公开(公告)号：US20040141169A1

公开(公告)日：2004-07-22

申请号：US10699246

申请日：2003-10-30

Inventor： Marco Jan-Jaco Wieland ,  Bert Jan Kampherbeek ,  Alexander Hendrik Vincent van Veen ,  Pieter Kruit

IPC: G03B001/00

CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

Abstract: The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron beamlets; a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optimal system comprising an array of electrostatic lenses wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Abstract translation: 本发明涉及一种用于将图案转印到目标表面上的电子束曝光装置，包括：用于产生多个电子束的小波发生器; 用于接收所述多个电子子束的调制阵列，包括用于调制电子束的强度的多个调制器; 连接到用于单独控制调制器的调制阵列的控制器，可操作地连接到每个调制器的调节器，用于单独调整每个调制器的控制信号; 聚焦电子最优系统，其包括静电透镜阵列，其中每个透镜将由所述调制阵列传输的相应单独的子束聚焦到小于300nm的横截面，以及用于将其曝光表面保持在其上的目标保持器 其图案将在聚焦电子光学系统的第一焦平面中转印。

公开(公告)号：US20030085645A1

公开(公告)日：2003-05-08

申请号：US09985737

申请日：2001-11-06

Applicant: Denki Kagaku Kogyo Kabushiki Kaisha

Inventor： Yoshinori Terui ,  Shinpei Hirokawa ,  Katsuyoshi Tsunoda

IPC: H01J029/46

CPC classification number: H01J3/02 ,  H01J1/148 ,  H01J1/15 ,  H01J37/065

Abstract: An electron gun comprising an electron emission cathode, a control electrode and an extractor wherein the electron emission cathode is mode of rare earth hexaboride and a tip of the electron emission cathode is located between the control electrode and the extractor.

Abstract translation: 一种电子枪，包括电子发射阴极，控制电极和提取器，其中电子发射阴极是稀土六硼化物的模式，电子发射阴极的尖端位于控制电极和提取器之间。

公开(公告)号：US06559586B1

公开(公告)日：2003-05-06

申请号：US09621575

申请日：2000-07-21

Applicant: Roger Casanova Alig ,  Dennis John Bechis ,  David Arthur New

Inventor： Roger Casanova Alig ,  Dennis John Bechis ,  David Arthur New

IPC: H01J2970

CPC classification number: H01J29/503 ,  H01J3/02 ,  H01J29/488 ,  H01J29/51 ,  H01J2229/481 ,  H01J2229/4813 ,  H01J2229/4834

Abstract: A cathode ray tube and a plural beam electron gun therefor include a main lens that comprises a tubular focus grid G5 and a conductive coating on the inner surface of the tube neck. The neck coating extends from the region of focus grid G5 towards the faceplate of the cathode ray tube. Preferably, the exit of the focus grid G5 is non-planar and is curved or undulated and focus grid G5 includes an aperture plate intermediate its entrance and exit. The aperture plate preferably has an elliptical center beam opening and connected-semi-elliptical outer-beam openings, to better converge and focus the outer and center electron beams. Also preferably, the focus grid G5 is centrally located in the tube neck and at least partly surrounded by the conductive neck coating.

Abstract translation: 一种阴极射线管及其多束电子枪包括：主透镜，其包括管状聚焦栅格G5和在管颈内表面上的导电涂层。 颈部涂层从聚焦栅格G5的区域朝向阴极射线管的面板延伸。 优选地，聚焦栅格G5的出口是非平面的并且是弯曲的或起伏的，并且聚焦栅格G5包括在其入口和出口之间的孔板。 孔板优选地具有椭圆形中心束开口和连接的半椭圆形外束开口，以更好地会聚和聚焦外部和中心电子束。 还优选地，焦点栅格G5位于管颈中心并且至少部分地被导电颈部涂层包围。

公开(公告)号：US20020175293A1

公开(公告)日：2002-11-28

申请号：US09866418

申请日：2001-05-25

Applicant: Siemens Information and Communication Networks, Inc.

Inventor： Kenneth Whitham

IPC: G21K001/08

CPC classification number: H01J3/02

Abstract: A radio frequency (RF) modulated electron gun includes a cathode, electrically coupled to operate as a source of charged particles, and a grid, positioned apart from the cathode. The grid and the cathode are electrically coupled to a grid voltage source and to a RF source. The grid voltage source places the grid at a first potential, and the RF source places the grid at a second potential selected to produce groups of the charged particles. The groups of charged particles are produced with each period of a signal received from the RF source.

Abstract translation: 射频（RF）调制电子枪包括电耦合以作为带电粒子源工作的阴极和与阴极隔开定位的栅极。 电网和阴极电耦合到电网电压源和RF源。 电网电压源将电网置于第一电位，并且RF源将电网放置在选择的第二电位以产生带电粒子组。 在从RF源接收的信号的每个周期产生带电粒子组。

公开(公告)号：US06304481B1

公开(公告)日：2001-10-16

申请号：US09612221

申请日：2000-07-07

Applicant: Thomas D. Hurt

Inventor： Thomas D. Hurt

IPC: G11C1300

CPC classification number: G11B23/281 ,  G11B5/00 ,  G11B5/64 ,  G11B5/65 ,  G11B5/653 ,  G11B5/656 ,  G11B9/10 ,  G11B11/11 ,  G11B11/115 ,  G11B13/045 ,  G11B19/04 ,  G11B20/1883 ,  G11C11/02 ,  G11C11/23 ,  H01J3/02 ,  H01J2203/0296

Abstract: A data storage device including a substrate, a data storage layer on the substrate, and a spin-polarized electron source. The data storage layer comprises a fixed number of atomic layers of a magnetic material which provide the data storage layer with a magnetic anisotropy perpendicular to a surface of the data storage layer. A data magnetic field is created in the data storage layer. The data magnetic field is polarized either in a first direction corresponding to a first data value or in a second direction corresponding to a second data value. Data is stored in the data storage layer by providing a spin-polarized electron having an electron magnetic field with a direction of polarization corresponding to one of the first and the second data values, the electron having a wavelength “characteristic” of unpaired electrons in the data storage layer which cause the magnetic moment of the material, and directing the spin-polarized electron at the data magnetic field to impart the direction of polarization of the electron magnetic field to the data magnetic field. Data is read from the data storage layer by directing the spin-polarized electron at a second wavelength at the data magnetic field and detecting a deflection or attraction of the spin-polarized electron by the data magnetic field. Alternatively, data is read from the data storage layer by directing the spin-polarized electron at the data magnetic field so that the magnetic medium produces a secondary electron and then detecting certain characteristics of the secondary electron.

Abstract translation: 一种数据存储装置，包括基板，基板上的数据存储层和自旋极化电子源。 数据存储层包括固定数量的磁性材料的原子层，为数据存储层提供垂直于数据存储层表面的磁各向异性。 在数据存储层中创建数据磁场。 数据磁场在对应于第一数据值的第一方向或对应于第二数据值的第二方向上被极化。 通过提供具有电子磁场的自旋极化电子，数据存储在数据存储层中，该电子磁场具有与第一和第二数据值中的一个数据值相对应的极化方向，电子具有不成对电子的波长“特性” 数据存储层，其引起材料的磁矩，并将自旋极化电子引导到数据磁场，以将电子磁场的极化方向赋予数据磁场。 通过在数据磁场处引导第二波长的自旋极化电子并通过数据磁场检测自旋极化电子的偏转或吸引，从数据存储层读取数据。 或者，通过将自旋极化电子指向数据磁场，从数据存储层读取数据，使得磁介质产生二次电子，然后检测二次电子的某些特性。

公开(公告)号：US6049162A

公开(公告)日：2000-04-11

申请号：US70028

申请日：1998-04-30

Applicant: Christoph Schultheiss ,  Vladimir Engelko ,  Gerd Kraft ,  Gustav Schumacher ,  Georg Muller

Inventor： Christoph Schultheiss ,  Vladimir Engelko ,  Gerd Kraft ,  Gustav Schumacher ,  Georg Muller

IPC: H01J3/02 ,  H01J37/06 ,  H01J17/26 ,  H01J61/28

CPC classification number: H01J3/02 ,  H01J37/06 ,  H01J2237/06375 ,  H01J2237/316

Abstract: In a pulsed electron beam source based on the vacuum principle, comprising a vacuum diode having a multi-point emission cathode with a flange and a plurality of emission points, a control grid, a pulse generator, a magnetic compression unit consisting of field coils, a drift chamber, a target chamber and a synchronization unit, the multipoint emission cathode is embedded in a shield electrode, and the shield electrode is connected to the cathode base by way of a resistor which is so sized that the shield electrode is capable of freely floating.

Abstract translation: 在基于真空原理的脉冲电子束源中，包括具有法兰和多个发射点的多点发射阴极的真空二极管，控制栅格，脉冲发生器，由场线圈组成的磁压缩单元， 漂移室，目标室和同步单元，多点发射阴极嵌入屏蔽电极中，屏蔽电极通过电阻器连接到阴极基座，电阻器的尺寸使得屏蔽电极能够自由地 浮动

公开(公告)号：US5939842A

公开(公告)日：1999-08-17

申请号：US907070

申请日：1997-08-06

Applicant: John Beeteson ,  Andrew Ramsay Knox ,  Christopher Carlo Pietrzak

Inventor： John Beeteson ,  Andrew Ramsay Knox ,  Christopher Carlo Pietrzak

IPC: H01J31/15 ,  G09G1/20 ,  H01J3/02 ,  H01J29/04 ,  H01J31/12 ,  G09G1/04 ,  H01J29/70

CPC classification number: H01J3/029 ,  H01J29/04 ,  H01J3/02 ,  H01J2329/00

Abstract: A virtual remote cathode has the position of a space charge cloud associated with it fixed by the geometry of a fixed insulating plate. The plate can be made to accurate dimensions and hence the cathode to control grid dimension can be accurately controlled and will not change as a result of any mechanical, electrical or physical changes in the construction. The fixed insulating plate is located on a surface of the control grid facing the cathode.

Abstract translation: 虚拟遥控阴极具有与固定绝缘板的几何形状固定的空间电荷云的位置。 该板可以制成精确的尺寸，因此可以精确地控制控制栅格尺寸的阴极，并且不会因结构中的任何机械，电或物理变化而改变。 固定绝缘板位于面向阴极的控制栅格的表面上。

公开(公告)号：US5929828A

公开(公告)日：1999-07-27

申请号：US695857

申请日：1996-08-09

Applicant: John Beeteson ,  Shaun Kerigan ,  Andrew Knox

Inventor： John Beeteson ,  Shaun Kerigan ,  Andrew Knox

IPC: B41J2/447 ,  G09G1/20 ,  G09G3/22 ,  H01J3/02 ,  H01J3/24 ,  H01J29/46 ,  H01J29/68 ,  H01J31/12

CPC classification number: B41J2/4476 ,  G09G1/20 ,  G09G3/22 ,  H01J29/46 ,  H01J29/68 ,  H01J3/02 ,  H01J3/24 ,  H01J2329/00

Abstract: A display system comprises a display screen including a matrix of display elements and a permanent magnet having an array of channels formed therein. Each channel corresponds to a different display element. Each display element comprises a phosphor target, an electron source and a device for controlling flow of electrons from the source through the corresponding channel in the magnet onto the target. Addressing device comprises first and second orthogonal conductors defining a grid. Each display element is located at the intersection of a different pair of first and second conductors. Each first conductor is connected to a first control electrode of the control device of each display element in a corresponding line of display elements and each second conductor is connected to a second control electrode of the control device of each display element in a corresponding line of display elements.

Abstract translation: 显示系统包括包括显示元件的矩阵的显示屏和具有形成在其中的通道阵列的永磁体。 每个通道对应于不同的显示元件。 每个显示元件包括荧光体靶，电子源和用于控制电子从源通过磁体中的相应通道到目标上的流动的装置。 寻址装置包括限定网格的第一和第二正交导体。 每个显示元件位于不同对的第一和第二导体的交叉处。 每个第一导体连接到显示元件的相应行中的每个显示元件的控制装置的第一控制电极，并且每个第二导体在相应的显示器线路中连接到每个显示元件的控制装置的第二控制电极 元素。

公开(公告)号：US5917277A

公开(公告)日：1999-06-29

申请号：US695856

申请日：1996-08-09

Applicant: Andrew Knox ,  John Beeteson

Inventor： Andrew Knox ,  John Beeteson

IPC: H01J31/12 ,  B41J2/447 ,  G09G1/20 ,  G09G3/22 ,  H01J3/02 ,  H01J3/24 ,  H01J9/02 ,  H01J29/46 ,  H01J29/68 ,  H01J29/70 ,  H01J29/64

CPC classification number: G09G3/22 ,  B41J2/4476 ,  G09G1/20 ,  H01J29/46 ,  H01J29/68 ,  H01J3/02 ,  H01J3/24 ,  H01J2329/00

Abstract: An electron source having a cathode and a permanent magnet having perforated channels extending between opposite poles of the magnet. Each channel forms electrons received from the cathode into an electron beam for guidance towards a target. The electron source has applications in a wide range of technologies, including display technology and printer technology.

Abstract translation: 具有阴极和永磁体的电子源具有在磁体的相对极之间延伸的穿孔通道。 每个通道形成从阴极接收的电子到电子束以用于朝向目标的引导。 电子源具有广泛的技术应用，包括显示技术和打印机技术。

公开(公告)号：US4912738A

公开(公告)日：1990-03-27

申请号：US153814

申请日：1988-02-08

Applicant: Peter J. Turchi

Inventor： Peter J. Turchi

IPC: H01J3/02 ,  H02M9/00 ,  H03K3/53 ,  H03K17/74 ,  H03K17/80

CPC classification number: H01J3/02 ,  H03K17/74 ,  H03K17/80 ,  H03K3/53

Abstract: A diode pulser is described which comprises a diode and an inductor connected in series, the impedance of the diode being controllable to suddenly increase the impedance to produce a high voltage pulse across the diode. The diode includes concentric electrodes forming a gap between them across which electrons move. To increase the impedance, a magnetic field is suddenly applied parallel to the electrode surfaces, to bend the electron paths so as to require a much higher voltage to move the electrons across the gap, the inductor creating such voltage to maintain the current flow for a brief time. The diode pulser is useful as a rapid-acting switch, and as a source of high energy electrons that are useful to generate X-rays, microwaves, and for other purposes.

Abstract translation: 描述了二极管脉冲发生器，其包括串联连接的二极管和电感器，二极管的阻抗可控制以突然增加阻抗以在二极管上产生高电压脉冲。 二极管包括在它们之间形成电子移动的间隙的同心电极。 为了增加阻抗，磁场突然平行于电极表面施加，以弯曲电子路径，以便要求更高的电压以使电子移动穿过间隙，电感器产生这样的电压，以保持电流流过 短暂的时间。 二极管脉冲发生器可用作快速开关，也可用作产生X射线，微波和其它目的的高能电子源。