Abstract:
An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
Abstract:
An ion detection device has a strip of carbon-based nanomaterial (CNM) film and a chamber enclosing the CNM film. A low bias voltage is applied at the ends of the CNM film strip, and ions present in the chamber are detected by a change in the magnitude of current flowing through the CNM film under the bias. Also provided are methods for fabricating the device, methods for measuring pressure of a gas, and methods for monitoring or quantifying an ionizing radiation using the device.
Abstract:
An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
Abstract:
A system for measuring gas density in a vacuum includes a gauge, a housing for containing the gauge, and a magnet secured to an exterior surface of the housing. The magnet is a flexible magnetic strips, and positioned around the exterior surface of the housing. The gauge includes grid insulator posts extending longitudinally along a tubular section of the housing, and the magnet is secured to the exterior surface of the housing adjacent to the grid insulator posts, and oriented transversely to the grid insulator posts. The magnet is a flexible magnetic strip, and a clamp secures the magnet to the exterior surface of the housing.
Abstract:
It is an object of the present invention to provide an ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement element, as well as in the measurement region intrinsic to a second measurement element. This ionization vacuum gauge comprises a measurement element vessel, and first and second measurement parts provided within this measurement element vessel. The first measurement part comprises component electrodes including a filament, grid and ion collector, and is of an ionization-type construction for measurement of the pressure of vacuum states. The second measurement part is of a construction having different functions from those of the first measurement part, and is disposed in a space that is near the extension of the grid axis, and is away from the principal space for flying of thermal electrons emitted from the filament. A shield plate is provided between the second measurement part and the component electrodes, to spatially separate the second measurement part and the component electrodes. The second measurement part is fixed to an element fastening plate made from a material with excellent thermal conductivity.
Abstract:
A photo-ionization detector (PID) includes an ultraviolet (UV) lamp that transmits UV light into an ionization chamber to ionize volatile gases. An ion detector in the ionization chamber includes interdigital electrodes that collect resulting ions using an electrical field perpendicular to the UV light propagation. A pump in the PID circulates gases through the ionization chamber in a direction perpendicular to the electrical field and to the UV light propagation. The PID additionally provides a UV monitor having interdigital electrodes that release electrons when struck by the UV light. The size of a monitor current in the UV monitor indicates the intensity of the UV light. The UV monitor is in a UV monitor chamber that protects the UV monitor from exposure to the ionized gases and improves the accuracy of UV intensity measurements. The interdigital electrodes of the ion detector and the UV monitor can be manufactured by forming an electrode layer on a substrate and selectively patterning the electrode layer to produce interdigital electrodes. If the substrate is not transparent to UV light, the substrate can be removed or patterned to match the interdigital electrodes. To remove contamination in the PID, the pump is turned off while operation of the UV lamp continues. The UV light creates ozone that accumulates in the ionization chamber and removes contamination from the ionization chamber.
Abstract:
An ionization detector for detection of an analyte includes a source chamber having a source of ionizing particles and receiving a fluid stream of detector gas; an ionization chamber connected to the source chamber at an ionization chamber entrance therebetween so as to allow metastables and photons to be generated in the source chamber and to be transferred in the fluid stream to the ionization chamber; a signal electrode assembly located in the ionization chamber; and a signal measuring circuit for measuring ionized analyte molecules. The signal electrode assembly includes a spaced array of electrodes including a collector electrode, a first signal electrode, and a second signal electrode. The first signal electrode is situated immediately downstream from the ionization chamber entrance and substantially upstream of the collector electrode, so as to extend the detection zone to the vicinity of the ionization chamber entrance.
Abstract:
An electrode arrangement for the detection of species ionized by radiant energy from a radiation source, comprising: an annular cathode; a shield, opaque to the radiant energy, extending across the cathode and having an aperture smaller than and coaxial with the annulus formed by the cathode; and an elongated anode having its distal end coaxially of the cathode and the shield aperture, the cathode being shielded from and the anode being exposed to the radiant energy from the radiation source.