公开(公告)号：US20090242763A1

公开(公告)日：2009-10-01

申请号：US12413463

申请日：2009-03-27

Applicant: Bart Buijsse

Inventor： Bart Buijsse

IPC: G01N23/00 ,  G01N13/10

CPC classification number: H01J37/023 ,  H01J37/16 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2608 ,  H01J2237/31749

Abstract: The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.

Abstract translation: 本发明涉及一种用于例如环境的环境细胞。 电子显微镜。 环境细胞显示用于将由电子显微镜产生的光束传递到放置在环境细胞内的样品（6）的孔（15）。 根据本发明的环境电池的特征在于，环境电池（14）的一部分对于二次辐射如背散电子或X射线是透明的。 这使得能够通过放置在环境单元外部的检测器来检测该辐射，从而使得单元的结构更简单。

公开(公告)号：US07541580B2

公开(公告)日：2009-06-02

申请号：US11731743

申请日：2007-03-30

Applicant: William Ralph Knowles ,  Milos Toth

Inventor： William Ralph Knowles ,  Milos Toth

IPC: H01J37/252

CPC classification number: G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2449 ,  H01J2237/2608

Abstract: A detector for use with a high pressure SEM, such as an ESEM® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal amplification without increasing working distance or pressure. Embodiments can therefore provide improved resolution and can operate at lower gas pressures.

Abstract translation: 用于高压SEM的检测器，如来自FEI公司的ESEM环境SEM，扩展了PLA上方的有效检测空间，从而在不增加工作距离或压力的情况下增加了二次信号放大。 因此，实施例可以提供改进的分辨率并且可以在较低的气体压力下操作。

公开(公告)号：US20080135751A1

公开(公告)日：2008-06-12

申请号：US11951429

申请日：2007-12-06

Applicant: Hidetoshi Nishiyama

Inventor： Hidetoshi Nishiyama

IPC: G01N23/00 ,  G21G5/00

CPC classification number: G01N23/225 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2485

Abstract: A sample holder is offered which is used when a sample is inspected by irradiating the sample with a primary beam consisting of a charged-particle beam (such as an electron beam) via a film. Furthermore, method and apparatus for preventing destruction of the film due to a pressure difference by detecting damage to the film during inspection are offered.

Abstract translation: 提供样品架，通过经由膜通过用带电粒子束（例如电子束）组成的主光束照射样品来检查样品时使用。 此外，提供了通过在检查期间检测对膜的损坏来防止由于压力差而破坏膜的方法和装置。

公开(公告)号：US07186976B2

公开(公告)日：2007-03-06

申请号：US10475288

申请日：2002-04-19

Applicant: Michael Frank Dean ,  Giles Adam Edward Martin

Inventor： Michael Frank Dean ,  Giles Adam Edward Martin

IPC: H01J37/28 ,  H01J37/252

CPC classification number: H01J37/301 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2605

Abstract: There is provided a reconfigurable scanning electron microscope (RSEM) (100) comprising: (a) a gun assembly (110) and an associated electron optical column (120) for generating an electron beam (600), for demagnifying the electron beam (600) to generate an electron probe (C3) and for scanning the probe (C3) across a sample (190); (b) an electron detector (550) for detecting emissions from the sample (190) in response to scanned electron probe irradiation thereof and for generating a corresponding detected signal (Sd) indicative of the magnitude of the emissions; and (c) a display (170) for receiving the detected signal (Sd) and scanning signals (x, y) indicative of the position of the probe (C3) relative to the sample (190) for generating the image of the sample (190). The RSEM (100) is distinguished in that it further includes aperture bearing members (500, 520), each member (500, 520) including an associated electon-beam transmissive aperture, for at least partially gaseously isolating the gun assembly (110) and the electron optical column (110) from the sample (190), thereby enabling the RSEM (100) to be reconfigurable as a high-vacuum scanning electron microscope and also as an environmental scanning electron microscope, the RSEM (100) being reconfigurable to include no aperture members, one aperture member (500, 750) and a plurality of aperture members (500, 750; 520 850, 860).

Abstract translation: 提供了一种可重构扫描电子显微镜（RSEM）（100），包括：（a）用于产生电子束（600）的枪组件（110）和相关联的电子光学柱（120），用于使电子束 ）以产生电子探针（C 3 N 3）并用于跨越样品（190）扫描探针（C 3 N 3）。 （b）电子检测器（550），用于响应于其扫描的电子探针照射来检测来自样品（190）的发射，并且用于产生相应的检测信号（S SUB） 排放; 以及（c）用于接收检测信号（S SUB）的显示器（170）和表示探头位置的扫描信号（x，y） ）相对于用于产生样品（190）的图像的样品（190）。 RSEM（100）的特征在于它还包括孔口支承构件（500,520），每个构件（500,520）包括相关联的电子束透射孔，用于至少部分地气动隔离枪组件（110）和 来自样品（190）的电子光学柱（110），从而使得RSEM（100）能够被重构为高真空扫描电子显微镜，并且还可以作为环境扫描电子显微镜，RSEM（100）可重新配置为包括 无孔构件，一个孔构件（500,750）和多个孔构件（500,750; 520 850,860）。

公开(公告)号：US20070045559A1

公开(公告)日：2007-03-01

申请号：US11362074

申请日：2006-02-27

Applicant: Chih-Yu Chao ,  Wen-Jiunn Hsieh

Inventor： Chih-Yu Chao ,  Wen-Jiunn Hsieh

IPC: H01J37/18

CPC classification number: H01J37/20 ,  H01J2237/2003

Abstract: A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a housing, putting the housing in the vacuum or low-pressure environment and keep a predetermined temperature difference between liquid, vapor, and buffer chambers, infusing vapor into the vapor chamber through a gas inlet and control the vapor pressure inside the vapor chamber to be equal to the saturated vapor pressure of a liquid specimen inside the liquid chamber under the same temperature to prevent the inside liquid from volatilization, and evacuating the buffer chamber through the pumping port to pump out the vapor and prevent the vapor from exhausting through outer apertures out of the housing. A probing source can pass through the outer, inner, and vapor apertures for observation and analysis of the liquid specimen inside the liquid chamber.

Abstract translation: 一种在真空或低压环境中操作液体的方法，分别观察操作和操作和观察装置，包括准备壳体的步骤，将壳体放置在真空或低压环境中并保持 液体，蒸汽和缓冲室之间的预定温度差，通过气体入口将蒸汽输入蒸气室，并将蒸气室内的蒸汽压力控制在与其相同的液体室内的液体试样的饱和蒸气压 温度以防止内部液体挥发，并且通过泵送端口排出缓冲室以泵出蒸气并防止蒸汽通过外部孔排出壳体。 探测源可以通过外部，内部和蒸气孔径，用于观察和分析液体室内的液体试样。

公开(公告)号：US20060284108A1

公开(公告)日：2006-12-21

申请号：US11169274

申请日：2005-06-28

Applicant: Bart Buijsse ,  Mark Meuwese ,  Maria Van Wely-Dieleman ,  Sjoerd Mentink ,  Theodorus Bisschops

Inventor： Bart Buijsse ,  Mark Meuwese ,  Maria Van Wely-Dieleman ,  Sjoerd Mentink ,  Theodorus Bisschops

IPC: G01K5/08

CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J2237/2003 ,  H01J2237/2605

Abstract: The invention relates to an apparatus for evacuating samples. A sample 4 is hereby placed in a cavity 3 of a sheet 1 with a smooth surface 2. A sole plate 5 Is placed upon this smooth surface 2, whereby the smooth surface 2 and the sole plate 5 placed thereupon together form a vacuum seal. The sole plate 5, upon which a vacuum column 6 is mounted, can be slid across the smooth surface 2. By sliding the sole plate 5 over the cavity 4, the cavity 4 is evacuated in several steps. In an embodiment of the invention, the vacuum column 6 takes the form of an ESEM (Environmental Scanning Electron Microscope). In this way, it is possible to inspect the evacuated sample 4 with the ESEM.

Abstract translation: 本发明涉及抽样样品的装置。 样品4因此被放置在具有光滑表面2的片材1的空腔3中。 将底板5放置在该光滑表面2上，由此将光滑表面2和放置在其上的底板5一起形成真空密封。 其上安装有真空塔6的底板5可以滑过光滑表面2。 通过将底板5滑动在空腔4上方，空腔4以几个步骤排空。 在本发明的一个实施方案中，真空塔6采用ESEM（环境扫描电子显微镜）的形式。 以这种方式，可以用ESEM检查抽空的样品4。

公开(公告)号：US20060138324A1

公开(公告)日：2006-06-29

申请号：US10528034

申请日：2002-09-26

Applicant: Matthew Kershaw

Inventor： Matthew Kershaw

IPC: G21K7/00

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605

Abstract: The invention provides a liquid injection system (12) for an environmental scanning electron microscope. The liquid injection system comprises a liquid firing device (18) for firing a liquid and a heat transfer system (17, 22, 24). The heat transfer system functions to maintain the liquid below its boiling point at an operating pressure within the specimen chamber of the environmental scanning electron microscope. The invention also provides an environmental scanning electron microscope incorporating a liquid injection system according to the present invention. The invention provides a simple and robust system for enabling investigation of the liquid injection system within an environmental or variable pressure scanning electron microscope.

Abstract translation: 本发明提供一种用于环境扫描电子显微镜的液体注入系统（12）。 液体喷射系统包括用于点燃液体的液体燃烧装置（18）和传热系统（17,22,24）。 传热系统的作用是在环境扫描电子显微镜的样品室内的工作压力下将液体保持在沸点以下。 本发明还提供一种结合根据本发明的液体注射系统的环境扫描电子显微镜。 本发明提供了一种用于在环境或可变压力扫描电子显微镜内对液体注入系统进行调查的简单和鲁棒的系统。

公开(公告)号：US06992300B2

公开(公告)日：2006-01-31

申请号：US10448313

申请日：2003-05-27

Applicant: Elisha Moses ,  Ory Zik ,  Stephan Thiberge

Inventor： Elisha Moses ,  Ory Zik ,  Stephan Thiberge

IPC: G21K5/08 ,  G01N23/00

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/2807

Abstract: A chamber suitable for use with a scanning electron microscope. The chamber comprises at least one aperture sealed with a membrane. The membrane is adapted to withstand a vacuum, and is transparent to electrons and the interior of the chamber is isolated from said vacuum. The chamber is useful for allowing wet samples including living cells to be viewed under an electron microscope.

Abstract translation: 适用于扫描电子显微镜的室。 该室包括用膜密封的至少一个孔。 膜适于承受真空，并且对电子是透明的，并且室的内部与所述真空隔离。 该室可用于允许在电子显微镜下观察包括活细胞的湿样品。

公开(公告)号：US20050279938A1

公开(公告)日：2005-12-22

申请号：US10516407

申请日：2003-06-01

Applicant: Elisha Moses ,  Stephan Thiberge

Inventor： Elisha Moses ,  Stephan Thiberge

IPC: G01N23/225 ,  G01N23/00 ,  G02B20060101 ,  G21K7/00 ,  H01J37/00 ,  H01J37/20 ,  H01J37/252 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J2237/2003 ,  H01J2237/2608

Abstract: A specimen enclosure assembly (100) for use in an electron microscope and including a rigid specimen enclosure dish (102) having an aperture (122) and defining an enclosed specimen placement volume (125), at electron beam permeable, fluid impermeable, cover (114) sealing the specimen placement volume (125) at the aperture (122) from a volume outside the enclosure and a pressure controller communicating with the enclosed specimen placement volume (125) and being operative to maintain the enclosed specimen placement volume (125) at a pressure, which exceeds a vapor pressure of a liquid sample (123) in the specimen placement volume (125) and is greater than a pressure of a volume outside the enclosure, whereby a pressure differential across the cover (114) does not exceed a threshold level at which rupture of the cover (114) would occur

Abstract translation: 一种用于电子显微镜并包括具有孔（122）并且限定封闭的样本放置体积（125）的刚性样品封闭皿（102）的样品外壳组件（100），其在电子束可透过的不透液体的盖 114）将所述孔（122）处的所述样本放置体积（125）从所述外壳外部的体积密封，以及压力控制器，其与所述封闭的样品放置体积（125）连通并且可操作以将封闭的样品放置体积（125）保持在 超过样品放置体积（125）中的液体样品（123）的蒸汽压力并且大于外壳外部的体积的压力的压力，由此覆盖物（114）上的压力差不超过 将发生盖（114）的破裂的阈值水平

公开(公告)号：US5485008A

公开(公告)日：1996-01-16

申请号：US264271

申请日：1994-06-23

Applicant: Myron E. Taylor, Jr.

Inventor： Myron E. Taylor, Jr.

IPC: H01J37/28 ,  H01J37/301 ,  H01J37/04 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/301 ,  H01J2237/2003 ,  H01J2237/2605

Abstract: The present invention pertains to scanning electron microscope devices with an improved design that allows for lower magnification capabilities without signal degradation. In particular, the design improvement is in the aperture carrier for the electron detector/differential pumping system therein. Advantages of this improvement include shorter working distances of a specimen under examination to obtain the same magnification for prior art type ESEM apparatus, lower magnification capabilities of an ESEM apparatus, better signal/noise ratio of the specimen and higher chamber pressures in which the specimen can be examined. Other features of the invention herein includes use of a variable displacement mount for holding the sample using a piston design which allows for variable detector positioning with respect to the specimen.

Abstract translation: 本发明涉及具有改进的设计的扫描电子显微镜装置，其允许较低的放大能力而不会降低信号。 特别地，设计改进在其中的电子检测器/差分泵送系统的孔径载体中。 这种改进的优点包括检查样品的工作距离较短，以获得现有技术类型的ESEM装置的相同放大率，ESEM装置的较低放大能力，样品的更好的信噪比和更高的室压力，其中样品可以 被检查。 本发明的其它特征包括使用可变排量安装件来使用活塞设计来保持样品，该活塞设计允许相对于样品的可变的检测器定位。