公开(公告)号：US20100134860A1

公开(公告)日：2010-06-03

申请号：US12500665

申请日：2009-07-10

Applicant: Takashi SHIMIZU ,  Kazuyuki Mori

Inventor： Takashi SHIMIZU ,  Kazuyuki Mori

IPC: G02B26/08 ,  H01L29/84

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/033

Abstract: A micro electro mechanical system device includes a fixed electrode that includes a first electrode group; and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group. Further, electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.

Abstract translation: 微机电系统装置包括：固定电极，其包括第一电极组; 以及在施加电压时相对于固定电极移动的可动电极，并且包括与第一电极组相对的第二电极组。 此外，第一电极组和第二电极组中的至少一个的电极经由电阻器连接。

公开(公告)号：US20090273255A1

公开(公告)日：2009-11-05

申请号：US12295027

申请日：2007-03-30

Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

IPC: H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

公开(公告)号：US07579746B2

公开(公告)日：2009-08-25

申请号：US11348788

申请日：2006-02-07

Applicant: Tomoaki Nakamura ,  Makoto Inoguchi

Inventor： Tomoaki Nakamura ,  Makoto Inoguchi

IPC: H02N1/00 ,  G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/042

Abstract: An actuator includes: a base section; an object having a body portion and a holding portion holding the body portion in a manner that the body portion is movable against the base section; a movable comb-tooth portion extending from the object side in a direction substantially perpendicular to a formation direction of the holding portion; and a fixed comb-tooth portion which extends from the base section in a direction substantially perpendicular to the formation direction of the holding portion and which is arranged at a position at which the fixed comb-tooth portion is engaged with but having a gap from the movable comb-tooth portion; the fixed comb-tooth portion being composed of a steady-voltage-receiving fixed comb tooth that steadily supplies a drive voltage and a variable-voltage-receiving fixed comb tooth that receives a controlled voltage.

Abstract translation: 致动器包括：基部; 物体具有主体部分和保持部分，其保持主体部分，使得主体部分能够相对于基部移动; 从所述物体侧沿与所述保持部的形成方向大致垂直的方向延伸的可动梳齿部; 以及固定梳齿部，其从与所述保持部的形成方向大致正交的方向从所述基部延伸，并且所述固定梳齿部配置在所述固定梳齿部与所述固定梳齿部接合的位置， 活动梳齿部分; 固定梳齿部分由稳定地提供驱动电压的稳压接收固定梳齿和接受受控电压的可变电压接收固定梳齿构成。

公开(公告)号：US07542188B2

公开(公告)日：2009-06-02

申请号：US11019519

申请日：2004-12-23

Applicant: Guangya Zhou ,  Logeeswaran Vj ,  Fook Siong Chau

Inventor： Guangya Zhou ,  Logeeswaran Vj ,  Fook Siong Chau

IPC: G02B26/10 ,  G02B26/08 ,  H02N1/00

CPC classification number: H02N1/008 ,  B33Y30/00 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/056 ,  G02B26/0808 ,  G02B26/106

Abstract: An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that connects the mass platform to at least one fixed support, and at least one driving actuator that drives the mass platform into an in-plane vibratory motion which can be rotational and/or translational. The apparatus may also be formed by a mass platform having at least one diffraction grating formed thereon as the scanning element, at least one driving actuator connected to the mass platform through at least one flexure structure. The driving actuator drives the mass platform into an in-plane vibratory motion.

Abstract translation: 一种光学扫描装置包括：具有形成在其上的至少一个衍射光栅作为扫描元件的平面内振动质量平台;将质量平台连接至至少一个固定支撑件的至少一个挠曲结构;以及至少一个驱动致动器，其驱动 质量平台成为可以旋转和/或平移的平面内的振动运动。 该装置还可以由其上形成有至少一个衍射光栅作为扫描元件的质量平台形成，至少一个驱动致动器通过至少一个弯曲结构连接到质量平台。 驱动执行器将质量平台驱动到平面内的振动运动中。

公开(公告)号：US20080284028A1

公开(公告)日：2008-11-20

申请号：US12144191

申请日：2008-06-23

Applicant: Dennis S. Greywall

Inventor： Dennis S. Greywall

IPC: H01L23/48

CPC classification number: B81C1/00404 ,  B81B2201/033

Abstract: A device fabricated using a multi-layered wafer that has an embedded etch mask adapted to map a desired device structure onto an adjacent (poly)silicon layer. Due to the presence of the embedded mask, it becomes possible to delay the etching that forms the mapped structure in the (poly)silicon layer until a relatively late fabrication stage. As a result, flatness of the (poly)silicon layer is preserved for the deposition of any necessary over-layers, which substantially obviates the need for filling the voids created by the structure formation with silicon oxide.

Abstract translation: 使用具有适于将期望的器件结构映射到相邻（多）硅层上的嵌入式蚀刻掩模的多层晶片制造的器件。 由于嵌入式掩模的存在，可以延迟在（多）硅层中形成映射结构的蚀刻，直到相对较晚的制造阶段。 结果，保留了（多）硅层的平坦度，用于沉积任何必需的上层，这基本上消除了填充由氧化硅形成的结构形成的空隙的需要。

公开(公告)号：US20080272447A1

公开(公告)日：2008-11-06

申请号：US12136722

申请日：2008-06-10

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L29/84

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US20080197748A1

公开(公告)日：2008-08-21

申请号：US10565980

申请日：2004-07-26

Applicant: Matan Naftali ,  David Elata

Inventor： Matan Naftali ,  David Elata

IPC: H02N1/00 ,  B81C1/00

CPC classification number: G02B26/0841 ,  B81B3/0043 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  Y10T29/49002

Abstract: A method for providing a vertical comb drive. The method comprises: fabricating a device comprising rotor comb element, the rotor element comb comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, and at least one of a plurality of stator comb elements, comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, adapted to be interlaced with the rotor, all on a single layer of a substrate.

Abstract translation: 一种用于提供垂直梳齿驱动的方法。 该方法包括：制造包括转子梳形元件的装置，所述转子元件梳包括主体和梳状布置中的多个基本平行的延伸部，以及多个定子梳形元件中的至少一个，包括主体和 多个基本上平行的梳齿布置的延伸件，适于与转子交错，全部在基底的单层上。

公开(公告)号：US07396476B2

公开(公告)日：2008-07-08

申请号：US11275575

申请日：2006-01-17

Applicant: Jeffrey A. Ridley ,  James A. Neus

Inventor： Jeffrey A. Ridley ,  James A. Neus

IPC: C23F1/00

CPC classification number: B81C1/00698 ,  B81B2201/0271 ,  B81B2201/033 ,  B81C2201/0132

Abstract: Methods of fabricating comb drive devices utilizing one or more sacrificial etch-buffers are disclosed. An illustrative fabrication method may include the steps of etching a pattern onto a wafer substrate defining one or more comb drive elements and sacrificial etch-buffers, liberating and removing one or more sacrificial etch-buffers prior to wafer bonding, bonding the etched wafer substrate to an underlying support substrate, and etching away the wafer substrate. In some embodiments, the sacrificial etch-buffers are removed after bonding the wafer to the support substrate. The sacrificial etch-buffers can be provided at one or more selective regions to provide greater uniformity in etch rate during etching. A comb drive device in accordance with an illustrative embodiment can include a number of interdigitated comb fingers each having a more uniform profile along their length and/or at their ends, producing less harmonic distortion during operation.

Abstract translation: 公开了使用一个或多个牺牲蚀刻缓冲器制造梳状驱动装置的方法。 示例性的制造方法可以包括以下步骤：将图案蚀刻到限定一个或多个梳状驱动元件和牺牲蚀刻缓冲器的晶片衬底上，在晶片接合之前释放和去除一个或多个牺牲蚀刻缓冲器，将蚀刻的晶片衬底接合到 底层支撑衬底，并蚀刻掉晶片衬底。 在一些实施例中，在将晶片接合到支撑衬底之后去除牺牲蚀刻缓冲器。 可以在一个或多个选择性区域处提供牺牲蚀刻缓冲器，以在蚀刻期间提供更大的蚀刻速率均匀性。 根据说明性实施例的梳状驱动装置可以包括多个交叉指状梳，每个梳指在其长度和/或其端部具有更均匀的轮廓，在操作期间产生较少的谐波失真。

公开(公告)号：US07357874B2

公开(公告)日：2008-04-15

申请号：US11733821

申请日：2007-04-11

Applicant: Steven H. Moffat ,  John M. Miller

Inventor： Steven H. Moffat ,  John M. Miller

IPC: C23F1/00

CPC classification number: B81C1/00174 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  H02N1/008

Abstract: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

Abstract translation: 本发明涉及一种制造具有松弛横向对准公差的交错垂直梳驱动致动器的方法。 首先使用自对准的双层掩模从前侧蚀刻晶片的器件层，以限定移动和静止梳状物的指状指状物。 第二蚀刻步骤用于通过选择性地去除它们的顶部部分来垂直变薄两组手指之一。 然后将晶片的前侧结合到载体晶片。 然后从器件层的背面选择性地蚀刻晶片，以便去除第二组指状物的下部，由此形成具有垂直偏移的指状物的交错的移动和静止梳。

公开(公告)号：US07279761B2

公开(公告)日：2007-10-09

申请号：US10943097

申请日：2004-09-15

Applicant: Cenk Acar ,  Andrei M. Shkel

Inventor： Cenk Acar ,  Andrei M. Shkel

IPC: H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0056 ,  B81B2201/033 ,  B81B2203/051 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125

Abstract: A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fingers is coupled to a movable stage. The stage is moved from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other. The stage is carried by two pairs flexures which maintain the stability of motion of the stage and when in the post-release position provide stiffness which prevents deflection of the set of fingers coupled to the stage. The stage and hence the assembled sets of fingers are then locked into the post-release position.

Abstract translation: 利用电容传感器或致动器的MEMS器件通过最初制造包含传感器或致动器的电容性组件来增强，该电容式组件包括非指令配置中的两组交叉指状物。 两组手指中的一组联接到可移动台。 舞台从初始位置移动到释放位置，其中两组交叉指状物彼此交错。 舞台通过两对弯曲进行，其保持舞台的运动的稳定性，并且当在释放位置时提供刚度，其防止联接到舞台的手指组的偏转。 然后将舞台和组合的手指组锁定到后释放位置。