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    Method and Apparatus for Infrared Scattering Scanning Near-field Optical Microscopy with High Speed Point Spectroscopy
    202.
    发明申请
    Method and Apparatus for Infrared Scattering Scanning Near-field Optical Microscopy with High Speed Point Spectroscopy 有权

    公开(公告)号：US20170219622A1

    公开(公告)日：2017-08-03

    申请号：US15488240

    申请日：2017-04-14

    Applicant: Anasys Instruments

    Inventor： Honghua Yang ,  Kevin Kjoller ,  Sam Berweger ,  Craig Prater

    IPC: G01Q60/18 ,  G01N21/35 ,  G01N21/47

    CPC classification number: G01Q60/18 ,  G01N21/35 ,  G01N21/39 ,  G01N21/47 ,  G01N21/4738 ,  G01N2201/0612 ,  G01N2201/10 ,  G01Q30/02 ,  G01Q60/22

    Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

    Wavelength scanning apparatus and method of use thereof
    205.
    发明授权
    Wavelength scanning apparatus and method of use thereof 有权
    波长扫描装置及其使用方法

    公开(公告)号：US09568429B1

    公开(公告)日：2017-02-14

    申请号：US14809175

    申请日：2015-07-25

    Applicant: STEM ARTS PROJECTS, LLC

    Inventor： Abraham Oommen ,  Matthew Greenleaf ,  Adam Koch ,  Amitabha Sarkar

    IPC: G01N21/64

    CPC classification number: G01J3/4406 ,  G01N21/0332 ,  G01N21/645 ,  G01N21/6452 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/10

    Abstract: A wavelength scanning apparatus that detects at least four different florescent emission wavelengths simultaneously or nearly simultaneously is described. The wavelength scanning apparatus includes a heating block having at least four sample wells, each sample well configured for receiving a sample, at least four excitation activation apertures, and at least four fluorescence emission discharge apertures. The wavelength scanning apparatus also includes an analysis scanner having at least four light sources, where the at least four light sources excite at least four fluorophores, at least four excitation light filters that filter out light except that of the desired excitation wavelength/s, at least four fluorescence emission light filters that filter out light except that of the desired florescent emission wavelengths, and at least four photodetectors to detect light of the desired florescent emission wavelengths.

    Abstract translation: 描述了同时或几乎同时检测至少四种不同的荧光发射波长的波长扫描装置。 所述波长扫描装置包括具有至少四个样品阱的加热块，每个样品良好地配置用于接收样品，至少四个激发活化孔和至少四个荧光发射排放孔。 所述波长扫描装置还包括具有至少四个光源的分析扫描器，其中所述至少四个光源激发至少四个荧光团，至少四个激发光滤光器，其将除了所需激发波长/ 至少四个荧光发射滤光器，其滤出除所需荧光发射波长以外的光，以及至少四个光电检测器，以检测所需荧光发射波长的光。

    WAVEGUIDE-BASED DETECTION SYSTEM WITH SCANNING LIGHT SOURCE
    206.
    发明申请
    WAVEGUIDE-BASED DETECTION SYSTEM WITH SCANNING LIGHT SOURCE 有权
    基于波导的检测系统，具有扫描光源

    公开(公告)号：US20170023477A1

    公开(公告)日：2017-01-26

    申请号：US15284396

    申请日：2016-10-03

    Applicant: Reuven DUER ,  Yun-Pei CHANG ,  Ashutosh SHASTRY

    Inventor： Reuven DUER ,  Yun-Pei CHANG ,  Ashutosh SHASTRY

    IPC: G01N21/64 ,  C12Q1/68 ,  C12Q1/70 ,  G01N33/543

    CPC classification number: C12Q1/703 ,  B01L3/502715 ,  B01L7/52 ,  B01L2300/0636 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0819 ,  C12Q1/6825 ,  G01N21/6428 ,  G01N21/6452 ,  G01N33/54373 ,  G01N2021/6463 ,  G01N2201/0853 ,  G01N2201/10 ,  G02B6/4226

    Abstract: The invention provides methods and devices for generating optical pulses in one or more waveguides using a spatially scanning light source. A detection system, methods of use thereof and kits for detecting a biologically active analyte molecule are also provided. The system includes a scanning light source, a substrate comprising a plurality of waveguides and a plurality of optical sensing sites in optical communication with one or more waveguide of the substrate, a detector that is coupled to and in optical communication with the substrate, and means for spatially translating a light beam emitted from said scanning light source such that the light beam is coupled to and in optical communication with the waveguides of the substrate at some point along its scanning path. The use of a scanning light source allows the coupling of light into the waveguides of the substrate in a simple and cost-effective manner.

    Abstract translation: 本发明提供了使用空间扫描光源在一个或多个波导中产生光脉冲的方法和装置。 还提供了检测系统，其使用方法和用于检测生物活性分析物分子的试剂盒。 该系统包括扫描光源，包括多个波导的基板和与基板的一个或多个波导光学通信的多个光学感测位置，耦合到基板并与光学连接的检测器，以及装置 用于空间地平移从所述扫描光源发射的光束，使得所述光束在沿其扫描路径的某点处耦合到所述衬底的波导并与所述衬底的波导光通信。 使用扫描光源允许以简单且成本有效的方式将光耦合到衬底的波导中。

    MEASUREMENT SYSTEM OF REAL-TIME SPATIALLY-RESOLVED SPECTRUM AND TIME-RESOLVED SPECTRUM AND MEASUREMENT MODULE THEREOF
    207.
    发明申请
    MEASUREMENT SYSTEM OF REAL-TIME SPATIALLY-RESOLVED SPECTRUM AND TIME-RESOLVED SPECTRUM AND MEASUREMENT MODULE THEREOF 审中-公开
    实时空间分辨率和时间分辨率的测量系统及其测量模块

    公开(公告)号：US20170016769A1

    公开(公告)日：2017-01-19

    申请号：US14825252

    申请日：2015-08-13

    Applicant: HC PHOTONICS CORP.

    Inventor： Ming-Hsien CHOU ,  Jian-Long XIAO ,  Ya-Wen CHUANG ,  Jyh-Rou SZE ,  Po-Jui CHEN ,  Chun-Fu LIN ,  Long-Jeng LEE ,  Chun-Li CHANG ,  Chi Hung HUANG ,  Da-Ren LIU

    IPC: G01J3/44 ,  G01N21/64

    CPC classification number: G01J3/4406 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/06 ,  G01J3/2823 ,  G01J2001/442 ,  G01J2003/063 ,  G01N21/6408 ,  G01N21/6456 ,  G01N2021/6421 ,  G01N2201/0697 ,  G01N2201/10

    Abstract: The present invention provides a measurement system of real-time spatially-resolved spectrum and time-resolved spectrum and a measurement module thereof. The measurement system includes an excitation light and a measurement module. The excitation light excites a fluorescent sample and the measurement module receives and analyzes fluorescence emitted by the fluorescent sample. The measurement module includes a single-photon linear scanner and a linear CCD spectrometer. The single-photon linear scanner selectively intercepts a light beam component of a multi-wavelength light beam that has a predetermined wavelength to generate a single-wavelength time-resolved signal, wherein the multi-wavelength light beam is generated by splitting the fluorescence. The linear CCD spectrometer receives the multi-wavelength light beam and generates a spatially-resolved full-spectrum fluorescence signal. With the implementation of the present invention, the spatially-resolved full-spectrum fluorescence signal and the single-wavelength time-resolved signal can be observed at the same time. Thus, the facility of a fluorescence spectrometer is improved.

    Abstract translation: 本发明提供实时空间分辨光谱和时间分辨光谱的测量系统及其测量模块。 测量系统包括激发光和测量模块。 激发光激发荧光样品，测量模块接收和分析由荧光样品发出的荧光。 测量模块包括单光子线性扫描仪和线性CCD光谱仪。 单光子线性扫描器选择性地截取具有预定波长的多波长光束的光束分量以产生单波长时间分辨信号，其中通过分离荧光产生多波长光束。 线性CCD光谱仪接收多波长光束并产生空间分辨全谱荧光信号。 通过本发明的实现，可以同时观察空间分辨全谱荧光信号和单波长时间分辨信号。 因此，提高了荧光光谱仪的设备。

    Inspection apparatus to detect a target located within a pattern for lithography
    208.
    发明授权
    Inspection apparatus to detect a target located within a pattern for lithography 有权
    用于检测位于用于光刻的图案内的目标的检查装置

    公开(公告)号：US09529278B2

    公开(公告)日：2016-12-27

    申请号：US15056410

    申请日：2016-02-29

    Applicant: ASML Netherlands B.V.

    Inventor： Marcus Adrianus Van De Kerkhof

    IPC: G03F7/20 ,  G01N21/21 ,  G01N21/956 ,  G01N21/95

    CPC classification number: G03F7/70633 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/10 ,  G03F7/70616

    Abstract: A system detects targets located within patterns. It operates in the pupil plane by filtering the received signal from the surrounding pattern. A method includes illuminating a target and a surrounding pattern with radiation, detecting the radiation reflected by the target and the surrounding pattern and forming a first set of data based on the detected radiation, removing portions of the first set of data which correspond to the target to form reduced data, interpolating the remaining portions of the reduced data over the removed portions to form product data, and subtracting the product data from the first set of data to form target data.

    Abstract translation: 系统检测位于模式内的目标。 它通过对周围图案的接收信号进行滤波而在瞳孔平面中工作。 一种方法包括用辐射照射目标和周围模式，检测由目标和周围模式反射的辐射，并基于检测到的辐射形成第一组数据，去除对应于目标的第一组数据的部分 以形成减少的数据，通过删除的部分内插减少的数据的剩余部分以形成产品数据，以及从第一组数据中减去产品数据以形成目标数据。

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