-
公开(公告)号:US20160282181A1
公开(公告)日:2016-09-29
申请号:US15031925
申请日:2014-10-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G01J3/26
CPC classification number: G01J3/26 , G01J3/0286
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
Abstract translation: 光谱传感器包括具有主表面的布线基板; 光检测器,其布置在所述布线基板的主表面上并电连接到所述布线基板; 布置在布线基板的主表面上的光检测器周围的间隔物; 和法布里 - 珀罗干涉滤光器,其具有透光区域,并且在其间具有间隔物的布线基板的主表面上。 间隔件在透光区域的周围区域中支撑法布里 - 珀罗干涉滤光器,并且隔离件被布置成当从透光性观察时形成与周围区域的内侧和周边区域的外侧连通的开口 光透射区域的方向。
-
公开(公告)号:US20160245697A1
公开(公告)日:2016-08-25
申请号:US15031786
申请日:2014-10-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G01J3/26
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/45 , G01J5/04 , G01J5/20 , G02B26/001
Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.
Abstract translation: 光谱传感器包括法布里 - 珀罗干涉滤光器,其设置有开口,以沿着沿着相对方向的第一反射镜和第二反射镜之间的距离传播的光; 光检测器,其具有用于接收已经穿过所述开口的光的光接收单元; 其上安装有光检测器的布线基板; 以及多个间隔件,其在所述布线基板上支撑所述滤波器,使得在所述滤波器和所述布线基板之间形成有与所述开口中的第一空间连续并且在从所述相对方向观察时包括所述第一空间的第二空间。 光检测器设置在第二空间中。 当从相对的方向观察时,光接收单元设置在与第二空间中的第一空间对应的区域中。
-
公开(公告)号:US20240019304A1
公开(公告)日:2024-01-18
申请号:US18373532
申请日:2023-09-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC: G01J3/26 , G02B26/00 , G01J3/02 , G01J5/0802 , G01J5/20 , G02F1/21 , H01L31/02 , H01L31/0203 , H01L31/0232 , H01L31/0304
CPC classification number: G01J3/26 , G02B26/00 , G01J3/0213 , G01J3/0256 , G01J3/0291 , G01J5/0802 , G01J5/20 , G02F1/21 , H01L31/02005 , H01L31/0203 , H01L31/02327 , H01L31/03046 , G01J5/045
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
-
公开(公告)号:US20230118479A1
公开(公告)日:2023-04-20
申请号:US18083074
申请日:2022-12-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
IPC: G01J3/26 , H01L21/673 , B65D85/48 , H01L21/677 , G02B26/00 , G02B26/02
Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
-
公开(公告)号:US20220333988A1
公开(公告)日:2022-10-20
申请号:US17847881
申请日:2022-06-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA
Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
-
公开(公告)号:US20210131870A1
公开(公告)日:2021-05-06
申请号:US17126297
申请日:2020-12-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G01J3/26 , B23K26/53 , B23K26/00 , B23K26/064 , B81B3/00 , B81C1/00 , G01J3/02 , G02B5/28 , G02B26/00 , B23K26/06
Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
-
27.
公开(公告)号:US20200310112A1
公开(公告)日:2020-10-01
申请号:US16765577
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B27/00 , H01L27/144 , H01L31/0203 , H01L31/0216 , H01L31/18 , B08B5/02 , B08B13/00
Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
-
公开(公告)号:US20200309637A1
公开(公告)日:2020-10-01
申请号:US16765564
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.
-
公开(公告)号:US20200292386A1
公开(公告)日:2020-09-17
申请号:US16765765
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
IPC: G01J3/26 , H01L21/673
Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second minor portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
-
公开(公告)号:US20200232852A1
公开(公告)日:2020-07-23
申请号:US16843244
申请日:2020-04-08
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC: G01J5/08 , G02B26/00 , G01J3/26 , G01J3/02 , G01J5/20 , G02F1/21 , H01L31/02 , H01L31/0203 , H01L31/0232 , H01L31/0304
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector, and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Pert interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
-
-
-
-
-
-
-
-
-