公开(公告)号：US20220152724A1

公开(公告)日：2022-05-19

申请号：US17455288

申请日：2021-11-17

Applicant: Applied Materials, Inc.

Inventor： Kang LUO ,  Ludovic GODET ,  Daihua ZHANG ,  Nai-Wen PI ,  Jinrui GUO ,  Rami HOURANI

IPC: B23K10/00 ,  F21V8/00

Abstract: The present disclosure generally relates to a method and apparatus for forming a substrate having a graduated refractive index. A method of forming a waveguide structure includes expelling plasma from an applicator having a head toward a plurality of grating structures formed on a substrate. The plasma is formed in the head at atmospheric pressure. The method further includes changing a depth of the plurality of grating structures with the plasma by removing grating material from the plurality of grating structures.

公开(公告)号：US20230375919A1

公开(公告)日：2023-11-23

申请号：US18320683

申请日：2023-05-19

Applicant: Applied Materials, Inc.

Inventor： Jing JIANG ,  Kang LUO

IPC: G03F7/00 ,  G02B27/01

CPC classification number: G03F7/0002 ,  G02B27/0172 ,  G03F7/0005 ,  G02B2207/101 ,  G02B6/0038

Abstract: A system for nanoimprint lithography includes a master holder, a spacer, and a stamp support. The spacer supports the stamp support as a stamp material is cured to create a stamp. A method of forming an optical device using the nanoimprint lithography system with a spacer is provided. A system for the nanoimprint lithography may also include a master and a stamp support holder. The stamp support holder includes a plurality of projections defining a plurality of vacuum channels. The vacuum channels are in fluid communication with a vacuum source to support a stamp support as a stamp material is cured to create a stamp.

公开(公告)号：US20230356540A1

公开(公告)日：2023-11-09

申请号：US18142305

申请日：2023-05-02

Applicant: Applied Materials, Inc.

Inventor： Yingdong LUO ,  Rami HOURANI ,  Xiaopei DENG ,  Kang LUO ,  Erica CHEN ,  Ludovic GODET

IPC: B41M5/00

CPC classification number: B41M5/0047

Abstract: Embodiments of the present disclosure relate to methods, systems, and apparatus for inkjet printing self-assembled monolayer (SAM) structures on substrates. In one embodiment, which can be combined with other embodiments, one or more SAM layers are printed on a substrate surface of a substrate in a localized manner such that a portion of the substrate surface is left exposed to a processing region of the inkjet chamber. The printing includes spraying one or more subsections of the substrate surface with an ink, the ink having a SAM composition. The SAM composition includes an active component, and a hydrophobic tail.

公开(公告)号：US20230341769A1

公开(公告)日：2023-10-26

申请号：US18333290

申请日：2023-06-12

Applicant: Applied Materials, Inc.

Inventor： Hao TANG ,  Kang LUO ,  Erica CHEN ,  Yongan XU

IPC: G03F7/00 ,  G02B5/18

CPC classification number: G03F7/0005 ,  G02B5/1857 ,  G03F7/0002

Abstract: A method of imprinting a pattern on a substrate is provided. The method includes forming a first pattern on a plurality of masters using a method other than imprinting, the first pattern including a plurality of patterned features of varying sizes; measuring the patterned features at a plurality of locations on each of the masters; selecting a first master of the plurality of masters based on the measurements of the patterned features on each of the masters; using the first master to form a second pattern on an imprint template; and imprinting the first pattern on a first device with the imprint template.

公开(公告)号：US20230305203A1

公开(公告)日：2023-09-28

申请号：US18183273

申请日：2023-03-14

Applicant: Applied Materials, Inc.

Inventor： Hao TANG ,  Kang LUO ,  Yongan XU ,  Andrew CEBALLOS ,  Rutger MEYER TIMMERMAN THIJSSEN

IPC: G02B5/18 ,  G02B6/02 ,  G02B6/42 ,  G02B6/34

CPC classification number: G02B5/1847 ,  G02B6/02038 ,  G02B6/4257 ,  G02B6/34 ,  G02B2207/101

Abstract: Embodiments of the present disclosure relate to optical device fabrication using methods of discrete grating assembly and optical interconnection. Discrete gratings corresponding to one of an input coupling grating, an intermediate grating, or an output coupling grating of an optical device are formed on separated donor substrates. The donor substrates are diced into individual gratings and adhered to an optical device substrate. An inkjet material is disposed between the gratings to optically interconnect the portions of the optical device.

公开(公告)号：US20230194982A1

公开(公告)日：2023-06-22

申请号：US18091525

申请日：2022-12-30

Applicant: Applied Materials, Inc.

Inventor： Yingdong LUO ,  Yongan XU ,  Kang LUO ,  Ludovic GODET

IPC: G03F7/00

CPC classification number: G03F7/0015 ,  G03F7/0002

Abstract: Embodiments described herein provide method a method of forming optical devices using nanoimprint lithography that maintains the critical dimension of the optical device structures. The method described herein accounts for lateral shrinkage of the solvent based resist during the cure process to maintain the critical dimension. The method includes disposing a stamp coating on a stamp having an inverse optical device pattern of inverse structures. The coating is disposed on sidewalls, inverse structure bottom, and inverse structure top of the inverse structures. The method includes etching the inverse structures such that the stamp coating remains on the sidewalls and is removed from the inverse structure top and bottom. The method further includes imprinting the stamp into an optical device material disposed and subjecting the imprintable optical device material to a cure process which transfers the optical device critical dimension to the optical device structures of the optical device pattern.

公开(公告)号：US20220035251A1

公开(公告)日：2022-02-03

申请号：US17033201

申请日：2020-09-25

Applicant: Applied Materials, Inc.

Inventor： Jinrui GUO ,  Ludovic GODET ,  Daihua ZHANG ,  Kang LUO ,  Rami HOURANI

IPC: G03F7/30 ,  G02B6/34

Abstract: A method of forming a three dimensional feature inwardly of a surface of a material includes providing a droplet dispenser including an outlet configured to dispense discrete droplets of a liquid material having a reactant therein capable of reacting with, and thereby removing, portions of the material layer with which the droplets come into contact, providing a support configured support the material thereon, the support, and the droplet dispenser, movable with respect to one another, such that the outlet of the droplet dispenser is positionable over different discrete areas of the surface of the material, and positioning the surface of the material under the droplet dispenser, and dispensing droplets to discrete portions of the surface of the material in a desired area thereof, to remove at least a portion of the material in the desired area and thereby form a three dimensional recess inwardly of the surface of the material.