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    Liquid cooled anode x-ray tubes
    21.
    发明授权
    Liquid cooled anode x-ray tubes 失效
    液体冷却阳极x射线管

    公开(公告)号：US4405876A

    公开(公告)日：1983-09-20

    申请号：US250275

    申请日：1981-04-02

    Applicant: Arthur H. Iversen

    Inventor： Arthur H. Iversen

    IPC: H01J35/10

    CPC classification number: H01J35/106

    Abstract: There is disclosed a liquid cooled anode x-ray tube wherein the rotating anode is adapted for irradiation by an energy beam, and includes a heat exchange surface, said x-ray tube includes means for providing a flow of coolant liquid to remove heat from said heat exchange surface by formation of nucleate vapor bubbles on said heat exchange surface, said liquid tending to include a viscous sublayer adjacent to said heat exchange surface, the improvement wherein said heat exchange surface includes at least one of: means for forming pressure gradients in said liquid having a component perpendicular to said heat exchange surface to facilitate removal of said nucleate bubbles; and means for breaking up said viscous sublayer to facilitate removal of said nucleate bubbles.

    Abstract translation: 公开了一种液体冷却阳极x射线管，其中旋转阳极适于通过能量束照射，并且包括热交换表面，所述X射线管包括用于提供冷却剂液体流以从所述热交换表面去除热的装置 热交换表面通过在所述热交换表面上形成核蒸气泡，所述液体倾向于包括邻近所述热交换表面的粘性子层，其改进在于所述热交换表面包括以下中的至少一个：用于在所述热交换表面上形成压力梯度的装置 液体具有垂直于所述热交换表面的部件以便于去除所述核泡; 以及用于分解所述粘性子层以便于去除所述核心气泡的装置。

    Soft x-ray source and method for manufacturing the same
    22.
    发明授权
    Soft x-ray source and method for manufacturing the same 失效
    软X射线源及其制造方法

    公开(公告)号：US4238706A

    公开(公告)日：1980-12-09

    申请号：US966621

    申请日：1978-12-05

    Applicant: Hideo Yoshihara ,  Mikiho Kiuchi ,  Satoshi Nakayama ,  Toa Hayasaka ,  Junji Matsui

    Inventor： Hideo Yoshihara ,  Mikiho Kiuchi ,  Satoshi Nakayama ,  Toa Hayasaka ,  Junji Matsui

    IPC: H01J9/14 ,  H01J35/10 ,  H01L21/027 ,  H01J35/08

    CPC classification number: H01J35/106

    Abstract: There is disclosed a soft x-ray source comprising (a) a substrate formed of a thermally conductive material, such as copper or a copper alloy, which tends to generate predominantly hard x-rays upon the collision of an electron beam, (b) an intermediate layer formed on the substrate, the intermediate layer being at least one of rhodium, silver, palladium, and molybdenum, and (c) a silicon film formed on the intermediate layer. There is also disclosed an x-ray lithographic apparatus comprising (a) an electron beam source, (b) the soft x-ray source described above, and (c) means for irradiating an object with the emitted soft x-rays. The method for manufacturing the soft x-ray source comprises (a) preparing a substrate, (b) setting the substrate in a vacuum chamber, (c) introducing a gas or vapor-containing silicon in a vacuum chamber, and (d) forming a silicon film on the intermediate layer by generating a plasma within the vacuum chamber.

    Abstract translation: 公开了一种软X射线源，其包括（a）由诸如铜或铜合金的导热材料形成的基底，其在电子束的碰撞时主要产生硬的x射线，（b） 形成在所述基板上的中间层，所述中间层是铑，银，钯和钼中的至少一种，以及（c）在所述中间层上形成的硅膜。 还公开了一种x射线光刻设备，其包括（a）电子束源，（b）上述软x射线源，和（c）用于用发射的软X射线照射物体的装置。 用于制造软X射线源的方法包括（a）制备基底，（b）将基底设置在真空室中，（c）在真空室中引入气体或含蒸汽的硅，和（d）形成 通过在真空室内产生等离子体，在中间层上形成硅膜。

    Rotating anode x-ray source and cooling technique therefor
    23.
    发明授权
    Rotating anode x-ray source and cooling technique therefor 失效
    旋转阳极x射线源及其冷却技术

    公开(公告)号：US4165472A

    公开(公告)日：1979-08-21

    申请号：US905483

    申请日：1978-05-12

    Applicant: David B. Wittry

    Inventor： David B. Wittry

    IPC: H01J35/10

    CPC classification number: H01J35/106 ,  H01J2235/1287

    Abstract: A rotating anode x-ray source is disclosed having means by which to efficiently cool the electron beam target surface thereof. Energy is removed from the rotating anode target surface by a technique which includes liquid to vapor phase cooling.

    Abstract translation: 公开了一种旋转阳极x射线源，其具有有效地冷却其电子束目标表面的装置。 通过包括液相至气相冷却的技术将能量从旋转阳极靶表面去除。

    X-ray tube
    24.
    发明授权
    X-ray tube 失效
    X射线管

    公开(公告)号：US3870916A

    公开(公告)日：1975-03-11

    申请号：US44425674

    申请日：1974-02-20

    Applicant: KERNFORSCHUNGSANLAGE JUELICH

    Inventor： KUSSEL ECKART ,  HAUBOLD HEINZ-GUNTHER ,  WOMBACHER PETER

    IPC: H01J35/00 ,  F16C37/00 ,  H01J35/10

    CPC classification number: H01J35/106

    Abstract: An x-ray tube with an anode which is located in a high vacuum chamber connectable to a vacuum pump and is passed through by cooling fluid. The anode which comprises a peripheral mantle surface and lateral surfaces which are approximately parallel to each other is disengageably connected to a rotatable hollow shaft for rotation therewith and has its peripheral mantle surface located within the region of the electron beams emitted by the cathode. The x-ray tube furthermore comprises a distributing member for distributing the cooling fluid, which distributing member is arranged in the interior of and coaxially with the rotatable anode. The peripheral mantle surface is formed by the central peripheral portion of a ring which has a U-shaped cross section and the legs of which are detachably connected to the lateral surfaces of the anode, O-rings being provided for sealing purposes between the legs of the ring and the lateral surfaces of the anode.

    Abstract translation: 具有阳极的x射线管，其位于可与真空泵连接并通过冷却流体的高真空室中。 包括周边地幔表面和彼此近似平行的侧表面的阳极可分离地连接到可旋转的空心轴与其一起旋转，并且其周围地幔表面位于由阴极发射的电子束的区域内。 X射线管还包括用于分配冷却流体的分配构件，该分配构件布置在可旋转阳极的内部并与可旋转阳极同轴。 周边地幔表面由具有U形横截面的环的中央周边部分形成，并且其腿部可拆卸地连接到阳极的侧表面，O形环设置用于在 环和阳极的侧表面。

    Apparatus and a method for generating a flattening x-ray radiation field
    28.
    发明授权
    Apparatus and a method for generating a flattening x-ray radiation field 有权
    用于产生平坦化X射线辐射场的装置和方法

    公开(公告)号：US09508525B2

    公开(公告)日：2016-11-29

    申请号：US14494178

    申请日：2014-09-23

    Applicant: NUCTECH COMPANY LIMITED ,  Tsinghua University

    Inventor： Kejun Kang ,  Chuanxiang Tang ,  Huaping Tang ,  Huaibi Chen ,  Wenhui Huang

    IPC: A61N5/10 ,  H01J35/14 ,  H01J35/06 ,  H01J35/10 ,  H05H7/06

    CPC classification number: H01J35/14 ,  A61N5/1077 ,  H01J35/06 ,  H01J35/106 ,  H01J2235/068 ,  H01J2235/086 ,  H01J2235/1262 ,  H05H7/06

    Abstract: An apparatus and a method are for generating a flattening x-ray radiation field. The apparatus includes: plurality of electron accelerators for generating high-energy electron beam current; and a common target unit including a vacuum target chamber, a target and plurality of input connectors. The plurality of input connectors are connected to one side of the vacuum target chamber and the target is installed at the other side of the vacuum target chamber opposing the plurality of input connectors, the axes of which intersect in pairs at one point in an predetermined included angle. The plurality of electron accelerators are connected to the plurality of input connectors.

    Abstract translation: 一种用于产生平坦的x射线辐射场的装置和方法。 该装置包括：多个用于产生高能电子束电流的电子加速器; 以及包括真空靶室，靶和多个输入连接器的公共目标单元。 多个输入连接器连接到真空靶室的一侧，并且目标件安装在真空靶室的与多个输入连接器相对的另一侧，多个输入连接器的轴线在预定的包括的一个点处成对地相交 角度。 多个电子加速器连接到多个输入连接器。

    Rotating-anode X-ray tube assembly and rotating-anode X-ray tube apparatus
    29.
    发明授权
    Rotating-anode X-ray tube assembly and rotating-anode X-ray tube apparatus 有权
    旋转阳极X射线管组件和旋转阳极X射线管装置

    公开(公告)号：US09431207B2

    公开(公告)日：2016-08-30

    申请号：US14488489

    申请日：2014-09-17

    Applicant: Toshiba Electron Tubes & Devices Co., Ltd.

    Inventor： Yoshifumi Imai ,  Tomonari Ishihara

    IPC: H01J35/00 ,  H01J35/10 ,  H01J35/18

    CPC classification number: H01J35/101 ,  H01J35/106 ,  H01J35/18

    Abstract: According to one embodiment, a rotating-anode X-ray tube assembly includes an X-ray tube, a stator coil, a housing, an X-ray radiation window, and a coolant. The housing includes a first divisional part which includes an X-ray radiation port and to which the X-ray tube is directly or indirectly fixed, and a second divisional part located on a side opposite to an anode target with respect to an anode target rotating mechanism and coupled to the first divisional part. A coupling surface between the first divisional part and the second divisional part is located on one plane, and is inclined to an axis, with exclusion of a direction perpendicular to the axis.

    Abstract translation: 根据一个实施例，旋转阳极X射线管组件包括X射线管，定子线圈，外壳，X射线辐射窗和冷却剂。 壳体包括第一分割部分，其包括X射线辐射端口，X射线管直接或间接固定到该第一分割部分，以及相对于阳极靶旋转的位于阳极靶的相反侧的第二分割部分 机制，并结合第一部分。 第一分割部分和第二分割部分之间的耦合表面位于一个平面上，并且相对于轴线倾斜，排除垂直于轴线的方向。

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