公开(公告)号：US08264153B2

公开(公告)日：2012-09-11

申请号：US12852804

申请日：2010-08-09

Applicant: Hongseub Kim

Inventor： Hongseub Kim

IPC: H01J7/24 ,  H01J17/26 ,  H01J61/28 ,  H05B31/26

CPC classification number: H05H1/46 ,  H01J37/32091 ,  H01J37/32183 ,  H05H2001/4682

Abstract: A plasma source for a substrate is provided. The plasma source may include a source electrode and an impedance box. The source electrode receives a source Radio Frequency (RF) from the external and generates plasma based on capacitive coupling within a vacuum chamber. The impedance box connects at one end to an outer circumference surface of the source electrode, and is grounded at the other end to the vacuum chamber, and controls an electric current flowing from the source electrode to the vacuum chamber by the source RF.

Abstract translation: 提供了一种用于衬底的等离子体源。 等离子体源可以包括源电极和阻抗盒。 源电极从外部接收源射频（RF），并根据真空室内的电容耦合产生等离子体。 阻抗箱的一端与源电极的外周面连接，另一端与真空室接地，通过源RF控制从源电极流向真空室的电流。

公开(公告)号：US20120035766A1

公开(公告)日：2012-02-09

申请号：US12852375

申请日：2010-08-06

Applicant: Ali Shajii ,  Richard Gottscho ,  Souheil Benzerrouk ,  Andrew Cowe ,  Siddharth P. Nagarkatti ,  William R. Entley

Inventor： Ali Shajii ,  Richard Gottscho ,  Souheil Benzerrouk ,  Andrew Cowe ,  Siddharth P. Nagarkatti ,  William R. Entley

IPC: H01L21/3065 ,  H05B31/26 ,  G05B13/02 ,  H01J61/28

CPC classification number: H01J37/32174 ,  H01J37/321 ,  H01J37/3244 ,  H01J37/32467 ,  H01J37/32642 ,  H01J37/3266 ,  H01J2237/334

Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.

Abstract translation: 等离子体源包括环等离子体室，围绕环等离子体室的外部的初级绕组，多个铁氧体，其中环等离子体室穿过将等离子体室耦合到处理室的每个铁氧体和多个等离子体室出口。 每个等离子体室出口具有相应的等离子体限制。 还描述了用于产生等离子体的系统和方法。

公开(公告)号：US20110000529A1

公开(公告)日：2011-01-06

申请号：US12920303

申请日：2008-04-08

Applicant: Masayasu Suzuki

Inventor： Masayasu Suzuki

IPC: H01L31/0256 ,  H01J61/28 ,  H01L31/18

CPC classification number: C23C16/505 ,  C23C16/45565 ,  H01J37/32091 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32541

Abstract: An arrangement of a cathode electrode for plasma CVD forms a radio frequency capacity coupled plasma by applying radio frequency radiation, in which the cathode electrode is disposed so as to face an anode electrode. The facing surface which faces the anode electrode is formed to have a concavo-convex shape comprising concaves constituted by a bottom surface and convexes constituted by a plurality of protrusions protruding toward the anode electrode from the bottom surface constituting the concaves. At least one of the protrusions forming the convexes has at least one reactive gas ejection nozzle on a side surface, which is capable of ejecting a reactive gas. An ejection direction of the reactive gas from the reactive gas ejection nozzle is substantially parallel to the bottom surface constituting the concaves. The optimization of the cathode electrode allows generation of dense plasma.

Abstract translation: 用于等离子体CVD的阴极电极的布置通过施加射频辐射形成射频容量耦合等离子体，其中阴极设置为面对阳极电极。 面对阳极电极的面对面形成为凹凸形状，其包括由底面构成的凹部和由构成凹部的底面的朝向阳极电极突出的多个突起构成的凸部。 形成凸起的突起中的至少一个在侧表面上具有至少一个能够喷射反应性气体的反应性气体喷射喷嘴。 来自反应性气体喷射喷嘴的反应气体的喷射方向基本上平行于构成凹部的底面。 阴极电极的优化允许产生致密等离子体。

公开(公告)号：US07786455B2

公开(公告)日：2010-08-31

申请号：US11695348

申请日：2007-04-02

Applicant: Donald K. Smith

Inventor： Donald K. Smith

IPC: H05B31/26 ,  G01J3/10 ,  G21G4/00 ,  H01J61/28

CPC classification number: G03F7/70033 ,  B82Y10/00 ,  H01J61/025 ,  H01J61/54 ,  H01J65/042

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

公开(公告)号：US20070075617A1

公开(公告)日：2007-04-05

申请号：US11536882

申请日：2006-09-29

Applicant: Byeong-Ju PARK

Inventor： Byeong-Ju PARK

IPC: H01J17/26 ,  H01J61/28 ,  H01J61/30

CPC classification number: H01J61/82 ,  H01J61/0732 ,  H01J61/0735 ,  H01J61/0737 ,  H01J61/12

Abstract: A sulfur lamp, is provided, including a power supply that supplies electrical power, a transparent bulb having a space inside that contains sulfur and a plurality of electrodes. Additionally, a portion of each electrode may be inserted into the space and an end of each electrode may be connected to the power supply such that the sulfur is excited by an electric discharge thereby emitting light. A portion of the electrode inserted into the space may be coated with a protective layer to prevent a chemical reaction of between the electrode and the sulfur. Further, the changing of the sulfur (contained in the space of the bulb) into a plasma phase may be accomplished by utilizing the electrodes (not microwaves). Therefore, a need to utilize a magnetron (which is low in energy transfer rate) may be eliminated, thereby increasing a system efficacy and saving a cost of replacing the magnetron.

Abstract translation: 提供了一种硫灯，包括供电电源，具有内部空间的透明灯泡，其中包含硫和多个电极。 此外，每个电极的一部分可以插入到空间中，并且每个电极的端部可以连接到电源，使得硫被放电激发，从而发光。 插入空间的电极的一部分可以涂覆有保护层，以防止电极和硫之间的化学反应。 此外，可以通过利用电极（不是微波）来实现将硫（包含在灯泡的空间中）变为等离子体相的变化。 因此，可以消除使用磁控管（其能量传递速率低）的需要，从而提高系统功效并节省更换磁控管的成本。

公开(公告)号：US07122949B2

公开(公告)日：2006-10-17

申请号：US10870992

申请日：2004-06-21

Applicant: Mikhail Strikovski

Inventor： Mikhail Strikovski

IPC: H01J17/26 ,  H01J61/28

CPC classification number: H01J3/025

Abstract: A surface discharge device performing functions of a trigger and electron beam generator includes a cylinder shaped member formed from a dielectric material with dielectric constant ε>100, in which a central opening is formed having a conical or cylindrical shape. An internal electrode is electrically coupled to the internal surface of the cylinder shaped member. An external electrode covers the external surface of the cylinder shaped member. A triggering pulse is applied between the external and internal electrodes to generate emission of electrons in the central opening and formation of the conducting plasma to ignite the device and serve as a source of electrons for generating an electron beam. The conducting plasma charges a capacitor formed by the cylinder shaped dielectric member and the external electrode. The cylinder shaped member is positioned in a hollow cathode having a central bore hole in the bottom. An anode is positioned remotely from the cathode and an electric field exists dynamically in space between the cathode and anode for at least a portion of the duration of the triggering pulse.

Abstract translation: 执行触发和电子束发生器的功能的表面放电装置包括由介电常数ε> 100的电介质材料形成的圆柱形构件，其中形成具有圆锥形或圆柱形形状的中心开口。 内部电极电耦合到圆筒形构件的内表面。 外部电极覆盖圆筒形构件的外表面。 在外部和内部电极之间施加触发脉冲以在中心开口中产生电子的发射并且形成导电等离子体以点燃该器件并且用作用于产生电子束的电子源。 导电等离子体对由圆柱形电介质构成的电容器和外部电极进行充电。 圆筒形构件位于底部具有中心孔的空心阴极中。 阳极远离阴极定位，并且电场在触发脉冲的持续时间的至少一部分之间动态地存在于阴极和阳极之间的空间中。

公开(公告)号：US20050265018A1

公开(公告)日：2005-12-01

申请号：US11124383

申请日：2005-05-09

Applicant: Takeo Yasuda ,  Kunihiko Ikada

Inventor： Takeo Yasuda ,  Kunihiko Ikada

IPC: F21S8/00 ,  H01J61/00 ,  H01J61/20 ,  H01J61/28 ,  H01J61/32 ,  H01J61/34

CPC classification number: H01J61/327 ,  H01J61/20 ,  H01J61/28 ,  H01J61/34 ,  Y02B20/19

Abstract: A compact fluorescent lamp comprises a fluorescent tube having a helical portion on at least a part thereof and turned down in the middle, a pair of tube ends thereof each provided with a discharge electrode, the pair of tube ends juxtaposing with each other in the same direction, a holder for holding the tube ends so as that the fluorescent tube is supported at the one side thereof, a lighting device for supplying a high-frequency power to the fluorescent tube, the lighting device comprising a circuit board facing the other side of the holder and circuit elements mounted on the circuit board, a cover for accommodating the lighting device the cover opening at both ends and holding the holder at the one opening end, and a cap fixed to the other opening end of the cover for supplying a commercial power to the lighting device by being mounted to a socket of luminaire, wherein a thin tube is protruded from at least one of the tube ends of the fluorescent tube in the cover, and the thin tube is communicated with the fluorescent tube.

Abstract translation: 紧凑型荧光灯包括在其至少一部分上具有螺旋部分并在中间向下翻转的荧光管，其一对管端各设有放电电极，一对管端彼此并置 方向，用于保持管端的保持器，使得荧光管在其一侧被支撑，用于向荧光管提供高频电力的照明装置，该照明装置包括面向另一侧的电路板 安装在电路板上的保持器和电路元件，用于容纳照明装置的盖，两端的盖开口并将保持器保持在一个开口端，以及固定到盖的另一个开口端的盖，用于提供商业 通过安装在照明器的插座上的照明装置的电力，其中细管从盖中的荧光管的至少一个管端突出，细管 e与荧光管连通。

公开(公告)号：US20050231095A1

公开(公告)日：2005-10-20

申请号：US11102820

申请日：2005-04-11

Applicant: Martin Beck ,  Sylvia Frenzel ,  Roland Hoffmann

Inventor： Martin Beck ,  Sylvia Frenzel ,  Roland Hoffmann

IPC: H01J61/28 ,  C22C28/00 ,  H01J61/20 ,  H01J61/72 ,  H01J17/26

CPC classification number: C22C28/00

Abstract: The present invention relates to mercury amalgams in discharge lamps for use at elevated operating temperatures.

Abstract translation: 本发明涉及在升高的工作温度下使用的放电灯中的汞齐汞合金。

公开(公告)号：US20050099141A1

公开(公告)日：2005-05-12

申请号：US10883077

申请日：2004-07-01

Applicant: Valery Godyak ,  Benjamin Alexandrovich ,  Alexander Sapozhnikov ,  Kenneth Hutcherson

Inventor： Valery Godyak ,  Benjamin Alexandrovich ,  Alexander Sapozhnikov ,  Kenneth Hutcherson

IPC: H01J61/28 ,  H01J61/56 ,  H01J65/04 ,  H05B37/02

CPC classification number: H01J61/56 ,  H01J61/28 ,  H01J65/048

Abstract: An electrodeless fluorescent lamp (10) having a burner (20), a ballast housing (30) containing a ballast (40) and a screw base (50) for connection to a power supply. A reentrant cavity (60) is formed in the burner (20) and an amalgam receptacle (70) containing amalgam (75) is formed as a part of the reentrant portion and in communication with the burner (20). A housing cap (80), formed of a suitable plastic, connects the burner (20) to the ballast housing (30) and a suitable adhesive (31) fixes the burner to the housing cap (80). An EMI cup (90) is formed as an insert to fit into the ballast housing (30), which also is formed of a suitable plastic, and has a bottom portion (100) and an EMI cap (110) with an aperture (120) therein closing an upper portion (140). The EMI cup (90) and the EMI cap (110) are preferably formed from 0.5 mm brass. The amalgam receptacle (70) extends through the aperture (120) and into the cup (90). For a fixed amalgam position, changing the aperture size allows adjustment of the amalgam tip temperature, and thus, allows control of the system lumen output, efficacy, CCT and CRI, all of which are dependent on the amalgam temperature.

Abstract translation: 一种具有燃烧器（20）的无电极荧光灯（10），包含镇流器（40）的镇流器壳体（30）和用于连接到电源的螺丝座（50）。 在燃烧器（20）中形成可折入腔（60），并且形成含有汞齐（75）的汞齐容器（70）作为折返部分的一部分并与燃烧器（20）连通。 由合适的塑料形成的壳体帽（80）将燃烧器（20）连接到镇流器壳体（30），并且合适的粘合剂（31）将燃烧器固定到壳体盖（80）。 EMI杯（90）形成为插入件以装配到也由合适的塑料形成的镇流器壳体（30）中，并且具有底部（100）和具有孔（120）的EMI帽（110） ）封闭上部（140）。 EMI杯（90）和EMI帽（110）优选地由0.5mm的黄铜形成。 汞齐容器（70）延伸穿过孔（120）并进入杯（90）。 对于固定的汞齐位置，改变孔径大小允许调整汞齐尖端温度，因此允许控制系统流明输出，功效，CCT和CRI，所有这些都取决于汞齐温度。

公开(公告)号：US6140752A

公开(公告)日：2000-10-31

申请号：US973138

申请日：1998-03-12

Applicant: D. Clint Seward ,  Chiping Chen ,  Richard J. Temkin

Inventor： D. Clint Seward ,  Chiping Chen ,  Richard J. Temkin

IPC: H02J15/00 ,  H05H1/12 ,  H01J17/26 ,  H01J61/28 ,  H05H11/00 ,  H05H13/00

CPC classification number: H02J15/00 ,  H05H1/12 ,  Y02E30/126

Abstract: Electrons are arranged so they circulate along a spiral path in a vacuum. The path has a hollow symmetrical shape which is defined by a surface of a toroid. The shape is controllable by a magnetic field and the electrons can be contained within the shape. A containing force can be created by external electromagnetic fields, ions within the vacuum, or by interactions between the orbiting electrons themselves. The contained electrons store energy for later retrieval.

Abstract translation: PCT No.PCT / US96 / 08175 Sec。 371日期1998年3月12日 102（e）1998年3月12日PCT PCT 1996年5月31日PCT公布。 WO96 / 38848 PCT公开 日期1996年12月5日电极的布置使得它们在真空中沿螺旋路径循环。 路径具有由环形面的表面限定的中空对称形状。 该形状可由磁场控制，并且电子可以被包含在该形状内。 可以通过外部电磁场，真空内的离子或轨道电子本身之间的相互作用产生含有力。 所含的电子存储能量以供稍后检索。