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    Chamber for an ionization vacuum gauge
    13.
    发明授权
    Chamber for an ionization vacuum gauge 有权

    公开(公告)号：US12154771B2

    公开(公告)日：2024-11-26

    申请号：US18431091

    申请日：2024-02-02

    Applicant: INFICON AG

    Inventor： Urs Wälchli ,  Stefan Kaiser ,  Bernhard Andreaus ,  Martin Wüest ,  Astrid Waldner ,  Michael Trefzer

    IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

    Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

    Spark gap device and method of measurement of X-ray tube vacuum pressure
    14.
    发明授权
    Spark gap device and method of measurement of X-ray tube vacuum pressure 有权

    公开(公告)号：US10605687B2

    公开(公告)日：2020-03-31

    申请号：US15056505

    申请日：2016-02-29

    Applicant: General Electric Company

    Inventor： Richard Michael Roffers ,  Sergio Lemaitre ,  Christian Bennett Fuller ,  Kalyan Koppisetty

    IPC: G01L21/30 ,  H01J21/02 ,  H01J19/78 ,  H01J23/12 ,  H01J41/02 ,  H01J35/20

    Abstract: In the present invention, a pressure measurement device for determining the vacuum level within the evacuated housing of a vacuum electrode device is provided that includes an electrically conductive enclosure secured to an interior surface of the housing, an electrically conductive electrode extending through an aperture in the housing, the electrode having a tip at one end positioned within the interior of the housing inside the enclosure to define a gap between the tip and the enclosure and a conductive lead at a second end disposed outside of the housing, and a voltage source connected to the conductive lead to supply a voltage potential to the tip of the electrode. A voltage difference produced between the electrode and the enclosure ionizes gas within the enclosure causing a measurable current to flow between the electrode and the enclosure which can be used to determine the vacuum level in the housing.

    Charged particle beam instrument
    15.
    发明授权
    Charged particle beam instrument 有权
    带电粒子束仪

    公开(公告)号：US09318300B2

    公开(公告)日：2016-04-19

    申请号：US14526582

    申请日：2014-10-29

    Applicant: JEOL Ltd.

    Inventor： Yasushi Hiroki ,  Mitsuaki Ohsaki

    IPC: H01J37/26 ,  H01J37/18 ,  H01J37/20 ,  H01J41/02

    CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J41/02 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2605

    Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2). The gas controller (812) sets a target value of pressure for the gas supplied into the specimen chamber (2) based on a predetermined relational expression indicating a relationship between the reading of the first vacuum gauge (CG1) and the pressure inside the specimen chamber (2) and on a corrective coefficient for correcting the reading of the first vacuum gauge (CG1) according to the species of the gas supplied into the specimen chamber (2) and controls the gas inflow rate adjusting valve (40) such that the reading of the first vacuum gauge (CG1) reaches the target value of pressure.

    Abstract translation: 提供了一种带电粒子束仪器，可以在气体气氛中轻松进行原位观察。 带电粒子束仪器（100）用于对放置在气体气氛中的样本（S）进行观察，并具有样本室（2），用于向样本室供给气体的气体供给部（6） 2），用于排出样品室（2）的排气部分（7），气体环境调节器（4）和用于控制气体环境调节器（4）的气体控制器（812）。 该调节器（4）具有用于调节供给到试样室（2）的气体的流量的气体流入量调节阀（40）和用于测定供给到试样室内的气体的压力的第一真空计（CG1） 室（2）。 气体控制器（812）基于表示第一真空计（CG1）的读数与试样室内的压力之间的关系的预定关系式，设定供给到试样室（2）的气体的目标值 （2），以及根据供给到试样室（2）的气体的种类来校正第一真空计（CG1）的读数的校正系数，并控制气体流入速率调节阀（40），使得读数 的第一个真空计（CG1）达到目标压力值。

    Portable device for detecting UV light ionizable gas or vapor
    16.
    发明授权
    Portable device for detecting UV light ionizable gas or vapor 失效
    用于检测UV光可电离气体或蒸气的便携式设备

    公开(公告)号：US5572137A

    公开(公告)日：1996-11-05

    申请号：US182041

    申请日：1994-01-25

    Applicant: Christopher D. Jones

    Inventor： Christopher D. Jones

    IPC: G01N27/64 ,  G01N27/66 ,  G01N33/00 ,  H01J41/02

    CPC classification number: G01N27/66 ,  G01N33/0011 ,  H01J41/02

    Abstract: An improved ionizable gas or vapor detector device and method are provided which are capable in preferred forms of sampling 4.times.10.sup.-3 cubic meters or more of air sec.sup.-1 and are responsive to ionizable gas fluctuations at a rate of up to 100Hz. Use of the device of the present invention has proved to provide sensitivity to UV ionizable gas or vapor of over 500 times that of prior devices, giving detection of propylene tracer gas at concentrations of 2 parts per 1,000,000,000 and thus increasing the range from the gas source at which the device may be reliably used. Use for detection of leaks of volatile UV ionizable compounds and for monitoring processes where vapors are emitted is also provided.

    Abstract translation: PCT No.PCT / GB92 / 01313 Sec。 371日期：1994年1月25日 102（e）日期1994年1月25日PCT提交1992年7月17日PCT公布。 公开号WO93 / 02354 日期1994年2月4日提供了一种改进的可电离气体或蒸汽检测装置和方法，其能够以4×10 -3立方米或更多的空气sec-1采样的优选形式，并且以可达到的气体波动 100Hz。 已经证明使用本发明的装置可以提供超过现有装置的500倍以上的可紫外可电离气体或蒸气的灵敏度，从而检测浓度为每1,000,000,000份2份的丙烯示踪气体，从而增加了气源 可以可靠地使用该装置。 用于检测挥发性紫外线可电离化合物的泄漏以及用于发出蒸气的监测过程。

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