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公开(公告)号：US20220333988A1
公开(公告)日：2022-10-20
申请号：US17847881
申请日：2022-06-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA
Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
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公开(公告)号：US20210131870A1
公开(公告)日：2021-05-06
申请号：US17126297
申请日：2020-12-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G01J3/26 , B23K26/53 , B23K26/00 , B23K26/064 , B81B3/00 , B81C1/00 , G01J3/02 , G02B5/28 , G02B26/00 , B23K26/06
Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
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33.发明申请公开(公告)号：US20200310112A1
公开(公告)日：2020-10-01
申请号：US16765577
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B27/00 , H01L27/144 , H01L31/0203 , H01L31/0216 , H01L31/18 , B08B5/02 , B08B13/00
Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
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公开(公告)号：US20200309637A1
公开(公告)日：2020-10-01
申请号：US16765564
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.
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公开(公告)号：US20200292386A1
公开(公告)日：2020-09-17
申请号：US16765765
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
IPC: G01J3/26 , H01L21/673
Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second minor portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
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Patent Agency Ranking
公开(公告)号：US20200232852A1
公开(公告)日：2020-07-23
申请号：US16843244
申请日：2020-04-08
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC: G01J5/08 , G02B26/00 , G01J3/26 , G01J3/02 , G01J5/20 , G02F1/21 , H01L31/02 , H01L31/0203 , H01L31/0232 , H01L31/0304
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector, and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Pert interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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公开(公告)号：US20190072431A1
公开(公告)日：2019-03-07
申请号：US16082616
申请日：2017-03-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA
Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
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公开(公告)号：US20180373021A1
公开(公告)日：2018-12-27
申请号：US16065856
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
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公开(公告)号：US20180292267A1
公开(公告)日：2018-10-11
申请号：US15764943
申请日：2016-09-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC: G01J5/08 , G02F1/21 , G01J5/20 , H01L31/0232 , H01L31/0203 , H01L31/0304 , H01L31/02
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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公开(公告)号：US20160370573A1
公开(公告)日：2016-12-22
申请号：US14901732
申请日：2014-06-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G02B26/00
CPC classification number: G02B26/001 , G01J3/26
Abstract: A Fabry-Perot interference filter 10A includes a first mirror 31; a second mirror 41 being opposite to the first mirror 31 with a gap S therebetween; a first electrode 17 formed in the first mirror 31 to surround a light transmission region 11; a second electrode 18 formed in the first mirror 31 to include the light transmission region 11; and a third electrode 19 formed in the second mirror 41 to be opposite to the first electrode 17 and the second electrode 18 and connected to the same potential as the second electrode 18. The second electrode 18 is positioned at the side of the third electrode 19 or the opposite side thereof with respect to the first electrode 17 in an opposite direction D where the first mirror 31 and the second mirror 41 are opposite each other.
Abstract translation: 法布里 - 珀罗干涉滤光片10A包括第一反射镜31; 与第一反射镜31相对的第二反射镜41，其间具有间隙S; 形成在第一反射镜31中以围绕光透射区域11的第一电极17; 形成在第一反射镜31中以包括透光区域11的第二电极18; 以及形成在第二反射镜41中以与第一电极17和第二电极18相对并且连接到与第二电极18相同的电位的第三电极19.第二电极18位于第三电极19的一侧 或者与第一电极17相反的方向D，其中第一反射镜31和第二反射镜41彼此相对。
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