Abstract:
A microfluidic device is provided. The microfluidic device includes a microtube having a hollow core. The microfluidic device further includes a plurality of nanopores extending radially outwards from an inner surface of the microtube.
Abstract:
A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.
Abstract:
Embodiments of hybrid microfluidic assemblies comprise at least one microstructure that is formed of transparent material and is substantially free of non-transparent material and further comprise at least one microstructure that is formed of non-transparent material and is substantially free of transparent material.
Abstract:
Provided is a device including: a first substrate having a flat surface; a second substrate having a flat surface; and a recessed portion formed in at least one of the flat surfaces of the first substrate and the second substrate, the flat surfaces of the first substrate and the second substrate being bonded together using a solvent to form a hollow therebetween in which a contact angle between a portion of the flat surface in contact with the hollow and the solvent is larger than a contact angle between at least part of a portion of the flat surface that is not in contact with the hollow and the solvent.
Abstract:
A functional device (and a functional device manufacturing method) includes a first substrate in which a groove is formed in one surface, a second substrate which is integrally disposed by bonding one surface of the second substrate to the one surface of the first substrate, and forms a flow path together with the groove of the first substrate, at least one modification object of a capture body which captures a target substance supplied into the flow path, an electrode which imparts an electrical or a chemical action to the target substance, and a catalyst, in which the modification object is disposed by being modified on a part of an inner surface of the flow path, a bonding portion between the one surface of the first substrate and the one surface of the second substrate is formed by bonding fluorine to silica.
Abstract:
A technique includes forming a gradient channel with width and depth gradients. A mask is disposed on top of a substrate. The mask is patterned with at least one elongated channel pattern having different elongated channel pattern widths. A channel is etched in the substrate in a single etching step, the channel having a width gradient and a corresponding depth gradient both simultaneously etched in the single etching step according to the different elongated channel pattern widths in the mask.
Abstract:
A microfluidic chip includes a thin biaxially-oriented polyethylene terephthalate (“BoPET”) film and a micro-channel in the BoPET film. A method for manufacturing a microfluidic chip includes coating UV epoxy on a first side of a BoPET film, placing the BoPET film on a first substrate with the first side facing the first substrate, curing the UV epoxy on the first side of the BoPET film to attach the BoPET film on the first substrate; forming at least one microfluidic pathway in the BoPET film, coating UV epoxy on a first side of a second substrate, placing the second substrate on the BoPET film with the first side of the second substrate facing a second side of the BoPET film, and curing the UV epoxy on the first side of the second substrate to attach the BoPET film to the second substrate. The microfluidic chip may be a multi-layered chip.
Abstract:
The invention exploits a widely used device in micro-fluidics, the electro-osmotic pump (EOP), to create very low energy micro-scale and macro-scale mechanical actuators. The EOP uses electrical fields to move naturally occurring charged particles (ions) through a fluid medium. As the ions move in response to the applied field, they drag the (non-charged) fluid along, establishing bulk flow. When confined to a narrow chamber, a pressure gradient can be established. The combination of pressure gradient and flow performs mechanical work. With the use of electro-osmotic pumps, the invention enables actuators to be constructed in a variety of embodiments, including for example, a sheet structure, a piston structure, and a cellular structure to name a few.
Abstract:
A method for at least partially inserting a plug into a hole, said method comprising the steps of a) providing a at least one substrate with at least one hole wherein said at least one hole has a largest dimension of from 1 μm to 300 μm, b) providing a piece of material, wherein said piece of material has a larger dimension than said at least one hole, c) pressing said piece of material against the hole with a tool so that a plug is formed, wherein at least a part of said piece of material is pressed into said hole, d) removing the tool from the piece of material. There is further disclosed a plugged hole manufactured with the method. One advantage of an embodiment is that an industrially available wire bonding technology can be used to seal various cavities. The existing wire bonding technology makes the plugging fast and cheap.
Abstract:
A method of manufacturing a MEMS package includes initially providing a substrate formed of a first material and defining a bore therein. The bore is substantially completely lined with a second material that is different from the first material. A micromachined component having a fluid passageway formed therein is affixed to the substrate such that the bore and the fluid passageway are in fluid communication.