X-ray source and fluorescent X-ray analyzing apparatus
    22.
    发明申请
    X-ray source and fluorescent X-ray analyzing apparatus 失效
    X射线源和荧光X射线分析装置

    公开(公告)号:US20080084966A1

    公开(公告)日:2008-04-10

    申请号:US11905911

    申请日:2007-10-05

    Abstract: The present invention relates to an X-ray source for emitting a characteristic X-ray and a fluorescent X-ray analyzing apparatus using the X-ray source. A secondary target is arranged in superposition on a primary target. An electron beam generated by an electron gun enters the primary target, which passes and emits a continuous X-ray. The secondary target transmits and emits a characteristic X-ray excited by the continuous X-ray emitted from the primary target. The primary target and the secondary target are superposed one on the other, so that the continuous X-ray emitted from the primary target efficiently excites the secondary target thereby to efficiently generate the characteristic X-ray.

    Abstract translation: 本发明涉及一种用于发射特征X射线的X射线源和使用该X射线源的荧光X射线分析装置。 辅助目标被叠加在主要目标上。 由电子枪产生的电子束进入主要目标,通过并发射连续的X射线。 二次靶发射并发射由从主要靶发射的连续X射线激发的特征X射线。 主要目标和次要目标彼此叠加,使得从主要目标发射的连续X射线有效地激发二次靶,从而有效地产生特征X射线。

    X-ray equipment
    24.
    发明申请
    X-ray equipment 有权
    X光设备

    公开(公告)号:US20050141669A1

    公开(公告)日:2005-06-30

    申请号:US10507204

    申请日:2004-01-09

    CPC classification number: H01J35/14 H01J35/18 H01J35/30 H01J2235/186

    Abstract: An x-ray tube (1) irradiates an electron beam from a cathode (18) to impact a target (36) and emit x-rays. When the x-ray tube (1) operates, the magnet portion (40) is rotated every fixed time period and positioned at a prescribed rotation position. Due to the rotation of the magnet portion (40), the magnetic field formed by the permanent magnets (42) changes and the irradiation position on the target (36) of the electron beam moves. As a result, the electron beam is irradiated at a new position on the target (36) and the same amount of x-ray as the initial performance is generated.

    Abstract translation: X射线管(1)照射来自阴极(18)的电子束以撞击靶(36)并发射X射线。 当X射线管(1)工作时,磁体部分(40)每固定时间周期旋转并且位于规定的旋转位置。 由于磁体部分(40)的旋转,由永磁体(42)形成的磁场发生变化,并且电子束的靶(36)上的照射位置移动。 结果,电子束被照射在目标(36)上的新位置,并且产生与初始性能相同量的x射线。

    Open type X-ray generating apparatus
    26.
    发明申请
    Open type X-ray generating apparatus 有权
    开放式X射线发生装置

    公开(公告)号:US20020168050A1

    公开(公告)日:2002-11-14

    申请号:US10132736

    申请日:2002-04-26

    Abstract: For eliminating a high-tension cable in order to improve the handling, the open type X-ray generating apparatus (1) in accordance with the present invention employs a mold power unit in which a high-voltage generating part, a grid connecting line, and a filament connecting line which attain a high voltage are molded with a resin, whereas the mold power unit is secured to the proximal end side of a tubular portion (2), whereby an apparatus of a type integrated with a power supply is realized. Since the high-voltage generating part, grid connecting line, and filament connecting line are confined within the resin mold as such, the degree of freedom in structure of the high-voltage generating part and the degree of freedom in bending the lines improve remarkably.

    Abstract translation: 为了消除高压电缆以改善处理,根据本发明的开放型X射线产生装置(1)采用模具功率单元,其中高压产生部分,栅格连接线, 并且用树脂模制高电压的灯丝连接线,而模具动力单元固定在管状部分(2)的基端侧,从而实现与电源集成的类型的装置。 由于高电压产生部分,电网连接线和灯丝连接线被限制在树脂模具内,所以高压发生部分的结构自由度和弯曲自由度显着提高。

    X-ray tube and microelectronics alignment process
    27.
    发明授权
    X-ray tube and microelectronics alignment process 失效
    X射线管和微电子校准工艺

    公开(公告)号:US5627871A

    公开(公告)日:1997-05-06

    申请号:US509532

    申请日:1995-07-31

    Applicant: Chia-Gee Wang

    Inventor: Chia-Gee Wang

    Abstract: A compact x-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.

    Abstract translation: 紧凑的x射线管组件包括由陶瓷管状外壳包围的抽真空室,一端连接到室内的发射器的附接电源,用于将电子束聚焦在金属箔靶上的静电装置,端窗 在包括所述目标的另一端,所述金属箔靶的厚度和组成以及所述电子束能被选择以产生预选能量的x射线的聚焦光束。 紧凑的组件在用于对准或定位用于生产微电子部件的层的方法中是有用的。

    Apparatus for and method of controlling relativistic charged particle beam distribution and transport
    30.
    发明授权
    Apparatus for and method of controlling relativistic charged particle beam distribution and transport 失效
    控制相对充电粒子束分布和运输的装置和方法

    公开(公告)号:US3720828A

    公开(公告)日:1973-03-13

    申请号:US3720828D

    申请日:1970-08-18

    Inventor: NABLO S

    CPC classification number: G21K1/02 H01J5/18 H01J33/00 H01J35/14 H01J2235/186

    Abstract: The present disclosure involves methods and apparatus for actively controlling the charged particle density in a controlled pressure region or in the ambient atmosphere, from an accelerator capable of producing high intensity relativistic charged particle streams in a pulsed manner. The techniques are applicable to both high repetition rate applications, typical of industrial processors, electron tubes or accelerator/fusion reactor injectors, and to single pulse or low repetition rate systems. These methods utilize the self-magnetic forces of relativistic beams to accomplish controlled distribution, and avoid the complexities of electromagnetic scanners or lenses heretofore used for this purpose. Methods are also disclosed which utilize force control in partially charged neutralized beams as well as plasma conductivity control in freely drifting beam systems.

    Abstract translation: 本公开涉及用于以受脉冲方式产生高强度相对论带电粒子流的加速器主动控制受控压力区域或环境气氛中的带电粒子密度的方法和装置。 这些技术适用于高重复率应用,典型的工业处理器,电子管或加速器/聚变反应器注入器,以及单脉冲或低重复率系统。 这些方法利用相对论光束的自磁力来实现受控分布,避免了以前用于此目的的电磁扫描器或透镜的复杂性。 还公开了在部分充电的中和束中利用力控制以及在自由漂移的波束系统中的等离子体电导率控制的方法。

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