Charged particle beam apparatus
    19.
    发明申请
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号:US20060231773A1

    公开(公告)日:2006-10-19

    申请号:US11401878

    申请日:2006-04-12

    Abstract: A small-sized charged particle beam apparatus capable of maintaining high vacuum even during emission of an electron beam is provided. A nonevaporative getter pump is placed upstream of differential pumping of an electron optical system of the charged particle beam apparatus, and a minimum number of ion pumps are placed downstream, so that both the pumps are used in combination. Further, by mounting a detachable coil on an electron gun part, the inside of a column can be maintained under high vacuum with a degree of vacuum in the order of 10−8 Pa.

    Abstract translation: 提供即使在电子束的发射期间也能保持高真空的小尺寸带电粒子束装置。 将非蒸发性吸气泵放置在带电粒子束装置的电子光学系统的差分泵浦的上游,并且将最少数量的离子泵放置在下游,使得两个泵组合使用。 此外,通过将可拆卸线圈安装在电子枪部件上,可以将真空度保持在10 -8 Pa以下的真空度的高真空下。

    Cathode structure for sputter ion pump
    20.
    发明授权
    Cathode structure for sputter ion pump 失效
    溅射离子泵的阴极结构

    公开(公告)号:US6004104A

    公开(公告)日:1999-12-21

    申请号:US892507

    申请日:1997-07-14

    CPC classification number: H01J41/14

    Abstract: A sputter ion pump including an anode assembly comprising a plurality of hollow anode cells and cathode surfaces having open spirals disposed at each end of said anode cells.

    Abstract translation: 一种溅射离子泵,其包括阳极组件,阳极组件包括多个中空阳极电池和阴极表面,阴极表面设置在所述阳极电池的每一端处具有开口螺旋。

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