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    ABERRATION-CORRECTED WIEN EXB MASS FILTER WITH REMOVAL OF NEUTRALS FROM THE BEAM
    32.
    发明申请
    ABERRATION-CORRECTED WIEN EXB MASS FILTER WITH REMOVAL OF NEUTRALS FROM THE BEAM 有权
    从光束去除中性粒子的去除校正的EXB质量过滤器

    公开(公告)号：US20120261566A1

    公开(公告)日：2012-10-18

    申请号：US13089991

    申请日：2011-04-19

    Applicant: David Tuggle ,  N. William Parker ,  Mark W. Utlaut

    Inventor： David Tuggle ,  N. William Parker ,  Mark W. Utlaut

    IPC: H01J49/20 ,  H01J49/22 ,  H01J49/10

    CPC classification number: H01J37/05 ,  H01J37/317 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/31749

    Abstract: A mass filter for an ion beam system includes at least two stages and reduces chromatic aberration. One embodiment includes two symmetrical mass filter stages, the combination of which reduces or eliminates chromatic aberration, and entrance and exit fringing field errors. Embodiments can also prevent neutral particles from reaching the sample surface and avoid crossovers in the beam path. In one embodiment, the filter can pass a single species of ion from a source that produces multiple species. In other embodiments, the filter can pass a single ion species with a range of energies and focus the multi-energetic ions at the same point on the substrate surface.

    Abstract translation: 用于离子束系统的质量过滤器包括至少两个级并且减少色差。 一个实施例包括两个对称质量过滤器级，其组合减少或消除色差，以及入射和退出边缘场误差。 实施例还可以防止中性粒子到达样品表面，并避免光束路径中的交叉。 在一个实施例中，过滤器可以从产生多种物质的源传递单种离子。 在其他实施例中，滤光器可以通过具有一定能量范围的单个离子种类并将多能量离子聚焦在衬底表面上的相同点。

    Monochromator for charged particle beam apparatus
    33.
    发明授权
    Monochromator for charged particle beam apparatus 有权
    带电粒子束装置的单色器

    公开(公告)号：US08274046B1

    公开(公告)日：2012-09-25

    申请号：US13111851

    申请日：2011-05-19

    Applicant: Weiming Ren ,  Zhongwei Chen

    Inventor： Weiming Ren ,  Zhongwei Chen

    IPC: G21K1/08 ,  H01J37/21 ,  H01J37/20

    CPC classification number: H01J37/28 ,  G21K1/093 ,  H01J37/05 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/153

    Abstract: This invention provides a monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus, which comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a double symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually cannot be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. Therefore, using the monochromator in SEM can reduce chromatic aberrations without additionally incurring adverse impacts, so as to improve the ultimate imaging resolution. The improvement of the ultimate imaging resolution will be more distinct for Low-Voltage SEM and the related apparatuses which are based on LVSEM principle, such as the defect inspection and defect review in semiconductor yield management. The present invention also provides two ways to build a monochromator into a SEM, one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

    Abstract translation: 本发明提供一种用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪，其包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成沿着直线光轴的偏转色散和基本轨迹的双重对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且还确保出射光束具有虚拟的虚拟交叉， 无色分离和单色仪内部。 因此，在SEM中使用单色仪可以减少色差，而不会产生不利影响，从而提高最终的成像分辨率。 对于低电压SEM和基于LVSEM原理的相关设备，如半导体产量管理中的缺陷检查和缺陷检查，最终成像分辨率的提高将会更加明显。 本发明还提供了在扫描电镜中构建单色仪的两种方法，一种是在电子源和电容器之间定位单色仪，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

    SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM
    34.
    发明申请
    SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM 审中-公开
    用于生产质量分析离子束的系统和方法

    公开(公告)号：US20120168622A1

    公开(公告)日：2012-07-05

    申请号：US12981002

    申请日：2010-12-29

    Applicant: Victor M. Benveniste ,  Frank Sinclair ,  Svetlana Radovanov ,  Bon-Woong Koo

    Inventor： Victor M. Benveniste ,  Frank Sinclair ,  Svetlana Radovanov ,  Bon-Woong Koo

    IPC: H01J49/30

    CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J37/20 ,  H01J49/30 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/20221

    Abstract: An implantation system includes an ion extraction plate having a set of apertures configured to extract ions from an ion source to form a plurality of beamlets. A magnetic analyzer is configured to provide a magnetic field to deflect ions in the beamlets in a first direction that is generally perpendicular to a principle axis of the beamlets. A mass analysis plate includes a set of apertures wherein first ion species having a first mass/charge ratio are transmitted through the mass analysis plate and second ion species having a second mass/charge ratio are blocked by the mass analysis plate. A workpiece holder is configured to move with respect to the mass analysis plate in a second direction perpendicular to the first direction, wherein a pattern of ions transmitted through the mass analysis plate forms a continuous ion beam current along the first direction at the substrate.

    Abstract translation: 植入系统包括具有一组孔口的离子提取板，其被配置为从离子源提取离子以形成多个子束。 磁分析器被配置为提供磁场，以在大体上垂直于子束的主轴的第一方向上偏转子束中的离子。 质量分析板包括一组孔，其中具有第一质量/荷率的第一离子种类通过质量分析板传输，具有第二质量/荷重比的第二离子种被质量分析板阻挡。 工件保持器构造成在与第一方向垂直的第二方向上相对于质量分析板移动，其中通过质量分析板传输的离子图案在衬底处沿着第一方向形成连续的离子束电流。

    Achromatic mass separator
    37.
    发明授权
    Achromatic mass separator 有权
    消色差分离器

    公开(公告)号：US08049180B2

    公开(公告)日：2011-11-01

    申请号：US11925598

    申请日：2007-10-26

    Applicant: Juergen Frosien ,  Helmut Banzhof

    Inventor： Juergen Frosien ,  Helmut Banzhof

    IPC: B01D59/44

    CPC classification number: H01J49/288 ,  H01J37/05 ,  H01J37/08 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/0805 ,  H01J2237/3174 ,  H01J2237/31749

    Abstract: An ion beam device is described. The ion beam device includes an ion beam source for generating an ion beam, the ion beam being emitted along a first axis, an aperture unit adapted to shape the ion beam, and an achromatic deflection unit adapted to deflect ions of the ion beam having a predetermined mass by a deflecting angle. The achromatic deflection unit includes: an electric field generating component for generating an electric field, and a magnetic field generating component for generating a magnetic field substantially perpendicular to the electric field. The device further includes a mass separation aperture adapted for blocking ions with a mass different from the predetermined mass and for allowing ions having the predetermined mass to trespass the mass separator, and an objective lens having a second optical axis, wherein the second optical axis is inclined with regard to the first axis.

    Abstract translation: 描述了离子束装置。 离子束装置包括用于产生离子束的离子束源，沿着第一轴发射的离子束，适于使离子束成形的孔单元，以及适于使离子束的离子偏转的消色差偏转单元， 预定质量的偏转角。 无彩色偏转单元包括：用于产生电场的电场产生部件和用于产生基本上垂直于电场的磁场的磁场产生部件。 该装置还包括质量分离孔，其适于阻挡具有不同于预定质量的质量的离子，并允许具有预定质量的离子侵入质量分离器，以及具有第二光轴的物镜，其中第二光轴为 相对于第一轴倾斜。

    SAMPLE TRANSFER DEVICE AND SAMPLE TRANSFERRING METHOD
    39.
    发明申请
    SAMPLE TRANSFER DEVICE AND SAMPLE TRANSFERRING METHOD 有权
    样品传送装置和样品传送方法

    公开(公告)号：US20110180724A1

    公开(公告)日：2011-07-28

    申请号：US13015115

    申请日：2011-01-27

    Applicant: Shohei TERADA ,  Tatsumi Hirano ,  Koichi Watanabe ,  Yasuichiro Watanabe ,  Hiromitsu Seino

    Inventor： Shohei TERADA ,  Tatsumi Hirano ,  Koichi Watanabe ,  Yasuichiro Watanabe ,  Hiromitsu Seino

    IPC: G21K5/08

    CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/2802

    Abstract: A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.

    Abstract translation: 提供了一种样品转移装置，其可以在带电粒子束的照射下插入到带电粒子束装置中的待观察和分析的样品，同时抑制将样品暴露于大气环境的时间最小化。 用于通过照射带电粒子束来传送待观察和分析的样品的样品转移装置包括能够容纳安装样品的样品架的可膨胀中空构件，用于将样品架固定在可膨胀中空构件内的固定构件，以及 密封构件与可膨胀中空构件的内部连通以打开/关闭样品保持器通过的开口。

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