公开(公告)号：US20020180969A1

公开(公告)日：2002-12-05

申请号：US10168314

申请日：2002-06-20

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Michael Orkuss

IPC: G01J003/28 ,  G01J003/18

CPC classification number: G01J3/22 ,  G01J3/18

Abstract: The invention relates to a spectrometer (10) with a dispersive element (16) that can be displaced between at least two positions. In the first position, the simply dispersed radiation (44) of a selected wavelength is reflected directly back in the incident beam path (42), while in the second position the dispersed radiation (32) of the selected wavelength can be directed to a reflective element (30) that is positioned such that the radiation (34) can be directed at least one more time across the dispersive element (16) and then back to the incident beam path (38). The spectrometer is provided with a device, for example, a mirror, an echelle grating or a prism that deflects the beam from the plane of dispersion, which is arranged in such a manner that the simply simply dispersed beam (34) runs in another plane than the multiply dispersed beam (36). The mirror (30) is inclined by an axis (54) that extends parallel to the plane of dispersion and perpendicular to the incident beam (32).

Abstract translation: 本发明涉及一种具有分散元件（16）的分光计（10），其可在至少两个位置之间移位。 在第一位置，所选择的波长的简单分散的辐射（44）被直接反射入入射光束路径（42），而在第二位置，所选波长的分散辐射（32）可以被引导到反射 定位成使得辐射（34）可以穿过色散元件（16）至少一次以上并且然后返回到入射光束路径（38）的元件（30）。 光谱仪设置有例如反射镜，梯形光栅或棱镜，其将光束从分散体平面偏转，该棱镜以这样的方式布置，使得简单的简单分散的光束（34）在另一平面中延伸 比多分散光束（36）。 反射镜（30）由垂直于入射光束（32）平行延伸的轴（54）倾斜。

公开(公告)号：US20010052980A1

公开(公告)日：2001-12-20

申请号：US09812473

申请日：2001-03-19

Inventor： Akifumi Tada

IPC: G01J003/18 ,  G01J003/36

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/18 ,  G01J3/22

Abstract: A compact and high-performance spectroscope capable of providing a resolution of 0.1 pm or less as in the case of a large-sized spectroscope with an increased focal length and suitable for measuring the spectral distribution of an excimer laser beam. A collimating optical system collimates light under measurement passing through an entrance slit. The collimated light is incident on a diffraction grating and diffracted at angles differing depending on wavelengths. An imaging optical system focuses a beam of light diffracted by the diffraction grating. An exit slit or a light distribution detector is placed in a focal plane of the imaging optical system. A beam diameter-expanding optical system is placed at least between the collimating optical system and the diffraction grating to expand the diameter of the beam of light collimated by the collimating optical system at least in the direction of dispersion of the diffraction grating.

Abstract translation: 能够提供0.1μm或更小分辨率的小型和高性能的分光器，如在具有增加的焦距的大尺寸分光器的情况下，并且适合于测量准分子激光束的光谱分布。 准直光学系统通过入口狭缝准直测量的光。 准直光入射在衍射光栅上，并以取决于波长的不同角度进行衍射。 成像光学系统聚焦由衍射光栅衍射的光束。 出射狭缝或光分布检测器被放置在成像光学系统的焦平面中。 光束直径扩展光学系统至少放置在准直光学系统和衍射光栅之间，以至少在衍射光栅的分散方向上扩展由准直光学系统准直的光束的直径。

公开(公告)号：US20010019410A1

公开(公告)日：2001-09-06

申请号：US09767405

申请日：2001-01-23

Inventor： Manabu Kojima

IPC: G01J003/18

CPC classification number: G01J3/28 ,  G01J3/12 ,  G01J2003/2866

Abstract: The reference light is entered into the monochromator 4, and by using the diffraction light of the different order from the diffraction order to measure the measured light, the wavelength of the reference light is measured, and the difference between the measured wavelength and the wavelength corresponding to the diffraction order of the reference light is found, and when there is a deviation in the absorption wavelength, the rotation angle of the diffraction grating 14 is corrected by an angle corresponding to the deviated wavelength, and the wavelength is calibrated.

Abstract translation: 参考光进入单色仪4，通过使用衍射级不同顺序的衍射光测量测量的光，测量参考光的波长，测量波长与波长对应的差值 发现参考光的衍射级，并且当吸收波长有偏差时，衍射光栅14的旋转角度被校正了与偏离的波长对应的角度，并且校准了波长。

公开(公告)号：US20040109159A1

公开(公告)日：2004-06-10

申请号：US10313471

申请日：2002-12-04

Inventor： Harvey C. Schau

IPC: G01J003/28 ,  G01J003/18

CPC classification number: G01J3/1838 ,  G01J3/2823

Abstract: A field multiplexed dispersive imaging spectrometer (20). The novel system includes foreoptics (22) for receiving incoming electromagnetic energy, a disperser (24) disposed to receive energy from the foreoptics (22), and a focal plane array (28) disposed to receive energy from the disperser (24). The disperser (24) is a computer generated holographic disperser designed to disperse light into several, overlapping diffraction orders. In the preferred embodiment, the disperser (24) is designed with greater energy in the central, undiffracted order than in the other diffracted orders. The system (20) also includes a processor (30) which takes the data detected by the focal plane array (28) and generates a representation of the input image in several color bands using an iterative restoration algorithm (32).

Abstract translation: 一种场复用色散成像光谱仪（20）。 新颖系统包括用于接收进入的电磁能的前置光学器件（22），设置成从前光学部件（22）接收能量的分散器（24）和设置成从分散器（24）接收能量的焦平面阵列（28）。 分散器（24）是计算机生成的全息分散器，其被设计成将光分散成几个重叠的衍射级。 在优选实施例中，分散器（24）被设计成具有比其他衍射阶数更大的能量，其中心的，未衍生的次序。 系统（20）还包括处理器（30），其处理由焦平面阵列（28）检测到的数据，并使用迭代恢复算法（32）生成多个色带中的输入图像的表示。

公开(公告)号：US20040061856A1

公开(公告)日：2004-04-01

申请号：US10256919

申请日：2002-09-27

Inventor： Stephan R. Clark ,  Lucas M. Fernandez

IPC: G01J003/18

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237

Abstract: An optical beam having a randomly and unpredictably variable input polarization state propagates through an optical system containing a first optical surface, for example a diffraction grating, a first adjustable mirror, and means for rotating the respective parallel (P) and perpendicular (S) plane polarization components of the optical beam relative to the first optical surface by ninety degrees, thereby generating a polarization rotated optical beam having reversed orientations of the S and P polarization components relative to the input. The optical beam is reflected from the first adjustable mirror, which redirects the optical beam onto an optimized location on the first optical surface, thereby reducing PDL due to propagation through the optical system. In some embodiments the optical beam location on the first adjustable mirror remains substantially constant during adjustment.

Abstract translation: 具有随机且不可预测的可变的输入偏振状态的光束通过包含第一光学表面的光学系统传播，例如衍射光栅，第一可调镜，以及用于使相应的平行（P）和垂直（S）平面旋转的装置 相对于第一光学表面的光束的偏振分量为90度，从而产生具有相对于输入的S和P偏振分量的相反取向的偏振旋转光束。 光束从第一可调镜反射，其将光束重定向到第一光学表面上的优化位置，从而由​​于通过光学系统的传播而减少PDL。 在一些实施例中，第一可调镜上的光束位置在调节期间保持基本恒定。

公开(公告)号：US20030098975A1

公开(公告)日：2003-05-29

申请号：US10302379

申请日：2002-11-22

Applicant: Ando Electric Co., Ltd.

Inventor： Tohru Mori ,  Tsutomu Kaneko ,  Toshikazu Yamamoto

IPC: G01J003/28 ,  G01J003/18

CPC classification number: G01J3/02 ,  G01J3/0264 ,  G01J3/0286

Abstract: An optical spectrum analyzer comprises a refractive grating which extracts a specific wavelength of light which is incident to be measured and outputs as a component light, an optical detector which measures optical intensity of the component light, a container in which the refractive grating and the optical detector are provided, a gas filling port and a gas exhaust port, for performing a replacement of air with a gas, which are provided in the container, are provided. By doing this, the optical spectrum analyzer which can measure level of the light to be measured having a specific wavelength accurately without causing the absorption of the specific wavelength by an OH group.

Abstract translation: 光谱分析仪包括：折射光栅，其提取入射到被测量的特定波长的光并作为分量光输出;测量分量光的光强度的光学检测器;折射光栅和光学器件的容器 提供检测器，设置在容器中的用于执行用气体替换空气的气体填充口和排气口。 通过这样做，可以精确地测量具有特定波长的待测光的水平而不会由OH基吸收特定波长的光谱分析仪。

公开(公告)号：US20020126279A1

公开(公告)日：2002-09-12

申请号：US10007796

申请日：2001-11-09

Inventor： Helen L. Kung ,  David A.B. Miller

IPC: G01J003/18

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/45 ,  G01J3/453

Abstract: A transform spectrometer determines the spectrum of light based on the Talbot effect. Light to be analyzed is passed through a spatially periodic object, thereby generating a series of Talbot images. The intensities of these Talbot images at different optical distances from the spatially periodic object are then detected, and Fourier transformed to determine the spectrum of the light. Preferably, the detector comprises a spatial masking pattern such that the intensities detected are maximized at Talbot planes or at the midpoints between Talbot planes. In one embodiment, the optical distance between the spatially periodic object and the detector is changed in order to detect image intensities at different Talbot planes. In another embodiment, the detector and the spatially periodic object are positioned along a common optical axis at relative angle null such that different detector rows detect intensities at different Talbot planes. In yet another embodiment, the spatially periodic object is both a grating and a detector, and the Talbot images generated by the grating are reflected off a mirror back to the detector.

Abstract translation: 变换光谱仪基于Talbot效应确定光谱。 要分析的光通过空间周期的物体，从而产生一系列Talbot图像。 然后检测这些Talbot图像在距离空间周期物体的不同光学距离处的强度，并进行傅里叶变换以确定光谱。 优选地，检测器包括空间掩蔽图案，使得检测到的强度在Talbot平面或Talbot平面之间的中点处最大化。 在一个实施例中，改变空间周期性物体与检测器之间的光学距离，以便检测不同Talbot平面处的图像强度。 在另一个实施例中，检测器和空间周期性物体沿着公共光轴以相对角度θ定位，使得不同的检测器行检测不同Talbot平面处的强度。 在另一个实施例中，空间周期性物体既是光栅又是检测器，并且由光栅产生的Talbot图像被反射回到检测器。

公开(公告)号：US20020101588A1

公开(公告)日：2002-08-01

申请号：US09772293

申请日：2001-01-29

Inventor： Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Scott T. Smith

IPC: G01J003/18

CPC classification number: G01J3/12 ,  G01J1/4257 ,  G01J3/22 ,  G01J3/26 ,  G01J9/02

Abstract: A high resolution etalon-grating monochromator. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the monochromator and scanning the laser wavelength over a range which includes the monochromator slit wavelength.

公开(公告)号：US20020101587A1

公开(公告)日：2002-08-01

申请号：US09734242

申请日：2000-12-04

Applicant: National Aeronautics and Space Administration

Inventor： Daniel W. Wilson ,  Paul D. Maker ,  Richard E. Muller ,  Pantazis Z. Mouroulis

IPC: G01J003/28 ,  G01J003/18 ,  G02B005/18

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/18 ,  G01J3/2823 ,  G02B5/1861

Abstract: The optical system of this invention is an unique type of imaging spectrometer, i.e. an instrument that can determine the spectra of all points in a two-dimensional scene. The general type of imaging spectrometer under which this invention falls has been termed a computed-tomography imaging spectrometer (CTIS). CTIS's have the ability to perform spectral imaging of scenes containing rapidly moving objects or evolving features, hereafter referred to as transient scenes. This invention, a reflective CTIS with an unique two-dimensional reflective grating, can operate in any wavelength band from the ultraviolet through long-wave infrared. Although this spectrometer is especially useful for rapidly occurring events it is also useful for investigation of some slow moving phenomena as in the life sciences.

Abstract translation: 本发明的光学系统是独特类型的成像光谱仪，即可以确定二维场景中所有点的光谱的仪器。 本发明所属的一般类型的成像光谱仪被称为计算机断层成像光谱仪（CTIS）。 CTIS有能力对包含快速移动物体或演变特征的场景进行光谱成像，以下简称瞬态场景。 本发明具有独特的二维反射光栅的反射CTIS可以在紫外线通过长波红外线的任何波段中工作。 虽然这种光谱仪对于快速发生的事件特别有用，但也有助于对生命科学中的一些缓慢移动的现象进行调查。

公开(公告)号：US20020008873A1

公开(公告)日：2002-01-24

申请号：US09907032

申请日：2001-07-17

Inventor： Tsutomu Kaneko

IPC: G01J003/18

CPC classification number: G01J3/1804 ,  G01J3/02 ,  G01J3/0286

Abstract: Plane diffraction grating 13 is formed of a material having an appropriate linear expansion coefficient and a variation in the wavelength of the reflected light from concave mirror 14 on account of thermal expansion or shrinkage of members other than plane diffraction grating 13 is cancelled out or reduced by a variation in the wavelength of the reflected light from concave mirror 14 on account of thermal expansion or shrinkage of plane diffraction grating 13. The same principle is used to deal with the effect on the wavelength of the diffracted light that may be caused by changes in the layout of individual members on account of thermal expansion or shrinkage of substrate 10a that fix them.

Abstract translation: 平面衍射光栅13由具有适当的线膨胀系数的材料形成，并且由于除了平面衍射光栅13之外的构件的热膨胀或收缩，来自凹面镜14的反射光的波长的变化被抵消或减少 考虑到平面衍射光栅13的热膨胀或收缩，来自凹面镜14的反射光的波长的变化。使用相同的原理来处理由于衍射光的波长的影响，这可能是由于 考虑到固定它们的基板10a的热膨胀或收缩的各个构件的布局。