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    Flexible ion generator device
    22.
    发明授权
    Flexible ion generator device 有权

    公开(公告)号：US11511014B2

    公开(公告)日：2022-11-29

    申请号：US17201794

    申请日：2021-03-15

    Applicant: Global Plasma Solutions, Inc.

    Inventor： Charles Houston Waddell

    IPC: A61L9/22 ,  H01J33/02

    Abstract: A flexible ion generator device that includes a dielectric layer having a first end, a second end, a first side, a second side, a top side, and a bottom side, at least one trace positioned on the dielectric layer and having a plurality of emitters engaged to the at least one trace. A plurality of lights disposed on the dielectric layer.

    Cathode housing suspension of an electron beam device
    25.
    发明授权
    Cathode housing suspension of an electron beam device 有权
    电子束装置的阴极外壳悬挂

    公开(公告)号：US09142377B2

    公开(公告)日：2015-09-22

    申请号：US14125989

    申请日：2012-06-27

    Applicant: Hans Wittwer ,  Urs Hostettler ,  Hans Reusser ,  Toni Waber

    Inventor： Hans Wittwer ,  Urs Hostettler ,  Hans Reusser ,  Toni Waber

    IPC: H01J1/88 ,  H01J33/02 ,  H01J9/36 ,  G21K5/02

    CPC classification number: H01J1/88 ,  G21K5/02 ,  H01J9/36 ,  H01J33/02

    Abstract: A cathode-housing suspension of an electron beam device having a tubular body of elongate shape with an exit window extending in the longitudinal direction and a connector end in one end of the tubular body is disclosed. The electron beam device further comprises a cathode housing having an elongate shape and comprising a free end and an attachment end remote to the free end, and the attachment end comprises an outwardly extending flange provided with threaded openings for set screws and non-threaded openings for attachment bolts, for attaching the attachment end to a corresponding socket of the tubular body, wherein a mechanism configured to bias the attachment end away from the socket are arranged in the tubular body.

    Abstract translation: 公开了一种具有细长形状管状体的电子束装置的阴极 - 壳体悬架，其具有在纵向方向上延伸的出射窗口和在管状体的一端中的连接器端部。 电子束装置还包括具有细长形状并且包括远离自由端的自由端和附接端的阴极壳体，并且附接端包括向外延伸的凸缘，其设有用于固定螺钉和非螺纹开口的螺纹开口， 附接螺栓，用于将附接端附接到管状体的相应插座，其中，构造成将附接端偏离插座的机构布置在管状体中。

    Non-radioactive ion source using high energy electrons
    26.
    发明授权
    Non-radioactive ion source using high energy electrons 有权
    使用高能电子的非放射性离子源

    公开(公告)号：US09006678B2

    公开(公告)日：2015-04-14

    申请号：US13960006

    申请日：2013-08-06

    Applicant: Implant Sciences Corporation

    Inventor： Dmitriy V. Ivashin ,  Säid Boumsellek

    IPC: H01J27/00 ,  H01J31/04 ,  H01J29/04 ,  H01J27/20 ,  H01J3/02 ,  H01J33/02 ,  G01N27/62

    CPC classification number: H01J31/04 ,  G01N27/624 ,  G01N27/64 ,  H01J3/021 ,  H01J27/205 ,  H01J29/04 ,  H01J33/02

    Abstract: A system and method for producing a continuous or pulsed source of high energy electrons at or near atmospheric pressure is disclosed. High energy electrons are used to ionize analyte molecules in ambient air through collisions with reactant ions. The device includes an electron emitter, electron optics, and a thin membrane in an evacuated tube. The electron emitter may include a photocathode surface mounted on an optically transparent window and an external source of UV photons. The transparent window may include a UV transparent window mounted on an evacuated tube and/or the evacuated tube may be a transparent tube on which a photocathode surface film is deposited. The electron optics may include successive electrodes biased at increasing voltages. The membrane may include a material transparent or semi-transparent to energetic electrons. Upon impacting the membrane, continuous or pulsed electron packets are partially transmitted through to a high pressure ionization region.

    Abstract translation: 公开了一种在大气压或接近大气压下产生高能电子的连续或脉冲源的系统和方法。 高能电子用于通过与反应物离子的碰撞使环境空气中的分析物分子电离。 该装置包括电子发射器，电子光学器件和真空管中的薄膜。 电子发射器可以包括安装在光学透明窗口和外部UV光子源上的光电阴极表面。 透明窗口可以包括安装在真空管上的UV透明窗口和/或真空管可以是其上沉积有光电阴极表面膜的透明管。 电子光学器件可以包括以增加的电压偏置的连续电极。 膜可以包括对高能电子透明或半透明的材料。 在撞击膜时，连续的或脉冲的电子包被部分地传输到高压电离区域。

    Particle-beam exposure apparatus and particle-beam therapeutic apparatus
    27.
    发明授权
    Particle-beam exposure apparatus and particle-beam therapeutic apparatus 有权
    粒子束曝光装置和粒子束治疗装置

    公开(公告)号：US07449702B2

    公开(公告)日：2008-11-11

    申请号：US11480430

    申请日：2006-07-05

    Applicant: Katsuhisa Yoshida

    Inventor： Katsuhisa Yoshida

    IPC: A61N5/10 ,  H01J33/02

    CPC classification number: G21K5/04 ,  A61N5/1043 ,  A61N2005/1087 ,  A61N2005/1095 ,  G21K1/10

    Abstract: A particle-beam exposure apparatus and a particle-beam therapeutic apparatus are obtained, in which, by reducing diameter increase, due to scattering in a range shifter, of a charged particle beam, the charged particle beam whose diameter is so narrow that spatially accurate exposure into the target is possible can be supplied, as well as, by placing the range shifter at a position apart from a patient, intimidation caused by a movement noise, etc. can be prevented. A particle-beam exposure apparatus and a particle-beam therapeutic apparatus include a range shifter 4 for varying energy of a charged particle beam with a thickness of the range shifter 4 being changed during exposure of the charged particle beam, so that a range of the charged particle beam at a target 5 to be exposed is set to a desired value; and a set of quadrupole magnets 6, being placed between the range shifter 4 and the target 5, based on the magnetization amount of the set of quadrupole magnets 6 being controlled corresponding to the charged-particle-beam energy varied by the range shifter 4, for reducing diameter increase, due to scattering at the range shifter 4, of the charged particle beam at the target 5.

    Abstract translation: 得到粒子束曝光装置和粒子束治疗装置，其中，通过减小带电粒子束由于在换档器中的散射而导致的直径增加的直径增加，其直径如此狭窄，使得空间准确 可以提供对目标的曝光，以及通过将距离移位器放置在与患者分开的位置，可以防止由运动噪音等引起的恐吓。 粒子束曝光装置和粒子束治疗装置包括用于改变在带电粒子束曝光期间改变范围移位器4的厚度的带电粒子束的能量的量程移位器4， 将要曝光的目标5处的带电粒子束设定为期望值; 以及一组四极磁体6，其被放置在范围移位器4和目标5之间，基于由变幅器4改变的带电粒子束能量控制的四极磁铁组6的磁化量， 用于减少由于在移动器4处的散射引起的靶5处的带电粒子束的直径增加。

    Transverse magnetic field voltage isolator
    28.
    发明授权
    Transverse magnetic field voltage isolator 有权
    横向磁场电压隔离器

    公开(公告)号：US07288774B1

    公开(公告)日：2007-10-30

    申请号：US10811308

    申请日：2004-03-26

    Applicant: George R. Koch ,  Douglas Masnaghetti ,  James Daniel Olson ,  Jeffery Scott Coffer

    Inventor： George R. Koch ,  Douglas Masnaghetti ,  James Daniel Olson ,  Jeffery Scott Coffer

    IPC: H01J33/02 ,  H01J37/18

    CPC classification number: H01J37/248 ,  H01J37/02 ,  H01J2237/0206

    Abstract: An SEM wherein the entire imaging apparatus of the SEM is supported on air bearings. A multi-stage differentially pumped vacuum seal area provides a localized vacuum zone for wafer examination. A wafer leveling mechanism insures that the top surface of the wafer being examined is placed and maintained in a position level with the surface upon which the air bearing supported SEM rests. The SEM can move on its air bearings such that any portion of the wafer can be examined. A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field across its passageway. The voltage-isolating passageway includes at least two magnets that are positioned along opposite and exterior surfaces of the passageway. A semi-conductive coating can be applied to the interior passageway surface.

    Abstract translation: 其中SEM的整个成像装置支撑在空气轴承上的SEM。 多级差分抽真空密封区域为晶圆检查提供了局部真空区。 晶片调平机构确保被检查的晶片的顶表面被放置并保持在与支撑有空气轴承的SEM的表面平齐的位置。 SEM可以在其空气轴承上移动，使得可以检查晶片的任何部分。 描述了一种用于在维持在高DC电压的部件和维持在基本上较低电压的部件之间提供高电压隔离的电压隔离通道。 电压隔离通道在其通道上包含横向磁场。 电压隔离通道包括沿通道的相对和外表面定位的至少两个磁体。 半导电涂层可以施加到内部通道表面。

    Cathode assembly for a line focus electron beam device
    29.
    发明授权
    Cathode assembly for a line focus electron beam device 失效
    用于线聚焦电子束装置的阴极组件

    公开(公告)号：US5637953A

    公开(公告)日：1997-06-10

    申请号：US589265

    申请日：1996-01-22

    Applicant: George Wakalopulos

    Inventor： George Wakalopulos

    IPC: H01J3/12 ,  H01J33/02 ,  H01J29/70 ,  H01J29/58

    CPC classification number: H01J3/12 ,  H01J33/02

    Abstract: An electron beam device has a cathode that generates a fan-shaped electron beam. A first focusing lens includes first and second plates on opposed sides of a filament. The edges of the plates closest to a positively charged anode are arcuate, so that as individual electrons are accelerated normal to the edge of the charged plates, the beam increases in length with departure from the filament. A second focusing lens includes third and fourth plates on opposed sides of the first focusing lens. Each of the third and fourth plates has an arcuate edge proximate to the positively charged anode. The plates of the first and second focusing lenses provide focusing in a widthwise direction, while defining the increase in the lengthwise direction. Preferably, the filament is also curved. In the preferred embodiment, the curvature of the plates of the first focusing lens defines a common radius with the plates of the second focusing lens. The electron beam may be projected from the interior of an evacuated tube and may have a length that is not limited by the length of the filament.

    Abstract translation: 电子束装置具有产生扇形电子束的阴极。 第一聚焦透镜包括在灯丝的相对侧上的第一和第二板。 最靠近正电荷的阳极的板的边缘是弧形的，使得随着各个电子垂直于带电板的边缘加速，光束随着灯丝的长度而增加。 第二聚焦透镜在第一聚焦透镜的相对侧上包括第三和第四平板。 第三和第四板中的每一个具有靠近带正电的阳极的弧形边缘。 第一和第二聚焦透镜的板在宽度方向上提供聚焦，同时限定长度方向上的增加。 优选地，细丝也是弯曲的。 在优选实施例中，第一聚焦透镜的板的曲率与第二聚焦透镜的平板形成共同的半径。 电子束可以从真空管的内部突出并且可以具有不受长丝长度限制的长度。

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