Synthetic silica glass used with uv-rays and method producing the same
    41.
    发明授权
    Synthetic silica glass used with uv-rays and method producing the same 有权
    与紫外线一起使用的合成石英玻璃及其制造方法

    公开(公告)号:US6143676A

    公开(公告)日:2000-11-07

    申请号:US214894

    申请日:1999-01-14

    Abstract: An object of the present invention is to provide a synthetic silica glass optical material which exhibits excellent transmittance as well as durability for high output power vacuum ultraviolet rays, being emitted from, for example, ArF excimer lasers and Xe.sub.2 excimer lamps, and to provide a method for producing the same. A synthetic silica glass optical material for high output power vacuum ultraviolet rays made from ultra high purity synthetic silica glass for use in the wavelength region of from 165 to 195 nm, containing OH groups at a concentration of from 5 to 300 wtppm with a fluctuation width in OH group concentration (.DELTA.OH/cm) of 10 wtppm or less, containing hydrogen molecules at a concentration of from 1.times.10.sup.17 to 1.times.10.sup.19 molecule/cm.sup.3 with a fluctuation width in hydrogen molecule concentration (.DELTA.H.sub.2 /cm) of 1.times.10.sup.17 molecule/cm.sup.3 or lower, and containing chlorine at a concentration of 50 wtppm or lower. Also claimed is a method for producing the same.

    Abstract translation: PCT No.PCT / EP98 / 02965 Sec。 371日期1999年1月14日第 102(e)日期1999年1月14日PCT提交1998年5月20日PCT公布。 第WO98 / 52879号公报 日期:1998年11月26日本发明的目的是提供一种合成石英玻璃光学材料,其表现出优异的透射率以及从例如ArF准分子激光器和Xe2准分子灯发射的高输出功率真空紫外线的耐久性 并提供其制造方法。 一种用于高浓度合成石英玻璃的高输出功率真空紫外线的合成二氧化硅玻璃光学材料,用于波长范围为165至195nm的OH基,其浓度为5至300重量ppm,具有波动宽度 OH分子浓度(DELTA OH / cm)为10重量ppm以下,含有浓度为1×10 17〜1×10 19分子/ cm 3的氢分子,氢分子浓度的波动宽度(DELTA H2 / cm)为1×10 17分子/ cm 3, 较低,含有浓度为50重量ppm以下的氯。 还要求保护其的方法。

    Quartz glass preform for optical waveguide
    42.
    发明授权
    Quartz glass preform for optical waveguide 失效
    用于光波导的石英玻璃预制件

    公开(公告)号:US5790736A

    公开(公告)日:1998-08-04

    申请号:US598925

    申请日:1996-02-09

    Applicant: Heinz Fabian

    Inventor: Heinz Fabian

    Abstract: In an optical component having a cylindrical core of quartz glass and a coaxial jacket of quartz glass containing a dopant which decreases the index of refraction, the jacket glass contains a viscosity-increasing stiffening agent to reduce tensile strength on the core at drawing temperature of 1000.degree. to 2500.degree. C. or a relaxation agent for lowering the viscosity of the quartz glass in a concentration which is lower than that present in the core glass.

    Abstract translation: 在具有石英玻璃的圆柱形芯和含有掺杂剂的同轴套管的光学部件中,该玻璃包含降低折射率的掺杂剂,夹套玻璃含有增粘硬化剂,以在拉伸温度为1000℃时降低芯上的拉伸强度 DEG至2500℃或用于降低石英玻璃的粘度的松弛剂,其浓度低于芯玻璃中存在的浓度。

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