MEMBRANE COMPONENTS AND METHOD FOR FORMING A MEMBRANE COMPONENT

    公开(公告)号:US20180222749A1

    公开(公告)日:2018-08-09

    申请号:US15885401

    申请日:2018-01-31

    Inventor: Alfons Dehe

    Abstract: A membrane component comprises a membrane structure comprising an electrically conductive membrane layer. The electrically conductive membrane layer has a suspension region and a membrane region. In addition, the suspension region of the electrically conductive membrane layer is arranged on an insulation layer. Furthermore, the insulation layer is arranged on a carrier substrate. Moreover, the membrane component comprises a counterelectrode structure. A cavity is arranged vertically between the counterelectrode structure and the membrane region of the electrically conductive membrane layer. In addition, an edge of the electrically conductive membrane layer projects laterally beyond an edge of the insulation layer by more than half of a vertical distance between the electrically conductive membrane layer and the counterelectrode structure.

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