公开(公告)号：US08810791B2

公开(公告)日：2014-08-19

申请号：US13922711

申请日：2013-06-20

Applicant: Sick Stegmann GmbH

Inventor： Reinhold Mutschler ,  Ulrich Zwolfer

IPC: G01J4/00 ,  G01D5/34 ,  G02B5/30 ,  H01L31/0216 ,  G01B11/26 ,  G01J4/04 ,  H01L31/02

CPC classification number: G01B11/26 ,  G01D5/345 ,  G01J4/04 ,  G02B5/30 ,  G02B5/3058 ,  G02B2207/121 ,  H01L31/02024 ,  H01L31/02161

Abstract: The invention relates to an optoelectronic sensor element (20) having at least one reception element (22, 22a, 22b, 22c, 22d) in front of which a polarizing structure (24, 24a, 24b, 24c, 24d) is arranged which is manufactured from an electrically conductive material, with the polarizing structure (24, 24a, 24b, 24c, 24d) having a contact connection (26) for the application of a defined tension and with the polarizing structure (24, 24a, 24b, 24c, 24d) being configured as a screen of the sensor element (20).

Abstract translation: 本发明涉及一种具有至少一个接收元件（22,22a，22b，22c，22d）的光电传感器元件（20），其前面布置有偏振结构（24,24a，24b，24c，24d） 由具有用于施加限定张力的接触连接（26）和偏振结构（24,24a，24b，24c，24c）的偏振结构（24,24a，24b，24c，24d）由导电材料制成， 24d）被配置为传感器元件（20）的屏幕。

公开(公告)号：US08792096B2

公开(公告)日：2014-07-29

申请号：US12922587

申请日：2009-03-24

Applicant: Alexander Straaijer

Inventor： Alexander Straaijer

IPC: G01J4/00

CPC classification number: G03F7/70608 ,  G01B11/0641 ,  G01J4/04 ,  G01N21/211 ,  G01N21/9501

Abstract: Four separately polarized beams are simultaneously measured upon diffraction from a substrate (W) to determine properties of the substrate. Linearly, circularly or elliptically polarized radiation is transmitted through a first beam splitter (N-PBS) and split into two polarized beams. These two beams are further split into two further beams using two further beam splitters, the further beam splitters (32,34) being rotated by 45° with respect to each other. The plurality of polarizing beam splitters enables the measurement of the intensity of all four beams and thus the measurement of the phase modulation and amplitude of the combined beams to give the features of the substrate. Algorithms are used to compare the four intensities of each of the polarized angles to give rise to the phase difference between the polarization directions and the ratio between the two main polarization direction amplitudes of the original polarized beam.

Abstract translation: 在从基底（W）衍射时同时测量四个分离的偏振光束，以确定基底的性质。 线性，圆形或椭圆偏振辐射通过第一分束器（N-PBS）传输并分裂成两个偏振光束。 使用两个另外的分束器将这两个光束进一步分成两个另外的光束，另外的光束分离器（32,34）相对于彼此旋转45°。 多个偏振分束器能够测量所有四个光束的强度，从而测量组合光束的相位调制和振幅，以给出衬底的特征。 算法用于比较每个偏振角的四个强度，以产生偏振方向之间的相位差和原始偏振光束的两个主偏振方向幅度之间的比率。

公开(公告)号：US20140152989A1

公开(公告)日：2014-06-05

申请号：US13690025

申请日：2012-11-30

Applicant: INFINEON TECHNOLOGIES AG

Inventor： Franz DARRER

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01S7/499 ,  G01S17/89 ,  G01S17/936

Abstract: Representative implementations of devices and techniques provide selectivity for imaging devices and systems. Polarization may be applied to emitted light radiation and/or received light radiation to select a desired imaging result. Using polarization, an imaging device or system can pass desired light radiation having desired information and reject unwanted or stray light radiation.

Abstract translation: 设备和技术的代表性实现为成像设备和系统提供了选择性。 极化可以应用于发射的光辐射和/或接收的光辐射以选择期望的成像结果。 使用偏振，成像装置或系统可以传递具有期望信息的期望的光辐射并且拒绝不需要的或杂散的光辐射。

公开(公告)号：US08736838B2

公开(公告)日：2014-05-27

申请号：US13506848

申请日：2012-05-21

Applicant: Craig M. Herzinger

Inventor： Craig M. Herzinger

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J5/20 ,  G01J5/42 ,  G01N21/211 ,  G01N21/3581 ,  G01N2021/3595

Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).

Abstract translation: 太赫兹椭偏仪，基本的优选实施例是具有反向波振荡器（BWO）的顺序系统; 包括线栅（WGP1）的第一可旋转偏振器; 包括线栅（RWGP）的旋转偏振器; 用于支撑样品（S）的阶段（STG）; 包括第一（RP），第二（RM1），第三（RM2）和第四（RM3）元件的旋转延迟器（RRET） 包括线栅（WGP2）的第二可旋转偏振器; 和Golay细胞检测器（DET）。

公开(公告)号：US08705032B2

公开(公告)日：2014-04-22

申请号：US13815487

申请日：2013-03-07

Applicant: Craig M. Herzinger ,  Mathias M. Schubert ,  Tino Hofmann ,  Martin M. Liphardt ,  John A. Woollam

Inventor： Craig M. Herzinger ,  Mathias M. Schubert ,  Tino Hofmann ,  Martin M. Liphardt ,  John A. Woollam

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J5/20 ,  G01J5/42 ,  G01N21/211 ,  G01N21/3581 ,  G01N2021/3595 ,  G01N2201/06113

Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.

公开(公告)号：US08665436B2

公开(公告)日：2014-03-04

申请号：US13144311

申请日：2010-01-15

Applicant: Dominique Pagnoux ,  Frédéric Louradour ,  Jérôme Desroches ,  Alain Barthelemy ,  Julien Brevier

Inventor： Dominique Pagnoux ,  Frédéric Louradour ,  Jérôme Desroches ,  Alain Barthelemy ,  Julien Brevier

IPC: G01J4/00

CPC classification number: G01J4/04 ,  A61B5/0059 ,  A61B5/0062 ,  A61B5/0064 ,  A61B5/442 ,  G01N21/21 ,  G01N2021/8438

Abstract: The invention relates to a method and to a device for determining a piece of polarisation information on a measurement point of a target sample, the device comprising: —a light source capable of emitting a rectilinearly polarised light beam in a predefined direction, the light beam being intended to be reflected by the measurement point of the target sample; —a unit for computing the piece of polarisation information on the measurement point using the beam reflected by the target sample; -a waveguide for guiding the incident beam towards the target sample and the reflected beam towards the computing means; and —a unit for rotating the polarisation, capable of rotating two orthogonal polarimetric components of the incident beam exiting the waveguide and two orthogonal polarimetric components of the reflected beam before passing through the waveguide.

Abstract translation: 本发明涉及一种用于在目标样本的测量点上确定一段偏振信息的方法和装置，该装置包括： - 能够沿预定方向发射直线偏振光束的光源，光束 旨在由目标样本的测量点反映; - 用于使用由目标样本反射的光束计算测量点上的偏振信息的单元; - 用于将入射光束引向目标样本的波导和朝向计算装置的反射光束; 以及 - 用于旋转偏振的单元，能够在穿过波导之前旋转离开波导的入射光束的两个正交偏振分量和反射光束的两个正交偏振分量。

公开(公告)号：US20140055786A1

公开(公告)日：2014-02-27

申请号：US13973495

申请日：2013-08-22

Applicant: National Cheng Kung University ,  National Applied Research Laboratories

Inventor： Yu-Lung Lo ,  Ren-Young Liu ,  Chih-Chung Yen ,  Yi-Fan Chung

IPC: G01J4/00

CPC classification number: G01J4/00 ,  G01C19/72 ,  G01J4/04 ,  G02B6/2793

Abstract: This invention relates to a near real time optical compensation verification system for verifying a fiber or fiber component through internal or external compensation to achieve equivalently free space propagation of a broadband light when coupled into fiber. Preferably, no component is added to the fiber or fiber component, and the compensation method is realized through real time fiber bending, twisting or other means at either or both ends of a fiber or fiber component. The output optical characteristics of the compensated fiber or fiber component are measured by a polarimeter through changing the input light properties. The required multi-variable compensation to achieve Unitary Matrix free space condition is computed in near real time, and as the feedback to formulate the required compensation. The disclosed invention not only enhances yield in the fiber and fiber component, but also accelerates the optimization of optical fiber sensors employed free space fiber coil.

Abstract translation: 本发明涉及一种用于通过内部或外部补偿来验证光纤或光纤部件的近实时光学补偿验证系统，以便在耦合到光纤中时实现宽带光的等效自由空间传播。 优选地，不向纤维或纤维组分添加组分，并且通过在纤维或纤维组分的任一端或两端实时纤维弯曲，扭曲或其它方式实现补偿方法。 通过改变输入光特性，通过偏振计来测量补偿光纤或光纤部件的输出光学特性。 实现单位矩阵自由空间条件所需的多变量补偿可以近似实时计算，并作为反馈来制定所需的补偿。 所公开的发明不仅提高了纤维和纤维成分的产量，而且加速了采用自由空间纤维线圈的光纤传感器的优化。

公开(公告)号：US08655017B2

公开(公告)日：2014-02-18

申请号：US13319077

申请日：2010-05-03

Applicant: Mehdi Alouini ,  Arnaud Beniere ,  Daniel Dolfi ,  Gérard Berginc ,  François Goudail

Inventor： Mehdi Alouini ,  Arnaud Beniere ,  Daniel Dolfi ,  Gérard Berginc ,  François Goudail

IPC: G06K9/62

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01J4/04

Abstract: Techniques for identifying images of a scene including illuminating the scene with a beam of 3 or more wavelengths, polarized according to a determined direction; simultaneously acquiring for each wavelength an image X//(λi) polarized according to said direction and an image X⊥(λi) polarized according to a direction perpendicular to said direction, X⊥(λi) being spatially distinct from X//(λi); calculating for each wavelength an intensity image which is a linear combination of X//(λi) and X⊥(λi), providing an intensity spectrum for each pixel; calculating for each wavelength a polarization contrast image on the basis of an intensity ratio calculated as a function of X//(λi) and of X⊥(λi), providing a polarization contrast spectrum for each pixel; and calculating a spectro-polarimetric contrast image of the scene, each pixel of this spectro-polarimetric contrast image calculated based on the intensity spectrum and the contrast spectrum of the pixel considered.

Abstract translation: 用于识别场景的图像的技术，包括用根据确定的方向极化的3个或更多波长的束照射场景; 同时获取根据所述方向偏振的图像X //（lambdai）和根据与所述方向垂直的方向偏振的图像X⊥（lambdai）的每个波长，X⊥（lambdai）在空间上不同于X //（lambdai ）; 为每个波长计算作为X //（lambdai）和X⊥（lambdai）的线性组合的强度图像，为每个像素提供强度谱; 基于作为X //（lambdai）和X⊥（lambdai）的函数计算的强度比，针对每个波长计算偏振对比图像，为每个像素提供偏振对比度光谱; 并计算场景的光谱偏振度对比度图像，基于所考虑的像素的强度光谱和对比度光谱计算该分光偏振对比度图像的每个像素。

公开(公告)号：US08610070B2

公开(公告)日：2013-12-17

申请号：US12799626

申请日：2010-04-28

Applicant: Thomas R. Schimert ,  Thomas P. Fagan, III ,  Athanasios J. Syllaios

Inventor： Thomas R. Schimert ,  Thomas P. Fagan, III ,  Athanasios J. Syllaios

IPC: H01L27/14 ,  G01J5/20 ,  H01L31/00

CPC classification number: G01J5/20 ,  G01J1/02 ,  G01J1/0204 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0429 ,  G01J1/0488 ,  G01J4/04 ,  G01J5/02 ,  G01J5/0215 ,  G01J5/023 ,  G01J5/024 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0825 ,  G01J5/0862

Abstract: Pixel-level monolithic optical element configurations for uncooled infrared detectors and focal plane arrays in which a monolithically integrated or fabricated optical element may be suspended over a microbolometer pixel membrane structure of an uncooled infrared detector element A monolithic optical element may be, for example, a polarizing or spectral filter element, an optically active filter element, or a microlens element that is structurally attached by an insulating interconnect to the existing metal interconnects such that the installation of the optical element substantially does not impact the thermal mass or thermal time constant of the microbolometer pixel structure, and such that it requires little if any additional device real estate area beyond the area originally consumed by the microbolometer pixel structure interconnects.

Abstract translation: 用于非制冷红外探测器和焦平面阵列的像素级单片光学元件配置，其中单片集成或制造的光学元件可以悬挂在非制冷红外探测器元件的微测辐射热计像素膜结构上。单片光学元件可以是例如 偏振或光谱滤光器元件，光学有源滤光器元件或微透镜元件，其通过绝缘互连结构地附接到现有金属互连，使得光学元件的安装基本上不影响光学元件的热质量或热时间常数 微照度计像素结构，并且使得其需要很少的额外的设备房地产区域超出由微测热计像素结构原始消耗的区域互连。

公开(公告)号：US20130321806A1

公开(公告)日：2013-12-05

申请号：US13992101

申请日：2011-11-30

Applicant: Robert T. Kester ,  Tomasz S. Tkaczyk

Inventor： Robert T. Kester ,  Tomasz S. Tkaczyk

IPC: G01J3/447

CPC classification number: G01J3/447 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/2823 ,  G01J4/04

Abstract: A method for imaging a sample, the method includes, during a single acquisition event, receiving a first polarization-encoded EM field for a first point and a second polarization-encoded EM field for a second point. The method further includes re-directing the first polarization-encoded EM field along a first pre-determined direction to a first location on a dispersing re-imager and the second polarization-encoded EM field along a second pre-determined direction to a second location on the dispersing re-imager. The method further includes spectrally dispersing the first polarization-encoded EM field to obtain a first spectrum, re-imaging the first spectrum onto a first location on a detector, spectrally dispersing the second polarization-encoded EM field to obtain a second spectrum, re-imaging the second spectrum onto a second location on the detector, and detecting the first re-imaged spectrum and the second re-imaged spectrum.

Abstract translation: 一种用于对样本进行成像的方法，所述方法包括在单个采集事件期间，为第一点接收第一偏振编码的EM场，并为第二点接收第二极化编码的EM场。 该方法还包括将沿着第一预定方向的第一偏振编码的EM场重新定向到分散再成像器上的第一位置，并且将第二偏振编码的EM场沿第二预定方向重新定向到第二位置 在分散重建器上。 该方法还包括光谱分散第一偏振编码的EM场以获得第一光谱，将第一光谱重新成像到检测器上的第一位置上，频谱地分散第二偏振编码的EM场以获得第二光谱， 将第二光谱成像到检测器上的第二位置，以及检测第一重新成像光谱和第二重新成像光谱。