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公开(公告)号：US20200310104A1
公开(公告)日：2020-10-01
申请号：US16765529
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yumi KURAMOTO , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA
IPC: G02B26/00 , H01L31/0203 , H01L31/0216 , H01L27/144 , G01N21/95 , G01N21/45
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. In the wafer, a gap is formed between the first mirror portion and the second mirror portion so as to form a plurality of Fabry-Perot interference filter portions. A wafer inspection method according to an embodiment includes a step of performing faulty/non-faulty determination of each of the plurality of Fabry-Perot interference filter portions, and a step of applying ink to at least part of a portion overlapping the gap when viewed in a facing direction on the second mirror layer of the Fabry-Perot interference filter portion determined as faulty.
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公开(公告)号：US20190179131A1
公开(公告)日：2019-06-13
申请号：US16322161
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B26/00
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.
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公开(公告)号：US20210364681A1
公开(公告)日：2021-11-25
申请号：US16763859
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B5/28
Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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公开(公告)号：US20190186994A1
公开(公告)日：2019-06-20
申请号：US16322170
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.
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公开(公告)号：US20180011232A1
公开(公告)日：2018-01-11
申请号：US15633863
申请日：2017-06-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi TERAMACHI
CPC classification number: G02B5/285 , G01J1/0488 , G01J5/023 , G01J5/0235 , G01J5/024 , G01J5/041 , G01J5/045 , G01J5/06 , G01J5/0862 , G02B5/288 , G02B26/001
Abstract: A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.
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Patent Agency Ranking
公开(公告)号：US20160245696A1
公开(公告)日：2016-08-25
申请号：US15031780
申请日：2014-10-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/45 , G01J5/04 , G01J5/20 , G02B26/001
Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.
Abstract translation: 光谱传感器1A包括具有透光区域11的法布里 - 珀罗干涉滤光器10; 光检测器3，其检测透射光透射区域11的光; 在光透射区域11的周围区域中支撑法布里 - 珀罗干涉滤光器10的间隔件4A和4B; 以及将法布里 - 珀罗干涉滤光器10和隔离物4A和4B彼此粘合的芯片接合树脂5。 当在光透射区域11中从透光方向观察时，裸片接合树脂5具有与周围区域的内侧连通的一个开口A2和周围区域的外侧。
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公开(公告)号：US20220350131A1
公开(公告)日：2022-11-03
申请号：US17861721
申请日：2022-07-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu KAWAI , Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
IPC: G02B26/00
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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公开(公告)号：US20220026703A1
公开(公告)日：2022-01-27
申请号：US17298316
申请日：2019-09-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.
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公开(公告)号：US20210396579A1
公开(公告)日：2021-12-23
申请号：US17288593
申请日：2019-08-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
Abstract: A spectroscopic sensor includes a wiring substrate having a main surface, a light detector disposed on the main surface of the wiring substrate, a Fabry-Perot interference filter, a spacer which is provided on the main surface of the wiring substrate and supports the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are separated from each other, and a stein connected to a ground potential. A second current path which has a smaller electric resistance than that of an arbitrary first current path which extends from the Fabry-Perot interference filter to the light detector via the spacer and the wiring substrate is formed between the Fabry-Perot interference filter and the stein.
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公开(公告)号：US20210372854A1
公开(公告)日：2021-12-02
申请号：US17398261
申请日：2021-08-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Takehiko YASHIRO , Mitsushi MINENO , Shigeru SUZUKI
IPC: G01J3/26 , G02B26/00 , G02B5/28 , G01J5/04 , G01J5/08 , G01J5/02 , G01J3/02 , G01J5/10 , G01J5/06 , G02B7/00
Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
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