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公开(公告)号：US20190072431A1
公开(公告)日：2019-03-07
申请号：US16082616
申请日：2017-03-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA
Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
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公开(公告)号：US20180373021A1
公开(公告)日：2018-12-27
申请号：US16065856
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
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公开(公告)号：US20180292267A1
公开(公告)日：2018-10-11
申请号：US15764943
申请日：2016-09-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC: G01J5/08 , G02F1/21 , G01J5/20 , H01L31/0232 , H01L31/0203 , H01L31/0304 , H01L31/02
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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34.发明申请SURFACE-ENHANCED RAMAN SCATTERING UNIT AND RAMAN SPECTROSCOPIC ANALYSIS METHOD 有权表面增强拉曼散射单元和拉曼光谱分析方法公开(公告)号：US20160061736A1
公开(公告)日：2016-03-03
申请号：US14780728
申请日：2014-02-07
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masashi ITO , Katsumi SHIBAYAMA , Kazuto OFUJI , Hiroki OYAMA , Yoshihiro MARUYAMA
IPC: G01N21/65
CPC classification number: G01N21/658
Abstract: A SERS unit 1A comprises a SERS element 2 having a substrate and an optical function part 20 formed on the substrate, the optical function part 20 for generating surface-enhanced Raman scattering; a measurement board 3 supporting the SERS element 2 upon measurement; and a holding part 4 mechanically holding the SERS element 2 in the measurement board 3.
Abstract translation: SERS单元1A包括具有基板的SERS元件2和形成在基板上的光学功能部件20，用于产生表面增强拉曼散射的光学功能部件20; 在测量时支撑SERS元件2的测量板3; 以及将SERS元件2机械地保持在测量板3中的保持部4。
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