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    Method of making an integrated electromechanical switch and tunable capacitor
    171.
    发明申请
    Method of making an integrated electromechanical switch and tunable capacitor 有权
    制造集成的机电开关和可调电容器的方法

    公开(公告)号：US20040097066A1

    公开(公告)日：2004-05-20

    申请号：US10663983

    申请日：2003-09-17

    Applicant: Corporation for National Research Initiatives

    Inventor： Mehmet Ozgur

    IPC: H01L021/4763

    CPC classification number: H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

    Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

    Abstract translation: 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

    Reducing the actuation voltage of microelectromechanical system switches
    173.
    发明申请
    Reducing the actuation voltage of microelectromechanical system switches 有权
    降低微机电系统开关的启动电压

    公开(公告)号：US20040000696A1

    公开(公告)日：2004-01-01

    申请号：US10185283

    申请日：2002-06-28

    Inventor： Qing Ma ,  Tsung-Kuan Allen Chou ,  Valluri Rao

    IPC: H01L021/00 ,  H01L029/82

    CPC classification number: H01H59/0009 ,  B81B3/007 ,  B81B2201/014 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/0353 ,  B81B2203/04 ,  B81C2201/056 ,  H01H1/20 ,  H01H2001/0084 ,  H01H2059/0036 ,  H01H2059/0063

    Abstract: A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations.

    Abstract translation: 微机电系统开关可以包括在其自由端上耦合到更顺从或柔性延伸部的相对刚性的悬臂梁。 触点可以位于悬臂梁的自由端。 该延伸部分减小了所需的致动电压，并补偿了关闭开关时悬臂梁的相对刚度。 在打开开关时，悬臂梁的刚度可以有利地实现更快的操作，这在更高的频率情况下是可取的。

    Micro electromechanical switch having self-aligned spacers
    174.
    发明申请
    Micro electromechanical switch having self-aligned spacers 失效
    具有自对准间隔物的微机电开关

    公开(公告)号：US20030210124A1

    公开(公告)日：2003-11-13

    申请号：US10465451

    申请日：2003-06-19

    Inventor： Richard P. Volant ,  David Angell ,  Donald F. Canaperi ,  Joseph T. Kocis ,  Kevin S. Petrarca ,  Kenneth J. Stein ,  William C. Wille

    IPC: H01H061/00 ,  H01H059/00

    CPC classification number: B81B3/001 ,  B81B2201/014 ,  H01H59/0009 ,  H01H2059/0072

    Abstract: A method of fabricating and the structure of a micro-electromechanical switch (MEMS) device provided with self-aligned spacers or bumps is described. The spacers are designed to have an optimum size and to be positioned such that they act as a detent mechanism for the switch to minimize problems caused by stiction. The spacers are fabricated using standard semiconductor techniques typically used for the manufacture of CMOS devices. The present method of fabricating these spacers requires no added depositions, no extra lithography steps, and no additional etching.

    Abstract translation: 描述了一种制造和具有自对准间隔物或凸块的微机电开关（MEMS）装置的结构的方法。 间隔件被设计成具有最佳尺寸并且被定位成使得它们用作开关的制动机构以最小化由静摩擦引起的问题。 使用通常用于制造CMOS器件的标准半导体技术制造间隔物。 制造这些间隔物的本方法不需要附加的沉积，不需要额外的光刻步骤，也不需要额外的蚀刻。

    Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
    175.
    发明授权
    Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same 有权
    微电子机械系统致动器装置和利用其的可重构电路

    公开(公告)号：US06646525B2

    公开(公告)日：2003-11-11

    申请号：US09885713

    申请日：2001-06-20

    Applicant: Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

    Inventor： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

    IPC: H01P110

    CPC classification number: B81B3/0021 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C1/00214 ,  H01G5/18 ,  H01G5/40 ,  H01H59/0009 ,  H01H2059/0081 ,  H01P1/12 ,  H01P1/20327 ,  H01P1/20363 ,  H01P1/20381 ,  H01P1/2039 ,  H01P5/04

    Abstract: A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves.

    Abstract translation: 一种微电子机械装置，其包括形成在基板上的固定电极，所述固定电极包括透明的高电阻层和在预定方向上形成有各向异性应力并且邻近所述固定电极设置的可移动电极。 该器件包括通过固定电极彼此隔离的第一和第二导电区域。 可移动电极移动以覆盖固定电极并且电耦合到第二导电区域，从而响应于施加在固定和可移动电极上的电势而电耦合第一和第二导电区域。 固定电极对电磁信号或波是透明的，并且可移动电极阻止或允许电磁信号或波的传输。

    Integrated sensor having plurality of released beams for sensing acceleration
    177.
    发明授权
    Integrated sensor having plurality of released beams for sensing acceleration 失效
    具有多个用于感测加速度的释放光束的集成传感器

    公开(公告)号：US6058778A

    公开(公告)日：2000-05-09

    申请号：US957809

    申请日：1997-10-24

    Applicant: Tsiu Chiu Chan ,  Melvin Joseph DeSilva

    Inventor： Tsiu Chiu Chan ,  Melvin Joseph DeSilva

    IPC: B81B3/00 ,  B81B7/02 ,  G01P15/08 ,  G01P15/135 ,  G01P15/18

    CPC classification number: G01P15/18 ,  B81C1/00246 ,  G01P15/0802 ,  G01P15/135 ,  B81B2201/014 ,  B81C2203/0735

    Abstract: An integrated circuit and method are provided for sensing activity such as acceleration in a predetermined direction of movement. The integrated released beam sensor preferably includes a switch detecting circuit region and a sensor switching region connected to and positioned adjacent the switch detecting circuit region. The sensor switching region preferably includes a plurality of floating contacts positioned adjacent and lengthwise extending outwardly from said switch detecting circuit region for defining a plurality of released beams so that each of said plurality of released beams displaces in a predetermined direction responsive to acceleration. The plurality of released beams preferably includes at least two released beams lengthwise extending outwardly from the switch detecting circuit region to different predetermined lengths and at least two released beams lengthwise extending outwardly from the switch detecting circuit region to substantially the same predetermined lengths. The methods of forming an integrated sensor advantageously are preferably compatible with know integrated circuit manufacturing processes, such as for CMOS circuit manufacturing, with only slight variations therefrom.

    Abstract translation: 提供集成电路和方法用于感测诸如预定运动方向的加速度的活动。 集成释放的光束传感器优选地包括开关检测电路区域和连接到并且位于开关检测电路区域附近的传感器开关区域。 传感器切换区域优选地包括多个浮动触点，其位于邻近并纵向地从所述开关检测电路区域向外延伸，用于限定多个释放的波束，使得所述多个释放波束中的每一个响应加速度以预定方向移动。 多个释放的光束优选地包括至少两个从开关检测电路区域向外延伸到不同预定长度的释放光束，以及至少两个从开关检测电路区域向外延伸到大致相同的预定长度的释放光束。 有利地形成集成传感器的方法优选地与知道的集成电路制造工艺相兼容，例如用于CMOS电路制造，仅具有轻微的变化。

    Micro normally-closed structure and method for manufacturing the same
    178.
    发明授权
    Micro normally-closed structure and method for manufacturing the same 有权

    公开(公告)号：US10077185B2

    公开(公告)日：2018-09-18

    申请号：US14676089

    申请日：2015-04-01

    Applicant: National Tsing Hua University

    Inventor： Wei-Cheng Lai ,  Weileun Fang

    IPC: B81B3/00 ,  H01H1/00

    CPC classification number: B81B3/0056 ,  B81B2201/014 ,  B81C2203/032 ,  H01H1/0036 ,  Y10T29/49105

    Abstract: A method for manufacturing a micro normally-closed structure. The method includes steps of providing a flexible arm, and a stationary base and a fixed contact separated from the flexible arm, wherein the flexible arm is free to move and includes a first end configured at one terminal and a movable contact configured at another terminal, the transient base is configured at where corresponds to the first end, and the fixed contact is configured at where corresponds to the movable contact; forming a temporary electrical connection between the first end and the stationary base; forming a temporary electrical conduction between the movable contact and the fixed contact; maintaining the temporary electrical connection and the temporary electrical conduction; and securing the first end to the stationary base permanently which causes the temporary electrical connection turn into a permanent electrical connection and the temporary electrical conduction turn into the micro normally-closed structure.

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