公开(公告)号：US20220155159A1

公开(公告)日：2022-05-19

申请号：US17439556

申请日：2020-03-13

Applicant: Massachusetts Institute of Technology

Inventor： Vladimir BULOVIC ,  Apoorva MURARKA ,  Damien REARDON ,  Jeffrey H. LANG ,  Jinchi HAN

IPC: G01L1/14 ,  G06F3/01 ,  B06B1/02

Abstract: Described embodiments provide an electromechanical transducer including a mechanically compliant, elastically deformable array of dielectric shells. A first electrically conductive electrode is disposed on a first surface of the array. A second electrically conductive electrode is disposed on a second surface of the array, where the second surface opposes the first surface. The array is configured to be mechanically compliant and elastically deformable in response to one or more incident forces applied to the electromechanical transducer.

公开(公告)号：US20220135442A1

公开(公告)日：2022-05-05

申请号：US17432534

申请日：2020-02-22

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Moungi BAWENDI ,  Vladimir BULOVIC ,  Richard SWARTWOUT ,  Nicole MOODY

IPC: C02F1/42

Abstract: A heavy metal capture composition, devices including the composition, and a method of reducing heavy metal contamination in the environment is described.

公开(公告)号：US20150268461A1

公开(公告)日：2015-09-24

申请号：US14189002

申请日：2014-02-25

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Apoorva MURARKA ,  Vladimir BULOVIC ,  Annie I-Jen WANG ,  Jeffrey Hastings LANG

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0825 ,  B81B2201/047 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0194 ,  G02B26/0841

Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable mirrors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.

Abstract translation: 所公开的实施例提供了使用溶剂辅助或非辅助释放方法形成的敏感像素阵列。 示例性设备包括检测器阵列，可调谐光学仪器，偏转镜，数字微镜，数字光处理芯片，可调谐光学微腔谐振器，声学传感器，声学致动器，声学换能器装置和电容拉链致动器。

公开(公告)号：US20150228916A1

公开(公告)日：2015-08-13

申请号：US14608504

申请日：2015-01-29

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Vladimir BULOVIC ,  Joel JEAN ,  Annie I-Jen WANG

IPC: H01L51/00 ,  H01L51/44

CPC classification number: H01L51/0097 ,  H01L51/003 ,  H01L51/0046 ,  H01L51/0056 ,  H01L51/448 ,  H01L2251/308 ,  Y02E10/549 ,  Y02P70/521

Abstract: The embodiments disclosed herein are directed to optoelectronic devices based, on ultra-thin, lightweight and in-situ deposited parylene substrates, as well as methods of manufacture. Using a bottom-up approach, a readily releasable parylene thin film can be used for fabricating thin film electronic and optoelectronic systems on the thin and light substrates having thicknesses in the nanometer to low micron range. The disclosed method enables the integration of forming a parylene substrate with, the fabrication of a complete photovoltaic device under a fully contained, controlled environment.

Abstract translation: 本文公开的实施例涉及基于超薄，轻质和原位沉积的聚对二甲苯基板以及制造方法的光电子器件。 使用自下而上的方法，易于释放的聚对二甲苯薄膜可用于在具有纳米至低微米范围的厚度的薄且轻的基底上制造薄膜电子和光电子系统。 所公开的方法使得能够在完全包含的受控环境下整合形成聚对二甲苯衬底，制造完整的光伏器件。

公开(公告)号：US20140063094A1

公开(公告)日：2014-03-06

申请号：US13778072

申请日：2013-02-26

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Vladimir BULOVIC ,  Jianglong CHEN ,  Conor F. MADIGAN ,  Martin A. SCHMIDT

IPC: B41J2/07

CPC classification number: B41J2/04588 ,  B05B17/0638 ,  B41J2/04581 ,  B41J2/07 ,  B41J2/14 ,  B41J2202/09 ,  B41J2202/16 ,  H01L51/0005 ,  H01L51/56 ,  H05B33/10

Abstract: The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

Abstract translation: 本公开涉及一种用于在可以形成LED或其他类型的显示器的一部分的衬底上沉积膜的方法。 在一个实施例中，本公开涉及一种用于在基底上沉积墨的装置。 该装置包括用于接收墨水的腔室; 具有入口和出口的排出喷嘴，所述排出喷嘴在所述入口处从所述室接收一定量的墨，并从所述出口分配墨水量; 以及分配器，用于计量从所述腔室到所述排放喷嘴的入口的墨水量; 其中所述腔室容纳具有多个悬浮颗粒的液体形式的墨水，并且所述墨水量从所述腔室脉动地计量到所述排放喷嘴; 并且排出喷嘴使载液蒸发并将固体颗粒沉积在基板上。

公开(公告)号：US20230268236A1

公开(公告)日：2023-08-24

申请号：US18041318

申请日：2021-08-13

Applicant: Massachusetts Institute of Technology

Inventor： Dane William DEQUILETTES ,  Brandon T. MOTES ,  Anthony T. TROUPE ,  Vladimir BULOVIC

IPC: H01L21/66

CPC classification number: H01L22/26

Abstract: An example methodology implementing the disclosed techniques includes receiving a plurality of measured semiconductor properties of one or more partially completed semiconductor devices, determining a measure of short circuit current density (JSC) of each of the one or more partially completed semiconductor devices, the JSC, measure based on a measure of semiconductor diffusion length (LD) and a measure of thickness, and determining a current voltage relationship of each of the one or more partially completed semiconductor devices. The method also includes calculating a current voltage (JV) curve based on the JSC, measure and the current voltage relationship of each of the one or more partially completed semiconductor devices, wherein the JV curve provides an indication of maximum achievable power point (Pmax) and open circuit voltage (Voc) of a semiconductor device completed from the one or more partially completed semiconductor devices, and determining a predicted performance characteristic of the semiconductor device.

公开(公告)号：US20230183860A1

公开(公告)日：2023-06-15

申请号：US18079572

申请日：2022-12-12

Applicant: Massachusetts Institute of Technology

Inventor： Vladimir BULOVIC ,  Ella WASSWEILER ,  Anurag PANDA

IPC: C23C16/448 ,  C23C16/08 ,  F16K3/26

CPC classification number: C23C16/4481 ,  C23C16/08 ,  F16K3/26

Abstract: A flow through valve can satisfy the manufacturing constraints encountered when handling materials at high temperatures and low pressures, for example during semiconductor thin-film manufacturing using techniques such as vapor transport deposition.

公开(公告)号：US20190067611A1

公开(公告)日：2019-02-28

申请号：US16056461

申请日：2018-08-06

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Alexi ARANGO ,  Vladimir BULOVIC ,  David OERTEL ,  Moungi G. BAWENDI

IPC: H01L51/42 ,  H01L51/00

Abstract: An electro-optical device can include a plurality of semiconductor nanocrystals. In some circumstances, the device can omit an electron transporting layer.

公开(公告)号：US20150311664A1

公开(公告)日：2015-10-29

申请号：US14541071

申请日：2014-11-13

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Vladimir BULOVIC ,  Jeffrey Hastings LANG ,  Apoorva MURARKA ,  Annie I-Jen WANG ,  Wendi CHANG

IPC: H01S3/106 ,  H01S3/0941 ,  H01S3/07 ,  G02B26/00 ,  H01S3/16 ,  H01S3/13 ,  H01S3/105 ,  H01S3/0933 ,  H01S3/08

CPC classification number: H01S3/1053 ,  B81B2201/02 ,  B81B2201/042 ,  B81C1/00158 ,  B81C1/00634 ,  B81C2201/0194 ,  G01L1/24 ,  G01L9/0005 ,  G01L9/0072 ,  G01L11/02 ,  G02B26/001 ,  H01L29/84 ,  H01S3/07 ,  H01S3/08059 ,  H01S3/0933 ,  H01S3/094 ,  H01S3/0941 ,  H01S3/106 ,  H01S3/1305 ,  H01S3/16 ,  H01S3/1693

Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.

Abstract translation: 本公开涉及在无溶剂环境中微机电系统（“MEMS”）的微接触印刷的方法和装置。 所公开的实施方案使得能够在聚对二甲苯层上形成复合膜并将复合结构转移到接收结构以形成由复合膜覆盖的一个或多个微腔。 聚对二甲苯膜的厚度可以在约100nm-2微米的范围内; 200nm-1微米，200-300nm，300-500nm，500nm至1微米和1-30微米。 接下来，在聚对二甲苯之上形成一个或多个二次层以产生复合膜。 复合膜可以具有约100nm至700nm至几微米的厚度。 可以测量复合膜的响应于外力的偏转，以提供无接触检测器。 相反，可以使用外部偏压来致动复合膜，以产生与施加的偏压相称的偏转。 所公开的实施例的应用包括可调激光器，麦克风，微型扬声器，远程激活的无接触压力传感器等。

公开(公告)号：US20130209668A1

公开(公告)日：2013-08-15

申请号：US13707562

申请日：2012-12-06

Applicant: Massachusetts Institute of Technology

Inventor： Vladimir BULOVIC ,  Jianglong CHEN ,  Conor F. MADIGAN ,  Martin A. SCHMIDT

IPC: H05B33/10

CPC classification number: B41J2/04588 ,  B05B17/0638 ,  B41J2/04581 ,  B41J2/07 ,  B41J2/14 ,  B41J2202/09 ,  B41J2202/16 ,  H01L51/0005 ,  H01L51/56 ,  H05B33/10

Abstract: The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

Abstract translation: 本公开涉及一种用于在可以形成LED或其他类型的显示器的一部分的衬底上沉积膜的方法。 在一个实施例中，本公开涉及一种用于在基底上沉积墨的装置。 该装置包括用于接收墨水的腔室; 具有入口和出口的排出喷嘴，所述排出喷嘴在所述入口处从所述室接收一定量的墨，并从所述出口分配墨水量; 以及分配器，用于计量从所述腔室到所述排放喷嘴的入口的墨水量; 其中所述腔室容纳具有多个悬浮颗粒的液体形式的墨水，并且所述墨水量从所述腔室脉动地计量到所述排放喷嘴; 并且排出喷嘴使载液蒸发并将固体颗粒沉积在基板上。