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公开(公告)号：US20220260766A1
公开(公告)日：2022-08-18
申请号：US17673538
申请日：2022-02-16
Applicant: Applied Materials, Inc.
Inventor： Kenichi OHNO , Andrew CEBALLOS , Karl J. ARMSTRONG , Rami HOURANI , Takashi KURATOMI , Ludovic GODET
Abstract: An optical device is provided. The optical device includes an optical device substrate having a first surface; and a plurality of optical device structures disposed over the first surface of the optical device substrate, the plurality of optical device structures spaced apart from each other in a direction parallel to the first surface, and each optical device structure of the plurality of optical device structures including an optical device film. The optical device film of each optical device structure includes a first zone and a second zone, the first zone positioned between the optical device substrate and the second zone, wherein the first zone and the second zone each include one or more of oxygen and nitrogen, and the first zone and the second zone collectively include three or more metal, metalloid, or semiconductor elements.
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2.发明公开公开(公告)号：US20240094630A1
公开(公告)日：2024-03-21
申请号：US18521853
申请日：2023-11-28
Applicant: Applied Materials, Inc.
Inventor： Amita JOSHI , Andrew CEBALLOS , Kenichi OHNO , Rami HOURANI , Ludovic GODET
CPC classification number: G03F7/0002 , C09D7/62 , C09D7/65 , C09D7/67 , G03F7/167
Abstract: Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition is provided and contains a plurality of passivated nanoparticles, one or more solvents, a surface ligand, an additive, and an acrylate. Each passivated nanoparticle contains a core and one or more shells, where the core contains one or more metal oxides and the shell contains one or more passivation materials. The passivation material of the shell contains one or more silicon-containing compounds.
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3.发明公开公开(公告)号：US20240111075A1
公开(公告)日：2024-04-04
申请号：US18275383
申请日：2022-01-31
Applicant: Applied Materials, Inc.
Inventor： Russell Chin Yee TEO , James CONNOLLY , Chien-An CHEN , Andrew CEBALLOS , Jing JIANG , Jhenghan YANG , Yongan XU
IPC: G02B1/00
CPC classification number: G02B1/002
Abstract: Embodiments described herein relate to flat optical devices with a coating layer including monolayers selected from the group consisting of molybdenum disulfide (MoS2), tungsten disulfide (WS2), tungsten diselenide (WSe2), molybdenum diselenide (MoSe2), molybdenum ditelluride (MoTe2), titanium disulfide (TlS2), zirconium disulfide (ZrS2), zirconium diselenide (ZrSe2), hafnium disulfide (HfS2), platinum disulfide (PtS2), tin disulfide (SnS2), or combinations thereof. The coating layer is disposed over a plurality of optical device structures of the optical device. The monolayers may alternate between the materials to form the coating layer or may be a uniform coating layer of a single material. The coating layer is disposed over each optical device structure of the plurality of optical device structures.
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公开(公告)号：US20220252779A1
公开(公告)日：2022-08-11
申请号：US17170342
申请日：2021-02-08
Applicant: Applied Materials, Inc.
Inventor： Andrew CEBALLOS
Abstract: Embodiments provided herein provide for amorphous encapsulation of nanoparticle imprint films for optical devices. In one embodiment provided herein, a device is provided. The device includes a plurality of optical device structures disposed on a surface of a substrate. The plurality of optical device structures include a nanoparticle imprint material. The plurality of optical device structures further include an encapsulation layer disposed over at least a top surface and one sidewall of each optical device structure of the plurality of optical device structures. The encapsulation layer is amorphous or substantially amorphous. The encapsulation layer includes a niobium oxide. The niobium oxide is selected from the group consisting of niobium monoxide (NbO), niobium dioxide (NbO2), niobium pentoxide (Nb2O5), Nb12O29, Nb47O116, or Nb3n+1O8n−2, where n is 5 to 8.
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5.发明公开公开(公告)号：US20240094440A1
公开(公告)日：2024-03-21
申请号：US18471005
申请日：2023-09-20
Applicant: Applied Materials, Inc.
Inventor： Andrew CEBALLOS
CPC classification number: G02B1/14 , G02B1/002 , G03F7/0002 , B82Y20/00
Abstract: Embodiments of the present disclosure generally relate to the introduction of an encapsulation material into an optical device formed with a same thickness distribution at one or more eyepiece areas across a substrate. The target thickness distribution formed in at least each eyepiece area reduces variation of substrate thickness from substrate to substrate. Forming the target thickness distribution in the substrate and the index-matched layer with maskless patterning such as gray-tone lithography and inkjet printing eliminates subsequent processing steps to achieve the target thickness distribution. An encapsulation material between the optical device layer and the index-matched layer will protect the index-matched layer from damage.
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Patent Agency Ranking
公开(公告)号：US20230305203A1
公开(公告)日：2023-09-28
申请号：US18183273
申请日：2023-03-14
Applicant: Applied Materials, Inc.
Inventor： Hao TANG , Kang LUO , Yongan XU , Andrew CEBALLOS , Rutger MEYER TIMMERMAN THIJSSEN
CPC classification number: G02B5/1847 , G02B6/02038 , G02B6/4257 , G02B6/34 , G02B2207/101
Abstract: Embodiments of the present disclosure relate to optical device fabrication using methods of discrete grating assembly and optical interconnection. Discrete gratings corresponding to one of an input coupling grating, an intermediate grating, or an output coupling grating of an optical device are formed on separated donor substrates. The donor substrates are diced into individual gratings and adhered to an optical device substrate. An inkjet material is disposed between the gratings to optically interconnect the portions of the optical device.
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公开(公告)号：US20220212983A1
公开(公告)日：2022-07-07
申请号：US17141813
申请日：2021-01-05
Applicant: Applied Materials, Inc.
Inventor： Alexia Adilene PORTILLO RIVERA , Andrew CEBALLOS , Kenichi OHNO , Rami HOURANI , Karl J. ARMSTRONG , Brian Alexander COHEN
Abstract: Embodiments of the present disclosure generally relate to encapsulated optical devices and methods for fabricating the encapsulated optical devices. In one or more embodiments, a method for encapsulating an optical device includes depositing a metallic silver layer on a substrate, depositing a barrier layer on the metallic silver layer, where the barrier layer contains silicon nitride, a metallic element, a metal nitride, or any combination thereof, and depositing an encapsulation layer containing silicon oxide on the barrier layer.
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8.发明申请公开(公告)号：US20220155678A1
公开(公告)日：2022-05-19
申请号：US17527819
申请日：2021-11-16
Applicant: Applied Materials, Inc.
Inventor： Amita JOSHI , Andrew CEBALLOS , Kenichi OHNO , Rami HOURANI , Ludovic GODET
Abstract: Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition is provided and contains a plurality of passivated nanoparticles, one or more solvents, a surface ligand, an additive, and an acrylate. Each passivated nanoparticle contains a core and one or more shells, where the core contains one or more metal oxides and the shell contains one or more passivation materials. The passivation material of the shell contains one or more atomic layer deposition (ALD) materials, one or more block copolymers, or one or more silicon-containing compounds.
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公开(公告)号：US20220026603A1
公开(公告)日：2022-01-27
申请号：US17371441
申请日：2021-07-09
Applicant: Applied Materials, Inc.
Inventor： Andrew CEBALLOS , Ludovic GODET , Karl J. ARMSTRONG , Rami HOURANI
Abstract: Embodiments of the present disclosure relate to optical device films and methods of forming optical device films. Specifically, embodiments described herein provide for an optical device film having a constant oxygen-concentration, a first concentration profile of the first material, and a second concentration profile of the second material. The first material, described and referenced to herein, has a first refractive index about 2.0 or greater and the second material has a second refractive index less than 2.0.
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公开(公告)号：US20240270633A1
公开(公告)日：2024-08-15
申请号：US18627544
申请日：2024-04-05
Applicant: Applied Materials, Inc.
Inventor： Alexia Adilene PORTILLO RIVERA , Andrew CEBALLOS , Kenichi OHNO , Rami HOURANI , Karl J. ARMSTRONG , Brian Alexander COHEN
CPC classification number: C03C17/3615 , C03C17/3626 , C03C17/3642 , C03C17/3644 , C03C17/3663 , C23C14/0652 , C23C14/08 , C23C14/18 , C23C14/3407 , C03C2218/154
Abstract: Embodiments of the present disclosure generally relate to encapsulated optical devices and methods for fabricating the encapsulated optical devices. In one or more embodiments, a method for encapsulating an optical device includes depositing a metallic silver layer on a substrate, depositing a barrier layer on the metallic silver layer, where the barrier layer contains silicon nitride, a metallic element, a metal nitride, or any combination thereof, and depositing an encapsulation layer containing silicon oxide on the barrier layer.
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