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公开(公告)号：US20130208041A1
公开(公告)日：2013-08-15
申请号：US13738710
申请日：2013-01-10
Applicant: Massachusetts Institute of Technology
Inventor： Vladimir BULOVIC , Jianglong CHEN , Conor F. MADIGAN , Martin A. SCHMIDT
IPC: B41J2/07
CPC classification number: B41J2/04588 , B05B17/0638 , B41J2/04581 , B41J2/07 , B41J2/14 , B41J2202/09 , B41J2202/16 , H01L51/0005 , H01L51/56 , H05B33/10
Abstract: The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.
Abstract translation: 本公开涉及一种用于在可以形成LED或其他类型的显示器的一部分的衬底上沉积膜的方法。 在一个实施例中，本公开涉及一种用于在基底上沉积墨的装置。 该装置包括用于接收墨水的腔室; 具有入口和出口的排出喷嘴，所述排出喷嘴在所述入口处从所述室接收一定量的墨，并从所述出口分配墨水量; 以及分配器，用于计量从所述腔室到所述排放喷嘴的入口的墨水量; 其中所述腔室容纳具有多个悬浮颗粒的液体形式的墨水，并且所述墨水量从所述腔室脉动地计量到所述排放喷嘴; 并且排出喷嘴使载液蒸发并将固体颗粒沉积在基板上。
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公开(公告)号：US20240080630A1
公开(公告)日：2024-03-07
申请号：US18499470
申请日：2023-11-01
Applicant: Massachusetts Institute of Technology
Inventor： Jinchi HAN , Jeffrey H. LANG , Vladimir BULOVIC
CPC classification number: H04R17/025 , H04R1/403 , H04R1/406 , H04R3/005 , H04R7/127 , H10N30/084 , H10N30/883 , H04R2400/01
Abstract: An active acoustic system includes a thin-film sheet having an array of piezoelectric microstructures embossed in the film. Each piezoelectric microstructure may act as a speaker and/or a microphone. A control circuit is configured to individually address the piezoelectric microstructures to provide a separate voltage signal to, or receive a separate voltage signal from, each piezoelectric microstructure.
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公开(公告)号：US20230304944A1
公开(公告)日：2023-09-28
申请号：US18041279
申请日：2021-08-13
Applicant: Massachusetts Institute of Technology
Inventor： Anthony T. TROUPE , Brandon T. MOTES , Dane William DEQUILETTES , Vladimir BULOVIC
IPC: G01N21/95
CPC classification number: G01N21/9501 , G01N2201/06113
Abstract: Described are devices and methods for measuring semiconductor materials, devices, circuits, and systems. The device includes a probe head that accepts multiple optical assemblies. At least one optical assembly provides a light source, and at least one optical assembly provides a detector. Both are coupled to the probe head. The optical assemblies may be manually or automatically adjustable using kinematic mounts, and may include optical fibers for conveying light to and from a sample. Each optical assembly may include a lens stack or an objective. Illumination and collection assemblies may share a common focal point, and different subsets of assemblies may share different focal points. The device may include a sample bed for imaging multiple samples at once, and may be coupled to a control system for automatically positioning the samples and/or the optical assemblies.
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公开(公告)号：US20220270925A1
公开(公告)日：2022-08-25
申请号：US17628374
申请日：2020-07-22
Applicant: Massachusetts Institute of Technology
Inventor： Vladimir BULOVIC , Ryan ZIMMERMAN
IPC: H01L21/786 , B23K26/364 , H01L21/56 , H01L21/67 , H01L23/31
Abstract: Aspects include a method of fabricating a semiconductor structure including providing a semiconductor layer, scribing the semiconductor layer to provide one or more scribe lines, disposing a flexible support layer on the semiconductor layer, and applying a force to the scribed semiconductor layer so as to induce cracks along the scribe lines.
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15.发明申请公开(公告)号：US20180367921A1
公开(公告)日：2018-12-20
申请号：US15956740
申请日：2018-04-18
Applicant: Massachusetts Institute of Technology
Inventor： Apoorva MURARKA , Vladimir BULOVIC , Jeffrey H. LANG
Abstract: Briefly, in accordance with one or more embodiments, a hearing aid comprises a housing and an audio processing system disposed in the housing, the audio processing system comprising at least one amplifier, an earbud formed as part of the housing or coupled to the housing to fit into an external acoustic meatus or ear canal of a user, one or more microphones coupled to an input of the amplifier, and one or more drivers coupled to an output of the amplifier to reproduce an amplified version of an input acoustic wave impinging on the one or more microphones. The audio processing system including a processor coupled between the microphone and the driver, wherein the processor is to provide one or more hearing correction functions. At least one of the one or more drivers or the one or more microphones, or a combination thereof, comprises an electrostatic acoustic transducer.
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Patent Agency Ranking
公开(公告)号：US20160380404A1
公开(公告)日：2016-12-29
申请号：US15140282
申请日：2016-04-27
Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventor： Vladimir BULOVIC , Jeffrey Hastings LANG , Apoorva MURARKA , Annie I-Jen WANG , Wendi CHANG
CPC classification number: H01S3/1053 , B81B2201/02 , B81B2201/042 , B81C1/00158 , B81C1/00634 , B81C2201/0194 , G01L1/24 , G01L9/0005 , G01L9/0072 , G01L11/02 , G02B26/001 , H01L29/84 , H01S3/07 , H01S3/08059 , H01S3/0933 , H01S3/094 , H01S3/0941 , H01S3/106 , H01S3/1305 , H01S3/16 , H01S3/1693
Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.
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公开(公告)号：US20160130138A1
公开(公告)日：2016-05-12
申请号：US14541065
申请日：2014-11-13
Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventor： Vladimir BULOVIC , Jeffrey Hastings LANG , Annie I-Jen WANG , Apoorva MURARKA , Wendi CHANG
CPC classification number: B81C1/00158 , B81B2201/042 , B81C1/00182 , B81C1/00634 , B81C2201/0194 , G01L9/0005 , G01L9/0072 , G01L11/02 , G02B26/001 , G02B26/0825 , G02B26/0841 , H01L29/84 , H01S5/0607 , H01S5/1039 , H01S5/187
Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.
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公开(公告)号：US20150309306A1
公开(公告)日：2015-10-29
申请号：US14281588
申请日：2014-05-19
Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventor： Apoorva MURARKA , Vladimir BULOVIC , Annie I-Jen WANG , Jeffrey Hastings LANG
CPC classification number: B81B3/0021 , B81B2201/042 , B81C1/00158 , B81C1/00634 , B81C2201/0194 , G02B26/0825 , G02B26/0841
Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable minors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.
Abstract translation: 所公开的实施例提供了使用溶剂辅助或非辅助释放方法形成的敏感像素阵列。 示例性设备包括检测器阵列，可调谐光学仪器，可偏转未成年人，数字微镜，数字光处理芯片，可调谐光学微腔谐振器，声学传感器，声学致动器，声学换能器装置和电容拉链致动器。
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公开(公告)号：US20140091409A1
公开(公告)日：2014-04-03
申请号：US13844270
申请日：2013-03-15
Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventor： Apoorva MURARKA , Vladimir BULOVIC , Annie I-Jen WANG , Jeffrey Hastings LANG
IPC: B81B3/00
CPC classification number: B81B3/0021 , B81B2201/042 , B81C1/00158 , B81C1/00634 , B81C2201/0194 , G02B26/0825 , G02B26/0841
Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable mirrors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.
Abstract translation: 所公开的实施例提供了使用溶剂辅助或非辅助释放方法形成的敏感像素阵列。 示例性设备包括检测器阵列，可调谐光学仪器，偏转镜，数字微镜，数字光处理芯片，可调谐光学微腔谐振器，声学传感器，声学致动器，声学换能器装置和电容拉链致动器。
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公开(公告)号：US20230054412A1
公开(公告)日：2023-02-23
申请号：US17508133
申请日：2021-10-22
Applicant: Massachusetts Institute of Technology
Inventor： Jinchi HAN , Jeffrey H. LANG , Vladimir BULOVIC
IPC: H04R17/02 , H01L41/053 , H01L41/333 , H04R3/00 , H04R1/40 , H04R7/12
Abstract: An active acoustic system includes a thin-film sheet having an array of piezoelectric microstructures embossed in the film. Each piezoelectric microstructure may act as a speaker and/or a microphone. A control circuit is configured to individually address the piezoelectric microstructures to provide a separate voltage signal to, or receive a separate voltage signal from, each piezoelectric microstructure.
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