公开(公告)号：US5963616A

公开(公告)日：1999-10-05

申请号：US815283

申请日：1997-03-11

Applicant: William T. Silfvast ,  Marc A. Klosner

Inventor： William T. Silfvast ,  Marc A. Klosner

IPC: G01J3/10 ,  G03F7/20 ,  H01J61/12 ,  H01J61/28 ,  H01J61/30 ,  H05G2/00 ,  H01J35/00

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G01J3/10 ,  G03F7/70033 ,  G03F7/70916 ,  G03F7/70983 ,  H01J61/12 ,  H01J61/28 ,  H01J61/30 ,  H05G2/005

Abstract: This invention relates to Lithium Plasma discharge sources, and in particular to methods of making and producing pulsed and continuous discharge sources for plasma soft-x-ray or EUV projection lithography. Specifically, novel configurations, metal and ceramic material combinations and efficient wavelengths over and including 11.4 nm are disclosed for EUV lithium plasma discharge lamps.

Abstract translation: 本发明涉及锂离子放电源，特别涉及制造和生产用于等离子体软X射线或EUV投影光刻的脉冲和连续放电源的方法。 具体地，对于EUV锂等离子体放电灯，公开了新颖的配置，金属和陶瓷材料组合以及超过11.4nm的有效波长。

公开(公告)号：US5909085A

公开(公告)日：1999-06-01

申请号：US820458

申请日：1997-03-17

Applicant: Leonard Y. Nelson

Inventor： Leonard Y. Nelson

IPC: H01J61/28 ,  H01J61/52 ,  H01J61/72 ,  H05B41/39 ,  H05B39/00

CPC classification number: H05B41/39 ,  H01J61/28 ,  H01J61/52 ,  H01J61/523 ,  H01J61/72

Abstract: A luminosity control system (10) for a fluorescent lamp (12) that has a glass enclosure (18) and a pair of lead wires (14) at each end of the glass enclosure is provided. A filament (16) is electrically coupled to each pair of lead wires. An amalgam (22) is located adjacent each filament. The amalgam releases mercury into the glass enclosure upon activation of the fluorescent lamp. A wrapped wire heater (24) is in thermal contact with a first portion of the exterior surface of the glass enclosure. The heater and a thermoelectric cooler (36) raise the temperature of the fluorescent lamp to a level above the temperature at which the fluorescent lamp produces maximum visible light as determined by mercury pressure within the glass enclosure while the amalgam releases mercury into the fluorescent lamp. Thereafter, the thermoelectric cooler (36) maintains a portion of the glass enclosure at this temperature.

Abstract translation: 提供了一种用于荧光灯（12）的光度控制系统（10），其在玻璃外壳的每一端具有玻璃罩（18）和一对引线（14）。 灯丝（16）电耦合到每对引线。 汞齐（22）位于每个细丝附近。 汞合金在激活荧光灯时将水银放入玻璃外壳。 包裹电线加热器（24）与玻璃外壳的外表面的第一部分热接触。 加热器和热电冷却器（36）将荧光灯的温度升高到高于荧光灯产生最大可见光的温度的水平，由玻璃外壳内的汞压力确定，而汞齐将汞释放到荧光灯中。 此后，热电冷却器（36）将该玻璃外壳的一部分保持在该温度。

公开(公告)号：US5830026A

公开(公告)日：1998-11-03

申请号：US921949

申请日：1997-08-26

Applicant: Antonio Schiabel ,  Claudio Boffito

Inventor： Antonio Schiabel ,  Claudio Boffito

IPC: H01J61/20 ,  B22F1/00 ,  H01J7/10 ,  H01J7/14 ,  H01J9/395 ,  H01J61/24 ,  H01J61/26 ,  H01J61/28

CPC classification number: H01J7/10 ,  B22F1/0003 ,  H01J61/24 ,  H01J7/14 ,  H01J9/395 ,  H01J61/72

Abstract: A mercury-dispensing device is disclosed that includes a mercury dispenser having the formula Ti.sub.x Zr.sub.y Hg.sub.z in which x and y are between 0 and 13, inclusive, the quantity x+y is between 3 and 13, inclusive, and z is 1 or 2; and a promoter that comprises copper, silicon and possibly a third metal selected among the transition elements. A getter material selected among titanium, zirconium, tantalum, niobium, vanadium and mixtures thereof, and alloys of these metals with nickel, iron or aluminum can be included in the device. The mercury dispenser, promoter and optional getter material are provided preferably in the form of powders compressed as a pellet, or contained in a ring-shaped metallic support or rolled on the surfaces of a metallic strip. Also disclosed is a process for introducing mercury into electron tubes by making use of the above-mentioned mercury-dispensing devices.

Abstract translation: 公开了一种汞分配装置，其包括具有式TixZryHgz的汞分配器，其中x和y在0和13之间，包括x和y的数量在3和13之间，其中z是1或2; 以及包含选自过渡元素中的铜，硅和可能的第三金属的促进剂。 选自钛，锆，钽，铌，钒及其混合物的吸气剂材料，以及这些金属与镍，铁或铝的合金可以包括在该装置中。 汞分配器，促进剂和任选的吸气剂材料优选以以颗粒压缩的粉末的形式提供，或者包含在环形金属支撑体中或在金属带的表面上滚动。 还公开了通过使用上述汞分配装置将汞引入电子管的方法。

公开(公告)号：US5767617A

公开(公告)日：1998-06-16

申请号：US730798

申请日：1996-10-17

Applicant: David O. Wharmby ,  Zoltan Toth ,  Istvan Nagy

Inventor： David O. Wharmby ,  Zoltan Toth ,  Istvan Nagy

IPC: H01J61/28 ,  H01J61/24 ,  H01J61/54 ,  H01J65/04 ,  H01J65/00

CPC classification number: H01J61/54 ,  H01J61/24 ,  H01J61/72 ,  H01J65/048

Abstract: An electrodeless fluorescent lamp comprises a discharge vessel (10) having a re-entrant portion (11) for housing a solenoid (12) for initiating a discharge in the vessel by means of an RF electromagnetic field. A primary amalgam (18) for releasing mercury vapor is placed at the tip of an exhaust tube (17) where the primary amalgam can be maintained at a suitable temperature for controlling the mercury vapor pressure. The primary amalgam does not provide rapid run-up of light output. To provide rapid run-up of light output a pied of indium (20,30) is placed on the re-entrant at a position where it is rapidly heated by the discharge. The indium may be coated with the layers of a coating including phosphor.

Abstract translation: 无电极荧光灯包括具有用于容纳用于通过RF电磁场在容器中启动放电的螺线管（12）的入口部分（11）的放电容器（10）。 用于释放汞蒸汽的初级汞齐（18）放置在排气管（17）的尖端处，其中初级汞齐可以保持在适当的温度以控制汞蒸汽压力。 主要的汞齐不能提供快速的光输出。 为了提供光输出的快速启动，在其被放电快速加热的位置处，将重叠的铟（20,30）放置在入口处。 铟可以涂覆包括磷光体的涂层的层。

公开(公告)号：US5754000A

公开(公告)日：1998-05-19

申请号：US527527

申请日：1995-09-13

Applicant: Christopher Thomas Skilton ,  Paul Hanlon James Beatty

Inventor： Christopher Thomas Skilton ,  Paul Hanlon James Beatty

IPC: H01J9/395 ,  H01J61/24 ,  H01J61/28

CPC classification number: H01J9/395 ,  H01J61/24

Abstract: Apparatus for providing radiation includes an envelope and a cathode arrangement disposed within the envelope. The cathode arrangement includes an element for establishing an electrical contact. A dispenser is also disposed within the envelope. The dispenser carries mercury or a mercury alloy. A support element supports the dispenser. The support element extends from the dispenser through the envelope to provide an independent electrical contact for the dispenser.

Abstract translation: 用于提供辐射的装置包括设置在封套内的封套和阴极装置。 阴极装置包括用于建立电接触的元件。 分配器也设置在信封内。 分配器携带汞或汞合金。 支撑元件支撑分配器。 支撑元件从分配器通过信封延伸，为分配器提供独立的电气接触。

公开(公告)号：US5719465A

公开(公告)日：1998-02-17

申请号：US574796

申请日：1995-12-19

Applicant: Peter M. Den Breeijen ,  Franciscus A. S. Ligthart ,  Patricius W. M. Lepelaars

Inventor： Peter M. Den Breeijen ,  Franciscus A. S. Ligthart ,  Patricius W. M. Lepelaars

IPC: H01J61/24 ,  H01J61/28 ,  H01J61/72 ,  H01J1/62

CPC classification number: H01J61/72 ,  H01J61/28

Abstract: A low-pressure mercury vapor discharge lamp according to the invention is provided with a discharge vessel (10) which encloses a discharge space (11) containing mercury and a rare gas in a gaslight manner. The discharge vessel (10) has a light-transmitting tubular portion (12) and a first and a second end portion (13A, 13B). Current supply conductors (20A, 20A'; 20B, 20B') issue through each end portion (13A, 13B) to respective electrodes (21A, 21B) arranged in the discharge space (11). The lamp is further provided with a main amalgam (30) for stabilizing the mercury vapour pressure in the discharge space (11) during normal operation, and with an auxiliary amalgam (31A, 31B) for quickly releasing mercury into the discharge space (11) after switching-on of the lamp. In an equilibrium state at room temperature (25.degree. C.), the mass (m.sub.Hg in mg) of the quantity of mercury absorbed in auxiliary amalgam (31A, 31B) is at most 20 times the mercury vapour pressure (P.sub.E in Pa) prevalent in the discharge space (11) in the equilibrium state. Only comparatively small brightness differences between lamp zones occur in the lamp according to the invention after switching-on.

Abstract translation: 根据本发明的低压汞蒸气放电灯设置有放电容器（10），其以气体方式包围含有汞和稀有气体的放电空间（11）。 放电容器（10）具有透光管状部分（12）和第一和第二端部（13A，13B）。 电流供给导体（20A，20A'; 20B，20B'）通过每个端部（13A，13B）发射到布置在放电空间（11）中的各个电极（21A，21B）。 该灯还具有用于在正常操作期间稳定放电空间（11）中的汞蒸汽压力的主汞齐（30），以及用于将汞快速释放到放电空间（11）中的辅助汞齐（31A，31B） 在灯的接通之后。 在室温（25℃）的平衡状态下，在辅助汞齐（31A，31B）中吸收的汞的质量（mgHg）为汞​​蒸气压（PE / Pa）的20倍以下 在放电空间（11）处于平衡状态。 在接通之后，根据本发明的灯在灯区域之间仅出现较小的亮度差异。

公开(公告)号：US5705887A

公开(公告)日：1998-01-06

申请号：US615406

申请日：1996-03-14

Applicant: John W. Shaffer

Inventor： John W. Shaffer

IPC: H01J61/02 ,  H01J61/24 ,  H01J61/28 ,  H01J61/30 ,  H01J61/70 ,  H01J61/72 ,  H01J1/62 ,  H01J5/50 ,  H01J17/04

CPC classification number: H01J61/02 ,  H01J61/24 ,  H01J61/302 ,  H01J61/70

Abstract: A fluorescent lamp is disclosed containing a deposit of a dried metal hydride-containing paste. The dried metal hydride-containing paste has a decomposition temperature higher than the temperature present during normal lamp operation. At the end of the lamp life, an increase in lamp temperature decomposes the metal hydride-containing paste and releases hydrogen within the lamp. The presence of hydrogen causes the lamp to extinguish passively without significant end heating or glass cracking.

Abstract translation: 公开了一种荧光灯，其包含含有干燥金属氢化物的浆料的沉积物。 干燥的含金属氢化物的糊剂的分解温度高于正常灯操作期间存在的温度。 在灯寿命结束时，灯温度的增加分解含金属氢化物的糊状物并释放灯内的氢。 氢的存在导致灯被动地熄灭，而没有显着的最终加热或玻璃开裂。

公开(公告)号：US5698943A

公开(公告)日：1997-12-16

申请号：US661231

申请日：1996-03-22

Applicant: John W. Shaffer

Inventor： John W. Shaffer

IPC: H01J61/28 ,  H01J61/24 ,  H01J61/54

CPC classification number: H01J61/54 ,  H01J61/24

Abstract: A low pressure mercury discharge lamp includes a sealed envelope defining a discharge space, an electrode disposed at one end of the envelope, mercury vapor sealed in the discharge space, and a starting flag. The starting flag includes a layer of bonded molecular sieve particles adhered to a metal foil.

Abstract translation: 低压汞放电灯包括限定放电空间的密封外壳，设置在外壳一端的电极，密封在放电空间中的水银蒸汽和启动标志。 起始标志包括粘附到金属箔上的粘结分子筛颗粒层。

公开(公告)号：US5520560A

公开(公告)日：1996-05-28

申请号：US393543

申请日：1995-02-23

Applicant: Antonio Schiabel ,  Claudio Boffito

Inventor： Antonio Schiabel ,  Claudio Boffito

IPC: B22F1/00 ,  H01J7/20 ,  H01J9/395 ,  H01J61/26 ,  H01J61/28

CPC classification number: H01J61/28 ,  B22F1/0003 ,  H01J61/26 ,  H01J7/20 ,  H01J9/395 ,  H01J61/72

Abstract: A mercury-dispensing combination suitable to release an amount of mercury higher than 60% during the activation step, even after partial oxidation, includes a mercury-dispensing intermetallic compound A with Hg and a second metal selected among Ti, Zr and mixtures thereof, as well as a promoting alloy or intermetallic compound B including Cu and a second metal selected among Sn, In or Ag or combinations thereof. There is also disclosed a mercury-dispensing device containing a combination of materials A and B, in addition to a process for introducing mercury into electron tubes consisting in the introduction of one of said devices inside the open tube and then heating thereof at a temperature between 550.degree. and 900.degree. C. after the tube sealing in order to get Hg free.

Abstract translation: 即使在部分氧化之后，适用于释放一定量的高于60％的汞的汞分配组合包括汞分配金属间化合物A与Hg和选自Ti，Zr及其混合物的第二金属，如 以及作为包含Cu和选自Sn，In或Ag的第二金属或其组合的促进合金或金属间化合物B。 还公开了一种含有材料A和B的组合的汞分配装置，以及将汞引入电子管的工艺，该方法包括在开放管内引入一种所述装置之后，然后在 550°和900°C后管密封，以获得无汞。

公开(公告)号：US5237240A

公开(公告)日：1993-08-17

申请号：US802117

申请日：1991-12-04

Applicant: Andre C. Bouchard

Inventor： Andre C. Bouchard

IPC: H01J61/24 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54

CPC classification number: H01J61/523 ,  H01J61/24 ,  H01J61/28 ,  H01J61/541

Abstract: A mercury vapor discharge lamp such as a negative glow discharge lamp includes a light-transmitting envelope containing a noble gas fill material. An anode electrode and a cathode electrode are spacedly located within the envelope. An amalgam-forming material for regulating the mercury vapor pressure of the lamp is disposed within the envelope. In order to increase the mercury vapor pressure and consequently the light output of the lamp at low ambient temperatures, a heating element is disposed within the envelope and in close thermal proximity to the amalgam-forming material. A thermostatic switch coupled to the heating element is activated when the temperature adjacent the amalgam-forming material is below a predetermined temperature.

Abstract translation: 诸如负辉光放电灯的汞蒸气放电灯包括含有惰性气体填充材料的透光外壳。 阳极电极和阴极电极间隔地位于封套内。 用于调节灯的汞蒸汽压的汞齐形成材料设置在外壳内。 为了在低环境温度下增加水银蒸汽压力并因此增加灯的光输出，加热元件设置在外壳内并且紧密接近汞齐形成材料。 当与汞齐形成材料相邻的温度低于预定温度时，耦合到加热元件的恒温开关被激活。