公开(公告)号：US20200086287A1

公开(公告)日：2020-03-19

申请号：US16494448

申请日：2018-03-15

Applicant: RASIRC, Inc.

Inventor： Jeffrey J. Spiegelman ,  Russell Holmes ,  Christopher Ramos

IPC: B01J4/00 ,  B01J8/00 ,  B01J19/00

Abstract: Provided herein are methods, systems, and apparatus for measuring and/or controlling mass flow/concentration of a catalytically reactive gas within a mixed gas stream by determining thermal rise due to decomposition.

公开(公告)号：US10196685B2

公开(公告)日：2019-02-05

申请号：US15310775

申请日：2015-05-12

Applicant: RASIRC, INC.

Inventor： Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman ,  Russell J. Holmes ,  Edward Heinlein ,  Zohreh Shamsi ,  Christopher Ramos ,  Alex Deptala ,  James Hogan

IPC: A61L2/00 ,  A61L9/00 ,  B01D47/02 ,  C12Q1/6848 ,  A61L2/20 ,  C12Q1/6806 ,  A61L2/18

Abstract: Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.

公开(公告)号：US10150048B2

公开(公告)日：2018-12-11

申请号：US15487924

申请日：2017-04-14

Applicant: RASIRC, Inc.

Inventor： Daniel Alvarez, Jr. ,  Russell J. Holmes ,  Jeffrey J. Spiegelman ,  Edward Heinlein ,  Christopher Ramos ,  Jeremiah Trammel

IPC: B01D19/00 ,  B01B1/00 ,  C23C16/455 ,  C01B15/017 ,  C23C16/448

Abstract: Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.