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    Parallel Electron Beam Lithography stamp (PEBLS)
    223.
    发明申请
    Parallel Electron Beam Lithography stamp (PEBLS) 失效
    平行电子束平版印刷（PEBLS）

    公开(公告)号：US20070228296A1

    公开(公告)日：2007-10-04

    申请号：US11395238

    申请日：2006-04-03

    Applicant: Blaise Mouttet

    Inventor： Blaise Mouttet

    IPC: G03C5/00 ,  G21K5/10

    CPC classification number: G03F7/2049 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01J1/304 ,  H01J37/3177 ,  H01J2201/30469 ,  H01J2237/0635 ,  H01J2237/182 ,  H01J2237/2002 ,  Y10S430/143 ,  Y10S977/939 ,  Y10S977/947 ,  Y10S977/953

    Abstract: An array of vertically aligned electron emitting nanotips such as multiwall carbon nanotubes are formed and patterned for use as a lithographic stamp. The spacing and/or arrangement of the nanotips correspond to a predetermined pattern that is desired to be formed on an opposing substrate. Simultaneous actuation of the nanotips by a common electrode forms a pattern on the opposing substrate without any necessary scanning techniques or use of masks. Applying a sufficient electrical potential between the array and the substrate generates electron emission from the tips so as to cure a resist, produce localized electrochemical reactions, establish localized electrostatic charge distributions or perform other desirable coating or etching process steps so as to create nanoelectronic circuitry or to facilitate molecular or nanoscale processing.

    Abstract translation: 形成垂直排列的电子发射纳米尖端阵列，例如多壁碳纳米管，并将其图案化以用作光刻印模。 纳米片的间隔和/或布置对应于希望形成在相对的基底上的预定图案。 通过公共电极同时致动纳米尖端，在相对的基板上形成图案，而无需任何必要的扫描技术或使用掩模。 在阵列和衬底之间施加足够的电势从尖端产生电子发射，以固化抗蚀剂，产生局部电化学反应，建立局部静电电荷分布或执行其它期望的涂覆或蚀刻工艺步骤，以便产生纳米电子电路或 以促进分子或纳米级处理。

    Electrode configuration for retaining cooling gas on electrostatic wafer clamp
    226.
    发明申请
    Electrode configuration for retaining cooling gas on electrostatic wafer clamp 审中-公开
    用于将冷却气体保持在静电晶片夹上的电极配置

    公开(公告)号：US20040066601A1

    公开(公告)日：2004-04-08

    申请号：US10264985

    申请日：2002-10-04

    Applicant: Varian Semiconductor Equipment Associates, Inc.

    Inventor： Grant Kenji Larsen

    IPC: H02H001/00

    CPC classification number: H01J37/20 ,  H01J2237/2002 ,  H01L21/67109 ,  H01L21/6833 ,  H02N13/00

    Abstract: Apparatus for electrostatic clamping of a semiconductor wafer includes a dielectric element that defines a clamping surface for receiving the semiconductor wafer and two or more electrodes, including a first electrode disposed at or near a periphery of the clamping surface and a second electrode disposed inwardly of the first electrode. The first and second electrodes have variable widths that form interdigitated projections along adjacent sides of the first and second electrodes. The interdigitated projections limit flexing of the wafer at or near its outer periphery and thereby enhance retention of cooling gas between the semiconductor wafer and the clamping surface.

    Abstract translation: 用于半导体晶片的静电夹持的装置包括限定用于接收半导体晶片的夹持表面和两个或更多个电极的电介质元件，所述两个或多个电极包括设置在夹紧表面的周边或附近的第一电极和设置在夹持表面内侧的第二电极 第一电极。 第一和第二电极具有可变宽度，其沿着第一和第二电极的相邻侧形成相互交叉的突起。 交叉突起限制晶片在其外周边或其附近的弯曲，从而增强了半导体晶片和夹紧表面之间的冷却气体的保留。

    Scanning electron microscope
    228.
    发明授权
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号：US5097134A

    公开(公告)日：1992-03-17

    申请号：US616413

    申请日：1990-11-21

    Applicant: Masahiko Kimoto ,  Kenichi Ishihara

    Inventor： Masahiko Kimoto ,  Kenichi Ishihara

    IPC: H01J37/20 ,  H01J37/28 ,  H01J37/301

    CPC classification number: H01J37/20 ,  H01J2237/2002

    Abstract: A scanning electron microscope permitting observation of raw biological specimens containing moisture. A vessel accommodating water supplied to the specimen is formed. A passage is formed in the specimen chamber of the microscope to convey the liquid from the vessel to the specimen. A pipe for introducing a gas such as air is connected with the passage. The introduced gas leaks around the specimen after flowing through the passage to prevent the liquid from freezing in the vessel and in the passage when the specimen chamber is evacuated to a vacuum.

    Abstract translation: 扫描电子显微镜，允许观察含有水分的生物样本。 形成容纳供应到试样的水的容器。 在显微镜的样品室中形成通道，以将液体从容器输送到样品。 用于引入诸如空气的气体的管道与通道连接。 引入的气体在流过通道之后在试样周围泄漏，以防止液体在容器中和在样品室被抽真空时的通道中冻结。

    Scanning electron microscope for visualization of wet samples
    229.
    发明授权
    Scanning electron microscope for visualization of wet samples 失效
    扫描电子显微镜可以显示湿样品

    公开(公告)号：US4720633A

    公开(公告)日：1988-01-19

    申请号：US820537

    申请日：1986-01-17

    Applicant: Alan C. Nelson

    Inventor： Alan C. Nelson

    IPC: H01J37/20 ,  G01N23/00

    CPC classification number: H01J37/20 ,  H01J2237/2002 ,  H01J2237/2608

    Abstract: A scanning electron microscope useful for obtaining microscopic data or images of wet specimens is provided with comprises an electron source capable of emitting a beam of electrons; an electron optical vacuum column with means for focussing the beam of electrons; means for scanning the focussed beam of electrons across a specimen; a differentially pumped aperture column attached to the electron optical vacuum column and having at least two walls perpendicular to the sides of the differentially pumped aperture column defining a suitable series of pressure gradients, each wall having an aperture aligned to permit the beam of electrons to pass through said differentially pumped aperture column; a specimen chamber which may be maintained at normal atmospheric pressure; a specimen mount; means of preventing the buildup of negative charge on the surface of the specimen; and a detector and image recording system.

    Abstract translation: 提供了用于获得湿样品的微观数据或图像的扫描电子显微镜，其包括能够发射电子束的电子源; 具有用于聚焦电子束的装置的电子光学真空柱; 用于扫描聚焦的电子束穿过样本的装置; 连接到电子光学真空塔的差分泵浦孔径柱，并且具有至少两个垂直于差分泵浦孔径柱的侧壁的壁，其限定了适当的一系列压力梯度，每个壁具有孔径对准以允许电子束通过 通过所述差分泵浦孔径柱; 可以保持在正常大气压下的试样室; 样品座 防止样品表面积极负电荷的手段; 以及检测器和图像记录系统。

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