公开(公告)号：US08915479B2

公开(公告)日：2014-12-23

申请号：US13569220

申请日：2012-08-08

Applicant: Mitsuhiro Furumoto ,  Tosiya Asano ,  Keiji Emoto

Inventor： Mitsuhiro Furumoto ,  Tosiya Asano ,  Keiji Emoto

IPC: F16M13/00 ,  F16F15/00

CPC classification number: F16F15/002 ,  G03F7/709 ,  G06F3/0488 ,  H01J2237/0216

Abstract: The present invention provides an anti-vibration apparatus including an anti-vibration base, a plurality of supporting mechanisms configured to support the anti-vibration base, a plurality of actuators configured to apply a force to the anti-vibration base, an obtaining unit configured to obtain vibration data which represents vibrations on the anti-vibration base, a first calculation unit configured to calculate, based on the vibration data obtained by the obtaining unit, a force to be applied to the anti-vibration base so as to reduce the vibrations on the anti-vibration base, and a distribution unit configured to distribute the force calculated by the first calculation unit to forces to be applied by the plurality of actuators to the anti-vibration base.

Abstract translation: 本发明提供一种抗振装置，包括防振基座，多个支撑机构，其构造成支撑防振基座;多个致动器，构造成向抗震基座施加力;获得单元构造 以获得表示抗振基座上的振动的振动数据，第一计算单元，被配置为基于获得单元获得的振动数据计算施加到防振基座的力，以减少振动 以及分配单元，其被配置为将由第一计算单元计算出的力分配给由多个致动器施加到防振基座的力。

公开(公告)号：US08907295B2

公开(公告)日：2014-12-09

申请号：US13564450

申请日：2012-08-01

Applicant: Oliver V. Naumovski ,  Shardul Patel ,  Charles A. Teodorczyk

Inventor： Oliver V. Naumovski ,  Shardul Patel ,  Charles A. Teodorczyk

IPC: H01J49/06 ,  H01Q9/04

CPC classification number: H01J37/1472 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/062 ,  H01J2237/0216 ,  H01J2237/151 ,  H01Q9/04 ,  Y10T428/2918 ,  Y10T428/292

Abstract: A composite electrostatic rod may include a body comprising a length L and cross sectional area A. The body may include an outer portion comprising a first material, and a core comprising a second material different than the first material and surrounded by the outer portion, wherein a natural frequency of the composite electrostatic rod is greater than that of a graphite rod having the length L and cross sectional area A.

Abstract translation: 复合静电杆可包括主体，其包括长度L和横截面面积A.主体可包括包括第一材料的外部部分和包括不同于第一材料并被外部部分包围的第二材料的芯部，其中 复合静电杆的固有频率大于具有长度L和横截面积A的石墨棒的固有频率。

公开(公告)号：US08835883B2

公开(公告)日：2014-09-16

申请号：US13703926

申请日：2011-06-03

Applicant: Daisuke Muto ,  Masanori Watanabe ,  Hiroshi Tsuji ,  Masaru Matsushima

Inventor： Daisuke Muto ,  Masanori Watanabe ,  Hiroshi Tsuji ,  Masaru Matsushima

IPC: G10K11/16 ,  G21K5/00 ,  H01J37/28

CPC classification number: G10K11/16 ,  G21K5/00 ,  H01J37/28 ,  H01J2237/0216

Abstract: A charged particle radiation device includes a sample chamber in which a sample stage adapted to mount a sample is installed, a charged particle radiation irradiation section adapted to irradiate the sample with a charged particle radiation to observe and fabricate the sample, sidewalls installed on a periphery of the sample chamber and the charged particle radiation irradiation section, a ceiling board installed on a plane located in an upper part of the sidewalls, and a sound absorbing structure section disposed below the ceiling board, and including a plurality of hole sections and a hollow section communicated with the hole sections. The sound absorbing structure section has an absorption band including a frequency band of a standing wave generated in a space surrounded by the sidewalls and the ceiling board. Further, a soundproof cover may include the sidewalls, ceiling board and sound absorbing structure.

Abstract translation: 带电粒子辐射装置包括：样品室，其中安装有用于安装样品的样品台;带电粒子辐射照射部分，适于用带电粒子辐射照射样品以观察和制造样品，安装在外围的侧壁 所述样品室和所述带电粒子辐射照射部分，安装在位于所述侧壁的上部的平面上的顶板和设置在所述顶板下方的吸声结构部分，并且包括多个孔部分和中空部 部分与孔部分连通。 吸声结构部分具有吸收带，该吸收带包括在由侧壁和天花板板围住的空间中产生的驻波的频带。 此外，隔音罩可以包括侧壁，天花板和吸音结构。

公开(公告)号：US08822919B2

公开(公告)日：2014-09-02

申请号：US12985827

申请日：2011-01-06

Applicant: Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

Inventor： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

IPC: G01N23/00

CPC classification number: H01J37/222 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/082 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26-1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10-1; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20-1 and guiding it to a detecting system 35-1; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37-1; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput.

Abstract translation: 本发明的基板检查装置1-1（图1）执行以下步骤：将要检查的基板“S”运送到检查室23-1中; 在所述检查室中保持真空; 将所述检查室与振动隔离; 通过具有至少一个自由度的平台26-1连续移动所述衬底; 照射具有指定宽度的电子束; 帮助所述电子束经由一次电子光学系统10-1到达所述衬底的表面; 通过二次电子光学系统20-1捕获从所述衬底发射的二次电子并将其引导到检测系统35-1; 基于由所述检测系统获得的二次电子束的检测信号，在图像处理系统中形成二次电子图像; 基于由所述图像处理系统形成的二次电子图像检测所述基板中的缺陷位置; 通过CPU37-1指示和/或存储所述衬底中的所述缺陷位置; 并将完全检查的基板从检查室中取出。 因此，可以以高水平的精度和效率以及更高的生产量连续地执行基板上的缺陷检查。

公开(公告)号：US08563944B2

公开(公告)日：2013-10-22

申请号：US13595588

申请日：2012-08-27

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

IPC: H01J49/10 ,  H01J37/28

CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J37/15 ,  H01J2237/0216 ,  H01J2237/0807 ,  H01J2237/28

Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

Abstract translation: 提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。 发射极基座和真空容器彼此磁性相互作用。

公开(公告)号：US20130126750A1

公开(公告)日：2013-05-23

申请号：US13703931

申请日：2011-06-10

Applicant: Hirohisa Enomoto ,  Wataru Suzuki ,  Shinya Kitayama

Inventor： Hirohisa Enomoto ,  Wataru Suzuki ,  Shinya Kitayama

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/0216 ,  H01J2237/16 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20235 ,  H01J2237/31749

Abstract: A charged particle device that can prevent an effect of a vibration and suppress relative displacement between a charged particle generator and a specimen stage without reducing a movement range of the specimen stage is achieved. The charged particle device (1) has a long cylindrical column (2) at its upper portion and a hollow specimen chamber (3) arranged under the column (2). The specimen chamber (3) is divided into a specimen chamber upper portion (3a) and a specimen chamber bottom portion (3b). A vertical vibration of the specimen chamber upper portion (3a) is larger than a horizontal vibration of the specimen chamber upper portion (3a). A horizontal vibration of the specimen chamber bottom portion (3b) is large. The column (2) has a charged particle gun and a detector. The column (1) and a specimen stage supporter (4) are held by the specimen chamber upper portion (3a), while the specimen stage supporter (4) holds the specimen stage (5). A central axis of the column (1) and a central axis of the specimen stage supporter (4) match each other or are parallel to each other. Even if an environmental sound is added to the column (2) or the specimen chamber (3), the column (2) and the specimen stage (5) are fixed to the specimen chamber upper portion (3a) and vibrate in an integrated manner. Thus, relative displacement hardly occurs between the charged particle generator and a specimen.

Abstract translation: 实现了能够防止振动影响并且抑制带电粒子发生器与样本台之间的相对位移而不减少样本台的移动范围的带电粒子装置。 带电粒子装置（1）的上部具有长圆筒状的柱（2），在柱（2）的下方具有中空的试样室（3）。 试样室（3）分为试样室上部（3a）和试样室底部（3b）。 试样室上部（3a）的垂直振动大于试样室上部（3a）的水平振动。 试样室底部（3b）的水平振动大。 柱（2）具有带电粒子枪和检测器。 柱体（1）和试样台支架（4）由样品室上部（3a）保持，而试样台支架（4）保持试样台（5）。 柱（1）的中心轴线和样品台支撑件（4）的中心轴彼此匹配或彼此平行。 即使在柱（2）或样品室（3）中添加了环境声音，也将柱（2）和样品台（5）固定在试样室上部（3a）上并以一体的方式振动 。 因此，带电粒子发生器和试样之间几乎不发生相对位移。

公开(公告)号：US20130037687A1

公开(公告)日：2013-02-14

申请号：US13569220

申请日：2012-08-08

Applicant: Mitsuhiro FURUMOTO ,  Tosiya ASANO ,  Keiji EMOTO

Inventor： Mitsuhiro FURUMOTO ,  Tosiya ASANO ,  Keiji EMOTO

IPC: F16M11/00

CPC classification number: F16F15/002 ,  G03F7/709 ,  G06F3/0488 ,  H01J2237/0216

Abstract: The present invention provides an anti-vibration apparatus including an anti-vibration base, a plurality of supporting mechanisms configured to support the anti-vibration base, a plurality of actuators configured to apply a force to the anti-vibration base, an obtaining unit configured to obtain vibration data which represents vibrations on the anti-vibration base, a first calculation unit configured to calculate, based on the vibration data obtained by the obtaining unit, a force to be applied to the anti-vibration base so as to reduce the vibrations on the anti-vibration base, and a distribution unit configured to distribute the force calculated by the first calculation unit to forces to be applied by the plurality of actuators to the anti-vibration base.

Abstract translation: 本发明提供一种抗振装置，包括防振基座，多个支撑机构，其构造成支撑防振基座;多个致动器，构造成向抗震基座施加力;获得单元构造 以获得表示抗振基座上的振动的振动数据，第一计算单元，被配置为基于获得单元获得的振动数据计算施加到防振基座的力，以减少振动 以及分配单元，其被配置为将由第一计算单元计算出的力分配给由多个致动器施加到防振基座的力。

公开(公告)号：US20120193550A1

公开(公告)日：2012-08-02

申请号：US13500592

申请日：2010-10-06

Applicant: Hiroshi Tsuji ,  Ichiro Tachibana

Inventor： Hiroshi Tsuji ,  Ichiro Tachibana

IPC: H01J3/14

CPC classification number: H01J37/09 ,  F16F1/50 ,  F16F9/306 ,  F16F15/08 ,  H01J37/28 ,  H01J2237/0216

Abstract: Provided is a charged particle radiation device enabling suppression of both inclination and vertical vibration of a charged particle optical lens barrel, with a simple configuration. A charged particle radiation device according to the present invention includes a vibration damping member (19) including viscoelastic material sheets (16A and 16B) sandwiched by support plates (17A and 17B), and is configured so that a plane including a sheet surface of each viscoelastic material sheet is not perpendicular to a center axis of the charged particle optical lens barrel.

Abstract translation: 提供一种能够以简单的结构抑制带电粒子光学镜片镜筒的倾斜和垂直振动的带电粒子辐射装置。 根据本发明的带电粒子辐射装置包括一个包括被支撑板（17A和17B）夹在中间的粘弹性材料片（16A和16B）的振动阻尼件（19​​），并被构造成使得包括每个 粘弹性材料片不垂直于带电粒子光学镜片镜筒的中心轴线。

公开(公告)号：US20120127299A1

公开(公告)日：2012-05-24

申请号：US13387424

申请日：2010-07-20

Applicant: Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

Inventor： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

IPC: H04N7/18

CPC classification number: H01J37/28 ,  F16F15/04 ,  H01J37/16 ,  H01J2237/0216

Abstract: A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

Abstract translation: 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元，主扫描电子显微镜单元上的控制器，容纳主扫描电子显微镜单元和控制器的单个壳体，底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上，在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔，并且阻尼器固定到底面 的主扫描电子显微镜单元，并且通过第一开孔设置。

公开(公告)号：US20120105820A1

公开(公告)日：2012-05-03

申请号：US13280243

申请日：2011-10-24

Applicant: Ryo Nawata ,  Katsumi Asada

Inventor： Ryo Nawata ,  Katsumi Asada

IPC: G03B27/32 ,  G05B15/00

CPC classification number: G03F7/709 ,  F16F15/002 ,  F16F15/022 ,  F16F2230/08 ,  H01J2237/0216

Abstract: A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.

Abstract translation: 振动控制装置包括第一弹簧机构，用于支撑第一物体作为第一系统的一部分。 为了控制第一物体的振动，第一致动器通过基于检测系统的输出的第一计算产生的命令值向第一物体施加力。 检测系统包括第二弹簧机构，用于支撑第二物体作为第二系统的一部分。 第三弹簧机构支撑第三物体作为第三系统的一部分。 第一位移检测器检测第三物体相对于第二物体的位移。 防止第三物体相对于第二物体移位。 第二系统的第二固有频率高于第一系统的第一固有频率，并且第三系统的第三固有频率高于第一固有频率。