Separation of doping density and minority carrier lifetime in photoluminescence measurements on semiconductor materials
    161.
    发明授权
    Separation of doping density and minority carrier lifetime in photoluminescence measurements on semiconductor materials 有权
    在半导体材料的光致发光测量中分离掺杂密度和少数载流子寿命

    公开(公告)号:US09157863B2

    公开(公告)日:2015-10-13

    申请号:US14256480

    申请日:2014-04-18

    Inventor: Thorsten Trupke

    CPC classification number: G01N21/6489 G01N2201/06113 G01N2201/10 H01L22/12

    Abstract: Methods are presented for separating the effects of background doping density and effective minority carrier lifetime on photoluminescence (PL) generated from semiconductor materials. In one embodiment the background doping density is measured by another technique, enabling PL measurements to be analyzed in terms of effective minority carrier lifetime. In another embodiment the effective lifetime is measured by another technique, enabling PL measurements to be analyzed in terms of background doping density. In another embodiment, the effect of background doping density is removed by calculating intensity ratios of two PL measurements obtained in different spectral regions, or generated by different excitation wavelengths. The methods are particularly useful for bulk samples such as bricks or ingots of silicon, where information can be obtained over a much wider range of bulk lifetime values than is possible with thin, surface-limited samples such as silicon wafers. The methods may find application in solar cell manufacturing.

    Abstract translation: 提出了用于分离背景掺杂密度和有效少数载流子寿命对从半导体材料产生的光致发光(PL)的影响的方法。 在一个实施方案中,通过另一种技术来测量背景掺杂密度,使得可以根据有效的少数载流子寿命来分析PL测量。 在另一个实施例中,通过另一技术来测量有效寿命,使得能够根据背景掺杂密度来分析PL测量。 在另一个实施方案中,通过计算在不同光谱区域中获得或由不同激发波长产生的两个PL测量的强度比来去除背景掺杂浓度的影响。 这些方法对于诸如硅砖的砖块或锭块的体积样品特别有用,其中可以获得比在薄的表面限制样品(例如硅晶片)上更大范围的体寿命值的信息。 该方法可应用于太阳能电池制造。

    FLUORESCENCE DETECTION DEVICE
    162.
    发明申请
    FLUORESCENCE DETECTION DEVICE 有权
    荧光检测装置

    公开(公告)号:US20150276605A1

    公开(公告)日:2015-10-01

    申请号:US14438255

    申请日:2013-11-06

    Inventor: Ryohhei Kawamuki

    Abstract: A fluorescence detection device includes: a light source that emits excitation light in a first direction; a base unit (30) to which the light source is attached; an opening (30a) that is provided on a side in the first direction of the base unit (30) with respect to the light source; a cantilever (31) that is cantilevered to the base unit (30) to extend from an inner edge of the opening (30a) toward a center side of the opening (30a); an optical path conversion unit (20) that is fixed to a free end of the cantilever (31), converts a traveling direction of the excitation light emitted from the light source into a second direction different from the first direction, and irradiates a measurement object with the excitation light turned in the second direction; and a photodetection element that is disposed on a side of the opening (30a) opposite to the measurement object and detects fluorescence passing through the opening (30a) in fluorescence emitted from the measurement object irradiated with the excitation light. Accordingly, a loss in the fluorescence guided to the photodetection element can be reduced, and thus fluorescence detection efficiency can be improved.

    Abstract translation: 荧光检测装置包括:在第一方向上发射激发光的光源; 安装光源的基座单元(30); 相对于所述光源设置在所述基座单元(30)的所述第一方向的一侧的开口(30a) 悬臂(31),其悬臂连接到所述基座单元(30),以从所述开口(30a)的内边缘朝向所述开口(30a)的中心侧延伸; 固定到悬臂(31)的自由端的光路转换单元(20)将从光源发射的激发光的行进方向转换成与第一方向不同的第二方向,并且照射测量对象 激发光在第二个方向转动; 以及光检测元件,其设置在与所述测量对象相对的所述开口(30a)的一侧,并且检测从所述激发光照射的所述测量对象发出的荧光中穿过所述开口(30a)的荧光。 因此,可以降低引导到光检测元件的荧光的损失,从而可以提高荧光检测效率。

    MOTION MODULATION FLUIDIC ANALYZER SYSTEM
    163.
    发明申请
    MOTION MODULATION FLUIDIC ANALYZER SYSTEM 有权
    运动调节流体分析系统

    公开(公告)号:US20150276589A1

    公开(公告)日:2015-10-01

    申请号:US14693301

    申请日:2015-04-22

    Abstract: A fluid analyzer includes an optical source and an optical detector defining an optical beam path through an interrogation region of a fluid flow cell. Motion control devices determine position of the interrogation region. Flow-control devices conduct analyte and reference fluids and manipulate fluid flow in response to control signals to position a fluid boundary across the interrogation region. A controller (1) generates a time-varying motion modulation signal to move the interrogation region across the fluid boundary, (2) samples an output signal from the optical detector at one time in which the interrogation region contains more analyte fluid than reference fluid and at a time at which the interrogation region contains more reference fluid than analyte fluid, thereby generating corresponding output signal samples, and (3) determines from the output signal samples a measurement value indicative of an optically measured characteristic of the analyte fluid.

    Abstract translation: 流体分析器包括光源和光学检测器,其限定穿过流体流动池的询问区域的光束路径。 运动控制装置确定询问区域的位置。 流量控制装置进行分析物和参考流体,并响应于控制信号操纵流体流动,以便在询问区域上定位流体边界。 控制器(1)产生时变运动调制信号,以移动询问区域跨过流体边界,(2)在询问区域中包含比参考流体多的分析物流体的一次的时间对来自光学检测器的输出信号进行采样;以及 在询问区域包含比分析物流体更多的参考流体的时间,从而产生相应的输出信号样本,以及(3)从输出信号样本确定指示分析物流体的光学测量特性的测量值。

    TWO-DIRECTIONAL SCANNING FOR LUMINESCENCE MICROSCOPY
    165.
    发明申请
    TWO-DIRECTIONAL SCANNING FOR LUMINESCENCE MICROSCOPY 审中-公开
    用于荧光显微镜的双向扫描

    公开(公告)号:US20150144806A1

    公开(公告)日:2015-05-28

    申请号:US14401103

    申请日:2013-05-28

    Abstract: In one form, a two-directional scanning method for luminescence microscopy is disclosed. A series of continuous scans are performed by an interrogation wide-field relative to a first direction and a target is identified. A precise position of the target is determined in the first direction. At least one scan by the interrogation wide-field is performed relative to a second direction at or near the precise position of the target in the first direction. The two-directional scanning method produces “on-the-fly” (i.e. ex tempore or impromptu) precise localization of targets. Embodiments open up new applications for background-free or background-reduced luminescence microscopy, for example time-gated or time-resolved luminescence microscopy, in a relatively fast, higher speed or more efficient manner.

    Abstract translation: 在一种形式中,公开了用于发光显微镜的双向扫描方法。 通过相对于第一方向的询问广域来执行一系列连续扫描,并且识别目标。 在第一方向上确定目标的精确位置。 相对于目标在第一方向的精确位置处或附近的第二方向,通过询问广域进行至少一次扫描。 双向扫描方法产生目标的“即时”(即临时或即兴)精确定位。 实施例以相对快速,更高速或更有效的方式开辟了无背景或背景减少发光显微镜的新应用,例如时间门控或时间分辨发光显微镜。

    INTERFEROMETER HAVING MULTIPLE SCAN CARRIAGES
    168.
    发明申请
    INTERFEROMETER HAVING MULTIPLE SCAN CARRIAGES 审中-公开
    具有多个扫描载体的干涉仪

    公开(公告)号:US20150083916A1

    公开(公告)日:2015-03-26

    申请号:US14561425

    申请日:2014-12-05

    Abstract: An interferometer includes a first assembly having a base, a beam splitter assembly to split light into first and second portions, and a fixed mirror for reflecting the first portion of light; and a second assembly movable with respect to the first assembly, and having first and second scan carriages, and a movable mirror connected to the second scan carriage for reflecting the second portion of light. The beam splitter assembly combines the reflected first and second portions of light into a recombined radiation beam. Inner bearing flexures enable movement of the first scan carriage relative to the base, and outer bearing flexures enable movement of the second scan carriage relative to the first scan carriage, such that a plane containing the movable mirror is maintained parallel to multiple planes containing the movable mirror at respective distances between the second and first assemblies during scan movement of the movable mirror.

    Abstract translation: 干涉仪包括具有底座的第一组件,将光分成第一和第二部分的分束器组件以及用于反射第一部分光的固定镜; 以及第二组件,其可相对于所述第一组件移动,并且具有第一和第二扫描支架,以及连接到所述第二扫描托架的用于反射所述第二部分光的可移动镜。 分束器组件将反射的第一和第二部分光合并成复合辐射束。 内部轴承挠曲能够使第一扫描滑架相对于基座移动,而外轴承挠曲使第二扫描滑架相对于第一扫描滑架能够移动,使得包含可移动反射镜的平面保持平行于包含可移动的多个平面的多个平面 在可移动镜的扫描运动期间在第二组件和第一组件之间的相应距离处的镜子。

    DEVICE FOR DETECTING QUALITY LEVEL OF MICROELECTRONIC PACKAGING SAMPLES USING PHOTO-THERMAL IMAGING
    169.
    发明申请
    DEVICE FOR DETECTING QUALITY LEVEL OF MICROELECTRONIC PACKAGING SAMPLES USING PHOTO-THERMAL IMAGING 审中-公开
    使用光热成像检测微电子包装样品的质量水平的装置

    公开(公告)号:US20150042980A1

    公开(公告)日:2015-02-12

    申请号:US14522667

    申请日:2014-10-24

    Abstract: An image acquisition device based on photo-thermal imaging, including a support beam, a translational electric motor, an imaging probe, and a light emitter. The translational electric motor is fixed to the lower side of the beam, and the imaging probe is perpendicularly fixed to a moving block in the translational electric motor. The light emitter is connected to the moving block via an adjustable connection piece, and by adjusting the adjustable connection piece, light emitted by the light emitter enters the imaging probe after being reflected by a sample. The moving block in the translational electric motor is configured to move the light emitter and the imaging probe in the radial direction right above the sample. The light emitter is configured to emit light on the upper surface of the sample. The imaging probe is configured to image reflected light from the upper surface of the sample.

    Abstract translation: 基于光热成像的图像采集装置,包括支撑光束,平移电动机,成像探针和光发射器。 平移电动机固定在梁的下侧,成像探头垂直固定在平移电动机的移动块上。 光发射器通过可调节的连接件连接到移动块,并且通过调节可调连接件,由发射器发射的光在被样品反射之后进入成像探针。 平移电动机中的移动块被配置成沿着样品正上方的径向移动光发射器和成像探针。 光发射器被配置为在样品的上表面上发光。 成像探针被配置成对来自样品的上表面的反射光进行成像。

    OPTICAL UNIT, FLUORESCENCE DETECTION DEVICE, AND FLUORESCENCE DETECTION METHOD
    170.
    发明申请
    OPTICAL UNIT, FLUORESCENCE DETECTION DEVICE, AND FLUORESCENCE DETECTION METHOD 有权
    光学单元,荧光检测装置和荧光检测方法

    公开(公告)号:US20150028226A1

    公开(公告)日:2015-01-29

    申请号:US14378674

    申请日:2013-02-20

    Inventor: Yukio Watanabe

    Abstract: Even when the distance from an objective lens to a sample differs, the distribution of light from the sample can be detected accurately.A first lens 23 for converting light from the objective lens into parallel light is composed of a concave lens part 32 having a concave curved face 32c in a center portion of a flat face 32a, and a convex lens part 33 having a convex curved face 33c around a flat face 33b. Further, the first lens 23 includes first and second regions for diverging light through the flat face 33b and the concave curved face 32c and a third region for collecting light through the convex curved face 33c and the concave curved face 32c. When the sample is placed on a sample table while being sealed in a two-dimensional electrophoresis substrate, light totally reflected by a side surface of the objective lens is caused to enter the second region. In contrast, when the sample is directly placed on the sample table, the light is caused to enter the third region. As a result, in any of the cases, the rays of light d emitted from the first lens 23 are nearly parallel to one another, and are nearly parallel to the optical axis.

    Abstract translation: 即使当从物镜到样品的距离不同时,可以准确地检测来自样品的光的分布。 用于将来自物镜的光转换成平行光的第一透镜23由在平面32a的中心部分具有凹曲面32c的凹透镜部32和具有凸曲面33c的凸透镜部33 围绕平面33b。 此外,第一透镜23包括用于使光通过平面33b和凹曲面32c发散的第一和第二区域,以及用于通过凸曲面33c和凹曲面32c收集光的第三区域。 当样品被放置在样品台上同时密封在二维电泳基片中时,由物镜的侧面全反射的光进入第二区域。 相反,当将样品直接放置在样品台上时,使光进入第三区域。 结果,在任何情况下,从第一透镜23发射的光线d几乎彼此平行,并且几乎平行于光轴。

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