公开(公告)号：US20160094760A1

公开(公告)日：2016-03-31

申请号：US14964781

申请日：2015-12-10

Applicant: Orbotech Ltd.

Inventor： Yigal KATZIR ,  Itay GUR-ARIE ,  Yacov MALINOVICH

IPC: H04N3/14 ,  H04N5/3745 ,  H04N5/374

CPC classification number: H04N3/155 ,  G01N21/8851 ,  G01N21/8901 ,  G01N21/956 ,  H01L27/14645 ,  H04N5/3743 ,  H04N5/37455

Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.

公开(公告)号：US20150324968A1

公开(公告)日：2015-11-12

申请号：US14272745

申请日：2014-05-08

Applicant: ORBOTECH LTD.

Inventor： Uri GOLD ,  Ram ORON

IPC: G06T7/00

CPC classification number: G06T7/004 ,  G01N21/88 ,  G03F7/00 ,  G03F7/70383 ,  G03F7/70516 ,  G06T7/0004 ,  G06T7/521 ,  G06T7/80 ,  G06T2207/30164

Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.

Abstract translation: 光学装置包括保持工件的安装件。 光学头阵列将相应的辐射图案投影到工件上。 校准组件捕获相应图案的图像。 校准组件安装在其上的运动组件在光学头阵列与安装座之间的多个不同位置之间传送校准组件，以便在每个不同位置处截取和成像投影的相应图案 通过不同的一个光学头。 处理器处理由校准组件在不同位置拍摄的图像，以便监视设备的操作。

公开(公告)号：US20040248346A1

公开(公告)日：2004-12-09

申请号：US10857887

申请日：2004-06-02

Applicant: ORBOTECH LTD

Inventor： Peter Rusian ,  Arie Glazer ,  Mannie Dorfan ,  Yoel Raab

IPC: H01L021/00

CPC classification number: H01L21/02667 ,  H01L21/2022 ,  H01L21/2026 ,  H01L27/12 ,  H01L27/1281 ,  H01L29/66757 ,  H01L29/78603 ,  H01L29/78675

Abstract: A method for fabricating a semiconductor device includes providing a layer of a semiconductor material on at least a portion of a surface of a substrate, and forming along the surface a capillary structure, which is in communication with the semiconductor material but is at least partially empty of the semiconductor material. The semiconductor material is heated, so as to cause the semiconductor material to melt and flow into the capillary structure. Upon allowing the semiconductor material to cool, a crystal is seeded in the capillary structure and spreads from the capillary structure through an area of the semiconductor material.

Abstract translation: 一种制造半导体器件的方法包括在衬底的表面的至少一部分上提供半导体材料层，并且沿表面形成与半导体材料连通但至少部分为空的毛细结构 的半导体材料。 半导体材料被加热，以使半导体材料熔化并流入毛细结构。 在允许半导体材料冷却时，将晶体接种在毛细结构中并从毛细结构扩散通过半导体材料的区域。

公开(公告)号：US20040137731A1

公开(公告)日：2004-07-15

申请号：US10694392

申请日：2003-10-28

Applicant: ORBOTECH LTD

Inventor： Arie Glazer ,  Abraham Gross

IPC: H01L021/302 ,  H01L021/461

CPC classification number: H01L27/1285 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/083 ,  B23K26/12 ,  B23K26/127 ,  B23K26/147 ,  B23K26/32 ,  B23K26/34 ,  B23K2103/50 ,  C23C14/5813 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1214 ,  H01L27/127

Abstract: A system and method for selectable area laser treatment of a substrate, such as thin film transistors, the system including a holder holding a substrate in proximity to reactant, and laser beams each addressing independently selectable mutually set apart locations on the substrate to induce a reaction between the substrate and the reactant.

Abstract translation: 用于可选区域激光处理衬底（例如薄膜晶体管）的系统和方法，该系统包括保持靠近反应物的衬底的保持器，以及激光束，每个激光束在衬底上独立地可选择地相互设置的分离位置以引起反应 在底物和反应物之间。

公开(公告)号：US20030024912A1

公开(公告)日：2003-02-06

申请号：US10265420

申请日：2002-10-07

Applicant: ORBOTECH LTD

Inventor： Abraham Gross ,  Zvi Kotler ,  Eliezer Lipman

IPC: B23K026/067 ,  B23K026/38

CPC classification number: B23K26/073 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/42 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50 ,  G02B26/0833 ,  G02B27/106 ,  G02B27/143 ,  G02B27/145 ,  H01S3/005 ,  H05K3/0026

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

公开(公告)号：US20020038510A1

公开(公告)日：2002-04-04

申请号：US09968878

申请日：2001-10-03

Applicant: ORBOTECH, LTD

Inventor： Nissim Savareigo ,  Hila Shteinberg

IPC: H01L021/00 ,  H01L021/66 ,  G01R031/26

CPC classification number: G06T7/0004 ,  G01N21/8851 ,  G06T7/60 ,  G06T2207/30141 ,  Y10T29/49004 ,  Y10T29/49155

Abstract: An automated optical inspection method detects width defects by employing locally applied width information. A defect determination is based on proximal width information of nearby parts of a conductor. Automated optical inspection systems inspect the surfaces of patterned objects for line width defects, employing line width data that is at least partially obtained automatically from analyzing a reference image of a non-defective patterned object.

Abstract translation: 自动光学检测方法通过采用局部应用的宽度信息来检测宽度缺陷。 缺陷确定是基于导体附近部分的近端宽度信息。 自动光学检查系统检查图形对象的表面，以获得线宽缺陷，采用从分析无缺陷图案对象的参考图像至少部分地获得的线宽数据。

公开(公告)号：US20010002935A1

公开(公告)日：2001-06-07

申请号：US09730381

申请日：2000-12-05

Applicant: ORBOTECH LTD.

Inventor： Anat Greenberg ,  Gregory Gutarts ,  Anna Yaari ,  Michael Barel ,  Jacob Nadivi

IPC: G06K009/00

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G06T2207/30141

Abstract: This invention discloses a method for printed circuit board (PCB) inspection, including providing a multiplicity of PCBs placed on an inspection panel, defining each non-identical PCB in terms of geometry and features which are to be inspected, grouping the PCBs into at least one cluster, the at least one cluster being defined in terms of an amount, location and orientation of the PCBs in the at least one cluster, creating a reference image for the panel defined by a location and orientation of the at least one cluster on the panel and inspecting the panel by comparing sensed information with the reference image.

Abstract translation: 本发明公开了一种用于印刷电路板（PCB）检查的方法，包括提供放置在检查面板上的多个PCB，根据要检查的几何和特征来定义每个不相同的PCB，将PCB分组成至少 一个群集，所述至少一个群集根据所述至少一个群集中的所述多个区域的数量，位置和取向来定义，为所述至少一个群集上的所述至少一个群集的位置和取向所定义的面板创建参考图像 并通过将感测信息与参考图像进行比较来检查面板。

公开(公告)号：US12276897B2

公开(公告)日：2025-04-15

申请号：US17903734

申请日：2022-09-06

Applicant: Orbotech Ltd.

Inventor： Itay Peled ,  John Linden

IPC: G01J1/42 ,  G02F1/33

Abstract: An optical scanner may include a sampler to receive an optical beam and provide a sampled beam including a portion of the optical beam, a dispersive element to spectrally disperse the sampled beam along a dispersion direction, one or more detectors to receive at least a portion of the sampled beam dispersed along the dispersion direction, one or more acousto-optic deflectors (AODs) configured to deflect the optical beam from the sampler, and a controller. The controller may determine a center of mass of the sampled beam dispersed along the dispersion direction based on signals from at least one of the one or more detectors, and generate a drive signal for at least one of the one or more AODs to deflect the optical beam from the sampler along a selected deflection angle based on the center of mass.

公开(公告)号：US20250102558A1

公开(公告)日：2025-03-27

申请号：US18472508

申请日：2023-09-22

Applicant: Orbotech Ltd.

Inventor： Arie Glazer

IPC: G01R31/26 ,  G01R31/27

Abstract: The system includes a laser generator, an antenna, and a processor. The laser generator is configured to emit a pulsed laser beam toward an LED. The LED generates a photovoltaic radio frequency signal when radiated by the pulsed laser beam. The antenna is configured to receive the photovoltaic radio frequency signal generated by the LED. The processor is in electronic communication with the antenna and is configured to read the photovoltaic radio frequency signal and determine whether the LED is a defective LED or a functioning LED based on the photovoltaic radio frequency signal.

公开(公告)号：US20250037261A1

公开(公告)日：2025-01-30

申请号：US18776530

申请日：2024-07-18

Applicant: Orbotech Ltd.

Inventor： Hagit Schechter

IPC: G06T7/00 ,  G06V10/764 ,  G06V10/774 ,  G06V10/82 ,  G06V10/94

Abstract: A system includes a light source configured to generate a beam of light, a stage configured to hold a workpiece in the path of the beam of light, a detector configured to capture an image of the workpiece based on the beam of light reflected from the workpiece, and a processor in electronic communication with the detector. The processor is configured to inspect the image of the workpiece received from the detector using an artificial intelligence (AI) inference model that is trained using a combined dataset of manually tagged data and AI-tagged data, and the AI inference model is stored on an electronic data storage unit that is in electronic communication with the processor.