公开(公告)号：US06946646B2

公开(公告)日：2005-09-20

申请号：US10287995

申请日：2002-11-05

Applicant: Xin Chen ,  Nicol A. Heron ,  Timothy L. Hunt ,  Eric J. Mozdy ,  Darren A. Stainer

Inventor： Xin Chen ,  Nicol A. Heron ,  Timothy L. Hunt ,  Eric J. Mozdy ,  Darren A. Stainer

IPC: G01J3/447 ,  G01J4/00 ,  G01M11/00 ,  G02F1/01 ,  H04B10/00

CPC classification number: G01M11/3181

Abstract: A method for screening fiber polarization mode dispersion using a polarization optical time domain reflectometer. A pulse radiation is emitted into the fiber under test, and the backscattered radiation is measured by the POTDR and used to obtain a POTDR trace. The POTDR trace is then analyzed to compare the variation of signals along the length of the fiber, the variation in signals relating to the level of PMD along the length of the fiber. Because high levels of PMD correspond to localized levels of low variability, by setting the variability of signal threshold sufficiently low, fibers having unacceptably high localized PMD can be identified and removed.

Abstract translation: 一种使用偏振光学时域反射计屏蔽光纤偏振模色散的方法。 脉冲辐射被发射到被测光纤中，反向散射辐射由POTDR测量并用于获得POTDR迹线。 然后分析POTDR迹线以比较沿着光纤长度的信号的变化，与沿着光纤长度的PMD的水平相关的信号的变化。 由于高水平的PMD对应于低变异性的局部水平，通过将信号阈值的可变性设置得足够低，可以识别和去除具有不可接受的高局部PMD的纤维。

公开(公告)号：US20050163365A1

公开(公告)日：2005-07-28

申请号：US11045703

申请日：2005-01-28

Applicant: Blair Barbour

Inventor： Blair Barbour

IPC: G01B11/24 ,  G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/04 ,  G01J9/00 ,  G06K7/00 ,  G06K9/00 ,  G06K9/36 ,  H01Q3/26

CPC classification number: G01B11/24 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/447 ,  G01J4/04 ,  G01J9/00 ,  G01J2009/002

Abstract: An apparatus for information extraction from electromagnetic energy via multi-characteristic spatial geometry processing to determine three-dimensional aspects of an object from which the electromagnetic energy is proceeding. The apparatus receives the electromagnetic energy. The received electromagnetic energy has a plurality of spatial phase characteristics. The apparatus separates the plurality of spatial phase characteristics of the received electromagnetic energy. The apparatus r identifies spatially segregated portions of each spatial phase characteristic, with each spatially segregated portion of each spatial phase characteristic corresponding to a spatially segregated portion of each of the other spatial phase characteristics in a group. The apparatus quantifies each segregated portion to provide a spatial phase metric of each segregated portion for providing a data map of the spatial phase metric of each separated spatial phase characteristic. The apparatus processes the spatial phase metrics to determine surface contour information for each segregated portion of the data map.

Abstract translation: 一种用于通过多特征空间几何处理从电磁能量提取信息以确定电磁能量正在进行的物体的三维方面的装置。 该装置接收电磁能。 所接收的电磁能具有多个空间相位特性。 该装置分离接收的电磁能的多个空间相位特性。 装置r识别每个空间相位特征的空间分离的部分，每个空间相位特征的每个空间分离的部分对应于一组中的每个其他空间相位特征的空间上分离的部分。 该装置对每个隔离部分进行量化以提供每个分离部分的空间相位度量，以提供每个分离的空间相位特性的空间相位度量的数据图。 该装置处理空间相位度量以确定数据图的每个分离部分的表面轮廓信息。

公开(公告)号：US20050157295A1

公开(公告)日：2005-07-21

申请号：US10927929

申请日：2004-08-27

Applicant: Won Chegal ,  Hyun Cho ,  Yong Cho ,  Yun Lee

Inventor： Won Chegal ,  Hyun Cho ,  Yong Cho ,  Yun Lee

IPC: G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01J3/447 ,  G01J4/04 ,  G01N21/211

Abstract: An ellipsometry system and method using spectral imaging are provided. The ellipsometry system includes a light source group for projecting a white light collimated to a multi-point region defined on the surface of a sample, a light analysis group for polarizing a reflected white light to analyze it, and a spectral imaging group for dispersing and imaging the polarized white light. The white light collimated to the multi-point region is input to the spectral imaging group and dispersed by a light dispersing means by wavelengths such that the dispersed lights are imaged on one axis of an imaging plane by the points forming the multi-point region and imaged on the other axis of the imaging plane by wavelengths, to obtain optical data having information about the physical property of the points and wavelengths. Accordingly, a large amount of data can be obtained by wavelengths and points to improve rapidity and reliability of measurement.

Abstract translation: 提供了使用光谱成像的椭偏仪系统和方法。 椭圆测量系统包括一个光源组，用于将准直的白光投射到在样品表面上限定的多点区域;光分析组，用于偏振反射白光进行分析;以及光谱成像组，用于分散和 成像偏振白光。 准直到多点区域的白光被输入到光谱成像组，并且通过波长使光散射装置分散，使得分散的光在形成多点区域的点上成像在成像平面的一个轴上， 通过波长在成像平面的另一轴上成像，以获得具有关于点和波长的物理性质的信息的光学数据。 因此，可以通过波长和点获得大量的数据，以提高测量的快速性和可靠性。

公开(公告)号：US20050041249A1

公开(公告)日：2005-02-24

申请号：US10644038

申请日：2003-08-20

Applicant: Michael Dobbs ,  Jeff Pruitt ,  Matthew Gypson ,  Benjamin Neff

Inventor： Michael Dobbs ,  Jeff Pruitt ,  Matthew Gypson ,  Benjamin Neff

IPC: G01J3/447 ,  G01J4/04 ,  G01N21/21 ,  G01J4/00

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N2021/1757 ,  G01N2021/1793 ,  G01N2201/0691

Abstract: Remotely sensing a target may include generating a first beam of optical radiation that is modulated at a first frequency and polarized at a first polarization. A second beam of optical radiation that is modulated at a second frequency and polarized at a second polarization may also be generated. The first and second beams of optical radiation may be transmitted to the target. Radiation at the first polarization and radiation at the second polarization may be detected from the target using a phase sensitive technique and the first and second frequencies.

Abstract translation: 远程感测目标可以包括产生以第一频率被调制并以第一极化极化的第一光束。 也可以产生以第二频率被调制并以第二极化极化的第二光束。 第一和第二光辐射束可以传输到目标。 可以使用相敏技术和第一和第二频率从目标检测第一极化处的辐射和第二极化处的辐射。

公开(公告)号：US6075647A

公开(公告)日：2000-06-13

申请号：US16235

申请日：1998-01-30

Applicant: David M. Braun ,  Timothy L. Bagwell

Inventor： David M. Braun ,  Timothy L. Bagwell

IPC: G02B27/28 ,  G01J3/26 ,  G01J3/447 ,  G02B27/00 ,  G01N21/25 ,  G02B5/30

CPC classification number: G01J3/26 ,  G01J3/447

Abstract: An optical spectrum analyzer includes a polarization modifier that eliminates polarization-dependent wavelength spreading, enabling the analyzer to have high signal selectivity and high measurement sensitivity. The polarization modifier spatially separates orthogonal polarization components of the applied optical signal into separate optical beams and rotates the relative polarization components of the beams so that the beams are incident on a tunable interference filter in a multipass configuration at a single polarization state. The optical beams are directed through regions of the interference filter which lie on a contour of substantially equal center wavelength so that each of the multiple passes through the interference filter provides for corresponding narrowing of the filter bandwidth. Narrow bandwidth and low insertion loss are maintained over a wide tuning range by tilting the interference filter about a tilt axis intercepting the regions of the interference filter that lie on a contour of substantially equal optical thickness.

Abstract translation: 光谱分析仪包括消除偏振相关波长扩散的偏振修正器，使得分析仪具有高信号选择性和高测量灵敏度。 偏振修正器将所施加的光信号的正交偏振分量空间分离成单独的光束并且旋转光束的相对偏振分量，使得光束以单极化状态的多次配置入射到可调谐干涉滤光器上。 光束被引导通过干涉滤波器的区域，其位于基本上相等的中心波长的轮廓上，使得多个通过干涉滤波器的每一个都能够提供滤波器带宽的相应变窄。 通过倾斜干涉滤光片围绕位于基本上相等的光学厚度的轮廓上的干涉滤光器的区域的倾斜轴倾斜干涉带宽和低插入损耗。

公开(公告)号：US5973787A

公开(公告)日：1999-10-26

申请号：US76673

申请日：1998-05-12

Applicant: David E. Aspnes ,  Jon Opsal

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01N21/21 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G02F1/01

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US5969818A

公开(公告)日：1999-10-19

申请号：US144764

申请日：1998-08-31

Applicant: Blaine D. Johs ,  Ping He

Inventor： Blaine D. Johs ,  Ping He

IPC: G01J3/14 ,  G01J3/447 ,  G01J4/00

CPC classification number: G01J3/14 ,  G01J3/447

Abstract: Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a beam of electromagnetic radiation without significantly changing the phase angle between orthogonal components therein. Two pairs of mirrors are oriented to form two orthogonally related planes such that phase shift entered to an electromagnetic beam by interaction with the first pair of mirrors is canceled by interaction with the second pair.

Abstract translation: 公开了一种电磁射束引导系统和方法，其能够改变电磁辐射束的传播方向，而不会显着改变其中的正交分量之间的相位角。 两对反射镜被定向以形成两个正交相关平面，使得通过与第二对反射镜相互作用而进入电磁波的相位与第二对的相互作用被抵消。

公开(公告)号：US5850284A

公开(公告)日：1998-12-15

申请号：US487249

申请日：1995-06-13

Applicant: Daniel Schoeffler ,  Howard Stern ,  Pat V. Costa

Inventor： Daniel Schoeffler ,  Howard Stern ,  Pat V. Costa

IPC: B64D15/20 ,  B64F5/00 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/88 ,  G08B19/02

CPC classification number: G08B19/02 ,  B64D15/20 ,  B64F5/0054 ,  G01J4/00 ,  G01N21/21 ,  G01N21/88 ,  G01N2021/8848

Abstract: An apparatus for detecting a polarization altering substance, such as ice, on a surface includes a polarizing filter on the surface between the surface and the polarization altering substance. When the polarizing filter includes alternating regions having orthogonal polarizing properties, only one viewing of the surface through a blocking filter is required. When light, either polarized or unpolarized, reflects off the surface, it passes through the polarizing filter and becomes polarized. Reflected light that additionally passes through ice after leaving the polarizer becomes unpolarized. When viewed through a blocking polarizer filter, polarized light passing through ice appears bright due to the unpolarizing effect of ice. On the other hand, polarized light not passing through ice retains its polarization and appears dark when viewed through a blocking filter. Since the polarizing filter is between the surface and the viewer, the surface can be metallic, dielectric, or painted without affecting the results. If the proper blocking orientation for the viewer is not known in advance, the Stokes coefficients can be calculated if views are taken through a series of specified polarizing filters. The ratio of polarized light returned to the viewer compared to the unpolarized light returned to the viewer can then be calculated from any arbitrary position. A retroreflective substance on the surface further enhances the effect for systems employing an active illumination source located coaxially with or adjacent to the imaging system.

Abstract translation: 用于在表面上检测诸如冰的极化改变物质如冰的装置包括在表面和极化改变物质之间的表面上的偏振滤光器。 当偏振滤光器包括具有正交偏振特性的交替区域时，仅需要通过阻挡滤光器观察表面。 当偏振或非偏振的光从表面反射时，它通过偏振滤光片并变成极化的。 离开偏光片之后额外通过冰的反射光不被偏振。 当通过阻挡偏振器滤光器观察时，通过冰的偏振光由于冰的非偏振效应而变亮。 另一方面，当通过阻挡滤光片观察时，不通过冰的偏振光保持其极化并且看起来暗。 由于偏振滤光片位于表面和观察者之间，所以表面可以是金属的，电介质的或涂层的，而不影响结果。 如果预先不知道观察者的正确阻挡方向，则如果通过一系列指定的偏振滤光片进行视图，则可以计算斯托克斯系数。 然后可以从任何任意位置计算返回到观察者的偏振光与返回到观看者的非偏振光相比的比率。 表面上的回射物质进一步增强了使用与成像系统同轴或邻近的主动照明源的系统的效果。

公开(公告)号：US5805285A

公开(公告)日：1998-09-08

申请号：US818445

申请日：1997-03-17

Applicant: Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

Inventor： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

CPC classification number: G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

Abstract: Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.

Abstract translation: 公开了一种分散光学系统，在样品衬底系统调查光谱反射计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多个“订单”的可用性允许在更大范围内同时测量更基本上单个波长的光束，而不仅仅是基本上单个波长束的“订单” 的光存在。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。 还公开了分散光学对准的象限检测器装置，以及用于减小检测器元件极化状态依赖性的影响的补偿器装置。

公开(公告)号：US5757494A

公开(公告)日：1998-05-26

申请号：US422346

申请日：1995-04-14

Applicant: Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam

Inventor： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam

IPC: C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N23/20

CPC classification number: C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N23/20058

Abstract: The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.

Abstract translation: 本发明一般适用于使用相对较大波长范围的光谱可旋转和旋转元件椭偏仪。 公开了一种用于控制偏振光束的偏振状态的系统和方法，使得其处于用于测量由与样品系统相互作用产生的所述偏振光束的变化的极化状态检测器的灵敏度， 降噪，测量误差等。 举例说明的是一种系统和使用方法，用于在范围内同时设置测量的椭圆偏振ALPHA和椭圆偏振BETA参数值（或等价物），其范围内的传递函数的灵敏度和使用所述椭圆偏振ALPHA的数学回归和 发现表征PSI和DELTA常数值的样本系统的计算中的椭偏测量值BETA值，测量噪声和误差等都是可忽略的。 本发明允许从椭圆偏振仪系统获得精确和精确的样本系统PSI和DELTA值，其中偏振光束定向在除了布鲁斯特发生角度的主体之外的样本系统，允许以其它方式确定范围的DELTA值 不是不可能的，允许确定偏振光束的“携带”，并且提供用于确定所有斯托克斯矢量和米勒矩阵分量值的装置。 本发明还提供了用于使得添加到常规椭偏仪系统的所有系统部件基本上使终端用户在需要时不透明的装置，而不从所述椭偏仪系统中移除。