公开(公告)号：US06796143B2

公开(公告)日：2004-09-28

申请号：US09794251

申请日：2001-02-28

Applicant: Rolf Clasen ,  Helmut Mangold ,  Klaus Deller ,  Gerrit Schneider ,  Christine Wagner

Inventor： Rolf Clasen ,  Helmut Mangold ,  Klaus Deller ,  Gerrit Schneider ,  Christine Wagner

IPC: C03B800

CPC classification number: C03C23/0095 ,  C03C3/06 ,  C03C3/076 ,  C03C2201/42

Abstract: SiO2—TiO2 glasses having a low coefficient of thermal expansion are produced by a molding being produced that consists of SiO2 powder, SiO2—TiO2 powder or TiO2 powder and that contains by way of secondary component a titanium-containing component which is converted into amorphous TiO2.

Abstract translation: 通过由SiO 2粉末，SiO 2 -TiO 2粉末或TiO 2粉末组成的成型体制造具有低热膨胀系数的SiO 2 -TiO 2玻璃，并且通过次要组分含有钛成分转化为无定形TiO 2 。

公开(公告)号：US20040027555A1

公开(公告)日：2004-02-12

申请号：US10378391

申请日：2003-03-03

Inventor： Kenneth E. Hrdina ,  John E. Maxon ,  Brent R. Mclean

IPC: G01B011/16 ,  C03B001/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  C03B19/1446 ,  C03B19/1484 ,  C03B2201/42 ,  C03B2207/62 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/42 ,  C03C2203/40 ,  G03F1/24 ,  G03F7/70958

Abstract: Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

Abstract translation: 公开了含有二氧化钛的二氧化硅玻璃体和具有低水平条纹的极紫外线元件。 还公开了用于制造和测量玻璃元件和极紫外元件中的条纹的方法和装置。

公开(公告)号：US20030159464A1

公开(公告)日：2003-08-28

申请号：US10086231

申请日：2002-02-27

Inventor： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight JR. ,  Chunzhe C. Yu

IPC: C03B008/02

CPC classification number: C03B19/06 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/34

Abstract: The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles and coarser ground or milled glass powder. The glass particles are mixed with a liquid to form a slurry which is cast in a mold to form a porous pre-form. Subsequently, the porous pre-form is consolidated into a glass object by heating the pre-form at a relatively high temperature. The method of the present invention produces optical components having substantially no striae. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from the optical blank.

Abstract translation: 本发明涉及一种形成光学元件的方法。 该方法包括提供玻璃聚集体。 通常，玻璃聚集体是细玻璃烟灰颗粒和较粗糙的研磨或研磨玻璃粉末的混合物。 将玻璃颗粒与液体混合以形成在模具中铸造以形成多孔预成型体的浆料。 随后，通过在相对高的温度下加热预成型件将多孔预成型件固结成玻璃制品。 本发明的方法产生基本上没有条纹的光学部件。 结果，当EUV光从由光学坯料产生的组分反射时，散射显着降低。

公开(公告)号：US06263706B1

公开(公告)日：2001-07-24

申请号：US09280464

申请日：1999-03-30

Applicant: Evelyn M. Deliso ,  Claud E. Lacy ,  Deborah L. Marlatt

Inventor： Evelyn M. Deliso ,  Claud E. Lacy ,  Deborah L. Marlatt

IPC: C03B37018

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01446 ,  C03B2201/12 ,  C03B2203/26 ,  C03C2201/12 ,  C03C2201/28 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/46

Abstract: A method for controlling the refractive index achieved using a fluorine dopant gas, wherein CF4 is employed as the dopant gas, and the soot preform is doped using the CF4 for a time and temperature sufficient to result in a decrease in fluorine dopant nearest the surface which is in contact with the CF4 gas.

Abstract translation: 控制使用氟掺杂剂气体实现的折射率的方法，其中使用CF 4作为掺杂气体，并且使用CF 4掺杂烟灰预制体足够的时间和温度，以使得最接近表面的氟掺杂剂减少 与CF4气体接触。

公开(公告)号：US6158244A

公开(公告)日：2000-12-12

申请号：US39450

申请日：1998-03-16

Applicant: John F. Poco ,  Lawrence W. Hrubesh

Inventor： John F. Poco ,  Lawrence W. Hrubesh

IPC: C03B8/02 ,  C03B19/12 ,  C03C1/00 ,  C03C3/06 ,  C03C11/00

CPC classification number: C03C1/006 ,  C03B19/12 ,  C03C11/00 ,  C03C3/06 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/26

Abstract: Optical quality glass having a selected refractive index is produced by a two stage drying process. A gel is produced using sol-gel chemistry techniques and first dried by controlled evaporation until the gel volume reaches a pre-selected value. This pre-selected volume determines the density and refractive index of the finally dried gel. The gel is refilled with solvent in a saturated vapor environment, and then dried again by supercritical extraction of the solvent to form a glass. The glass has a refractive index less than the full density of glass, and the range of achievable refractive indices depends on the composition of the glass. Glasses having different refractive indices chosen from an uninterrupted range of values can be produced from a single precursor solution.

Abstract translation: 具有选择的折射率的光学品质的玻璃是通过两阶段干燥方法制造的。 使用溶胶 - 凝胶化学技术制备凝胶，并首先通过受控蒸发干燥直到凝胶体积达到预先选择的值。 该预选择的体积确定最终干燥的凝胶的密度和折射率。 在饱和蒸汽环境中用溶剂重新填充凝胶，然后通过超临界萃取溶剂再次干燥以形成玻璃。 玻璃的折射率小于玻璃的全密度，可实现折射率的范围取决于玻璃的组成。 可以从单一前体溶液产生具有从不间断值范围选择的折射率不同的玻璃。

公开(公告)号：US5808411A

公开(公告)日：1998-09-15

申请号：US759439

申请日：1996-12-05

Applicant: Manfred Deisenhofer ,  Dieter Meiss ,  Ekkehard Messner

Inventor： Manfred Deisenhofer ,  Dieter Meiss ,  Ekkehard Messner

IPC: C03C3/06 ,  C03C4/08 ,  C09K11/77 ,  H01J61/30 ,  H01J1/62 ,  H01J63/04

CPC classification number: H01J61/302 ,  C03C3/06 ,  C03C4/085 ,  C09K11/7706 ,  C03C2201/10 ,  C03C2201/32 ,  C03C2201/3423 ,  C03C2201/42 ,  C03C2201/54

Abstract: To inhibit, or at least sharply attenuate, fluorescence of a quartz-glass velope (10) surrounding a light source (11), such as a halogen incandescent lamp, a high-pressure discharge lamp, or the like, when the quartz glass is subjected to ultraviolet (UV) radiation from the light source, and has been doped with a UV radiation absorbing material, typically a cerium, or cerium-titanium doping, the quartz-glass envelope is additionally doped with barium and boron. The barium/boron in the doping is, preferably, present in quantities of between about 0.008 and 1.25%, by weight, with reference to the undoped quartz glass. Barium metaborate can be used, optionally together with praseodymium to attenuate the fluorescence. Preferably, barium and boron form a combined doping substance with cerium, in form of a cerium aluminate and metaborate, added to the starting material for the quartz glass, and before the quartz glass is fused from quartz sand or pulverized quartz crystal.

Abstract translation: 为了抑制或至少急剧衰减围绕光源（11）的石英玻璃外壳（10）的荧光，例如卤素白炽灯，高压放电灯等，当石英玻璃是 经受来自光源的紫外（UV）辐射，并且已经掺杂有紫外线吸收材料，通常为铈或铈 - 钛掺杂，石英玻璃外壳另外掺杂有钡和硼。 相对于未掺杂的石英玻璃，掺杂中的钡/硼优选以约0.008和1.25重量％的量存在。 可以使用偏硼酸钡，任选地与镨一起减弱荧光。 优选地，钡和硼与被添加到石英玻璃的起始材料中以及石英玻璃从石英砂或粉碎的石英晶体熔融之前形成具有铈铝酸盐和偏硼酸铈形式的铈的组合掺杂物质。

公开(公告)号：US5572091A

公开(公告)日：1996-11-05

申请号：US442831

申请日：1995-05-17

Applicant: Alfred Langer ,  Andreas Genz ,  Manfred Deisenhofer ,  Walter Keile ,  Bernd Lewandowski ,  J urgen Reichardt

Inventor： Alfred Langer ,  Andreas Genz ,  Manfred Deisenhofer ,  Walter Keile ,  Bernd Lewandowski ,  J urgen Reichardt

IPC: C03B20/00 ,  C03C3/06 ,  H01J5/02 ,  H01J61/30 ,  H01J61/34 ,  H01J61/40 ,  H01J61/82

CPC classification number: H01J61/40 ,  C03C3/06 ,  H01J61/302 ,  H01J61/34 ,  H01J61/827 ,  C03C2201/3423 ,  C03C2201/36 ,  C03C2201/42 ,  C03C2203/10 ,  Y10S65/09

Abstract: Ultraviolet (UV) radiation in the UV-C and UV-B bands, which is particularly dangerous, is absorbed and filtered by quartz glass doped with between 0.065% and 3.25%, and preferably between 0.065% and 1.3% by weight, of cerium metal, or cerium as such. Preferably, the cerium is added to quartz sand and/or rock crystal, in form of a fine-grained powder of up to 2 0 .mu.m grain size, in form of cerium aluminate (CeAlO.sub.3), present in up to about 5% by weight, and preferably up to about 2%, and melted together in a single step. The quartz glass so obtained is particularly suitable for a metal halide discharge lamp, e.g. as an outer envelope (1), or as the discharge vessel (27) itself, or for halogen incandescent lamps, to form the quartz-glass light bulb or an envelope therefor. A small quantity of titanium oxide, up to about 0.05%, may be added as a further doping agent to the melt to further improve the UV absorption in the B and C bands.

Abstract translation: 特别危险的UV-C和UV-B带中的紫外线（UV）辐射被掺入0.065％至3.25％，优选0.065％至1.3％重量的铈的石英玻璃吸收和过滤 金属或铈。 优选地，将铈以石灰砂和/或岩石晶体的形式加入石英砂和/或岩石晶体，其形式为以铝酸铈（CeAlO 3）的形式存在的至多约0％的晶粒尺寸的细粒粉末，其以至多约5％的比例存在， 重量，优选高达约2％，并在一个步骤中熔融在一起。 如此获得的石英玻璃特别适用于金属卤化物放电灯，例如， 作为外封套（1），或作为放电容器（27）本身，或用于卤素白炽灯，以形成石英玻璃灯泡或其封套。 可以将少量至多约0.05％的氧化钛作为另外的掺杂剂加入到熔体中以进一步提高B和C带中的UV吸收。

公开(公告)号：US5569979A

公开(公告)日：1996-10-29

申请号：US312164

申请日：1994-09-26

Applicant: Curtis E. Scott ,  Cynthia A. Secen ,  Thomas G. Parham ,  Gary R. Allen ,  Robert L. Bateman, Jr. ,  Paul G. Mathews

Inventor： Curtis E. Scott ,  Cynthia A. Secen ,  Thomas G. Parham ,  Gary R. Allen ,  Robert L. Bateman, Jr. ,  Paul G. Mathews

IPC: C03C3/06 ,  C03C4/08 ,  H01J61/30 ,  H01J61/40 ,  H01J17/16

CPC classification number: C03C4/085 ,  C03C3/06 ,  H01J61/302 ,  H01J61/40 ,  C03C2201/3423 ,  C03C2201/3447 ,  C03C2201/42 ,  C03C2203/10

Abstract: Fused quartz containing europium oxide, titanium dioxide and cerium oxide has been found to be effective for absorbing UV radiation while transmitting visible light radiation. Uses for this material include lamp envelopes and shrouds for halogen-incandescent lamps and metal halide arc discharge lamps which emit both UV and visible light radiation.

Abstract translation: 已经发现，含有氧化铕，二氧化钛和氧化铈的熔融石英在透射可见光辐射的同时有效吸收紫外线辐射。 该材料的用途包括用于卤素白炽灯的灯泡和护罩以及发出紫外线和可见光辐射的金属卤化物电弧放电灯。

公开(公告)号：US4272488A

公开(公告)日：1981-06-09

申请号：US075644

申请日：1979-09-14

Applicant: Justice N. Carman

Inventor： Justice N. Carman

IPC: C01B33/02 ,  C03C3/06 ,  B01J19/02

CPC classification number: C03C3/06 ,  C01B33/02 ,  C03C2201/10 ,  C03C2201/28 ,  C03C2201/30 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/3435 ,  C03C2201/42 ,  C03C2203/00

Abstract: The method and apparatus for producing liquid silicon of high purity and for casting silicon. Hydrogen and a hydrogenated silane in gaseous state are mixed, preferably with a source of a small amount of oxygen, in a heated chamber producing the liquid silicon, with the exhaust gases bubbling out of the melt under a baffle. The chamber for the melt of liquid silicon preferably is lined with silicon dioxide. The liquid silicon may be used in making high purity vitreous silica and may be used in making castings of silicon. In making castings, the liquid silicon is accumulated in a second chamber and is periodically drawn from the second chamber into a third chamber which contains the mold for the casting.

Abstract translation: 用于生产高纯度硅和硅铸造液态硅的方法和装置。 氢气和气态的氢化硅烷在产生液体硅的加热室中混合，优选用少量氧气源，废气在挡板下方从熔体中冒出。 用于液体硅熔体的室优选用二氧化硅衬里。 液硅可用于制造高纯度二氧化硅玻璃，可用于制造硅铸件。 在制造铸件时，液态硅积聚在第二腔室中，并且从第二腔室周期性地拉入包含用于铸造的模具的第三腔室。

公开(公告)号：US4176166A

公开(公告)日：1979-11-27

申请号：US800191

申请日：1977-05-25

Applicant: Justice N. Carman

Inventor： Justice N. Carman

IPC: C01B33/02

CPC classification number: C01B33/02 ,  C03C2201/10 ,  C03C2201/28 ,  C03C2201/30 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/3435 ,  C03C2201/42 ,  C03C2203/00

Abstract: The method and apparatus for producing liquid silicon of high purity and for casting silicon. Hydrogen and a hydrogenated silane in gaseous state are mixed, preferably with a source of a small amount of oxygen, in a heated chamber producing the liquid silicon, with the exhaust gases bubbling out of the melt under a baffle. The chamber for the melt of liquid silicon preferably is lined with silicon dioxide. The liquid silicon may be used in making high purity vitreous silica and may be used in making castings of silicon. In making castings, the liquid silicon is accumulated in a second chamber and is periodically drawn from the second chamber into a third chamber which contains the mold for the casting.

Abstract translation: 用于生产高纯度硅和硅铸造液态硅的方法和装置。 氢气和气态的氢化硅烷在产生液体硅的加热室中混合，优选用少量氧气源，废气在挡板下方从熔体中冒出。 用于液体硅熔体的室优选用二氧化硅衬里。 液硅可用于制造高纯度二氧化硅玻璃，可用于制造硅铸件。 在制造铸件时，液态硅积聚在第二腔室中，并且从第二腔室周期性地拉入包含用于铸造的模具的第三腔室。