System and method for analyzing light by three-photon counting
    32.
    发明授权
    System and method for analyzing light by three-photon counting 有权
    通过三光子计数分析光的系统和方法

    公开(公告)号:US08669512B2

    公开(公告)日:2014-03-11

    申请号:US13338386

    申请日:2011-12-28

    Abstract: A system for measuring one or more characteristics of light of a photon energy Eph from a light source, that can be determined from measuring three-photon absorption events, the system comprising: a) a detector having a band gap material characterized by gap energy between 2.1 and 3 times Eph; b) an optical element configured to concentrate a beam of light from the light source on the detector; c) a signal amplifier that amplifies an output signal indicative of when three photons produced by the light source undergo a three-photon absorption event in the band gap material; and d) an analyzer that analyzes the output signal to count or measure a rate of the three-photon absorption events, and determines the one or more characteristics of the light from the light source.

    Abstract translation: 一种用于测量来自光源的光子能量Eph的光的一个或多个特性的系统,其可以通过测量三光子吸收事件来确定,所述系统包括:a)具有带隙材料的检测器,其特征在于, 2.1倍和3倍Eph; b)光学元件,被配置为将来自光源的光束聚集在检测器上; c)信号放大器,其放大指示由所述光源产生的三个光子何时在所述带隙材料中经历三光子吸收事件的输出信号; 以及d)分析器,其分析输出信号以计数或测量三光子吸收事件的速率,并且确定来自光源的光的一个或多个特性。

    SPATIAL-DOMAIN LOW-COHERENCE QUANTITATIVE PHASE MICROSCOPY
    33.
    发明申请
    SPATIAL-DOMAIN LOW-COHERENCE QUANTITATIVE PHASE MICROSCOPY 审中-公开
    空域低相位定量相位显微镜

    公开(公告)号:US20130229663A1

    公开(公告)日:2013-09-05

    申请号:US13695230

    申请日:2011-05-09

    CPC classification number: G01J9/02 A61B5/0062 G02B21/002

    Abstract: Due to potential sampling errors (due to small tissue samples not necessarily directly from the developing tumor) and limited optical resolution (˜1 micron), cancer may be missed or detected too late for optimal treatment, or conservative interpretation of indeterminate findings could lead to unnecessary surgery. The novel technology herein—Spatial-domain Low-coherence Quantitative Phase Microscopy (SL-QPM)—can detect structural alterations within cell nuclei with nanoscale sensitivity (0.9 nm) (or nuclear nano-morphology) for “nano-pathological diagnosis” of cancer. SL-QPM uses original, unmodified cytology and histology specimens prepared with standard clinical protocols and stains. SL-QPM can easily integrate in existing clinical pathology laboratories. Results quantified the spatial distribution of optical path length or refractive index in individual nuclei with nanoscale sensitivity, which could be applied to studying nuclear nano-morphology as cancer progresses. The nuclear nano-morphology derived from SL-QPM offers significant diagnostic value in clinical care and subcellular mechanistic insights for basic and translational research.

    Abstract translation: 由于潜在的抽样误差(由于小组织样本不一定直接来自发展中的肿瘤)和有限的光学分辨率(〜1微米),癌症可能被错过或检测到太晚以获得最佳治疗,或者对不确定发现的保守解释可导致 不必要的手术。 本文的新技术 - 空间域低相干定量相位显微镜(SL-QPM) - 可以检测细胞核内的结构改变,纳米级灵敏度(0.9 nm)(或核纳米形态)用于癌症的“纳米病理诊断” 。 SL-QPM使用原始,未修改的细胞学和组织学标本,用标准临床方案和污渍制备。 SL-QPM可以轻松整合到现有的临床病理实验室。 结果量化了具有纳米级灵敏度的单个核中光程长度或折射率的空间分布,可用于研究核纳米形态作为癌症进展。 来自SL-QPM的核纳米形态为临床护理和亚细胞机械学基础和翻译研究提供了显着的诊断价值。

    Spatial and temporal coherence measurement system
    34.
    发明授权
    Spatial and temporal coherence measurement system 有权
    空间和时间相干性测量系统

    公开(公告)号:US08456622B1

    公开(公告)日:2013-06-04

    申请号:US12892317

    申请日:2010-09-28

    CPC classification number: G01J9/02 G01J2009/0211

    Abstract: A system for determining spatial coherence, temporal coherence or both of an optical signal includes a fiber bundle containing optical fibers. Optical fiber inputs are arranged in proximate groups having the same number of fibers. The groups can each receive a portion of the optical signal. Each fiber in the group has a gross length that differs from the other fibers, but each group has the same set of different gross lengths. The fibers are joined to a lens which spreads the optical signal and causes interference between portions of the signal. This interference is detected at a detector. A computer joined to the detector can measure spatial and temporal coherence from the interference. Other embodiments feature multiple detectors and reflection along the bundle.

    Abstract translation: 用于确定空间相干性,时间相干性或光信号两者的系统包括含有光纤的光纤束。 光纤输入被布置在具有相同数量的光纤的近组中。 这些组可以各自接收光信号的一部分。 组中的每个纤维的总长度与其他纤维不同,但是每个组具有相同的不同总长度的组。 光纤连接到透镜,该透镜扩展光信号并且引起信号的部分之间的干扰。 在检测器处检测到这种干扰。 连接到检测器的计算机可以测量干扰的空间和时间相干性。 其他实施例具有沿着束的多个检测器和反射。

    Wavefront Correction of Light Beam
    35.
    发明申请
    Wavefront Correction of Light Beam 有权
    光束波前校正

    公开(公告)号:US20130015367A1

    公开(公告)日:2013-01-17

    申请号:US13353029

    申请日:2012-01-18

    Applicant: Meng Cui

    Inventor: Meng Cui

    Abstract: An apparatus includes a transverse scanning optical system in the path of a first light beam traveling along a first optic axis; a wavefront correction system in the path of a second light beam traveling along a second optic axis, the wavefront correction system including a wavefront correction device having a spatial phase profile on its surface; a beam combiner that receives the first light beam and the second light beam and outputs an interference beam having a beat frequency equal to a difference frequency between the first light beam and second light beam; and a detection system placed relative to a random scattering medium, which is in the path of the interference beam. The detection system detects measurement light produced by the random scattering medium while the interference beam strikes the random scattering medium.

    Abstract translation: 一种装置包括在沿着第一光轴行进的第一光束的路径中的横向扫描光学系统; 所述波前校正系统包括沿着第二光轴行进的第二光束的路径中的波前校正系统,所述波前校正系统包括在其表面上具有空间相位轮廓的波前校正装置; 接收第一光束和第二光束并且输出具有等于第一光束和第二光束之间的差分频率的拍频的干涉光束的光束组合器; 以及相对于在干涉光束的路径中的随机散射介质放置的检测系统。 检测系统检测由随机散射介质产生的测量光,同时干涉光束照射随机散射介质。

    Wavefront-aberration-measuring device and exposure apparatus
    36.
    发明授权
    Wavefront-aberration-measuring device and exposure apparatus 有权
    波前像差测量装置和曝光装置

    公开(公告)号:US08351050B2

    公开(公告)日:2013-01-08

    申请号:US12683141

    申请日:2010-01-06

    Applicant: Chidane Ouchi

    Inventor: Chidane Ouchi

    CPC classification number: G03F7/706 G01J9/02 G01J9/0215

    Abstract: A wavefront-aberration-measuring device measures wavefront aberration of a to-be-tested optical system and includes a diffraction grating that splits light transmitted through the optical system, a detecting unit that detects interference fringes produced by beams of the split light, an arithmetic unit that calculates the wavefront aberration from the detected interference fringes, an image-side mask insertable into and retractable from an image plane of the optical system, and an illuminating unit that incoherently illuminates the image-side mask. The image-side mask has an aperture with a diameter larger than λ/2NA, where λ denotes a wavelength of the illuminating unit and NA denotes a numerical aperture of the to-be-tested optical system. The arithmetic unit calculates the wavefront aberration of the optical system from the interference fringes detected with the image-side mask being retracted from the image plane and the interference fringes detected with the image-side mask being in the image plane.

    Abstract translation: 波前像差测量装置测量待测光学系统的波前像差,并包括分离透过光学系统的光的衍射光栅,检测由分束光束产生的干涉条纹的检测单元,算术 从检测到的干涉条纹计算波前像差的单元,可插入光学系统的像面并从光学系统的像面缩回的图像侧掩模,以及不连续地照射图像侧掩模的照明单元。 图像侧掩模具有直径大于λ/ 2NA的孔径,其中λ表示照明单元的波长,NA表示被测试光学系统的数值孔径。 算术单元根据从图像平面缩回的图像侧掩模检测到的干涉条纹和由图像侧掩模在图像平面中检测到的干涉条纹来计算光学系统的波前像差。

    Methods and apparatus for wavefront manipulations and improved 3-D measurements
    37.
    发明授权
    Methods and apparatus for wavefront manipulations and improved 3-D measurements 失效
    用于波前操作和改进的3-D测量的方法和装置

    公开(公告)号:US08319975B2

    公开(公告)日:2012-11-27

    申请号:US10592544

    申请日:2005-03-11

    Abstract: Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging.

    Abstract translation: 在光学系统中执行波前分析的方法和装置,包括相位和幅度信息以及3D测量,特别是基于分析光学系统的中间平面(诸如像平面)的输出的方法和装置。 描述了存在薄膜涂层或多层结构的各层的表面形貌的测量。 利用多波长分析结合相位和幅度映射。 描述了通过波前传播和重聚焦改进相位和表面形貌测量的方法,使用基于麦克斯韦方程解的虚拟波阵面传播。 光学成像系统中的相干噪声的降低是通过这种相位操作方法,或通过使用宽带和相干光源的组合的方法实现的。 该方法应用于集成电路检测,通过在单次成像中改善对比度或3-D成像来改善覆盖测量技术。

    Matched pulse stimulated raman scattering
    38.
    发明授权
    Matched pulse stimulated raman scattering 有权
    匹配脉冲刺激拉曼散射

    公开(公告)号:US08300228B2

    公开(公告)日:2012-10-30

    申请号:US12582168

    申请日:2009-10-20

    CPC classification number: G01J3/44 G01J3/10 G01J3/4531 G01J9/02

    Abstract: Methods and apparatus for selectively driving the vibrations of normal modes of a target molecule into coherence using stimulated Raman scattering. In concert, many vibrations produce a larger anti-Stokes signal than a single vibration. The same illumination does not drive other molecules to have coherent vibrations, so these molecules produce a weaker signal. Target and confounder molecules can be distinguished by pulses that drive many vibrations coherently, with applications in coherent Raman microspectroscopy.

    Abstract translation: 使用受激拉曼散射选择性地将目标分子的正常模式的振动驱动到相干性的方法和装置。 在一致的情况下,许多振动产生比单个振动更大的反斯托克斯信号。 相同的照明不会驱使其他分子具有相干的振动,所以这些分子产生较弱的信号。 目标和混杂分子可以通过相干拉曼光谱中应用的脉冲来区分。

    Measuring apparatus and exposure apparatus having the same
    39.
    发明授权
    Measuring apparatus and exposure apparatus having the same 失效
    测量装置和具有该测量装置的曝光装置

    公开(公告)号:US08223315B2

    公开(公告)日:2012-07-17

    申请号:US12434095

    申请日:2009-05-01

    Applicant: Yumiko Ohsaki

    Inventor: Yumiko Ohsaki

    CPC classification number: G03F7/706 G01J9/02 G02B27/60

    Abstract: A measuring apparatus for measuring an optical performance of an optical system under test that has a numerical aperture of more than 0.6 at a light exit side, said measuring apparatus includes a numerical aperture decreasing part for decreasing the numerical aperture of a light exited from the optical system under test to 0.6 or less, and a detector for detecting an interference fringes formed by the light that passes through the numerical aperture decreasing part.

    Abstract translation: 一种用于测量在光出射侧具有大于0.6的数值孔径的被测光学系统的光学性能的测量装置,所述测量装置包括用于减小从光学器件退出的光的数值孔径的数值孔径减小部件 被测系统为0.6以下,以及用于检测通过数值孔径减少部分的光形成的干涉条纹的检测器。

    Circular common-path point diffraction interference wavefront sensor
    40.
    发明申请
    Circular common-path point diffraction interference wavefront sensor 有权
    圆形共轨点衍射干涉波前传感器

    公开(公告)号:US20120140242A1

    公开(公告)日:2012-06-07

    申请号:US13303163

    申请日:2011-11-23

    CPC classification number: G01J9/02

    Abstract: A circular common-path point diffraction interference wavefront sensor includes an optical matching system, a beam-splitter, a first reflection mirror, a second reflection mirror, a first Fourier lens, a second Fourier lens, a charge-coupled device (CCD) detector, a computer system, and a two-pinhole mask having a reference pinhole and a testing window and placed at a confocal plane of the first Fourier lens and the second Fourier lens. A testing beam is divided into two beams through the beam-splitter. One beam makes the pinhole diffraction by the reference pinhole, thereby producing the approximately ideal plane wave as the reference wave. Another beam passes through the testing window almost without any attenuation as the signal wave. The spatially linear carrier frequency is introduced by adjusting the tilt angle of the beam-splitter. The present invention is adapted for all kinds of dynamic and static detection field of wavefront phase.

    Abstract translation: 圆形公共点衍射干涉波前传感器包括光学匹配系统,分束器,第一反射镜,第二反射镜,第一傅里叶透镜,第二付里叶透镜,电荷耦合器件(CCD)检测器 ,计算机系统和具有参考针孔和测试窗口的双针孔掩模,并且放置在第一付里叶式透镜和第二傅里叶透镜的共焦平面处。 测试梁通过分束器分成两束。 一个光束通过参考针孔产生针孔衍射,从而产生近似理想的平面波作为参考波。 另一束光束通过测试窗口几乎没有任何衰减作为信号波。 通过调整分束器的倾斜角来引入空间线性载波频率。 本发明适用于波前相的各种动态和静态检测领域。

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