公开(公告)号：US20240044819A1

公开(公告)日：2024-02-08

申请号：US18346778

申请日：2023-07-03

Applicant: NOVA LTD.

Inventor： Gilad BARAK

IPC: G01N23/2055 ,  H01L21/66 ,  G06T7/00 ,  G06T5/00 ,  G01N23/201 ,  G01N23/20

CPC classification number: G01N23/2055 ,  H01L22/12 ,  G06T7/0004 ,  G06T5/002 ,  G01N23/201 ,  G01N23/20 ,  G01N2223/6116 ,  G06T2207/30148 ,  G06T2207/20224 ,  G06T2207/10116 ,  G01N2223/401 ,  G01N23/207

Abstract: A method and system are presented for use in X-ray based measurements on patterned structures. The method comprises: processing data indicative of measured signals corresponding to detected radiation response of a patterned structure to incident X-ray radiation, and subtracting from said data an effective measured signals substantially free of background noise, said effective measured signals being formed of radiation components of reflected diffraction orders such that model based interpretation of the effective measured signals enables determination of one or more parameters of the patterned structure, wherein said processing comprises: analyzing the measured signals and extracting therefrom a background signal corresponding to the background noise; and applying a filtering procedure to the measured signals to subtract therefrom signal corresponding to the background signal, resulting in the effective measured signal.

公开(公告)号：US20240019375A1

公开(公告)日：2024-01-18

申请号：US18245161

申请日：2021-09-14

Applicant: NOVA LTD.

Inventor： Eyal Hollander ,  Gilad BARAK ,  Elad Schleifer ,  Yonatan OREN ,  Amir Shayari

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/0636 ,  G01N2201/06113

Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.

公开(公告)号：US20230296434A1

公开(公告)日：2023-09-21

申请号：US18147682

申请日：2022-12-28

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  Yonatan OREN

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/28 ,  G01J3/44

CPC classification number: G01J3/0208 ,  G01J3/0224 ,  G01J3/06 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/44 ,  G01J2003/283

Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, said system comprising: a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory.

公开(公告)号：US20230035404A1

公开(公告)日：2023-02-02

申请号：US17758067

申请日：2020-12-24

Applicant: NOVA LTD.

Inventor： Yonatan OREN ,  Gilad BARAK

IPC: G01N21/956 ,  G01N21/95

Abstract: A combined OCD and photoreflectance system and method for improving the OCD performance in measurements of optical properties of a target sample. The system comprises (a) either a single channel OCD set-up comprised of a single probe beam configured in a direction normal/oblique to the target sample or a multi-channel OCD set-up having multiple probe beams configured in normal and oblique directions to the target sample for measuring the optical properties of the target sample, (b) at least one laser source for producing at least one laser beam, (c) at least one modulation device to turn the at least one laser beam into at least one alternatingly modulated laser beam, and (d) at least one spectrometer for measuring spectral components of the at least one light beam reflecting off said target sample; wherein the at least one alternatingly modulated laser beam is alternatingly modulating the spectral reflectivity of the target sample,

公开(公告)号：US20240264538A1

公开(公告)日：2024-08-08

申请号：US18403654

申请日：2024-01-03

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  Amir Shayari

IPC: G03F7/00 ,  G01B9/02

CPC classification number: G03F7/70625 ,  G01B9/02044

Abstract: A measurement system for use in optical metrology, the measurement system which includes a control system configured and operable to carry out the following: (i) receive raw measured data generated by a measurement unit that is configured and operable for performing normal-incidence spectral interferometric measurements on a sample and generating the raw measured data indicative of spectral interferometric signals measured on the sample for a number of different optical path differences (OPDs) between sample and reference arms using infrared wavelengths; (ii) extract, from the raw measured data, a portion of spectral interferometric signals describing variation of signal intensity with a change of an optical path difference OPD during interferometric measurements, said portion of the spectral interferometric signals being independent of interferometric signals returned from a bottom portion of the sample in response to said illuminating electromagnetic field; and (iii) directly determine, from the extracted portion of the spectral interferometric signals, both spectral amplitude and phase of reflection of the illuminating electromagnetic field from the top portion of the sample, thereby enabling to determine a measured spectral signature characterizing the top portion of the sample.

公开(公告)号：US20230168200A1

公开(公告)日：2023-06-01

申请号：US17816713

申请日：2022-08-01

Applicant: NOVA LTD.

Inventor： Eyal Hollander ,  Gilad BARAK ,  Elad Schleifer ,  Yonatan OREN ,  Amir Shayari

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/0636 ,  G01N2201/06113

Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up

公开(公告)号：US20230124422A1

公开(公告)日：2023-04-20

申请号：US17904950

申请日：2021-02-24

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  Amir Shayari

IPC: G03F7/20 ,  G01B9/02

Abstract: A measurement system is provided for use in optical metrology measurements. The measurement system comprises a control system which processes raw measured data indicative of spectral interferometric signals measured on a sample in response to illuminating electromagnetic field incident onto a top portion of the sample and comprising at least one spectral range to which said sample is substantially not absorbing. The processing comprises: extracting, from the raw measured data, a portion of spectral interferometric signals describing signal intensity variation with change of optical path difference during interferometric measurements, the extracted signal portion being independent of interferometric signals returned from a bottom portion of the sample in response to said illuminating electromagnetic field; and directly determining, from said extracted portion, both spectral amplitude and phase of reflection of the electromagnetic field from the top portion of the sample, thereby determining measured spectral signature characterizing the SA, SC, SD, SE, SG, SK, SL, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW.