公开(公告)号：US20180224377A1

公开(公告)日：2018-08-09

申请号：US15928886

申请日：2018-03-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masashi ITO ,  Katsumi SHIBAYAMA ,  Kazuto OFUJI ,  Hiroki OYAMA ,  Yoshihiro MARUYAMA

IPC: G01N21/65

CPC classification number: G01N21/658

Abstract: A SERS unit 1A comprises a SERS element 2 having a substrate and an optical function part 20 formed on the substrate, the optical function part 20 for generating surface-enhanced Raman scattering; a measurement board 3 supporting the SERS element 2 upon measurement; and a holding part 4 mechanically holding the SERS element 2 in the measurement board 3.

公开(公告)号：US20170261435A1

公开(公告)日：2017-09-14

申请号：US15509549

申请日：2015-09-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroki OYAMA ,  Katsumi SHIBAYAMA ,  Masashi ITO ,  Kazuto OFUJI ,  Yoshihiro MARUYAMA

IPC: G01N21/65

CPC classification number: G01N21/658 ,  G01N2021/651

Abstract: A surface-enhanced Raman scattering unit includes a surface-enhanced Raman scattering element including an optical functional portion that causes surface-enhanced Raman scattering, and a support member that supports the surface-enhanced Raman scattering element. The surface-enhanced Raman scattering element is fixed to the support member due to a magnetic force.

公开(公告)号：US20240019304A1

公开(公告)日：2024-01-18

申请号：US18373532

申请日：2023-09-27

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki HIROSE ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Toshimitsu KAWAI ,  Hiroki OYAMA ,  Yumi TERAMACHI

IPC: G01J3/26 ,  G02B26/00 ,  G01J3/02 ,  G01J5/0802 ,  G01J5/20 ,  G02F1/21 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/0232 ,  H01L31/0304

CPC classification number: G01J3/26 ,  G02B26/00 ,  G01J3/0213 ,  G01J3/0256 ,  G01J3/0291 ,  G01J5/0802 ,  G01J5/20 ,  G02F1/21 ,  H01L31/02005 ,  H01L31/0203 ,  H01L31/02327 ,  H01L31/03046 ,  G01J5/045

Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.

公开(公告)号：US20230118479A1

公开(公告)日：2023-04-20

申请号：US18083074

申请日：2022-12-16

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroki OYAMA ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Masaki HIROSE ,  Toshimitsu KAWAI ,  Yumi KURAMOTO

IPC: G01J3/26 ,  H01L21/673 ,  B65D85/48 ,  H01L21/677 ,  G02B26/00 ,  G02B26/02

Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.

公开(公告)号：US20220333988A1

公开(公告)日：2022-10-20

申请号：US17847881

申请日：2022-06-23

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki HIROSE ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Toshimitsu KAWAI ,  Hiroki OYAMA

IPC: G01J3/26 ,  G01J1/04 ,  G02B26/00 ,  G01J3/02 ,  G01J3/45 ,  G02F1/21

Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.

公开(公告)号：US20210131870A1

公开(公告)日：2021-05-06

申请号：US17126297

申请日：2020-12-18

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi KASAHARA ,  Katsumi SHIBAYAMA ,  Masaki HIROSE ,  Toshimitsu KAWAI ,  Hiroki OYAMA ,  Yumi KURAMOTO

IPC: G01J3/26 ,  B23K26/53 ,  B23K26/00 ,  B23K26/064 ,  B81B3/00 ,  B81C1/00 ,  G01J3/02 ,  G02B5/28 ,  G02B26/00 ,  B23K26/06

Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.

公开(公告)号：US20200310112A1

公开(公告)日：2020-10-01

申请号：US16765577

申请日：2018-11-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki HIROSE ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Toshimitsu KAWAI ,  Hiroki OYAMA ,  Yumi KURAMOTO

IPC: G02B27/00 ,  H01L27/144 ,  H01L31/0203 ,  H01L31/0216 ,  H01L31/18 ,  B08B5/02 ,  B08B13/00

Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.

公开(公告)号：US20200309637A1

公开(公告)日：2020-10-01

申请号：US16765564

申请日：2018-11-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi KASAHARA ,  Katsumi SHIBAYAMA ,  Masaki HIROSE ,  Toshimitsu KAWAI ,  Hiroki OYAMA ,  Yumi KURAMOTO

IPC: G01M11/00 ,  G01R1/067 ,  G02B5/28 ,  G01J3/02 ,  G01J3/26 ,  G01R31/52 ,  G01R27/26 ,  G02B26/00

Abstract: An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.

公开(公告)号：US20200292386A1

公开(公告)日：2020-09-17

申请号：US16765765

申请日：2018-11-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroki OYAMA ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Masaki HIROSE ,  Toshimitsu KAWAI ,  Yumi KURAMOTO

IPC: G01J3/26 ,  H01L21/673

Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second minor portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.

公开(公告)号：US20200232852A1

公开(公告)日：2020-07-23

申请号：US16843244

申请日：2020-04-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki HIROSE ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Toshimitsu KAWAI ,  Hiroki OYAMA ,  Yumi TERAMACHI

IPC: G01J5/08 ,  G02B26/00 ,  G01J3/26 ,  G01J3/02 ,  G01J5/20 ,  G02F1/21 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/0232 ,  H01L31/0304

Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector, and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Pert interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.