength dispersive element and a photo-detector. The method and apparatus can be applied to polarization and polarization mode dispersion measurements in wavelength division multiplexed communication systems.

Abstract translation: 一种用于偏振测量的方法和装置。 可以使用包括偏振控制器，偏振器，波长色散元件和光检测器的偏振分析器来确定光信号的偏振状态。 该方法和装置可以应用于波分复用通信系统中的偏振和偏振模色散测量。