FLOW CELL AND OPTICAL SYSTEM FOR ANALYZING FLUID

    公开(公告)号:US20180364152A1

    公开(公告)日:2018-12-20

    申请号:US16001966

    申请日:2018-06-07

    Inventor: Yoram Naor

    Abstract: A flow cell analyzes a fluid sample. A flow cell body contains a reference material and includes at least one hollow chamber to contain the fluid sample. Opposing surfaces of the flow cell body each have at least one transparent portion thereof. An optical path for light traversing through the flow cell body is defined in part by the transparent portions. A switching mechanism adjusts the amount of the reference material in the optical path to effect switching of the flow cell between a reference measurement state and a fluid sample measurement state. The reference measurement state corresponds to a first light intensity measurement and the fluid sample measurement state corresponds to a second light intensity measurement.

    Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method

    公开(公告)号:US09904181B2

    公开(公告)日:2018-02-27

    申请号:US14901993

    申请日:2014-06-13

    Abstract: The present invention determines property of a target (30) on a substrate (W), such as a grating on a wafer. An inspection apparatus has an illumination source (702, 710) with two or more illumination beams (716, 716′, 716″, 716′″) in the pupil plane of a high numerical aperture objective lens (L3). The substrate and target are illuminated via the objective lens from different angles of incidence with respect to the plane of the substrate. In the case of four illumination beams, a quad wedge optical device (QW) is used to separately redirect diffraction orders of radiation scattered from the substrate and separates diffraction orders from the two or more illumination beams. For example four 0th diffraction orders are separated for four incident directions. After capture in multimode fibers (MF), spectrometers (S1-S4) are used to measure the intensity of the separately redirected 0th diffraction orders as a function of wavelength. This may then be used in determining a property of a target.

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