公开(公告)号：US20200013580A1

公开(公告)日：2020-01-09

申请号：US16453699

申请日：2019-06-26

Applicant: FEI Company

Inventor： Alexander Henstra ,  Pleun Dona

IPC: H01J37/153 ,  H01J37/244 ,  H01J37/22

Abstract: Disclosed herein are electron microscopes with improved imaging. An example electron microscope at least includes an illumination system, for directing a beam of electrons to irradiate a specimen, an elongate beam conduit, through which the beam of electrons is directed; a multipole lens assembly configured as an aberration corrector, and a detector for detecting radiation emanating from the specimen in response to said irradiation, wherein at least a portion of said elongate beam conduit extends at least through said aberration corrector and has a composite structure comprising an outer tube of electrically insulating material, and an inner skin of electrically conductive material with an electrical conductivity σ and a thickness t, with σt

公开(公告)号：US20170213691A1

公开(公告)日：2017-07-27

申请号：US15218512

申请日：2016-07-25

Applicant: FEI Company

Inventor： Pleun Dona ,  Luigi Mele

IPC: H01J37/16 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: Presented is a holder assembly for cooperating with a nanoreactor and an electron microscope. The holder assembly has a distal end for holding the nanoreactor. The volume has a fluid inlet and outlet. The holder assembly has fluid supply and outlet tubes which in working are connected to the fluid inlet and outlet of the nanoreactor. In working, the connection between the fluid inlet and outlet and the respective supply and outlet tubes are sealed by sealing elements. The holder assembly has a recess which, when the nanoreactor is attached and the holder is inserted into the evacuated portion of an electron microscope, forms a sealed pre-vacuum volume between the holder and the nanoreactor, with the pre-vacuum volume being evacuated via a pre-vacuum channel such that any fluid leakage is pumped away and does not enter the evacuated part of the electron microscope.

公开(公告)号：US09524850B2

公开(公告)日：2016-12-20

申请号：US13769040

申请日：2013-02-15

Applicant: FEI Company ,  Delft University of Technology

Inventor： Hendrik Willem Zandbergen ,  Pleun Dona ,  Gerardus Nicolaas Anne van Veen

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A holder assembly comprises a first and a separable second part, the first part detachable from the second part, the first part comprising a tube and an environmental cell interface and the second part comprising an electron microscope interface, as a result of which the first part can be cleaned at high temperatures without exposing the second part to said high temperature.By forming the holder assembly from detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000° C., clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.

Abstract translation: 通过从可拆卸部件形成保持器组件，可以通过将其加热至例如1000℃的高温来清洁一部分，可以通过还原碳来除去管中的堵塞，同时保持另一部分（通常 包括机械配件，滚珠轴承，滑块等）冷却。 可以通过吹送例如通过管的氧气或氢气来提高清洁。

公开(公告)号：US20160244871A1

公开(公告)日：2016-08-25

申请号：US15052716

申请日：2016-02-24

Applicant: FEI Company

Inventor： Johannes Jacobus Lambertus Mulders ,  Petrus Hubertus Franciscus Trompenaars ,  Pleun Dona

IPC: C23C14/22 ,  B05B1/14 ,  B05B7/24 ,  B05B1/00

CPC classification number: C23C14/221 ,  B05B1/005 ,  B05B1/14 ,  B05B7/24 ,  H01J37/30 ,  H01J2237/006 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: A Gas Injection System (GIS) applies at least two fluids in the vacuum chamber of a particle-optical apparatus, the gas injection system having two or more channels. Each channel is connected to an associated reservoir holding a fluid at a first side and having an associated exit opening at the other side, the exit sides individually exiting to the outside of the GIS via a nozzle with a nozzle opening. At least two exit openings separated by less than the diameter of the channels near the exit openings, preferably concentric to each other.

Abstract translation: 气体注入系统（GIS）在颗粒光学装置的真空室中应用至少两种流体，气体注入系统具有两个或更多个通道。 每个通道连接到在第一侧保持流体并且在另一侧具有相关联的出口的相关储存器，出口侧通过具有喷嘴开口的喷嘴单独地离开GIS的外部。 至少两个出口开口分开，小于靠近出口开口的通道的直径，优选彼此同心。

公开(公告)号：US20130213439A1

公开(公告)日：2013-08-22

申请号：US13769040

申请日：2013-02-15

Applicant: FEI Company ,  Delft University of Technology

Inventor： Hendrik Willem Zandbergen ,  Pleun Dona ,  Gerardus Nicolaas Anne van Veen

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A holder assembly comprises a first and a separable second part, the first part detachable from the second part, the first part comprising a tube and an environmental cell interface and the second part comprising an electron microscope interface, as a result of which the first part can be cleaned at high temperatures without exposing the second part to said high temperature.By forming the holder assembly from detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000° C., clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.

Abstract translation: 保持器组件包括第一和可分离的第二部分，第一部分可与第二部分分离，第一部分包括管和环境细胞界面，第二部分包括电子显微镜界面，结果第一部分 可以在高温下进行清洁，而不会使第二部分暴露于所述高温。 通过从可拆卸部件形成保持器组件，可以通过将其加热至例如1000℃的高温来清洁一部分，可以通过还原碳来除去管中的堵塞，同时保持另一部分（通常 包括机械配件，滚珠轴承，滑块等）冷却。 可以通过吹送例如通过管的氧气或氢气来提高清洁。

公开(公告)号：US11417498B2

公开(公告)日：2022-08-16

申请号：US16929752

申请日：2020-07-15

Applicant: FEI Company

Inventor： Bart Jozef Janssen ,  Pleun Dona

IPC: H01J37/28 ,  H01J37/244

Abstract: The invention relates to a method of manufacturing a charged particle detector, comprising the steps of providing a sensor device, such as an Active Pixel Sensor (APS). Said sensor device at least comprises a substrate layer and a sensitive layer. The method further comprises the step of providing a mechanical supporting layer and connecting said mechanical supporting layer to said sensor device. After connection, the sensitive layer is situated in between said substrate layer and said mechanical supporting layer. By connecting the mechanical supporting layer, it is possible to thin said substrate layer for forming said charged particle detector. The mechanical supporting layer forms part of the manufactured detector. The detector can be used in a charged particle microscope, such as a Transmission Electron Microscope for direct electron detection.

公开(公告)号：US20220208507A1

公开(公告)日：2022-06-30

申请号：US17139859

申请日：2020-12-31

Applicant: FEI Company

Inventor： Alexander Henstra ,  Pleun Dona

IPC: H01J37/153 ,  H01J37/28

Abstract: Systems for reducing the generation of thermal magnetic field noise in optical elements of microscope systems, are disclosed. Example microscopy optical elements having reduced Johnson noise generation according to the present disclosure comprises an inner core composed of an electrically isolating material, and an outer coating composed of an electrically conductive material. The product of the thickness of the outer coating and the electrical conductivity is less than 0.01Ω−1. The outer coating causes a reduction in Johnson noise generated by the optical element of greater than 2×, 3×, or an order of magnitude or greater. In a specific example embodiment, the optical element is a corrector system having reduced Johnson noise generation. Such a corrector system comprises an outer magnetic multipole, and an inner electrostatic multipole. The inner electrostatic multipole comprises an inner core composed of an electrically isolating material and an outer coating composed of an electrically conductive material.

公开(公告)号：US20210366684A1

公开(公告)日：2021-11-25

申请号：US17325946

申请日：2021-05-20

Applicant: FEI Company

Inventor： Pleun Dona ,  Casper Maria Smit

IPC: H01J37/147 ,  H01J37/28

Abstract: An axial alignment assembly (100) comprising a first body and a second body. The first body has a substantially cylindrical outer jacket, and has a first alignment axis. The second body comprises a substantially cylindrical inner jacket, and has a second alignment axis. The second body is positioned with respect to said first body in so that said inner jacket faces said outer jacket and in between said inner jacket and said outer jacket a substantially annular recess is formed. The axial alignment assembly further comprises a plurality of resilient elements that are positioned within said annular recess, wherein each resilient element is in contact with said outer jacket of said first body and with said inner jacket of said second body. Each resilient element exerts a force onto said outer jacket and onto said inner jacket for aligning said first alignment axis and said second alignment axis.

公开(公告)号：US11101104B2

公开(公告)日：2021-08-24

申请号：US16557199

申请日：2019-08-30

Applicant: FEI Company

Inventor： Maarten Kuijper ,  Ondrej Ludmil Shanel ,  Mathijs Petrus van den Boogaard ,  Pleun Dona

IPC: H01J37/26 ,  G06K9/00 ,  H01J37/20 ,  H01J37/10 ,  H01J37/22

Abstract: Cryo compatible sample grids having multi-modal cryo-EM compatible GUIDs, according to the present disclosure include an outer support structure that defines a region of the grid for holding one or more samples, and a plurality of inner support structures that define a plurality of apertures that are each configured to hold a sample. Cryo compatible sample grids further include a first identifier located on the outer support structure, and a second identifier located within the region of the grid for holding the one or more samples. The first identifier is readable with an optical detector, while the second identifier is readable with an electron detector (e.g., within an electron microscope). Specifically, the second identifier is readable with an electron detector when one or more teeth and/or holes that comprise the second identifier are filled with ice from a vitrification process.

公开(公告)号：US11101101B2

公开(公告)日：2021-08-24

申请号：US16855536

申请日：2020-04-22

Applicant: FEI Company

Inventor： Bart Buijsse ,  Bas Hendriksen ,  Pleun Dona

IPC: H01J37/22 ,  H01J37/147 ,  H01J37/28 ,  H01J37/26

Abstract: Methods and systems for implementing laser-based phase plate image contrast enhancement are disclosed herein. An example method at least includes forming at least one optical peak in a diffraction plane of an electron microscope, and directing an electron beam through the at least one optical peak at a first location, where the first location determines an amount of phase manipulation the optical peak imparts to an electron of the electron beam.