公开(公告)号：US2072576A

公开(公告)日：1937-03-02

申请号：US8722036

申请日：1936-06-25

Applicant: BELL TELEPHONE LABOR INC

Inventor： ACKER JOHN T ,  WILSON JAMES R

IPC: C22C19/00 ,  H01J1/146 ,  H01J1/26

CPC classification number: C22C19/00 ,  H01J1/146 ,  H01J1/26

公开(公告)号：US2061755A

公开(公告)日：1936-11-24

申请号：US52365131

申请日：1931-03-18

Applicant: UNION CARBIDE & CARBON CORP

Inventor： COOPER HUGH S

IPC: H01J1/146

CPC classification number: H01J1/146

公开(公告)号：US12027340B2

公开(公告)日：2024-07-02

申请号：US18510302

申请日：2023-11-15

Applicant: Kimball Physics, Inc.

Inventor： Andrea Michelle Calvey ,  George Douglas Calvey

IPC: H01J1/18 ,  H01J1/146 ,  H01J1/88 ,  H01J9/08

CPC classification number: H01J1/18 ,  H01J1/146 ,  H01J1/88 ,  H01J9/08 ,  H01J2201/2889

Abstract: A cathode device includes an emitter tip for generating electrons. An elongate heater is included having proximal and distal ends. The emitter tip can be located at the distal end of the heater. Two spaced apart legs can extend away from the distal end of the heater, terminating at the proximal end and forming an elongate slot therebetween. Two electrical contacts can compressively engage respective opposite outer surfaces of the two legs at the proximal end of the heater to mechanically secure and electrically connect the two legs of the heater to respective electrical contacts at a junction that is at a location spaced away from the emitter tip to keep the junction cooler.

公开(公告)号：US20240161994A1

公开(公告)日：2024-05-16

申请号：US18510302

申请日：2023-11-15

Applicant: Kimball Physics, Inc.

Inventor： Andrea Michelle Calvey ,  George Douglas Calvey

IPC: H01J1/18 ,  H01J1/146 ,  H01J1/88

CPC classification number: H01J1/18 ,  H01J1/146 ,  H01J1/88 ,  H01J2201/2889

Abstract: A cathode device includes an emitter tip for generating electrons. An elongate heater is included having proximal and distal ends. The emitter tip can be located at the distal end of the heater. Two spaced apart legs can extend away from the distal end of the heater, terminating at the proximal end and forming an elongate slot therebetween. Two electrical contacts can compressively engage respective opposite outer surfaces of the two legs at the proximal end of the heater to mechanically secure and electrically connect the two legs of the heater to respective electrical contacts at a junction that is at a location spaced away from the emitter tip to keep the junction cooler.

公开(公告)号：US09240301B1

公开(公告)日：2016-01-19

申请号：US13851732

申请日：2013-03-27

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J1/148

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

公开(公告)号：US20060145585A1

公开(公告)日：2006-07-06

申请号：US10545808

申请日：2004-02-17

Applicant: Yoshinori Terui ,  Ryozo Nongaki ,  Seiichi Sakawa

Inventor： Yoshinori Terui ,  Ryozo Nongaki ,  Seiichi Sakawa

IPC: H01J1/20 ,  H01J19/14 ,  H01J9/02

CPC classification number: H01J1/16 ,  H01J1/146 ,  H01J1/20 ,  H01J9/04 ,  H01J9/042 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28 ,  H01J2237/3175

Abstract: To provide an electron source which is suitable for an electron beam lithography machine, an Auger electron spectroscope or the like and provides a small total emission current even in a high angular intensity operation. An electron gun provided with a cathode which comprises a single crystal needle of tungsten or molybdenum and a coating layer consisting of oxygen and at least one metal element selected from the group consisting of Group 2A, Group 3A and Group 4A, formed on its surface, characterized in that an apex of the cathode as a truncated cone shape, and the truncated cone shape portion has a cone angle of from 25° to 95° and a diameter of the top surface of from 5 μm to 200 μm.

Abstract translation: 提供适用于电子束光刻机，俄歇电子分光镜等的电子源，并且即使在高角度强度操作中也提供小的总发射电流。 一种具有阴极的电子枪，其包括钨或钼的单晶针和由氧和由其表面形成的组2A，组3A和组4A组成的组中的至少一种金属元素组成的涂层， 其特征在于，所述阴极的顶点为截头圆锥形状，所述截锥形部分的锥角为25°〜95°，顶面直径为5〜200μm。

公开(公告)号：US20050179024A1

公开(公告)日：2005-08-18

申请号：US11102628

申请日：2005-04-11

Applicant: Motoshi Shibata ,  Masahiro Deguchi ,  Akira Taomoto ,  Toyokazu Ozaki

Inventor： Motoshi Shibata ,  Masahiro Deguchi ,  Akira Taomoto ,  Toyokazu Ozaki

IPC: H01J1/13 ,  H01J1/146 ,  H01L29/06

CPC classification number: H01J1/13 ,  H01J1/146

Abstract: Provided are an electron emission material having a reduced work function, and an electron emission element that has lower power consumption and/or high current density and exhibits excellent electron emission performance. An electron emission material includes a semiconductor substrate having atomic steps on a surface thereof and a flat region between two of the atomic steps adjacent to each other, and an adsorbed layer arranged in the flat region. The adsorbed layer contains at least one element selected from an alkali metal element, an alkaline-earth metal element, and Sc.

Abstract translation: 提供具有降低的功函数的电子发射材料和具有较低功耗和/或高电流密度并且表现出优异的电子发射性能的电子发射元件。 电子发射材料包括其表面上具有原子台阶的半导体衬底和彼此相邻的两个原子台阶之间的平坦区域和布置在平坦区域中的吸附层。 吸附层含有选自碱金属元素，碱土金属元素和Sc中的至少一种元素。

公开(公告)号：US20040239229A1

公开(公告)日：2004-12-02

申请号：US10452037

申请日：2003-05-30

Inventor： Shankar Madras Venugopal ,  Alok M. Srivastava ,  Holly Ann Comanzo ,  Vikas Midha ,  William Winder Beers ,  Gopi Chandran Ramachandran ,  Mukunda Srinivas Adyam

IPC: H01J001/38 ,  H01J001/14 ,  H01J001/00 ,  H01J001/48 ,  H01J009/04

CPC classification number: H01J1/146 ,  H01J1/14 ,  H01J61/0677 ,  H01J61/0737

Abstract: An electron emissive composition comprises a barium tantalate composition of the formula (Ba1-x, Cax, Srp, Dq)6(Ta1-y, Wy, Et, Fu, Gv, Caw)2O(11nullnull) where null is an amount of about 0 to about null3; and wherein D is either an alkali earth metal ion or an alkaline earth ion; E, F, and G, are alkaline earth ions and/or transition metal ion; x is an amount of up to about 0.7; y is an amount of up to about 1; p and q are amounts of up to about 0.3; and t is an amount of about 0.05 to about 0.10, u is an amount of up to about 0.5, v is an amount of up to about 0.5 and w is an amount of up to about 0.25. A method for manufacturing an electron emissive composition comprises blending a barium tantalate composition with a binder; and sintering the barium tantalate composition with the binder at a temperature of about 1000null C. to about 1700null C.

Abstract translation: 电子发射组合物包含式（Ba1-x，Cax，Srp，Dq）6（Ta1-y，Wy，Et，Fu，Gv，Caw）2O（11±δ）的钽酸钡组合物，其中δ是量 约0至约-3; 并且其中D是碱土金属离子或碱土金属离子; E，F和G是碱土离子和/或过渡金属离子; x是高达约0.7的量; y是高达约1的量; p和q是高达约0.3的量; 并且t为约0.05至约0.10的量，u为至多约0.5的量，v为至多约0.5的量，w为高达约0.25的量。 制造电子发射组合物的方法包括将钡钽酸盐组合物与粘合剂混合; 并在约1000℃至约1700℃的温度下用粘合剂烧结钽酸钡组合物。

公开(公告)号：US06511632B1

公开(公告)日：2003-01-28

申请号：US09806164

申请日：2001-06-26

Applicant: Jong-Seo Choi ,  Yoon-Chang Kim ,  Kyu-Nam Joo ,  Nikolay Osaulenko ,  Vladislav Shutovsky ,  Oleg Kultashev

Inventor： Jong-Seo Choi ,  Yoon-Chang Kim ,  Kyu-Nam Joo ,  Nikolay Osaulenko ,  Vladislav Shutovsky ,  Oleg Kultashev

IPC: C22C2800

CPC classification number: H01J1/146 ,  C22C5/04 ,  H01J9/04

Abstract: A cathode material of an electron beam device comprising 0.5 to 9.0% by weight of a rare-earth metal of the cerium group, 0.5 to 15.0% by weight of tungsten and/or rhenium, 0.5 to 10% by weight of hafnium and the balance of iridium is provided. Since the cathode material has excellent plasticity, it is easy to manufacture small-size emitters. Also, since the density of the electron emission of the cathode material is high and the working temperature is low, a long lifetime can be ensured. Also, the cathode material is useful as a cathode material of an electron beam device.

Abstract translation: 电子束装置的阴极材料包含0.5〜9.0重量％的铈的稀土金属，0.5〜15.0重量％的钨和/或铼，0.5〜10重量％的铪，余量 的铱。 由于阴极材料具有优异的可塑性，因此容易制造小型发射体。 此外，由于阴极材料的电子发射密度高，工作温度低，因此可以确保长寿命。 此外，阴极材料可用作电子束装置的阴极材料。

公开(公告)号：US2144250A

公开(公告)日：1939-01-17

申请号：US4371435

申请日：1935-10-05

Applicant: RCA CORP

Inventor： ALLEN VICTOR O ,  JOSEPH JOHNSON

IPC: H01J1/146

CPC classification number: H01J1/146 ,  Y10S428/929 ,  Y10S428/935 ,  Y10T428/12833