公开(公告)号：US20130301676A1

公开(公告)日：2013-11-14

申请号：US13997547

申请日：2011-12-01

Applicant: Ki Soo Chang ,  Hae Young Choi ,  Seon Young Ryu ,  Geon Hee Kim ,  Sun Cheol Yang

Inventor： Ki Soo Chang ,  Hae Young Choi ,  Seon Young Ryu ,  Geon Hee Kim ,  Sun Cheol Yang

IPC: G01K3/06

CPC classification number: G01K3/06 ,  G01J5/0003 ,  G01J5/047 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0809 ,  G01J5/0846 ,  G01J2005/0077 ,  G01J2005/0081 ,  G01K11/125

Abstract: The present invention pertains to a device for measuring a temperature distribution, which can measure a temperature distribution without contacting a minor sample having a three-dimensional structure. More particularly, the device for measuring the temperature distribution can measure a three-dimensional temperature distribution for a sample, wherein the temperature distribution in a depth direction (direction z) of the sample is measured by a thermo-reflectance technique using a chromatic dispersion lens, a diffraction spectrometer and an optical detection array; and the temperature distribution in parallel directions (direction x-y axes) of the sample is measured by the thermo-reflectance technique using a biaxial scanning mirror.

Abstract translation: 本发明涉及一种用于测量温度分布的装置，其可以在不接触具有三维结构的次要样品的情况下测量温度分布。 更具体地，用于测量温度分布的装置可以测量样品的三维温度分布，其中样品的深度方向（方向z）上的温度分布通过使用色散透镜的热反射技术测量 ，衍射光谱仪和光学检测阵列; 并且通过使用双轴扫描镜的热反射技术测量样品的平行方向（方向x-y轴）的温度分布。

公开(公告)号：US20130043552A1

公开(公告)日：2013-02-21

申请号：US13656352

申请日：2012-10-19

Applicant: Texas Instruments Incorporated

Inventor： Kalin V. Lazarov ,  Walter B. Meinel

IPC: H01L31/0232 ,  H01L31/18

CPC classification number: G01J5/02 ,  G01J5/024 ,  G01J5/04 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/12

Abstract: An infrared (IR) radiation sensor device (27) includes an integrated circuit radiation sensor chip (1A) including first (7) and second (8) temperature-sensitive elements connected within a dielectric stack (3) of the chip, the first temperature-sensitive element (7) being more thermally insulated from a substrate (2) than the second temperature-sensitive element (8). Bonding pads (28A) on the chip (1) are coupled to the first and second temperature-sensitive elements. Bump conductors (28) are bonded to the bonding pads (28A), respectively, for physically and electrically connecting the radiation sensor chip (1) to corresponding mounting conductors (23A). A diffractive optical element (21,22,23,31,32 or 34) is integrated with a back surface (25) of the radiation sensor chip (1) to direct IR radiation toward the first temperature-sensitive element (7).

Abstract translation: 红外（IR）辐射传感器装置（27）包括集成电路辐射传感器芯片（1A），其包括连接在芯片的电介质堆叠（3）内的第一（7）和第二（8）温度敏感元件，第一温度 - 敏感元件（7）比第二温度敏感元件（8）比基底（2）更热绝缘。 芯片（1）上的接合焊盘（28A）耦合到第一和第二温度敏感元件。 凸起导体（28）分别结合到接合焊盘（28A），用于将辐射传感器芯片（1）物理地和电气地连接到相应的安装导体（23A）。 衍射光学元件（21,22,23,31,32或34）与辐射传感器芯片（1）的背表面（25）成一体，以将IR辐射引向第一温度敏感元件（7）。

公开(公告)号：US20130028286A1

公开(公告)日：2013-01-31

申请号：US13625161

申请日：2012-09-24

Applicant: Mattson Technology, Inc.

Inventor： Paul Janis Timans

IPC: G01J5/02 ,  G01K15/00

CPC classification number: G01J5/0896 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0285 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0821 ,  G01J5/0831 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/065 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

公开(公告)号：US20120235038A1

公开(公告)日：2012-09-20

申请号：US13380810

申请日：2010-06-22

Applicant: Takayuki Nishikawa ,  Yoshifumi Watabe ,  Yuichi Inaba ,  Takahiko Hirai ,  Hiroaki Kitamura

Inventor： Takayuki Nishikawa ,  Yoshifumi Watabe ,  Yuichi Inaba ,  Takahiko Hirai ,  Hiroaki Kitamura

IPC: G01N21/59 ,  G01J5/00

CPC classification number: G01N21/359 ,  G01J5/0014 ,  G01J5/02 ,  G01J5/024 ,  G01J5/04 ,  G01J5/045 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0862 ,  G01J5/12 ,  G01J5/20 ,  G01N21/3504

Abstract: An infrared gas detector includes an infrared reception member, a package configured to accommodate the infrared reception member, and an optical filter. The infrared reception member includes a plurality of thermal infrared detection elements each configured to detect infrared based on heat caused by received infrared. The thermal infrared detection elements are placed side by side. The package is provided with a window opening configured to allow the infrared reception member to receive infrared. The optical filter is attached to the package so as to cover the window opening, and includes a plurality of filter elements respectively corresponding to the plurality of the thermal infrared detection elements. Each of the filter elements includes a filter substrate made of an infrared transparent material, a transmission filter configured to transmit infrared of a selected wavelength, and a cut-off filter configured to absorb infrared of a wavelength longer than the selected wavelength. The transmission filter and the cut-off filter are formed over the filter substrate. The filter substrate is thermally coupled to the package. The transmission filters of the respective filter elements are configured to transmit infrared of the different selected wavelengths.

Abstract translation: 红外线气体检测器包括红外线接收部件，被构造成容纳红外线接收部件的封装体和滤光器。 红外线接收构件包括多个热红外线检测元件，每个热红外线检测元件被配置为基于由接收到的红外线引起的热量来检测红外线。 热红外线检测元件并排放置。 该包装件设置有一个窗口，该开口被配置为允许红外线接收件接收红外线。 滤光器附接到封装以覆盖窗口，并且包括分别对应于多个热红外线检测元件的多个滤光元件。 每个滤光元件包括由红外线透明材料制成的滤光片基板，被配置为透射所选择的波长的红外线的透射滤光器和被配置为吸收长于所选波长的波长的红外线的截止滤光器。 透过滤波器和截止滤波器形成在滤波器基板上。 过滤器基板热耦合到封装。 各个滤波器元件的透射滤波器被配置成透射不同选择波长的红外线。

公开(公告)号：US20120049071A1

公开(公告)日：2012-03-01

申请号：US13210255

申请日：2011-08-15

Applicant: Jacob Y. Wong

Inventor： Jacob Y. Wong

IPC: G01J5/02

CPC classification number: G01J5/0014 ,  G01J5/022 ,  G01J5/045 ,  G01J5/0803 ,  G01J5/0809 ,  G01J5/0818 ,  G01J5/0846 ,  G01J5/0875 ,  G01N21/3504 ,  G01N21/61 ,  H01L2224/48091 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An NDIR gas sensor takes advantage of a conventional packaging embodiment commonly used to house detectors of all kinds comprising a can, header and a dish sample chamber all welded together to form a single detector unit. The can forms the top, a hollowed out header body forms the middle and a custom dish sample chamber forms the bottom of a completely functioning NDIR gas sensor. Whereas the header body not only accommodates all the optoelectronic and optical parts on its top surface providing the required signal processing functions for the gas sensor, part of its body is excavated below to accommodate a custom dish sample chamber in communication with the gas outside whose concentration level is to be measured. A lens and windows are also fabricated on the top part of this header body so that infrared radiation can enter the dish sample chamber below and then be redirected back above for signal processing. To achieve this optical feat, strategic reflecting surfaces are impregnated on the top of the can housing so as to direct infrared radiation to the dish sample chamber below through a lens and then redirect the radiation above via another window for subsequent signal detection and processing.

Abstract translation: NDIR气体传感器利用通常用于容纳各种包括罐，集管和盘样品室的所有检测器的常规包装实施例，其全部焊接在一起以形成单个检测器单元。 罐头形成顶部，形成中间的中空的头部主体，并且定制的皿样品室形成完全功能的NDIR气体传感器的底部。 而头部主体不仅容纳其顶部表面上的所有光电子部件和光学部件，而是为气体传感器提供所需的信号处理功能，其身体的一部分在下方被挖掘以适应定制的皿样品室，其与浓度范围外的气体 水平要测量。 镜头和窗户也被制造在这个头部主体的顶部，以便红外辐射可以进入下面的盘子样品室，然后被重定向回到上面进行信号处理。 为了实现这种光学特征，将战略反射表面浸渍在罐壳体的顶部上，以便通过透镜将红外辐射引导到下面的盘样品室，然后通过另一个窗口将辐射重新定位以用于随后的信号检测和处理。

公开(公告)号：US20100206482A1

公开(公告)日：2010-08-19

申请号：US12698616

申请日：2010-02-02

Applicant: Tatsuo MATSUDO ,  Chishio Koshimizu ,  Jun Abe

Inventor： Tatsuo MATSUDO ,  Chishio Koshimizu ,  Jun Abe

IPC: C23F1/08 ,  G01J5/08 ,  G01K1/00 ,  C23C16/00

CPC classification number: H01L21/67248 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/041 ,  G01J5/045 ,  G01J5/048 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0821 ,  G01J5/0846 ,  G01K11/00 ,  H01J2237/2001

Abstract: A plasma processing apparatus includes a temperature measuring unit; airtightly sealed temperature measuring windows provided in a mounting table, for optically communicating to transmit a measurement beam through a top surface and a bottom surface of the mounting table; and one or more connection members for connecting the mounting table and a base plate, which is provided in a space between the mounting table and the base plate. In the plasma processing apparatus, a space above the mounting table is set to be maintained under a vacuum atmosphere, and a space between the mounting table and the base plate is set to be maintained under a normal pressure atmosphere, and each collimator is fixed to the base plate at a position corresponding to each temperature measuring window, thereby measuring a temperature of the substrate via the temperature measuring windows by the temperature measuring unit.

Abstract translation: 一种等离子体处理装置，包括：温度测量单元; 设置在安装台上的气密密封温度测量窗，用于光学连通以将测量光束穿过安装台的顶表面和底表面传播; 以及用于连接安装台和设置在安装台和基板之间的空间中的基板的一个或多个连接构件。 在等离子体处理装置中，将安装台上方的空间设定为保持在真空气氛下，将安装台和基板之间的间隔设定为保持在常压气氛下，将每个准直器固定在 基板在与各温度测量窗对应的位置处，由温度测量单元通过温度测量窗测量基板的温度。

公开(公告)号：US20100187419A1

公开(公告)日：2010-07-29

申请号：US12361079

申请日：2009-01-28

Applicant: Juejun Hu ,  Ning-Ning Feng ,  Anuradha M. Agarwal ,  Lionel C. Kimerling

Inventor： Juejun Hu ,  Ning-Ning Feng ,  Anuradha M. Agarwal ,  Lionel C. Kimerling

IPC: G01J5/00 ,  H01S4/00

CPC classification number: G01J5/02 ,  G01J5/024 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0853 ,  G01J5/40 ,  G01J5/58 ,  G01N21/553 ,  Y10T29/49002

Abstract: A surface plasmon polariton (SPP) pixel structure is provided. The SPP pixel structure includes a coupling structure that couples the probing light into the SPP mode by matching the in-plane wave vector by changing the refractive index of the coupling structure using thermo-optic effects to vary the coupling strength of the probing light into the SPP mode. An absorber layer is positioned on the coupling structure for absorbing incident infrared/thermal radiation being detected.

Abstract translation: 提供表面等离子体激元（SPP）像素结构。 SPP像素结构包括耦合结构，其通过使用热光效应改变耦合结构的折射率来匹配面内波矢量来将探测光耦合到SPP模式中，以将探测光的耦合强度改变为 SPP模式。 吸收层位于耦合结构上，用于吸收检测到的入射红外/热辐射。

公开(公告)号：US20100176300A1

公开(公告)日：2010-07-15

申请号：US12602758

申请日：2008-06-05

Applicant: Takayuki Nishikawa ,  Tomohiro Kamitsu ,  Yoshiaki Honda

Inventor： Takayuki Nishikawa ,  Tomohiro Kamitsu ,  Yoshiaki Honda

IPC: H01L31/09 ,  H01L31/0232

CPC classification number: G01V8/20 ,  G01J5/0022 ,  G01J5/0025 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0846 ,  G08B13/193

Abstract: An infrared ray detector comprises a prism element, a condenser lens, and an infrared ray receiving unit. The prism element is configured to convert the infrared ray irradiated from a detection area of a viewing field to the infrared ray proceeding toward the condenser lens. The condenser lens is configured to concentrate the infrared ray into the infrared ray receiving unit. The infrared ray receiving unit includes a plurality of the infrared ray detection elements. The infrared ray detection elements are arranged in an alternate fashion so as to output electrical signals of positive polarity and negative polarity. Consequently, the infrared ray detector is configured to detect the infrared ray irradiated from a plurality of the detection area, and is configured to detect the infrared ray on the basis of movement of the human in the detection area.

Abstract translation: 一种红外线检测器，包括棱镜元件，聚光透镜和红外线接收单元。 棱镜元件被配置为将从视场的检测区域照射的红外线转换为朝向聚光透镜行进的红外线。 聚光透镜被配置为将红外线集中到红外线接收单元中。 红外线接收单元包括多个红外线检测元件。 红外线检测元件以交替的方式排列，以输出正极性和负极性的电信号。 因此，红外线检测器被配置为检测从多个检测区域照射的红外线，并且被配置为基于检测区域中的人的移动来检测红外线。

公开(公告)号：US20090321637A1

公开(公告)日：2009-12-31

申请号：US12110977

申请日：2008-04-28

Applicant: Roland Andrew Wood

Inventor： Roland Andrew Wood

IPC: G01J5/02

CPC classification number: H01L27/14625 ,  G01J5/0205 ,  G01J5/023 ,  G01J5/025 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/20 ,  G01J5/22 ,  H01L27/14649 ,  H04N5/2254 ,  H04N5/3572

Abstract: A lightweight camera is provided that includes a lightweight lens system that has a reduced number of lenses. Reducing the number of lenses produces a lighter camera, but produces a distorted local image. The distorted local image is captured by the lightweight camera, and is preferably transmitted to a remote station. The remote station then performs image processing on the distorted image to remove at least some of the distortion in the image. Preferably, a Massively Parallel Richardson-Lucy (MPRL) algorithm is used to identify and remove distortion from the image. Also, motion, temperature and inter-detector difference distortion is detected and corrected.

Abstract translation: 提供了一种轻便的相机，其包括具有减少的透镜数量的轻量级的透镜系统。 减少镜头数量会产生较轻的相机，但会产生扭曲的本地图像。 失真的本地图像由轻量级摄像机捕获，并且优选地被发送到远程站。 然后，远程站对失真图像进行图像处理，以去除图像中的至少一些失真。 优选地，使用大容量平行理查森 - 露西（MPRL）算法来识别和去除图像中的失真。 此外，检测和校正运动，温度和检测器间差异畸变。

公开(公告)号：US20090114007A1

公开(公告)日：2009-05-07

申请号：US12333557

申请日：2008-12-12

Applicant: Sebastian Csutak

Inventor： Sebastian Csutak

IPC: E21B47/06 ,  G01V3/18 ,  G01V5/00 ,  G01J3/00

CPC classification number: G01V8/02 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0818 ,  G01J5/0896 ,  G01J5/602 ,  G02F1/3536

Abstract: A sensor for measuring a property of a chemical, the sensor including: a light source; and a mixing medium in optical communication with the light source and exposed to the chemical; wherein four wave mixing of light interacting with the mixing medium provides a signal that indicates the property.

Abstract translation: 1.一种用于测量化学品特性的传感器，所述传感器包括：光源; 以及与光源光学连通并暴露于化学品的混合介质; 其中与混合介质相互作用的光的四次波混合提供指示性质的信号。