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1.发明申请公开(公告)号：US20180068827A1
公开(公告)日：2018-03-08
申请号：US15811911
申请日：2017-11-14
Applicant: Protochips, Inc.
Inventor： Daniel Stephen Gardiner , William Bradford Carpenter , John Damiano, JR. , Franklin Stampley Walden, II , David P. Nackashi
CPC classification number: H01J37/261 , G01K11/32 , G01L11/025 , G01L19/04 , H01J37/16 , H01J37/20 , H01J2237/2001 , H01J2237/2002 , H01J2237/2003 , H01J2237/206 , H01J2237/2801
Abstract: An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.
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公开(公告)号：US09816946B2
公开(公告)日：2017-11-14
申请号：US13765022
申请日：2013-02-12
Applicant: Heiko Stegmann
Inventor： Heiko Stegmann
CPC classification number: G01N23/04 , G01N1/286 , G01N1/32 , G01N2001/045 , G01N2001/2886 , H01J37/00 , H01J37/317 , H01J2237/206 , H01J2237/31745 , H01J2237/31749
Abstract: Methods and apparatus are disclosed for the preparation of microscopic samples using light pulses. Material volumes greater than 100 μm3 are removed. The methods include inspecting an object with a scanning electron microscope (SEM) or a focused ion beam (FIB). The inspection includes recording an image of the object. The methods also includes delineating within the object a region to be investigated, and delineating a laser-machining path based on the image of the object so that a sample can be prepared out of the object. The methods further include using laser-machining along the delineated laser-machining path to remove a volume that is to be ablated, and inspecting the object with the scanning electron microscope (SEM) or a focused ion beam (FIB).
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3.发明授权Method for forming an electrical connection to an sample support in an electron microscope holder 有权在电子显微镜支架中与样品支架形成电连接的方法公开(公告)号：US09437393B2
公开(公告)日：2016-09-06
申请号：US14079223
申请日：2013-11-13
Applicant: PROTOCHIPS, INC.
Inventor： John Damiano, Jr. , David P. Nackashi , Daniel Stephen Gardiner , Franklin Stampley Walden, II , William Bradford Carpenter
CPC classification number: H01R13/24 , H01J37/20 , H01J37/26 , H01J2237/2003 , H01J2237/2007 , H01J2237/2008 , H01J2237/206 , H01R12/721 , H01R12/79
Abstract: An electrical connector for use in electron microscopy sample holders. The electrical connector provides electrical contacts to the sample support devices which are positioned in the sample holders for electrical, temperature and/or electrochemical control.
Abstract translation: 用于电子显微镜样品架的电连接器。 电连接器为位于样品保持器中的样品支撑装置提供电接触，用于电气，温度和/或电化学控制。
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4.发明申请公开(公告)号：US20160172158A1
公开(公告)日：2016-06-16
申请号：US14890258
申请日：2013-05-14
Applicant: Hitachi, Ltd.
Inventor： Noriyuki LEE , Hiroyuki YAMAMOTO , Akira SUGAWARA
IPC: H01J37/305
CPC classification number: H01J37/3056 , H01J37/317 , H01J2237/0262 , H01J2237/045 , H01J2237/12 , H01J2237/151 , H01J2237/206 , H01J2237/31745 , H01J2237/31749
Abstract: To realize a focused-ion-beam machining apparatus capable of machining a thin sample with a wide area and a uniform film thickness and a needle-like sample with a sharp tip, in a focused-ion-beam machining apparatus including: an ion source (1); an electronic lens (3) focusing an ion beam extracted from the ion source (1) and irradiating the ion beam to a sample (5); and a sample holder (13) holding the sample (5), the sample holder (13) is provided with a shield electrode (7) arranged in a manner such as to cover the sample (5), and the sample (5) and the shield electrode (7) are insulated from each other in a manner such that voltages can be applied to them separately from each other.
Abstract translation: 为了实现聚焦离子束加工装置，该聚焦离子束加工装置能够在聚焦离子束加工装置中对具有广泛面积和均匀薄膜厚度的薄样品进行加工的针状样品和具有尖尖的针状样品进行加工，所述聚焦离子束加工装置包括：离子源 （1）; 聚焦从离子源（1）提取的离子束并将离子束照射到样品（5）的电子透镜（3）; 和保持样品（5）的样品架（13），样品保持器（13）设置有以覆盖样品（5）的方式配置的屏蔽电极（7）和样品（5）和 屏蔽电极（7）以能够彼此分开施加电压的方式彼此绝缘。
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公开(公告)号：US08878144B2
公开(公告)日：2014-11-04
申请号：US13577751
申请日：2010-12-01
Applicant: Toshie Yaguchi , Yasuhira Nagakubo , Akira Watabe
Inventor： Toshie Yaguchi , Yasuhira Nagakubo , Akira Watabe
CPC classification number: H01J37/26 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/206 , H01J2237/2065
Abstract: The electron beam apparatus sample holding means has a diaphragm which is placed on upper and lower sides of a sample to form a cell for separating a gas atmosphere and a vacuum atmosphere of a sample chamber and sealing an ambient atmosphere of the sample; a gas supply means for supplying gas to an inside of the cell; and exhaust means for exhausting gas. The exhaust means includes a gas exhaust pipe provided in the inside of the cell and an openable/closable exhaust hole provided in a sidewall of the sample holding means so as to pass through the cell. The diaphragm is an amorphous film made of light elements which can transmit an electron beam, such as carbon films, oxide films, and nitride films.
Abstract translation: 电子束装置样品保持装置具有隔膜，其被放置在样品的上侧和下侧，以形成用于分离气体气氛的单元和样品室的真空气氛并密封样品的周围空气; 气体供给装置，用于向所述电池内部供应气体; 以及用于排出气体的排气装置。 排气装置包括设置在电池内部的排气管和设置在样品保持装置的侧壁中以便通过电池的可打开/关闭的排气孔。 隔膜是由透光电子束如碳膜，氧化膜和氮化物膜的光元件制成的非晶膜。
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Patent Agency Ranking
6.发明申请公开(公告)号：US20140284950A1
公开(公告)日：2014-09-25
申请号：US14123633
申请日：2012-06-01
Inventor： Yu Sun , Ko Lun Chen
CPC classification number: B25J7/00 , B25J15/04 , B25J15/0491 , B25J15/12 , B81B2201/12 , B81B2201/13 , B81C3/008 , H01J37/20 , H01J2237/206 , H01J2237/208
Abstract: The present invention relates to modular system for micro-nano manipulation of samples. The modular system of the present invention comprises changeable tool tips which may be provided in an array, and a tool body. Each changeable tool tip comprises an end effector connected to a base having mating structures. The tool body includes an arm having slits having dimensions and being disposed on the arm so as to detachably couple with the mating structures of the tool tip. The slits may include an opening with rounded corners for receiving the mating structures, and tapered side walls for frictionally fitting the mating structures. The present invention relates also to a connection system for connecting a micro-dimensional tool body to a changeable micro-dimensional tool tip and to a manipulation tool for use with changeable tool tips of the present invention.
Abstract translation: 本发明涉及用于微纳米操作样品的模块化系统。 本发明的模块化系统包括可以设置在阵列中的可变工具尖端和工具主体。 每个可变的工具尖端包括连接到具有配合结构的底座的端部执行器。 工具主体包括具有尺寸的狭缝的臂，并且布置在臂上，以便可拆卸地与工具尖端的配合结构联接。 狭缝可以包括具有用于接收配合结构的圆角的开口和用于摩擦地配合配合结构的锥形侧壁。 本发明还涉及一种用于将微尺寸工具主体连接到可更换的微尺寸工具尖端的连接系统以及与本发明的可变工具尖端一起使用的操作工具。
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公开(公告)号：US20140110577A1
公开(公告)日：2014-04-24
申请号：US14057002
申请日：2013-10-18
Applicant: Carl Zeiss Microscopy GmbH
Inventor： Lorenz Lechner
CPC classification number: H01J37/26 , G01N1/32 , H01J37/28 , H01J37/3056 , H01J2237/20207 , H01J2237/20214 , H01J2237/206 , H01J2237/31745
Abstract: A method of processing a TEM-sample, wherein the method comprises: mounting an object in a particle beam system such that the object is disposed, in an object region of the particle beam system; directing of a first particle beam onto the object region from a first direction, wherein the first particle beam is an ion beam; and then rotating the object about an axis by 180°, wherein the following relation is fulfilled: 35°≦α≦55°, wherein α denotes a first angle between the first direction and the axis; and then directing of the first particle beam onto the object region from the first direction; wherein material is removed from the object during the directing of the first particle beam onto the object region. Furthermore, a second particle beam may be directed onto the object region, and particles emanating from the object region can be detected.
Abstract translation: 一种处理TEM样品的方法，其中所述方法包括：将物体安装在粒子束系统中，使得所述物体设置在所述粒子束系统的物体区域中; 从第一方向将第一粒子束引导到物体区域，其中第一粒子束是离子束; 然后将物体绕轴旋转180°，其中满足以下关系：35°＆nlE;α＆nlE; 55°，其中α表示第一方向和轴之间的第一角度; 然后从第一方向将第一粒子束引导到物体区域上; 其中在将所述第一粒子束引导到所述物体区域时，从所述物体移除材料。 此外，第二粒子束可以被引导到物体区域上，并且可以检测从物体区域发出的粒子。
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公开(公告)号：US08704176B2
公开(公告)日：2014-04-22
申请号：US13856899
申请日：2013-04-04
Applicant: FEI Company
Inventor： Faysal Boughorbel , Eric Gerardus Theodoor Bosch , Pavel Potocek , Xiaodong Zhuge , Berend Helmerus Lich
IPC: H01J37/26
CPC classification number: H01J37/222 , G01N1/06 , G01N1/36 , G01N23/225 , G01N2223/401 , G01N2223/418 , H01J37/26 , H01J37/261 , H01J37/28 , H01J2237/206 , H01J2237/208 , H01J2237/221 , H01J2237/226 , H01J2237/31745
Abstract: A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.
Abstract translation: 一种使用带电粒子显微镜检查样品的方法，包括将样品安装在样品架上; 使用粒子光学柱将至少一束颗粒辐射引导到样品的表面S上，从而产生使得发射的辐射从样品中发出的相互作用; 使用检测器装置来检测所述发射辐射的至少一部分，其方法包括体现检测器装置以检测所发射的辐射中的电子; 记录所述检测器装置的输出On作为所述电子的动能En的函数，从而针对多个En值编制测量集M = {（On，En）}; 使用计算机处理装置自动地对测量集M进行解卷积并将其空间解析为结果集R = {（Vk，Lk）}，其中空间变量V表示以参考表面的相关离散深度级Lk的值Vk S，其中n和k是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。
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公开(公告)号：US20140026672A1
公开(公告)日：2014-01-30
申请号：US13934225
申请日：2013-07-03
Applicant: Honda Motor Co., Ltd.
Inventor： Kenji MATSUMOTO , Hideo WATANABE
CPC classification number: G01N3/02 , G01N3/62 , G01N2203/0017 , G01N2203/0286 , G01N2203/0617 , G01N2203/0647 , H01J37/20 , H01J37/26 , H01J2237/206 , H01J2237/24585
Abstract: A sample for electron microscopy includes a base member and a sensor. The sensor is configured to measure data on the sample. The sensor includes an insulating member and a measuring element. The insulating member is deposited in or near an area of observation that is defined on a surface of the base member. The measuring element is deposited on a surface of the insulating member or over the surface of the base member and the surface of the insulating member.
Abstract translation: 用于电子显微镜的样品包括基底构件和传感器。 传感器被配置为测量样品上的数据。 传感器包括绝缘构件和测量元件。 绝缘构件沉积在限定在基底构件的表面上的观察区域中或附近。 测量元件沉积在绝缘构件的表面上或者在基底构件的表面和绝缘构件的表面上。
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公开(公告)号：US20120305769A1
公开(公告)日：2012-12-06
申请号：US13577751
申请日：2010-12-01
Applicant: Toshie Yaguchi , Yasuhira Nagakubo , Akira Watabe
Inventor： Toshie Yaguchi , Yasuhira Nagakubo , Akira Watabe
CPC classification number: H01J37/26 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/206 , H01J2237/2065
Abstract: The electron beam apparatus sample holding means has a diaphragm which is placed on upper and lower sides of a sample to form a cell for separating a gas atmosphere and a vacuum atmosphere of a sample chamber and sealing an ambient atmosphere of the sample; a gas supply means for supplying gas to an inside of the cell; and exhaust means for exhausting gas. The exhaust means includes a gas exhaust pipe provided in the inside of the cell and an openable/closable exhaust hole provided in a sidewall of the sample holding means so as to pass through the cell. The diaphragm is an amorphous film made of light elements which can transmit an electron beam, such as carbon films, oxide films, and nitride films.
Abstract translation: 电子束装置样品保持装置具有隔膜，其被放置在样品的上侧和下侧，以形成用于分离气体气氛的单元和样品室的真空气氛并密封样品的周围空气; 气体供给装置，用于向所述电池内部供应气体; 以及用于排出气体的排气装置。 排气装置包括设置在电池内部的排气管和设置在样品保持装置的侧壁中以便通过电池的可打开/关闭的排气孔。 隔膜是由透光电子束如碳膜，氧化膜和氮化物膜的光元件制成的非晶膜。
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