Abstract:
An accessory for a spectrometer for carrying out measurements of specular reflectance of a sample. The accessory is designed so that all components can be located in a housing and the sample can be located horizontally on a top-plate of the housing with the components disposed below the plane of that plate.
Abstract:
A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.
Abstract:
The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.
Abstract:
A process for measuring a point comprising at least one spectrometer and a measuring transducer connected thereto for picking up, processing and forwarding measuring signals from the spectrometer, the spectrometer being arranged in an armature for introduction into a process or a process fluid and the data produced by the spectrometer is used to control a process. The armature comprises a housing for receiving the spectrometer and for securing the armature to a process container containing process fluid and a sensor holder with an inbuilt sensor, interacting with the spectrometer and which is guided in an axially displaceable manner in the armature, whereby the sensor holder protrudes into the process fluid in an extended state.
Abstract:
A scanning confocal microscopy system and apparatus, especially useful for endoscopy with a flexible probe which is connected to the end of an optical fiber (9). The probe has a grating (12) and a lens (14) which delivers a beam of multi-spectral light having spectral components which extend in one dimension across a region of an object and which is moved to scan in another dimension. The reflected confocal spectrum is measured to provide an image of the region.
Abstract:
A detection system is used during irradiation of an interaction region of a structure including embedded material with laser light. The detection system includes a collimating lens positioned to receive light emitted from the interaction region. The detection system further includes an optical fiber optically coupled to the collimating lens and a spectrometer optically coupled to the optical fiber. The spectrometer is adapted for analysis of the light for indications of the embedded material within the interaction region. The spectrometer includes an input slit adapted to receive light from the optical fiber. The input slit has a width selected to provide sufficient light transmittance and sufficient resolution. The spectrometer further includes an optical grating adapted to receive light from the input slit and to separate the light into a spectrum of wavelengths. The spectrometer further includes a collection lens adapted to receive a selected range of wavelengths of the separated light from the optical grating. The spectrometer further includes a light sensor adapted to receive the selected range of wavelengths and to generate a signal corresponding to an intensity of the received light.
Abstract:
A colorimeter for measuring a color of light includes a color sensing device, a hanging means, and a means for reducing color distortion. The hanging means hangs the color sensing device in an operative relationship relative to a color producing device. The means for reducing color distortion reduces color distortion on the color producing device while the color sensing device is in the operative relationship relative to the color producing device.
Abstract:
A compact handy type inspection instrument is provided for conducting readily nondestructive inspection of an inspection object in any working site. The inspection instrument comprises a spectroscope assembly containing an optical fiber-arranging member for arranging and holding a light-outputting end of an optical fiber bundle to be flat in a uniform layer thickness, a packaged compact spectroscope which is enclosed in a package having a slit-shaped light inlet window on a side confronting the rectilinear light-outputting end of the optical fiber-arranging member and is constituted of linear type continuous variable interference filter, a microlens array, and a linear type silicon array sensor assembled in the named order from the side of the light inlet window toward the opposite side, and a positioning device for positioning the rectilinear light-outputting end of the optical fiber bundle to fit to the light input window; and a detection head; incorporated together into a main body casing.
Abstract:
Methods of treating, preventing and/or managing macular degeneration are disclosed. Specific embodiments encompass the administration of a selective cytokine inhibitory drug, or a pharmaceutically acceptable salt, solvate, hydrate, stereoisomer, clathrate, or prodrug thereof, alone or in combination with a second active agent and/or surgery. Pharmaceutical compositions, single unit dosage forms, and kits suitable for use in methods of the invention are also disclosed.
Abstract:
A spectrometer, or a spectral instrument using multiple non-interfering optical beam paths and special optical elements. The special optical elements for use with the instrument are used for directing the optical beam and/or altering the form of the beam. The instrument has the potential, depending upon the totality of the optical components incorporated into the instrument, to be a monochromator, a spectroradiometer, a spectrophotometer and a spectral source. The spectral instrument may further be a part of the spectral system. The system may include the spectral instrument, a power module and means for remote control of the instrument. Such remote control may be by use of a personal computer or a control system dedicated to the control, measurement and analysis of the collected information. The multiple non-interfering beam paths are created using specially designed optical elements such as a diffraction grating, a splitter box, a zero back-lash drive system for movement of the grating element. The orientation of and a physical/spatial relationship between the field lenses, slits, return mirror, reflecting prism, turning lenses all define the multiple, preferably two paths. Particularly, there is a double pass through the grating to increase dispersion, reduce scatter while maintaining a perfect temperature independent spectral match for the second pass. Using the same grating twice reduces scatter by about a factor of 1000, increases the dispersion by a factor of two, and eliminates any temperature-related mechanical spectral drift which often is present with two separate monochromators. Because of the specially designed grating structure, the grating can cause the concurrent diffraction of a plurality of incident optical beams, each of which beams have different angles of incidence and different angles of reflection. The path of the incident and the reflected beam to and from the grating is “off-axis”. That is, the beams going to and from the grating do not use the optical axis of the grating structure.