Abstract:
Provided is a vertical heat treatment apparatus which performs a film-forming process for substrates by supplying a film-forming gas to a plurality of substrates loaded onto a substrate supporter. The substrate supporter is rotated around an inclination axis, and the apparatus includes: a plurality of main holders which are provided at every reception position of the substrates in the substrate supporter and respectively supports the peripheries of the substrates at positions separated from each other in the circumferential direction; and first and second auxiliary holders which are located to be separated from the main holders in the circumferential direction and whose tops are lower than those of the main holders. Each substrate alternates between a position supported by the first auxiliary holder and the main holders and a position supported by the second auxiliary holder and the main holders every rotation of the substrate supporter.
Abstract:
The invention relates to an electrostatic projector (P1) comprising: an insulation body (1); a rotatably movable projection member (2); rotational driving means (7); high-voltage power supply means (26); conducting elements (2.1, 6, 22, 23); a detection device (40) for evaluating the rotation speed of the projection member (2), the detection device (40) including at least one target (41, 42) on a rotary component and a sensor (43) adapted for detecting the or each target. The projector (P1) further includes at least one insulating wall (50) that defines a housing (51) surrounding the sensor (43) for insulating the entire sensor (43) from the conducting elements (2.1, 6, 22, 23). The sensor (43) is separated from the space (V) scanned by the rotating target (41, 42) by an essentially axial detection distance (H).
Abstract:
Several embodiments of semiconductor systems and associated methods of color corrections are disclosed herein. In one embodiment, a method for producing a light emitting diode (LED) includes forming an (LED) on a substrate, measuring a base emission characteristic of the formed LED, and selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED and the phosphor at least approximates white light. The method further includes introducing the selected phosphor onto the LED via, for example, inkjet printing.
Abstract:
A wet processing apparatus for wet-processing substrates can suppress the reduction of throughput when some component part thereof becomes unserviceable. The wet processing apparatus includes a first nozzle unit and a second nozzle unit. When the wet processing apparatus operates in a normal mode, a substrate carrying mechanism is controlled so as to deliver substrates alternately to processing units of a first group and those of a second group so that the substrates are processed sequentially in order. When the processing units of the first group (the second group) are unserviceable due to the inoperativeness of the substrate holders, a processing liquid supply system or a nozzle support mechanism, the nozzle unit for the processing units of the second group (the first group) is moved to process substrates by the serviceable ones of the first group (the second group).
Abstract:
A vacuum processing apparatus includes two process chambers and three load-lock chambers which are alternately connected in series, and a transferring device which transfers a plurality of carriers only between the process chamber and the load-lock chambers that are adjacent to each other. A substrate undergoes deposition processing when the carrier is positioned in the process chamber by the transferring device, and the substrate is replaced when the carrier is positioned in the load-lock chamber by the transferring device.
Abstract:
The present invention discloses systems and methods for printing functional blocks from a plurality of printheads to a target substrate. In exemplary embodiments, the printing system comprises a main printhead for the majority of printing process, and a secondary printhead for supplemental printing. The system further comprises a controller, utilizing a positioning intelligence system to distribute the printing of the functional blocks between the main printhead and the secondary printhead, to minimize the motions of the printheads while maximize the printing speed.
Abstract:
A holster is provided for use with a hot melt dispensing handgun having a nozzle, with the holster including a body defining a cavity and further including a nozzle garage. The body is operable for receiving at least a portion of a handgun within the cavity and for supporting the handgun when the handgun is inactive. The nozzle garage has a housing defining a hollow interior communicating with the cavity and also includes a heating element. The nozzle garage is operable for receiving at least a portion of a nozzle within the hollow interior and for heating the nozzle of the handgun when the handgun is inactive.
Abstract:
An apparatus for measuring withwise ejection uniformity of a slit nozzle comprises a plurality of oil pressure measuring units that are arranged in parallel in a widthwise direction of the slit nozzle so as to measure ejection pressure of fluid to be ejected from an ejection port of the slit nozzle, each oil pressure measuring unit having an oil-pressure detection surface facing the ejection port of the slit nozzle; and a control unit that measures ejection pressure applied to the oil pressure measuring unit so as to calculate the uniformity to display.
Abstract:
A coating head assembly incorporates a replaceable breakaway link into the coating head assembly. In the event of a collision, this link will break to reduce the likelihood of breakage of any other part of the coating head assembly. Repair then only requires that the link be replaced, rather than the coating head assembly be rebuilt. This invention reduces the coating head repair time from a fifteen-hour job of rebuilding the coating head assembly to a three-hour job of tooling a new link.
Abstract:
A material dispensing valve finding particular application in the robotic dispensing of sealants, adhesives, etc. in a desired pattern on a workpiece. The dispensing valve comprises a unique actuating arrangement wherein back to back pancake cylinders are moveably arranged within a housing and, depending upon how the cylinders are actuated, three or four dispense rate positions can be provided. The dispense rate positions of the valve are preferably coordinated with the rate of movement of the robotic system so that the dispense rate is appropriate for the rate of movement.