Cathode structure for sputter ion pump
    22.
    发明授权
    Cathode structure for sputter ion pump 失效
    溅射离子泵的阴极结构

    公开(公告)号:US6004104A

    公开(公告)日:1999-12-21

    申请号:US892507

    申请日:1997-07-14

    CPC classification number: H01J41/14

    Abstract: A sputter ion pump including an anode assembly comprising a plurality of hollow anode cells and cathode surfaces having open spirals disposed at each end of said anode cells.

    Abstract translation: 一种溅射离子泵,其包括阳极组件,阳极组件包括多个中空阳极电池和阴极表面,阴极表面设置在所述阳极电池的每一端处具有开口螺旋。

    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
    24.
    发明授权
    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus 失效
    排气装置和真空泵单元包括排气装置

    公开(公告)号:US5480286A

    公开(公告)日:1996-01-02

    申请号:US217699

    申请日:1994-03-25

    CPC classification number: H01J41/14 H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置,其中在真空容器中实现高真空,使得真空容器内的气体分子被离子化并加速而被排出, 此外,在高真空泵送单元中,从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。

    Exhaust apparatus with vacuum pump
    25.
    发明授权
    Exhaust apparatus with vacuum pump 失效
    排气装置带真空泵

    公开(公告)号:US5326227A

    公开(公告)日:1994-07-05

    申请号:US11783

    申请日:1993-02-01

    CPC classification number: H01J41/14 H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括高真空装置和辅助真空泵的排气装置和高真空泵装置,其中在真空容器中实现高真空,使得真空容器内的气体分子被离子化并加速而被排出。 在高真空泵送单元中,这些气体分子被扩散回或从真空泵中释放出来被离子化并加速回到真空泵中。

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