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公开(公告)号：US20230358610A1
公开(公告)日：2023-11-09
申请号：US18223209
申请日：2023-07-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Kei TABATA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
CPC classification number: G01J3/26 , G01J3/0297 , G01J3/45 , G02B5/281 , G02B26/001
Abstract: A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US20200310104A1
公开(公告)日：2020-10-01
申请号：US16765529
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yumi KURAMOTO , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA
IPC: G02B26/00 , H01L31/0203 , H01L31/0216 , H01L27/144 , G01N21/95 , G01N21/45
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. In the wafer, a gap is formed between the first mirror portion and the second mirror portion so as to form a plurality of Fabry-Perot interference filter portions. A wafer inspection method according to an embodiment includes a step of performing faulty/non-faulty determination of each of the plurality of Fabry-Perot interference filter portions, and a step of applying ink to at least part of a portion overlapping the gap when viewed in a facing direction on the second mirror layer of the Fabry-Perot interference filter portion determined as faulty.
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公开(公告)号：US20190179131A1
公开(公告)日：2019-06-13
申请号：US16322161
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B26/00
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.
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公开(公告)号：US20220341780A1
公开(公告)日：2022-10-27
申请号：US17634280
申请日：2020-10-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Kei TABATA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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公开(公告)号：US20200310105A1
公开(公告)日：2020-10-01
申请号：US16765547
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B26/00
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20190204150A1
公开(公告)日：2019-07-04
申请号：US16303209
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
CPC classification number: G02B26/001 , B23K26/0006 , B23K26/064 , B23K26/0643 , B23K26/53 , B23K2101/40 , B23K2103/56 , B81B3/0072 , B81C1/00539 , B81C1/00634 , G01J3/0243 , G01J3/26 , G02B5/284
Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.
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公开(公告)号：US20240035888A1
公开(公告)日：2024-02-01
申请号：US17631941
申请日：2020-09-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Kei TABATA , Yumi KURAMOTO
CPC classification number: G01J3/26 , G01J3/0291 , G01J3/0262 , G01J2003/1213
Abstract: A spectroscopic unit includes a housing having a wall part formed with an opening, a first aperture part formed with a first aperture, and a second aperture part formed with a second aperture, in which a length of the second aperture in the facing direction is larger than a length of the first aperture in the facing direction, an outer edge of the first aperture is positioned inside each of an outer edge of the opening and an outer edge of the second aperture, and the first aperture includes at least one of a first tapered portion reaching a first surface of the first aperture part and extending toward the first surface, and a second tapered portion reaching a second surface of the first aperture part and extending toward the second surface.
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公开(公告)号：US20210364681A1
公开(公告)日：2021-11-25
申请号：US16763859
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B5/28
Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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公开(公告)号：US20190186994A1
公开(公告)日：2019-06-20
申请号：US16322170
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.
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公开(公告)号：US20240369410A1
公开(公告)日：2024-11-07
申请号：US18685342
申请日：2022-06-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A light detection system includes a Fabry-Perot interference filter including a first mirror and a second mirror, a distance therebetween being variable, a light detection unit configured to detect light in a wavelength range of λ1 or more and λ2 or less, and a control unit configured to apply a voltage to the Fabry-Perot interference filter such that the distance changes in a distance range of d1 or more and d2 or less. For a transmission spectrum T1 (λ) of light in a case where the distance is d1, a peak transmittance T1 (λa) appears within the wavelength range, and a transmittance T1 (λ2) is less than or equal to 1%. For a transmission spectrum T2 (λ) of light in a case where the distance is d2, a peak transmittance T2 (λb) appears within the wavelength range, and a transmittance T2 (λ1) is less than or equal to 1%.
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