VERTICAL HEAT TREATMENT APPARATUS
    41.
    发明申请
    VERTICAL HEAT TREATMENT APPARATUS 有权
    垂直热处理设备

    公开(公告)号:US20120103256A1

    公开(公告)日:2012-05-03

    申请号:US13284269

    申请日:2011-10-28

    Inventor: Kazuhide Hasebe

    Abstract: Provided is a vertical heat treatment apparatus which performs a film-forming process for substrates by supplying a film-forming gas to a plurality of substrates loaded onto a substrate supporter. The substrate supporter is rotated around an inclination axis, and the apparatus includes: a plurality of main holders which are provided at every reception position of the substrates in the substrate supporter and respectively supports the peripheries of the substrates at positions separated from each other in the circumferential direction; and first and second auxiliary holders which are located to be separated from the main holders in the circumferential direction and whose tops are lower than those of the main holders. Each substrate alternates between a position supported by the first auxiliary holder and the main holders and a position supported by the second auxiliary holder and the main holders every rotation of the substrate supporter.

    Abstract translation: 提供一种垂直热处理装置,其通过向装载到基板支撑体上的多个基板供给成膜气体来对基板进行成膜处理。 基板支撑体围绕倾斜轴线旋转,并且该装置包括:多个主保持器,其设置在基板支撑件中的基板的每个接收位置处,并且分别支撑基板的周边在彼此分离的位置 圆周方向 以及第一和第二辅助保持器,其位于与主保持器在圆周方向上分离并且其顶部低于主保持器的顶部。 每个基板在由第一辅助保持器支撑的位置和主保持器之间交替位置,并且每个旋转基板支撑件由第二辅助保持器和主保持件支撑的位置交替。

    ELECTROSTATIC PROJECTOR COMPRISING A ROTATION SPEED DETECTION DEVICE
    42.
    发明申请
    ELECTROSTATIC PROJECTOR COMPRISING A ROTATION SPEED DETECTION DEVICE 有权
    包含旋转速度检测装置的静电投影机

    公开(公告)号:US20120048196A1

    公开(公告)日:2012-03-01

    申请号:US13148559

    申请日:2010-02-08

    Abstract: The invention relates to an electrostatic projector (P1) comprising: an insulation body (1); a rotatably movable projection member (2); rotational driving means (7); high-voltage power supply means (26); conducting elements (2.1, 6, 22, 23); a detection device (40) for evaluating the rotation speed of the projection member (2), the detection device (40) including at least one target (41, 42) on a rotary component and a sensor (43) adapted for detecting the or each target. The projector (P1) further includes at least one insulating wall (50) that defines a housing (51) surrounding the sensor (43) for insulating the entire sensor (43) from the conducting elements (2.1, 6, 22, 23). The sensor (43) is separated from the space (V) scanned by the rotating target (41, 42) by an essentially axial detection distance (H).

    Abstract translation: 本发明涉及一种静电投影仪(P1),包括:绝缘体(1); 可旋转地移动的突出构件(2); 旋转驱动装置(7); 高压电源装置(26); 导电元件(2.1,6,22,23); 用于评估所述突起构件(2)的旋转速度的检测装置(40),所述检测装置(40)包括在旋转部件上的至少一个目标(41,42)和传感器(43),所述传感器适于检测或 每个目标。 投影仪(P1)还包括限定围绕传感器(43)的壳体(51)的至少一个绝缘壁(50),用于将整个传感器(43)与导电元件(2.1,6,22,23)绝缘。 传感器(43)与由旋转靶(41,42)扫描的空间(V)基本上是轴向检测距离(H)分离。

    MICROELECTRONIC WORKPIECE PROCESSING SYSTEMS AND ASSOCIATED METHODS OF COLOR CORRECTION
    43.
    发明申请
    MICROELECTRONIC WORKPIECE PROCESSING SYSTEMS AND ASSOCIATED METHODS OF COLOR CORRECTION 有权
    微电子工件加工系统及相关的颜色校正方法

    公开(公告)号:US20110217794A1

    公开(公告)日:2011-09-08

    申请号:US12715820

    申请日:2010-03-02

    CPC classification number: H01L33/005 B05C11/00

    Abstract: Several embodiments of semiconductor systems and associated methods of color corrections are disclosed herein. In one embodiment, a method for producing a light emitting diode (LED) includes forming an (LED) on a substrate, measuring a base emission characteristic of the formed LED, and selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED and the phosphor at least approximates white light. The method further includes introducing the selected phosphor onto the LED via, for example, inkjet printing.

    Abstract translation: 本文公开了半导体系统的几个实施例和颜色校正的相关联的方法。 在一个实施例中,一种制造发光二极管(LED)的方法包括在衬底上形成(LED),测量形成的LED的基极发射特性,并且基于所形成的LED的测量的基极发射特性来选择荧光体 使得来自LED和磷光体的组合发射至少近似于白光。 该方法还包括通过例如喷墨印刷将所选择的荧光体引入到LED上。

    WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM
    44.
    发明申请
    WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM 有权
    湿处理设备,湿处理方法和储存介质

    公开(公告)号:US20110217473A1

    公开(公告)日:2011-09-08

    申请号:US13037624

    申请日:2011-03-01

    CPC classification number: B05D1/02 B05C11/00 B05D1/00 B05D1/30

    Abstract: A wet processing apparatus for wet-processing substrates can suppress the reduction of throughput when some component part thereof becomes unserviceable. The wet processing apparatus includes a first nozzle unit and a second nozzle unit. When the wet processing apparatus operates in a normal mode, a substrate carrying mechanism is controlled so as to deliver substrates alternately to processing units of a first group and those of a second group so that the substrates are processed sequentially in order. When the processing units of the first group (the second group) are unserviceable due to the inoperativeness of the substrate holders, a processing liquid supply system or a nozzle support mechanism, the nozzle unit for the processing units of the second group (the first group) is moved to process substrates by the serviceable ones of the first group (the second group).

    Abstract translation: 用于湿处理基板的湿式处理装置可以抑制当其一部分成为不可用时的吞吐量的降低。 湿式处理装置包括第一喷嘴单元和第二喷嘴单元。 当湿法处理装置以正常模式操作时,控制基板承载机构以将基板交替地传送到第一组和第二组的处理单元,使得依次顺序地处理基板。 当第一组(第二组)的处理单元由于基板保持器的不能操作而不能使用时,处理液体供应系统或喷嘴支撑机构,用于第二组(第一组)的处理单元的喷嘴单元 )被移动到由第一组(第二组)中可用的基板处理衬底。

    VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
    45.
    发明申请
    VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD 审中-公开
    真空加工设备和真空加工方法

    公开(公告)号:US20110217467A1

    公开(公告)日:2011-09-08

    申请号:US13037689

    申请日:2011-03-01

    CPC classification number: B05C11/00 C23C14/56

    Abstract: A vacuum processing apparatus includes two process chambers and three load-lock chambers which are alternately connected in series, and a transferring device which transfers a plurality of carriers only between the process chamber and the load-lock chambers that are adjacent to each other. A substrate undergoes deposition processing when the carrier is positioned in the process chamber by the transferring device, and the substrate is replaced when the carrier is positioned in the load-lock chamber by the transferring device.

    Abstract translation: 真空处理装置包括串联交替连接的两个处理室和三个装载锁定室,以及仅在处理室和彼此相邻的装载锁定室之间传送多个载体的传送装置。 当载体通过转移装置定位在处理室中时,基板经历沉积处理,并且当载体通过转印装置定位在装载锁定室中时,基板被更换。

    Holster For Hot Melt Dispensing Handgun
    47.
    发明申请
    Holster For Hot Melt Dispensing Handgun 失效
    热熔胶点胶手套

    公开(公告)号:US20080105709A1

    公开(公告)日:2008-05-08

    申请号:US11557280

    申请日:2006-11-07

    Abstract: A holster is provided for use with a hot melt dispensing handgun having a nozzle, with the holster including a body defining a cavity and further including a nozzle garage. The body is operable for receiving at least a portion of a handgun within the cavity and for supporting the handgun when the handgun is inactive. The nozzle garage has a housing defining a hollow interior communicating with the cavity and also includes a heating element. The nozzle garage is operable for receiving at least a portion of a nozzle within the hollow interior and for heating the nozzle of the handgun when the handgun is inactive.

    Abstract translation: 提供了一种与具有喷嘴的热熔胶分配手枪一起使用的皮套,其中皮套包括限定空腔的主体并且还包括喷嘴车库。 身体可操作以在腔内接收手枪的至少一部分,并且当手枪不活动时支撑手枪。 喷嘴车库具有限定与空腔连通的中空内部并且还包括加热元件的壳体。 喷嘴车库可操作用于在中空内部中接收喷嘴的至少一部分,并且当手枪不起作用时加热手枪的喷嘴。

    Apparatus and method for measuring widthwise ejection uniformity of slit nozzle
    48.
    发明申请
    Apparatus and method for measuring widthwise ejection uniformity of slit nozzle 审中-公开
    用于测量狭缝喷嘴横向喷射均匀性的装置和方法

    公开(公告)号:US20070275157A1

    公开(公告)日:2007-11-29

    申请号:US11798867

    申请日:2007-05-17

    Applicant: Kang II Cho

    Inventor: Kang II Cho

    CPC classification number: B05C11/00 B05C5/0254

    Abstract: An apparatus for measuring withwise ejection uniformity of a slit nozzle comprises a plurality of oil pressure measuring units that are arranged in parallel in a widthwise direction of the slit nozzle so as to measure ejection pressure of fluid to be ejected from an ejection port of the slit nozzle, each oil pressure measuring unit having an oil-pressure detection surface facing the ejection port of the slit nozzle; and a control unit that measures ejection pressure applied to the oil pressure measuring unit so as to calculate the uniformity to display.

    Abstract translation: 用于测量狭缝喷嘴的随动喷射均匀性的装置包括多个油压测量单元,其在狭缝喷嘴的宽度方向上平行设置,以便测量从狭缝喷射口喷出的流体的喷射压力 每个油压测量单元具有面向狭缝喷嘴的喷射口的油压检测表面; 以及控制单元,其测量施加到油压测量单元的喷射压力,以便计算显示的均匀性。

    Replaceable breakaway link
    49.
    发明申请

    公开(公告)号:US20030024076A1

    公开(公告)日:2003-02-06

    申请号:US09923114

    申请日:2001-08-06

    CPC classification number: B05C11/00 Y10T24/3982 Y10T403/11 Y10T403/74

    Abstract: A coating head assembly incorporates a replaceable breakaway link into the coating head assembly. In the event of a collision, this link will break to reduce the likelihood of breakage of any other part of the coating head assembly. Repair then only requires that the link be replaced, rather than the coating head assembly be rebuilt. This invention reduces the coating head repair time from a fifteen-hour job of rebuilding the coating head assembly to a three-hour job of tooling a new link.

    Variable flow rate dispensing valve assembly
    50.
    发明授权
    Variable flow rate dispensing valve assembly 失效
    可变流量分配阀组件

    公开(公告)号:US4759477A

    公开(公告)日:1988-07-26

    申请号:US37237

    申请日:1987-04-10

    CPC classification number: B05C11/00 B05C5/0225

    Abstract: A material dispensing valve finding particular application in the robotic dispensing of sealants, adhesives, etc. in a desired pattern on a workpiece. The dispensing valve comprises a unique actuating arrangement wherein back to back pancake cylinders are moveably arranged within a housing and, depending upon how the cylinders are actuated, three or four dispense rate positions can be provided. The dispense rate positions of the valve are preferably coordinated with the rate of movement of the robotic system so that the dispense rate is appropriate for the rate of movement.

    Abstract translation: 一种材料分配阀,其特征在于在工件上以所需图案的机器人分配密封剂,粘合剂等。 分配阀包括独特的致动装置,其中背靠背的煎饼筒可移动地布置在壳体内,并且根据气缸如何致动,可以提供三个或四个分配速率位置。 阀的分配速率位置优选地与机器人系统的运动速率协调,使得分配速率适合于运动速率。

Patent Agency Ranking