Light receiving device, light receiving device manufacturing method, and light receiving method
    31.
    发明授权
    Light receiving device, light receiving device manufacturing method, and light receiving method 有权
    光接收装置,光接收装置的制造方法以及光接收方法

    公开(公告)号:US08279379B2

    公开(公告)日:2012-10-02

    申请号:US12889230

    申请日:2010-09-23

    CPC classification number: G01J1/04 G01J1/0407 G01J1/0422 G01J1/0429 G01J1/0437

    Abstract: There is provided a light receiving device including a polarization dispersing section that disperses a polarization direction of incoming light into a plurality of polarization directions, a light collecting section that has a metal pattern shaped like concentric circles on a surface thereof, where the light collecting section collects light that has passed through the polarization dispersing section, and a light receiving section that receives the light collected by the light collecting section. Also provided are a light receiving device manufacturing method and a light receiving method. The light collecting section may have a surface plasmon antenna that has the metal pattern shaped like the concentric circles on a surface thereof, and the light receiving section may receive the light collected toward a center of the concentric circles of the metal pattern of the light collecting section, through a hole at the center of the concentric circles, on a rear side of the light collecting section.

    Abstract translation: 提供了一种光接收装置,其包括将入射光的偏振方向分散成多个偏振方向的偏振光分散部,具有在其表面上形状为同心圆的金属图案的聚光部, 收集通过偏振分散部的光,以及受光部,其接收由该光收集部收集的光。 还提供了一种光接收装置的制造方法和光接收方法。 集光部可以具有表面等离子体激元天线,其具有在其表面上形状与同心圆形状的金属图案,并且光接收部可以接收朝向聚光的金属图案的同心圆的中心收集的光 通过在同心圆的中心的孔,在集光部的后侧。

    Scanning exposure apparatus and method of manufacturing device
    33.
    发明授权
    Scanning exposure apparatus and method of manufacturing device 失效
    扫描曝光装置及其制造方法

    公开(公告)号:US08248580B2

    公开(公告)日:2012-08-21

    申请号:US12433698

    申请日:2009-04-30

    Inventor: Makiko Ogasawara

    Abstract: A scanning exposure apparatus (300) includes a first stage (325), a second stage (345), a projection optical system (330), a first measurement unit (20) arranged on the second stage (345), and a controller (350). A measurement mask (10) is arranged on the first stage (325). The first measurement unit (20) includes a light-shielding member having an opening, and measures the intensity of light having passed through the opening in a light intensity distribution formed on the light-shielding member when at least one of the first stage (325) and the second stage (345) is scanned and a measurement pattern of the measurement mask (10) is obliquely illuminated. The controller (350) calculates the defocus amount, while at least one of the first stage (325) and the second stage (345) is scanned, based on a temporal change in the light intensity measured by the first measurement unit (20).

    Abstract translation: 扫描曝光装置(300)包括第一级(325),第二级(345),投影光学系统(330),布置在第二级(345)上的第一测量单元(20)和控制器 350)。 测量掩模(10)布置在第一台(325)上。 第一测量单元(20)包括具有开口的遮光构件,并且当第一阶段(325)中的至少一个第一阶段(325)中的至少一个时,测量在形成于遮光构件上的光强度分布中通过开口的光强度 )和第二级(345),并且测量掩模(10)的测量图案被倾斜地照亮。 基于由第一测量单元(20)测量的光强度的时间变化,控制器(350)计算散焦量,同时扫描第一级(325)和第二级(345)中的至少一个。

    Method and system for supporting a moving optical component on a sloped portion
    34.
    发明授权
    Method and system for supporting a moving optical component on a sloped portion 有权
    用于在倾斜部分上支撑移动的光学部件的方法和系统

    公开(公告)号:US08243262B2

    公开(公告)日:2012-08-14

    申请号:US12524002

    申请日:2008-01-24

    Inventor: Arnon Ben-Natan

    CPC classification number: G01J1/04 G01J1/0403 G02B7/005

    Abstract: A device and a method for supporting an optical component (240) of an optical evaluation system, the device includes: (a) a supporting element (220) that includes a sloped portion (222); (b) at least one movement control component (210) that is coupled to the sloped portion; and (c) a movable element (230), adapted to move along the at least one movement control component; wherein the movable element is adapted to support the optical component; wherein when the movable element supports the optical component a center Of gravity of a combination of the movable element and the optical component is positioned above, the sloped portion or in proximity to the sloped portion.

    Abstract translation: 一种用于支撑光学评估系统的光学部件(240)的装置和方法,所述装置包括:(a)包括倾斜部分(222)的支撑元件(220); (b)耦合到所述倾斜部分的至少一个运动控制部件(210); 和(c)适于沿着所述至少一个移动控制部件移动的可移动元件(230); 其中所述可移动元件适于支撑所述光学部件; 其中当所述可移动元件支撑所述光学部件时,所述可移动元件和所述光学部件的组合的重心位于所述倾斜部分的上方或所述倾斜部分附近。

    Laser beam analysis apparatus
    35.
    发明授权
    Laser beam analysis apparatus 有权
    激光束分析仪

    公开(公告)号:US08237922B2

    公开(公告)日:2012-08-07

    申请号:US12756476

    申请日:2010-04-08

    Abstract: An apparatus that enables real time measurement of the spatial profile, circularity, centroid, astigmatism and M2 values of a laser beam generated by a high power laser beam. The apparatus employs the optics used in a process application, including a focus lens and cover glass. An attenuation module includes a pair of high reflecting mirror plates disposed in parallel, spaced apart relation to one another at a common angle of incidence to the laser beam. A beam dump is positioned out of a path of travel of the laser beam and in receiving relation to light reflected by the first and second mirrors. A camera detects spots of light that pass through the first and second mirrors. A high power attenuator formed by a highly reflective mirror pair is positioned between the source and the attenuation module. A second embodiment includes a single mirror plate having highly reflective surfaces.

    Abstract translation: 能够对由高功率激光束产生的激光束的空间分布,圆度,重心,像散和M2值进行实时测量的装置。 该装置采用在工艺应用中使用的光学元件,包括聚焦透镜和盖玻璃。 衰减模块包括一对平行设置的高反射镜板,以与激光束的共同入射角相互间隔开。 光束转台位于激光束的行进路径之外并且接收与由第一和第二反射镜反射的光的关系。 相机检测通过第一和第二反射镜的光点。 由高反射镜对形成的高功率衰减器位于源极与衰减模块之间。 第二实施例包括具有高反射表面的单个反射镜板。

    Integrated opto-electronic device and portable reflective projection system
    36.
    发明授权
    Integrated opto-electronic device and portable reflective projection system 有权
    集成光电器件和便携式反射投影系统

    公开(公告)号:US08220930B2

    公开(公告)日:2012-07-17

    申请号:US12411308

    申请日:2009-03-25

    Applicant: Deming Tang

    Inventor: Deming Tang

    Abstract: An integrated opto-electronic device, a portable reflective projection system and a method for in situ monitoring and adjusting light illumination are provided. The device includes a reflective polarizing composite film (150) configured to receive a source light (210) at a desired non-normal incident angle (221), polarizes and reflects a first portion (211) of said source light (210) as polarized illumination light (16) at a reciprocal angle (222) to said desired non-normal incident angle (221); and a photovoltaic cell (180), adhered to an opposite side of said reflective polarizing composite film (150) to said source light (210), configured to receive a second portion (212) of said source light (210) that passes through said reflective polarizing composite film (150) and transform said second portion (212) to photogenerated charge. Unused illumination can be collected in order to re-store and reuse recovered energy.

    Abstract translation: 提供集成光电装置,便携式反射投影系统和用于原位监测和调节光照的方法。 该装置包括被配置为以期望的非正常入射角(221)接收源光(210)的反射偏振复合膜(150),偏振并将所述源光(210)的第一部分(211)反射为偏振 照明光(16)以相对的角度(222)延伸到所述期望的非正常入射角(221); 以及光电池(180),其粘附到所述反射型偏振复合膜(150)与所述源光(210)的相对侧,被配置为接收穿过所述源光(210)的所述源光(210)的第二部分(212) 反射偏振光复合膜(150),并将所述第二部分(212)转换成光生电荷。 可以收集未使用的照明,以便重新储存和重新利用回收的能量。

    OCCUPANCY SENSOR AND CONTROLLABLE PHOTOSENSOR
    37.
    发明申请
    OCCUPANCY SENSOR AND CONTROLLABLE PHOTOSENSOR 有权
    OCCUPANCY传感器和可控光电传感器

    公开(公告)号:US20120175494A1

    公开(公告)日:2012-07-12

    申请号:US13361118

    申请日:2012-01-30

    Abstract: An occupancy sensor is provided with a separable override unit to selectively override the operation of the occupancy sensor at designated times and for selected time intervals. The occupancy sensor includes a light sensor for actuating the occupancy sensor and a light assembly when the ambient light is below a predetermined level and to deactivate the occupancy sensor when the ambient light is above a threshold level. The override unit having a light source is removably attached to the occupancy sensor. The override unit is coupled to the occupancy sensor to emit light to actuate the light sensor of the occupancy sensor, thereby preventing the occupancy sensor from being actuated regardless of the light level in the surrounding areas. A control unit is operatively connected to one or more override units for selectively controlling the normal operation of the occupancy sensor.

    Abstract translation: 占用传感器设置有可分离的覆盖单元,以在指定的时间和选定的时间间隔选择性地超越占用传感器的操作。 占用传感器包括用于在环境光低于预定水平时致动占用传感器和灯组件的光传感器,以及当环境光高于阈值水平时停用占用传感器。 具有光源的超控单元可移除地附接到占用传感器。 超控单元耦合到占用传感器以发光以致使占用传感器的光传感器,从而防止占用传感器被驱动,而不管周围区域的光级别如何。 控制单元可操作地连接到一个或多个超控单元,用于选择性地控制占用传感器的正常操作。

    AMBIENT LIGHT SENSOR WITH REDUCED SENSITIVITY TO NOISE FROM INFRARED SOURCES
    38.
    发明申请
    AMBIENT LIGHT SENSOR WITH REDUCED SENSITIVITY TO NOISE FROM INFRARED SOURCES 有权
    环境光传感器,具有降低红外光源噪声的灵敏度

    公开(公告)号:US20120056091A1

    公开(公告)日:2012-03-08

    申请号:US13296425

    申请日:2011-11-15

    Abstract: Systems and methods are provided for detecting ambient light with reduced sensitivity to infrared sources. An electronic device may include an infrared sensor, an ambient light sensor, a decoder, and a processor. The infrared sensor may detect an intensity of infrared light. The ambient light sensor may be configured to detect incident light and to generate an electronic signal indicative of an intensity of visible light. The decoder may be configured to receive the intensity of infrared light and to generate an intensity of decoded infrared light. The processor, which may be coupled to the decoder and the ambient light sensor, may be configured to substitute an alternate electronic signal for the electronic signal if the intensity of infrared light exceeds a threshold amount.

    Abstract translation: 提供了系统和方法来检测对红外光源敏感度降低的环境光。 电子设备可以包括红外传感器,环境光传感器,解码器和处理器。 红外传感器可以检测红外光的强度。 环境光传感器可以被配置为检测入射光并产生指示可见光强度的电子信号。 解码器可以被配置为接收红外光的强度并产生解码的红外光的强度。 可以耦合到解码器和环境光传感器的处理器可以被配置为如果红外光的强度超过阈值量则替代电子信号的替代电子信号。

    Method and system for detecting single-shot pulse contrast based on fiber array
    40.
    发明授权
    Method and system for detecting single-shot pulse contrast based on fiber array 有权
    基于光纤阵列检测单次脉冲对比的方法和系统

    公开(公告)号:US08071934B2

    公开(公告)日:2011-12-06

    申请号:US12343471

    申请日:2008-12-23

    Abstract: A system for detecting single-shot pulse contrast includes a correlator generating a correlation signal, a spectral filter filtering light signals having wavelengths different from the correlation signal, a fiber array comprising a plurality of fibers with different lengths for transmitting the correlation signal in parallel forming parallel correlation signals, and a fiber bundle bounding the fibers at the end thereof for converging the parallel correlation signals, wherein due to different lengths of the fibers, the parallel correlation signals are converted into serial correlation signals at end of the fibers, a plurality of fiber attenuators spliced into at least one of the fibers respectively for attenuating the parallel correlation signals, a detector for detecting the serial correlation signals to produce analog signals, an A/D convertor converting the analog signals to digital signals, and a computer for processing the digital signals for retrieving the single-shot pulse contrast.

    Abstract translation: 用于检测单次脉冲对比度的系统包括产生相关信号的相关器,滤波器滤波具有不同于相关信号的波长的光信号;光纤阵列,包括具有不同长度的多个光纤,以平行形成发送相关信号 平行相关信号和在其末端限制光纤的光纤束,用于会聚平行相关信号,其中由于光纤的不同长度,并行相关信号在光纤端部被转换为串行相关信号,多个 光纤衰减器分别拼接成至少一个光纤以衰减并行相关信号,用于检测串行相关信号以产生模拟信号的检测器,将模拟信号转换为数字信号的A / D转换器,以及用于处理 用于检索单次脉冲的数字信号 st。

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