公开(公告)号：US20140044570A1

公开(公告)日：2014-02-13

申请号：US14019163

申请日：2013-09-05

Applicant: Entegris, Inc.

Inventor： James Cedrone ,  George Gonnella ,  Iraj Gashgaee

IPC: F04B43/04

CPC classification number: F04B43/04 ,  F04B7/0076 ,  F04B9/02 ,  F04B13/00 ,  F04B23/06 ,  F04B49/065 ,  F04B53/06 ,  F04B53/16 ,  F04B53/22 ,  F04B2201/0201 ,  F04B2201/0601 ,  F04B2205/03 ,  Y10T29/49236 ,  Y10T137/87885

Abstract: Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having onboard electronics and features to prevent heat from the onboard electronics from degrading process fluid or otherwise negatively impacting pump performance. Embodiments may also include features for reducing the likelihood that fluid will enter an electronics housing.

Abstract translation: 本发明的实施例提供具有减小形状因素并提高可靠性和可服务性的特征的泵。 此外，本发明的实施例提供了用于温和流体处理特性的特征。 本发明的实施例可以包括具有车载电子设备和特征的泵，其特征在于防止车载电子器件的热量降解过程流体或以其他方式不利地影响泵的性能。 实施例还可以包括用于降低流体进入电子设备壳体的可能性的特征。

公开(公告)号：US20130220452A1

公开(公告)日：2013-08-29

申请号：US13853674

申请日：2013-03-29

Applicant: Entegris, Inc.

Inventor： Marc Laverdiere ,  Robert F. McLoughlin ,  George Gonnella ,  Iraj Gashgaee ,  Jennifer Marrs

IPC: G05D7/06

CPC classification number: G05D7/0617 ,  G05D16/2013 ,  Y10T137/0396 ,  Y10T137/7758 ,  Y10T137/776 ,  Y10T137/7761

Abstract: Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

Abstract translation: 装置和控制系统，用于监控（优选数字化）和/或控制诸如比例流体控制阀的气动负载的压力，并使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入 以控制气动负载的压力，使得可以增加或减少气动负载（以比例地打开或关闭气动阀），以将流体的流速改变到期望的速率。 也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。

公开(公告)号：US20190056041A1

公开(公告)日：2019-02-21

申请号：US16079709

申请日：2017-03-31

Applicant: ENTEGRIS, Inc.

Inventor： Iraj Gashgaee ,  George Gonnella ,  Bruce Garber

IPC: F16K31/126 ,  F16K7/17 ,  F16K31/122

Abstract: A fluid valve (700) is disclosed that incorporates a plunger (760) with a fluid channel (766). The plunger is connected to a (724) boss coupled to a diaphragm 720), this boss also includes a fluid channel (726) and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity (780) and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat (712) thereby improving performance of the valve.

公开(公告)号：US20170107982A1

公开(公告)日：2017-04-20

申请号：US15314461

申请日：2015-05-28

Applicant: Entegris, Inc.

Inventor： James Cedrone ,  Iraj Gashgaee ,  George L. Gonnella

IPC: F04B49/10 ,  F04B9/02 ,  F04B19/04 ,  F04B43/02 ,  H01L21/67 ,  F04B51/00 ,  F04B53/10 ,  F04B53/16 ,  F04B23/04 ,  F04B53/20 ,  F04B49/22

CPC classification number: F16H25/2006 ,  F04B9/02 ,  F04B13/00 ,  F04B17/03 ,  F04B19/04 ,  F04B23/04 ,  F04B43/02 ,  F04B43/04 ,  F04B49/10 ,  F04B51/00 ,  F04B53/10 ,  F04B53/16 ,  F04B2205/02 ,  F04B2205/503 ,  H01L21/6715

Abstract: A pumping system with a pressure sensor positioned on the fill side and a pressure sensor on the dispense side to obtain and provide pressure information that can be used by a controller in determining various operating profiles. To avoid trapping air in a process fluid, a pressure sensor can be flush mounted or mounted at an angle on the sidewall of a feed chamber, a bottle, or a reservoir tank at or near the bottom or half-height. The pressure information obtained from the fill side can have many beneficial including filtration confirmation, air detection, and reduced pressure priming of a filter. The pumping system may further include a graphical user interface for displaying the operating profiles and various associated alarms in real time.

公开(公告)号：US20140361046A1

公开(公告)日：2014-12-11

申请号：US14466115

申请日：2014-08-22

Applicant: Entegris, Inc.

Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

IPC: F04B43/02

CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

Abstract translation: 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。